CN201992667U - Silicane burning tower with online maintenance - Google Patents

Silicane burning tower with online maintenance Download PDF

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Publication number
CN201992667U
CN201992667U CN2011200183127U CN201120018312U CN201992667U CN 201992667 U CN201992667 U CN 201992667U CN 2011200183127 U CN2011200183127 U CN 2011200183127U CN 201120018312 U CN201120018312 U CN 201120018312U CN 201992667 U CN201992667 U CN 201992667U
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CN
China
Prior art keywords
tower body
chamber
spray chamber
tower
spray
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Expired - Lifetime
Application number
CN2011200183127U
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Chinese (zh)
Inventor
张文光
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHANGZHOU HENGWEI PURIFYING EQUIPMENT Co Ltd
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CHANGZHOU HENGWEI PURIFYING EQUIPMENT Co Ltd
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Priority to CN2011200183127U priority Critical patent/CN201992667U/en
Application granted granted Critical
Publication of CN201992667U publication Critical patent/CN201992667U/en
Anticipated expiration legal-status Critical
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Abstract

The utility model discloses a silicane burning tower with online maintenance. A burning chamber, a left spray chamber and a right spray chamber are arranged in a tower body, and clapboards which can cause the burning chamber, the left spray chamber and the right spray chamber to be mutually independent are arranged in the tower body. A left gas channel isolating valve and a right gas channel isolating valve which can control and exchange gas in the burning chamber and gas in the left spray chamber and the right spray chamber are correspondingly arranged on the clapboards respectively. A spray chamber isolating valve for controlling gas exchange is arranged between the left spray chamber and the right spray chamber. The bottom of the burning chamber is provided with a left slag removing port and a right slag removing port which lead to the outside of the tower body, and a left slag removing isolating valve and a right slag removing isolating valve are correspondingly arranged between the burning chamber and the left and right slag removing ports respectively. Double gas channels reach to the double spray chambers, so that the speed of waste gas absorption is high, and the effect is good.

Description

But the silicone hydride combustion tower of on-line maintenance
Technical field
The utility model relates to a kind of burning method that uses and handles the device that flammable inorganic gas absorbs, but particularly relates to a kind of silicone hydride combustion tower of on-line maintenance.
Background technology
The pernicious gas that in electronic component and integrated circuit industry, produces, the general employing in the burn mode of silane of burning imflammable gas, when adopting this mode to handle pernicious gas, because extinguishing of imflammable gas very easily produces explosion danger.
In order to address this problem, Chinese patent application 200810093385.5 discloses a kind of silicone hydride combustion tower, have tower body and water tank, the tower body top is provided with exhaust outlet, be provided with combustion barrel in the tower body, filler chamber, spray chamber and take off liquid chamber, the combustion barrel bottom is arranged in the water tank, combustion barrel is covered with the ballast cover, in the cavity between ballast cover and combustion barrel spray equipment is housed, the ballast cover is outward a filler chamber, the filler chamber top is provided with two perforated baffles for taking off liquid chamber in the combustion barrel, combustion barrel is separated into three chambers, the bottom is the combustion chamber, the middle part is for all pressing the chamber, and the top is the nitrogen protection chamber, and the bottom, combustion chamber has leads to the outer slag-drip opening of tower body, waste gas inlet and compressed air inlet port are arranged on the tower body of combustion chamber, waste gas inlet is equipped with check valve, and the nitrogen air inlet is housed on the cylindrical shell of nitrogen protection chamber, and there is the gas outlet on the top of the tower body of nitrogen protection chamber; Have access hole on the tower body at filler chamber top and spray chamber place, tower body is equipped with water circulating pump outward, and the pump intake of water circulating pump feeds under the liquid level of water tank, delivery port connects each spray equipment by water pipe.But but the silicone hydride combustion tower of this on-line maintenance is in scarfing cinder or when giving the spray system filler; must shut down, influence the progress of handling waste gas greatly, simultaneously when running into a large amount of waste gas; it is not thorough that the design of single spray system makes the absorption of waste gas handle, and polluted environment.
This shows that above-mentioned silicone hydride combustion tower obviously still has inconvenience and defective, and demands urgently further being improved in structure and use.In order to solve the problem that silicone hydride combustion tower exists, relevant manufacturer there's no one who doesn't or isn't seeks solution painstakingly, but do not see always that for a long time suitable design finished by development, and common product does not have appropriate structure to address the above problem, this obviously is the problem that the anxious desire of relevant dealer solves.
Because the defective that above-mentioned existing silicone hydride combustion tower exists, the utility model people is based on being engaged in this type of product design manufacturing abundant for many years practical experience and professional knowledge, and the utilization of cooperation scientific principle, actively studied innovation, but silicone hydride combustion tower in the hope of the on-line maintenance of founding a kind of new structure, but can improve the silicone hydride combustion tower of general existing on-line maintenance, make it have more practicality.Through constantly research, design, and after studying sample and improvement repeatedly, create the utility model that has practical value finally.
The utility model content
Main purpose of the present utility model is, overcome the defective that existing silicone hydride combustion tower exists, but and provide a kind of silicone hydride combustion tower of on-line maintenance of new structure, technical problem to be solved is to make it can be implemented in line to give the spray system filler, and the design of left and right sides spray chamber and two gas circuits, can be so that the absorption of ammonia be more abundant and gas circuit is more smooth and easy, thus be suitable for practicality more, and have the value on the industry.
The purpose of this utility model and solve its technical problem and realize by the following technical solutions.But silicone hydride combustion tower according to the on-line maintenance that the utility model proposes, the water tank that comprises tower body and be arranged on the tower body bottom, top in the described tower body is provided with water collection device, be provided with the combustion chamber in the described tower body, left side spray chamber and right spray chamber, be provided with the combustion chamber in the described tower body, left side spray chamber and the separate dividing plate of right spray chamber, the corresponding respectively left and right sides gas circuit isolating valve, that is provided with control exchange combustion chamber gas to left and right sides spray chamber on the described dividing plate, be provided with the spray chamber isolating valve, of control gas exchange between described left spray chamber and the right spray chamber, the bottom of described combustion chamber is provided with leads to tower body outer left breast hole and right breast hole, between described combustion chamber and the left and right sides breast hole respectively correspondence be provided with left scarfing cinder isolating valve, and right scarfing cinder isolating valve,, the tower body at place, described combustion chamber is provided with a plurality of air inlets of compression, liquid in the described water tank flow in the left spray system and right spray system of corresponding setting in the spray chamber of the left and right sides by pipeline, finally flow into after the spray liquid in described left spray system and the right spray system in the water tank of tower body bottom, tail gas enters in the combustion chamber of tower body from air inlet, thereby silane contacts burning or oxidation reaction takes place with the air of feeding, the silica dust that generates is fallen in the water tank, ammonia in the gas that has burnt then enters in left spray chamber and the right spray chamber by opening left and right sides gas circuit isolating valve, correspondence, liquid in the described water tank is connected to the spray system that is provided with in the spray chamber of the left and right sides by pipeline, flow into after the spray liquid in the spray system in the water tank of tower body bottom, realize the liquid in the spray system and the circulation of the liquid in the water tank by being arranged on the outer circulating pump of tower body, through the gas after the spray chamber neutralization reaction of the left and right sides finally by in the exhaust outlet row people atmosphere.
The purpose of this utility model and solve its technical problem and also can be applied to the following technical measures to achieve further.
But the silicone hydride combustion tower of aforesaid on-line maintenance, the bottom of wherein said tower body are provided with the dust separation system that the foam that is suspended in described water tank liquid surface can be separated.
But the silicone hydride combustion tower of aforesaid on-line maintenance, the corresponding tower body in place, wherein said combustion chamber is provided with new wind gas supplementing opening and compressed air inlet port, because silane contacts the characteristics that spontaneous combustion takes place with air, the air that enters silane in the combustion chamber and compressed air inlet port by the air inlet generation silica that fully burns has been eliminated silicone hydride waste gas.
But the silicone hydride combustion tower of aforesaid on-line maintenance, on the pipeline that spray system in wherein said water tank and the described left and right sides spray chamber is connected respectively correspondence be provided with flow control valve, can control the flow velocity and the flow of the neutralizer in the spray system by flow control valve, when spray chamber of needs maintenance, close the spray chamber isolating valve, that is provided with between the flow control valve of the neutralizer of spray system in the corresponding control spray chamber and the left and right sides spray chamber, during another spray chamber can continue like this and tail gas, inspection and repair shop spray chamber do not carry out in and the work of tail gas, user friendly maintenance.
But the silicone hydride combustion tower of aforesaid on-line maintenance; the tower body of locating between wherein said dividing plate and the tower body is provided with cleaning and is bonded in the scarfing cinder blow vent of dust on the dividing plate inwall and the nitrogen mouth of protection usefulness, can remove the dust that is bonded on the dividing plate inwall by purging the scarfing cinder blow vent.
But the silicone hydride combustion tower of aforesaid on-line maintenance, on the tower body of wherein said left and right sides spray chamber and water collection device respectively correspondence be provided with manhole, the client has realized the user's online maintenance by manhole by closed control valve.
But the silicone hydride combustion tower of aforesaid on-line maintenance, the tower body of wherein said water tank is provided with water inlet and water supplement port.
By technique scheme, but the silicone hydride combustion tower of the utility model on-line maintenance has following advantage at least:
1, the waste gas of the reaction by the combustion chamber arrives left and right sides spray chamber and circulation fluid generation neutralization reaction respectively by two gas circuits, the speed that makes waste gas absorb is faster, better effects if, the spray chamber isolating valve, is set between two spray chambers simultaneously, filler in needs are changed spray system or spray chamber overhauled or filler and shower nozzle when changing, by closing the spray chamber isolating valve,, left and right sides spray chamber is independent sealed respectively, can be implemented in the line maintenance like this, a spray chamber proceeds to handle waste gas, another spray chamber can overhaul or filler and shower nozzle replacing, has made things convenient for the client greatly.
2, the design of dust separation system can effectively be separated the silica that swims on the water tank level.
3, by flow control valve, be convenient to that the user overhauls spray chamber or the speed of neutralization reaction is regulated and control, also be convenient to filler simultaneously and change.
4, increase the scarfing cinder blow vent, utilized compressed-air actuated pressure can remove the silica dust that is bonded on the dividing plate inwall easily.
In sum, but the silicone hydride combustion tower of the on-line maintenance of the utility model special construction, realized the online spray system filler of giving, and the design of left and right sides spray chamber and two gas circuits, can be so that the absorption of ammonia be more abundant and gas circuit is more smooth and easy, thereby be suitable for practicality more, it has above-mentioned many advantages and practical value, and in like product, do not see have similar structural design to publish or use and really genus innovation, no matter it structurally or bigger improvement all arranged on the function, have large improvement technically, and produced handy and practical effect, but and the silicone hydride combustion tower of more existing on-line maintenance have the multinomial effect of enhancement, thereby be suitable for practicality more, and have the extensive value of industry, really be a novelty, progressive, practical new design.
Above-mentioned explanation only is the general introduction of technical solutions of the utility model, for can clearer understanding technological means of the present utility model, and can be implemented according to the content of specification, below with preferred embodiment of the present utility model and conjunction with figs. describe in detail as after.
The specific embodiment of the present utility model is provided in detail by following examples and accompanying drawing thereof.
Description of drawings
But Fig. 1 is the internal structure schematic diagram of the silicone hydride combustion tower of on-line maintenance described in the utility model;
But Fig. 2 is the structural representation of left and right sides spray chamber of the silicone hydride combustion tower of on-line maintenance described in the utility model;
But Fig. 3 is the schematic diagram of combustion chamber of the silicone hydride combustion tower of on-line maintenance described in the utility model.
Among the figure, 1, water tank; 2, water collection device; 3, combustion chamber; 4, left breast hole; 4.1 right breast hole; 5, compressed air inlet port; 6, left scarfing cinder isolating valve; 6.1 right scarfing cinder isolating valve; 7, new wind gas supplementing opening; 8, left scarfing cinder blow vent; 9, right scarfing cinder blow vent; 10, air inlet; 11, left gas circuit isolating valve; 11.1 right gas circuit isolating valve; 12, water inlet; 13, water supplement port; 15, dust separation system; 16, left spray chamber; 16.1, right spray chamber; 17, left spray system; 17.1 right spray system; 18, spray chamber isolating valve; 19, flow control valve; 20, circulating pump; 21, first packing layer.
The specific embodiment
For further setting forth the utility model is to reach technological means and the effect that predetermined utility model purpose is taked, below in conjunction with accompanying drawing and preferred embodiment, but to its specific embodiment of silicone hydride combustion tower, structure, feature and effect thereof according to the on-line maintenance that the utility model proposes, describe in detail as after.
See also Fig. 1, Fig. 2 and shown in Figure 3, but the silicone hydride combustion tower of the on-line maintenance of the utility model preferred embodiment, the water tank 1 that comprises tower body and be arranged on the tower body bottom, top in the tower body is provided with water collection device 2, be provided with the combustion chamber in the tower body, left side spray chamber and right spray chamber, be provided with in the described tower body combustion chamber 3, the dividing plate that a left side spray chamber 16 and right spray chamber 16.1 are separate, be respectively arranged with left gas circuit isolating valve, 11 and right gas circuit isolating valve, 11.1 on the dividing plate, be provided with the spray chamber isolating valve, 18 of control gas exchange between left side spray chamber 16 and the right spray chamber 16.1, when needs are safeguarded a certain spray chamber, close spray chamber isolating valve, 18, correspondence is closed the gas circuit control valve that it is connected with the combustion chamber simultaneously, realized on-line maintenance like this, be convenient to the client and produce.The bottom of combustion chamber 3 is provided with leads to tower body outer left breast hole 4 and right breast hole 4.1, between combustion chamber 3 and the left and right sides breast hole respectively correspondence be provided with left scarfing cinder isolating valve, 6 and right scarfing cinder isolating valve, 6.1, the tower body at 3 places, combustion chamber is provided with a plurality of air inlets 10, finally flow into after the spray liquid in left side spray system 17 and the right spray system 17.1 in the water tank 1 of tower body bottom, the circulating pump 20 that is arranged on the tower body outside flow into the liquid in the water tank 1 in the left spray system 17 and right spray system 17.1 of corresponding setting in the spray chamber of the left and right sides by pipeline, on water tank 1 and the pipeline that left and right sides spray system is connected respectively correspondence be provided with flow control valve 19, control the flow of neutralizer and the switch of control spray system by flow control valve 19, the tower body at water tank 1 place is provided with water inlet 12 and water supplement port 13.
Waste gas is at first from air inlet 10 enters air that combustion chamber 3 neutralization enters and burns from compressed air inlet port 5 after; silane and oxygen effect generate silica; enter first packing layer 21 that be arranged on spray chamber bottom by the left gas circuit isolating valve, 11 opened and right gas circuit isolating valve, 11.1 along the inwall of dividing plate and tower body with the gas of silica dust through reaction; what have drops on the liquid in the water tank 1; the foam that will be suspended in liquid surface by the dust separation system 15 that is arranged on water tank 1 liquid surface is separated; the tower body of locating between dividing plate and the tower body is provided with scarfing cinder blow vent and nitrogen mouth and is used for cleaning and is bonded in silica dust on the dividing plate inwall; through in first packing layer 21 and after gas enter into left spray chamber 16 and right spray chamber 16.1; after the neutralizer that waste gas and left spray system 17 and right spray system 17.1 are sprayed reacts and is fully absorbed; by discharging outside the tower body behind the water collection device 2 absorption neutralizers that are arranged on the tower body top; the design of water collection device 2 can save since heating along with the gas that neutralizes flow into neutralizer in the atmosphere; reduce cost, and protected environment.
But the technological innovation of the silicone hydride combustion tower of the utility model on-line maintenance that above-mentioned structure like this constitutes all has many saving graces for technical staff of the same trade now, and the progressive that possesses skills really.
The above, it only is preferred embodiment of the present utility model, be not that the utility model is done any pro forma restriction, though the utility model discloses as above with preferred embodiment, yet be not in order to limit the utility model, any those skilled in the art, in not breaking away from the technical solutions of the utility model scope, when the technology contents that can utilize above-mentioned announcement is made a little change or is modified to the equivalent embodiment of equivalent variations, in every case be the content that does not break away from technical solutions of the utility model, according to technical spirit of the present utility model to any simple modification that above embodiment did, equivalent variations and modification all still belong in the scope of technical solutions of the utility model.

Claims (8)

1. but the silicone hydride combustion tower of on-line maintenance, the water tank that comprises tower body and be arranged on the tower body bottom, top in the described tower body is provided with water collection device, be provided with the combustion chamber in the described tower body, left side spray chamber and right spray chamber, be provided with the combustion chamber in the described tower body, left side spray chamber and the separate dividing plate of right spray chamber, corresponding respectively left gas circuit isolating valve, and the right gas circuit isolating valve, that is provided with the interior gas of the gas that to control in the exchange combustion chamber and left and right sides spray chamber on the described dividing plate, be provided with the spray chamber isolating valve, of control gas exchange between described left spray chamber and the right spray chamber, the bottom of described combustion chamber is provided with leads to tower body outer left breast hole and right breast hole, between described combustion chamber and the left and right sides breast hole respectively correspondence be provided with left scarfing cinder isolating valve, and right scarfing cinder isolating valve,, the tower body at place, described combustion chamber is provided with a plurality of air inlets of compression, liquid in the described water tank flow in the left spray system and right spray system of corresponding setting in the spray chamber of the left and right sides by pipeline, finally flow into after the spray liquid in described left spray system and the right spray system in the water tank of tower body bottom.
2. but the silicone hydride combustion tower of on-line maintenance according to claim 1 is characterized in that, the bottom of described tower body is provided with the dust separation system that the foam that is suspended in described water tank liquid surface can be separated.
3. but the silicone hydride combustion tower of on-line maintenance according to claim 1 is characterized in that, the corresponding tower body in place, described combustion chamber is provided with new wind gas supplementing opening and compressed air inlet port.
4. but the silicone hydride combustion tower of on-line maintenance according to claim 1 is characterized in that, on the pipeline that the spray system in described water tank and the described left and right sides spray chamber is connected respectively correspondence be provided with flow control valve.
5. but the silicone hydride combustion tower of on-line maintenance according to claim 1 is characterized in that, the tower body of locating between described dividing plate and the tower body is provided with cleaning and is bonded in the scarfing cinder blow vent of dust on the dividing plate inwall and the nitrogen mouth of protection usefulness.
6. but the silicone hydride combustion tower of on-line maintenance according to claim 1 is characterized in that, on the tower body at spray chamber place, the described left and right sides respectively correspondence be provided with manhole.
7. but the silicone hydride combustion tower of on-line maintenance according to claim 1 is characterized in that, the tower body of described water collection device is provided with manhole.
8. but the silicone hydride combustion tower of on-line maintenance according to claim 1 is characterized in that, the tower body of described water tank is provided with water inlet and water supplement port.
CN2011200183127U 2011-01-20 2011-01-20 Silicane burning tower with online maintenance Expired - Lifetime CN201992667U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2011200183127U CN201992667U (en) 2011-01-20 2011-01-20 Silicane burning tower with online maintenance

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Application Number Priority Date Filing Date Title
CN2011200183127U CN201992667U (en) 2011-01-20 2011-01-20 Silicane burning tower with online maintenance

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CN201992667U true CN201992667U (en) 2011-09-28

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102080827A (en) * 2011-01-20 2011-06-01 常州恒威净化设备有限公司 Silane combustion tower capable of being maintained on line
CN107143865A (en) * 2017-06-29 2017-09-08 昊诚光电(太仓)有限公司 A kind of silane arranges dust cleaning device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102080827A (en) * 2011-01-20 2011-06-01 常州恒威净化设备有限公司 Silane combustion tower capable of being maintained on line
CN102080827B (en) * 2011-01-20 2012-04-11 常州恒威净化设备有限公司 Silane combustion tower capable of being maintained on line
CN107143865A (en) * 2017-06-29 2017-09-08 昊诚光电(太仓)有限公司 A kind of silane arranges dust cleaning device

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C14 Grant of patent or utility model
GR01 Patent grant
AV01 Patent right actively abandoned

Granted publication date: 20110928

Effective date of abandoning: 20120411