CN201533421U - Semiconductor furnace tube machine table heater - Google Patents
Semiconductor furnace tube machine table heater Download PDFInfo
- Publication number
- CN201533421U CN201533421U CN2009202099213U CN200920209921U CN201533421U CN 201533421 U CN201533421 U CN 201533421U CN 2009202099213 U CN2009202099213 U CN 2009202099213U CN 200920209921 U CN200920209921 U CN 200920209921U CN 201533421 U CN201533421 U CN 201533421U
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- resistance wire
- supports insulative
- heater
- pottery
- furnace tube
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- Expired - Fee Related
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Abstract
The utility model provides a semiconductor furnace tube machine table heater which comprises a plurality of resistance wires which are arranged in parallel, a plurality of support insulating ceramics are arranged on each resistance wire, wherein the plurality of support insulating ceramics on the adjacent two resistance wires are arranged in a staggered manner. The semiconductor furnace tube machine table heater provided by the utility model can improve the safety performance of the heater and prolong the service life of the heater.
Description
Technical field
The utility model relates to field of semiconductor manufacture, and is particularly related to a kind of semiconductor furnace tube board heater.
Background technology
Please refer to Fig. 1, Figure 1 shows that semiconductor furnace tube board structural representation in the prior art.Semiconductor furnace tube board shown in Fig. 1 includes gas port 1, blast pipe 2, branch manifold 3, inner tube 4, lift 5, heater 6 and resistive heater 7.Semiconductor furnace tube board heater is divided into: three types of high temperature, middle temperature, low temperature, and to make employed boiler tube board heater high temperature be more than 1200 ℃ to our semiconductor at present, and middle temperature is about 780 ℃, and low temperature is about 300 ℃.At present at the employed boiler tube board of field of semiconductor manufacture heater, its resistive heater is after after a while, because the distortion or the short circuit of resistive heater, so that whole heater can't continue to use, please refer to Fig. 2, Figure 2 shows that in the prior art resistive heater of heater and supports insulative pottery layout in the semiconductor furnace tube board.If in time do not find the serious hidden danger of heater, serious consequence certainly will will be caused.Analyze its source of damage, probably have following two kinds: 1. be sagging excessive after the resistance wire thermal deformation; 2. short circuit causes resistive heater fusing.Sagging after first resistance wire, 10 thermal deformations between two supports insulative potteries 11 as can be seen among Fig. 2, touch the second adjacent resistance wire 20 easily and cause short circuit.The boiler tube board need carry out the preventive maintenance inspection, seriously will change wait if find distortion.The most of heater strip distortion of each inspection discovery heater is all compared serious with regard to present circumstances.
Present all faults of finding or have the heater of potential risk, its problem all goes out at heater base (BOTTOM ZONE).Semiconductor furnace tube board heater base power (BOTTOM ZONEPOWER) is greater than the power of other parts, reason is that heater base dispels the heat easily, the thermal loss of while heater base when loading is than other part height, therefore the compensation power of heater base is compared meeting greatly, so the heating resistor deformation of filament is also bigger.
Simultaneously, heater be replaced by integral replacing, it comprises the dismounting of a large amount of pipelines, the dismounting of electric wire, holding wire, the test of interlocking, alarm signal, the test of insulation, electric current, so the replacing of heater difficulty comparatively, cost is also higher.
The utility model content
The utility model proposes a kind of semiconductor furnace tube board heater, can improve the security performance of heater, prolong the useful life of heater.
In order to achieve the above object, the utility model proposes a kind of semiconductor furnace tube board heater, comprise the many resistance wires that be arranged in parallel, described every resistance wire is provided with a plurality of supports insulative potteries, wherein, a plurality of supports insulative potteries on adjacent two resistance wires are staggered.
Further, has identical distance each other with a plurality of supports insulative potteries on the root resistance wire.
Further, has the reservation wider space between described supports insulative pottery and the resistance wire.
In order to achieve the above object, the utility model also proposes a kind of semiconductor furnace tube board heater, comprise vertically arranged waveform resistance wire, described waveform resistance wire is provided with a plurality of supports insulative potteries, wherein, described a plurality of supports insulative pottery is arranged at the crest and the trough of waveform resistance wire.
Further, has the reservation wider space between described supports insulative pottery and the resistance wire.
The semiconductor furnace tube board heater that the utility model proposes with the setting that is staggered of a plurality of supports insulative potteries on the adjacent resistor silk, changes the support arrangement of resistance wire, guarantees the isolation of resistance wire, plays the security protection effect; Resistance wire is set to waveform, and a plurality of supports insulative potteries are set on its crest and trough, thereby has changed the trend of resistance wire, guarantees the isolation of resistance wire, plays the security protection effect; The utility model also has the reservation wider space between supports insulative pottery and resistance wire, thereby prolongs the useful life of heater.
Description of drawings
Figure 1 shows that semiconductor furnace tube board structural representation in the prior art.
Figure 2 shows that the resistance wire and the supports insulative pottery layout of semiconductor furnace tube board heater in the prior art.
Figure 3 shows that the resistance wire of the utility model first preferred embodiment and the layout of supports insulative pottery.
Figure 4 shows that the resistance wire of the utility model first preferred embodiment and the schematic diagram after the use of supports insulative pottery.
Figure 5 shows that the waveform resistance wire of the utility model second preferred embodiment and the layout of supports insulative pottery.
Figure 6 shows that the resistance wire of the utility model second preferred embodiment and the structure chart of supports insulative pottery.
Embodiment
In order more to understand technology contents of the present utility model, especially exemplified by specific embodiment and cooperate institute's accompanying drawing to be described as follows.
The utility model proposes a kind of semiconductor furnace tube board heater, can improve the security performance of heater, prolong the useful life of heater.
Please refer to Fig. 3, Figure 3 shows that the resistance wire of the utility model first preferred embodiment and the layout of supports insulative pottery.The utility model proposes a kind of semiconductor furnace tube board heater, comprise the many resistance wires that be arranged in parallel 100, described every resistance wire 100 is provided with a plurality of supports insulative potteries 200, has identical distance each other with a plurality of supports insulative potteries 200 on the root resistance wire 100, wherein, a plurality of supports insulative potteries 200 on adjacent two resistance wires 100 are staggered.
With reference to figure 4, Figure 4 shows that the resistance wire of the utility model first preferred embodiment and the schematic diagram after the use of supports insulative pottery again.Sagging after first resistance wire, 110 temperature distortions between first supports insulative pottery, the 211 and second supports insulative pottery 212, touch the 3rd supports insulative pottery 221 on second resistance wire 120, cause short circuit thereby can not touch the second adjacent resistance wire 120 because of first resistance wire 110 after sagging.
Please refer to Fig. 5 again, Figure 5 shows that the waveform resistance wire of the utility model second preferred embodiment and the layout of supports insulative pottery.The utility model also proposes a kind of semiconductor furnace tube board heater, comprise vertically arranged waveform resistance wire 300, described waveform resistance wire 300 is provided with a plurality of supports insulative potteries 400, wherein, described a plurality of supports insulative pottery 400 is arranged at the crest and the trough of waveform resistance wire 300.The crest of waveform resistance wire 300 shown in Figure 5 has the 4th supports insulative pottery 410, and the trough of described waveform resistance wire 300 has the 5th supports insulative pottery 420.Waveform resistance wire 300 with this structure is sagging by 400 supports of supports insulative pottery after temperature distortion, does not therefore have the puzzlement of short circuit problem.
Please refer to Fig. 6 again, Figure 6 shows that the resistance wire of the utility model second preferred embodiment and the structure chart of supports insulative pottery.Referring to the sectional view along A-A ' direction on Fig. 6 right side, has the wider space 500 of reservation between described supports insulative pottery 400 and the waveform resistance wire 300.It is ccontaining to be reserved wider space 500 after 300 temperature distortions of waveform resistance wire, and can not destroy supports insulative pottery 400, thereby prolongs the useful life of heater.The resistance wire of described first preferred embodiment and supports insulative pottery have this structure equally, no longer repeat here.
In sum, the semiconductor furnace tube board heater that the utility model first embodiment proposes with settings that be staggered of a plurality of supports insulative potteries on the adjacent resistor silk, changes the support arrangement of resistance wire, and the security protection effect is played in the isolation of assurance resistance wire; Among the utility model second embodiment, resistance wire is set to waveform, and a plurality of supports insulative potteries are set on its crest and trough, thereby has changed the trend of resistance wire, guarantees the isolation of resistance wire, plays the security protection effect; The utility model also has the reservation wider space between supports insulative pottery and resistance wire, thereby prolongs the useful life of heater.
Though the utility model discloses as above with preferred embodiment, so it is not in order to limit the utility model.Have in the technical field under the utility model and know the knowledgeable usually, in not breaking away from spirit and scope of the present utility model, when being used for a variety of modifications and variations.Therefore, protection range of the present utility model is as the criterion when looking claims person of defining.
Claims (5)
1. a semiconductor furnace tube board heater is characterized in that, comprises the many resistance wires that be arranged in parallel, and described every resistance wire is provided with a plurality of supports insulative potteries, and wherein, a plurality of supports insulative potteries on adjacent two resistance wires are staggered.
2. semiconductor furnace tube board heater according to claim 1 is characterized in that, has identical distance each other with a plurality of supports insulative potteries on the root resistance wire.
3. semiconductor furnace tube board heater according to claim 1 is characterized in that, has the reservation wider space between described supports insulative pottery and the resistance wire.
4. semiconductor furnace tube board heater, it is characterized in that comprise vertically arranged waveform resistance wire, described waveform resistance wire is provided with a plurality of supports insulative potteries, wherein, described a plurality of supports insulative pottery is arranged at the crest and the trough of waveform resistance wire.
5. semiconductor furnace tube board heater according to claim 4 is characterized in that, has the reservation wider space between described supports insulative pottery and the resistance wire.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202099213U CN201533421U (en) | 2009-09-22 | 2009-09-22 | Semiconductor furnace tube machine table heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202099213U CN201533421U (en) | 2009-09-22 | 2009-09-22 | Semiconductor furnace tube machine table heater |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201533421U true CN201533421U (en) | 2010-07-21 |
Family
ID=42528819
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009202099213U Expired - Fee Related CN201533421U (en) | 2009-09-22 | 2009-09-22 | Semiconductor furnace tube machine table heater |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201533421U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103779258A (en) * | 2014-02-20 | 2014-05-07 | 北京七星华创电子股份有限公司 | Heating device of semiconductor heat treatment device, service part of heating device and repair method of heating device |
| CN104988463A (en) * | 2015-06-24 | 2015-10-21 | 深圳市华星光电技术有限公司 | Heating source and organic light emitting diode evaporator |
| CN107552555A (en) * | 2017-09-29 | 2018-01-09 | 中科鼎实环境工程股份有限公司 | The system and method for electric heater unit and in-situ immobilization ultra-deep organic polluted soil |
| CN109951906A (en) * | 2017-12-20 | 2019-06-28 | 长鑫存储技术有限公司 | Semiconductor furnace tube machine table heater |
-
2009
- 2009-09-22 CN CN2009202099213U patent/CN201533421U/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103779258A (en) * | 2014-02-20 | 2014-05-07 | 北京七星华创电子股份有限公司 | Heating device of semiconductor heat treatment device, service part of heating device and repair method of heating device |
| CN103779258B (en) * | 2014-02-20 | 2016-06-15 | 北京七星华创电子股份有限公司 | The heater of a kind of semiconductor heat treatment equipment, service parts and method for maintaining |
| CN104988463A (en) * | 2015-06-24 | 2015-10-21 | 深圳市华星光电技术有限公司 | Heating source and organic light emitting diode evaporator |
| US10014493B2 (en) | 2015-06-24 | 2018-07-03 | Shenzhen China Star Optoelectronics Technology Co., Ltd | Heating source and evaporator of organic light emitting diode |
| CN104988463B (en) * | 2015-06-24 | 2018-11-06 | 深圳市华星光电技术有限公司 | A kind of evaporator of heating source and Organic Light Emitting Diode |
| CN107552555A (en) * | 2017-09-29 | 2018-01-09 | 中科鼎实环境工程股份有限公司 | The system and method for electric heater unit and in-situ immobilization ultra-deep organic polluted soil |
| CN107552555B (en) * | 2017-09-29 | 2022-10-21 | 中科鼎实环境工程有限公司 | Electric heating device and system and method for in-situ remediation of ultra-deep organic contaminated soil |
| CN109951906A (en) * | 2017-12-20 | 2019-06-28 | 长鑫存储技术有限公司 | Semiconductor furnace tube machine table heater |
| CN109951906B (en) * | 2017-12-20 | 2024-05-10 | 长鑫存储技术有限公司 | Machine heater for semiconductor furnace tube |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION Effective date: 20130220 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20130220 Address after: 100176 No. 18 Wenchang Avenue, Beijing economic and Technological Development Zone Patentee after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100721 Termination date: 20180922 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |