CN201990766U - Furnace body and diffusion furnace for diffusion furnace - Google Patents
Furnace body and diffusion furnace for diffusion furnace Download PDFInfo
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- CN201990766U CN201990766U CN2011200411481U CN201120041148U CN201990766U CN 201990766 U CN201990766 U CN 201990766U CN 2011200411481 U CN2011200411481 U CN 2011200411481U CN 201120041148 U CN201120041148 U CN 201120041148U CN 201990766 U CN201990766 U CN 201990766U
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- diffusion furnace
- heater
- furnace
- shell
- furnace body
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Abstract
The utility model provides a furnace body and a diffusion furnace for diffusion furnace. The furnace body for a diffusion furnace comprises a housing and a heating furnace wire as well as at least six main control leads, the main control leads are uniformly and fixedly arranged on the housing along the extending direction of the housing, and each main control lead is respectively and electrically connected with the heating furnace wire. Through the arrangement of at least six main control leads on the housing, at least five temperature control areas can be formed in the housing, so that the furnace body for the diffusion furnace can realize at least five-section type temperature control mode, thus being capable of more accurately controlling the temperature of the furnace body, effectively improving the temperature control accuracy of the furnace body for the diffusion furnace, and further improving the yield rate of products produced by the furnace body for the diffusion furnace.
Description
Technical field
The utility model relates to diffusion furnace equipment, relates in particular to a kind of diffusion furnace with body of heater and diffusion furnace.
Background technology
Diffusion furnace be used in semiconducter device and the large-scale integrated circuit manufacturing processed to wafer spread, a kind of heat-processing equipment of technology such as oxidation, plated film, annealing, alloy and sintering.Diffusion furnace generally includes: body of heater, clean work station, push-and-pull boat, air supply system and Controlling System etc.The enclosure of body of heater is provided with the process furnace silk along the body of heater bearing of trend in the prior art, and the housing exterior of body of heater evenly is provided with four master control lead-in wires along the body of heater bearing of trend, the master control lead-in wire is electrically connected with the process furnace silk, thereby the Controlling System of diffusion furnace can realize that body of heater is set to the syllogic temperature control by control master control lead-in wire power on/off.Because body of heater of the prior art adopts the syllogic temperature control, make the control accuracy of temperature in the shell lower, cause the converted products qualification rate lower.
Summary of the invention
Technical problem to be solved in the utility model is: provide a kind of diffusion furnace with body of heater and diffusion furnace, the control accuracy that solves stove body temperature in the prior art is lower, cause the lower defective of product percent of pass, realize improving the control accuracy of diffusion furnace, to improve the qualification rate of converted products with furnace body temperature.
The technical scheme that the utility model provides is, a kind of diffusion furnace body of heater, comprise: shell and process furnace silk, also comprise at least six master control lead-in wires, described master control lead-in wire evenly is installed on the described shell along described shell bearing of trend, and each described master control lead-in wire is electrically connected with described process furnace silk respectively.
The diffusion furnace body of heater that the utility model provides, be provided with at least six master control lead-in wires by shell, can middlely in the enclosure form at least five temperature control zones, make diffusion furnace realize five-part form temperature control method at least with body of heater, thereby can control stove body temperature more accurately, effectively raise diffusion furnace with the control accuracy of furnace body temperature, thereby improved the qualification rate of the product that diffusion furnace processes with body of heater.
Aforesaid diffusion furnace body of heater, diffusion furnace also comprises the tubular thermal insulation layer with body of heater, and described tubular thermal insulation layer is plugged in the described shell, and described tubular thermal insulation layer is between described shell and described process furnace silk.
Aforesaid diffusion furnace body of heater, diffusion furnace also comprises the tubular insulation layer with body of heater, and described tubular insulation layer is plugged in the described shell, and described tubular insulation layer is between described shell and described tubular thermal insulation layer.
Aforesaid diffusion furnace body of heater, described shell two ends are installed with annulus respectively, and are inserted with the pipe that keeps out the wind in each described annulus.
Aforesaid diffusion furnace body of heater, diffusion furnace also comprises cooling tube with body of heater, described cooling tube is wrapped in the outside of described shell.
Aforesaid diffusion furnace body of heater offers a plurality of thermocouples hole on the described shell.
Aforesaid diffusion furnace body of heater, symmetry is installed with handle on the described shell.
The technical scheme that the utility model provides is that a kind of diffusion furnace comprises aforesaid diffusion furnace body of heater.
The diffusion furnace that the utility model provides, be provided with at least six master control lead-in wires by shell, can middlely in the enclosure form at least five temperature control zones, make diffusion furnace realize five-part form temperature control method at least with body of heater, thereby can control stove body temperature more accurately, effectively raise diffusion furnace with the control accuracy of furnace body temperature, thereby improved the qualification rate of the product that diffusion furnace processes with body of heater.
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, to do one to the accompanying drawing of required use in embodiment or the description of the Prior Art below introduces simply, apparently, accompanying drawing in describing below is embodiment more of the present utility model, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the structural representation one of the utility model diffusion furnace with body of heater embodiment;
Fig. 2 is the structural representation two of the utility model diffusion furnace with body of heater embodiment;
Fig. 3 is the local enlarged diagram of a-quadrant among Fig. 1.
Embodiment
For the purpose, technical scheme and the advantage that make the utility model embodiment clearer, below in conjunction with the accompanying drawing among the utility model embodiment, technical scheme among the utility model embodiment is clearly and completely described, obviously, described embodiment is the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that is obtained under the creative work prerequisite, all belong to the scope of the utility model protection.
Fig. 1 is the structural representation one of the utility model diffusion furnace with body of heater embodiment, and Fig. 2 is the structural representation two of the utility model diffusion furnace with body of heater embodiment, and Fig. 3 is the local enlarged diagram of a-quadrant among Fig. 1.As shown in Figure 1-Figure 3, present embodiment diffusion furnace body of heater comprises: shell 1 and process furnace silk 2 also comprise at least six master control lead-in wires 3, six master controls lead-in wire 3 evenly is installed on the shell 1 along shell 1 bearing of trend, and each master control lead-in wire 3 is electrically connected with process furnace silk 2 respectively.
Particularly, the present embodiment diffusion furnace is with being installed with at least six master control lead-in wires 3 on the shell in the body of heater 1, master control lead-in wire 3 is electrically connected with process furnace silk 2 in the shell 1, every adjacent two master controls lead-in wire 3 and corresponding process furnace silk 2 formation one temperature control zone, thereby in shell 1, form at least five independently temperature control zones, realized that the present embodiment diffusion furnace adopts five-part form temperature control method at least with body of heater, thereby can control present embodiment diffusion furnace stove body temperature more accurately, improve the control accuracy of diffusion furnace with furnace body temperature.Wherein, the process furnace silk 2 in the present embodiment can adopt high temperature resistant stove silk, thereby can guarantee that process furnace silk 2 can not produce the phenomenon of high temperature fracture in long-time hot environment.And shell 1 can adopt stainless steel frosted plate to make.In addition, can offer a plurality of thermocouples hole 11 on the shell 1 in the present embodiment, can also symmetry be installed with handle 12 on the shell 1, can conveniently and solidly the present embodiment diffusion furnace be installed and fixed with body of heater by handle 12.
Further, the present embodiment diffusion furnace can also comprise tubular thermal insulation layer 4 with body of heater, and tubular thermal insulation layer 4 is plugged in the shell 1, and tubular thermal insulation layer 4 is between shell 1 and process furnace silk 2.Concrete, by tubular thermal insulation layer 4 is set, the heat that can effectively reduce 2 generations of process furnace silk is dispersed into the outside by shell 1, makes the present embodiment diffusion furnace better with the heat-insulating property of body of heater.
Further, the present embodiment diffusion furnace can also comprise tubular insulation layer 5 with body of heater, and tubular insulation layer 5 is plugged in the shell 1, and tubular insulation layer 5 is between shell 1 and tubular thermal insulation layer 4.Concrete, by tubular insulation layer 5 is set in shell 1, tubular insulation layer 5 can effectively carry out insulation processing with process furnace silk 2 and shell 1, thereby effectively raises the safety performance of present embodiment diffusion furnace with body of heater.Wherein, the tubular insulation layer 5 in the present embodiment can adopt stupalith to make; In addition, tubular insulation layer 5 will guarantee that on the one hand process furnace silk 2 and shell 1 insulation are provided with; In addition on the one hand, tubular insulation layer 5 can effectively support process furnace silk 2, guarantee between the process furnace silk 2 spacing evenly, guarantee not subside under the process furnace silk 2 high temperature service conditions.
Present embodiment diffusion furnace body of heater, be provided with at least six master control lead-in wires by shell, can middlely in the enclosure form at least five temperature control zones, make diffusion furnace realize five-part form temperature control method at least with body of heater, thereby can control stove body temperature more accurately, effectively raise diffusion furnace with the control accuracy of furnace body temperature, thereby improved the qualification rate of the product that diffusion furnace processes with body of heater.
Based on technique scheme, optionally, shell 1 two ends in the present embodiment are installed with annulus 6 respectively, and are inserted with the pipe 7 that keeps out the wind in each annulus 6.Concrete, by annulus 6 pipe 7 reliable firm being fixed on the shell 1 of will keeping out the wind, under the effect of the pipe 7 that keeps out the wind, the air that can reduce the external world enters into shell 1 in a large number.
Further, in order to effectively reduce the outside temperature of present embodiment diffusion furnace with body of heater, the present embodiment diffusion furnace can also comprise cooling tube 8 with body of heater, and cooling tube 8 is wrapped in the outside of shell 1.Concrete, the outside of the shell 1 in the present embodiment also is wound with cooling tube 8, when the present embodiment diffusion furnace carries out work with body of heater, can inject cooling fluid in the cooling tube 8, thereby reduces the outside temperature of shell 1 fast and effectively.
The utility model also provides a kind of diffusion furnace, comprise the diffusion furnace body of heater, wherein, diffusion furnace in the present embodiment can adopt the utility model diffusion furnace with the diffusion furnace body of heater among the body of heater embodiment with body of heater, its concrete structure can not repeat them here referring to the record of the utility model diffusion furnace with body of heater embodiment and accompanying drawing 1-Fig. 3.
The present embodiment diffusion furnace, be provided with at least six master control lead-in wires by shell, can middlely in the enclosure form at least five temperature control zones, make diffusion furnace realize five-part form temperature control method at least with body of heater, thereby can control stove body temperature more accurately, effectively raise diffusion furnace with the control accuracy of furnace body temperature, thereby improved the qualification rate of the product that diffusion furnace processes with body of heater.
It should be noted that at last: above embodiment only in order to the explanation the technical solution of the utility model, is not intended to limit; Although the utility model is had been described in detail with reference to previous embodiment, those of ordinary skill in the art is to be understood that: it still can be made amendment to the technical scheme that aforementioned each embodiment put down in writing, and perhaps part technical characterictic wherein is equal to replacement; And these modifications or replacement do not make the essence of appropriate technical solution break away from the spirit and scope of each embodiment technical scheme of the utility model.
Claims (8)
1. diffusion furnace body of heater, comprise: shell and process furnace silk, it is characterized in that, also comprise at least six master control lead-in wires, described master control lead-in wire evenly is installed on the described shell along described shell bearing of trend, and each described master control lead-in wire is electrically connected with described process furnace silk respectively.
2. diffusion furnace body of heater according to claim 1 is characterized in that, also comprises the tubular thermal insulation layer, and described tubular thermal insulation layer is plugged in the described shell, and described tubular thermal insulation layer is between described shell and described process furnace silk.
3. diffusion furnace body of heater according to claim 2 is characterized in that, also comprises the tubular insulation layer, and described tubular insulation layer is plugged in the described shell, and described tubular insulation layer is between described shell and described tubular thermal insulation layer.
4. according to the arbitrary described diffusion furnace body of heater of claim 1-3, it is characterized in that described shell two ends are installed with annulus respectively, and be inserted with the pipe that keeps out the wind in each described annulus.
5. according to the arbitrary described diffusion furnace body of heater of claim 1-3, it is characterized in that also comprise cooling tube, described cooling tube is wrapped in the outside of described shell.
6. according to the arbitrary described diffusion furnace body of heater of claim 1-3, it is characterized in that, offer a plurality of thermocouples hole on the described shell.
7. according to the arbitrary described diffusion furnace body of heater of claim 1-3, it is characterized in that symmetry is installed with handle on the described shell.
8. a diffusion furnace is characterized in that, comprises arbitrary described diffusion furnace body of heater as claim 1-7.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200411481U CN201990766U (en) | 2011-02-18 | 2011-02-18 | Furnace body and diffusion furnace for diffusion furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200411481U CN201990766U (en) | 2011-02-18 | 2011-02-18 | Furnace body and diffusion furnace for diffusion furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201990766U true CN201990766U (en) | 2011-09-28 |
Family
ID=44667260
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011200411481U Expired - Fee Related CN201990766U (en) | 2011-02-18 | 2011-02-18 | Furnace body and diffusion furnace for diffusion furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201990766U (en) |
-
2011
- 2011-02-18 CN CN2011200411481U patent/CN201990766U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110928 Termination date: 20120218 |