CN201975408U - Automatic slice inserting machine - Google Patents
Automatic slice inserting machine Download PDFInfo
- Publication number
- CN201975408U CN201975408U CN2010206763511U CN201020676351U CN201975408U CN 201975408 U CN201975408 U CN 201975408U CN 2010206763511 U CN2010206763511 U CN 2010206763511U CN 201020676351 U CN201020676351 U CN 201020676351U CN 201975408 U CN201975408 U CN 201975408U
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- Prior art keywords
- transmission shaft
- slide block
- silicon chip
- sheet machine
- automatic plug
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The embodiment of the utility model discloses an automatic slice inserting machine, which comprises a tray, a fixing frame, a slide block, a transmission shaft, a spring, a driving device and an elevating mechanism, wherein the tray is used for accommodating silicon slices; the transmission shaft is provided with an anti-slip component; the spring is used for compressing the slide block; the driving device is used for driving the transmission shaft to rotate towards a discharge hole; and the elevating mechanism can lift or lower the tray along an axis. When the automatic slice inserting machine is used, a certain number of silicon slices are arranged on the tray, and the distance between each silicon slice and the transmission shaft is adjusted, so that the anti-slip component on the transmission shaft is directly contacted with the silicon slices. When the transmission shaft rotates, the silicon slices are conveyed onto a subsequent conveyer belt under the action of frictional force. By adopting the automatic slice inserting machine with the structure, slices can be automatically taken from an entire pile of silicon slices without manual slice insertion of workers on the basis of lowering the breaking rate of the silicon slices, and the production efficiency of the silicon slices is improved.
Description
Technical field
The utility model relates to the solar panel production equipment, more particularly, relates to a kind of automatic plug-in sheet machine.
Background technology
In recent years, the application of the photovoltaic generation effect of silicon chip solar cell presents blowout trend, and silicon chip is as the core parts of solar cell, because of the higher development that is restricting solar cell of its production cost.Domestic enterprise's silicon chip production equipment mainly depends on import at present, and relative cost is higher, and most enterprise is labor-intensive enterprises.In the silicon chip production process, the inserted sheet link adopted artificial inserted sheet substantially during silicon chip cleaned.Because silicon chip is thin and crisp, make the workman silicon chip be cracked when taking the sheet inserted sheet to happen occasionally.In order to reduce the fragment rate of silicon chip, enterprise has introduced automatic plug-in sheet machine inserted sheet technology, but this automatic plug-in sheet machine can't be piled automatic sheet-fetching the silicon chip from putting in order, limited its popularization, and adopt artificial inserted sheet, and the workman is in the intensive work environment for a long time, and the fault rate that the duplication of labour has caused easily increases in time, cause the cracked or scuffing increase of silicon chip, thereby caused the waste of silicon chip.
The utility model content
In view of this, the utility model provides a kind of automatic plug-in sheet machine, to realize improving the efficient that silicon chip is produced.
For achieving the above object, the utility model provides following technical scheme:
A kind of automatic plug-in sheet machine comprises:
Place the pallet of silicon chip, described pallet comprises discharging opening;
Be arranged on the fixed mount of described discharging opening one side;
Be arranged on the described fixed mount, and the slide block that can move along axis direction, described slide block is provided with installing hole;
The one end is by the power transmission shaft of Bearing Installation in described installing hole, and described power transmission shaft is provided with the anti-slip parts;
Be arranged between described fixed mount and the described slide block, and can compress the spring of described slide block;
Drive the drive unit that described power transmission shaft points to described discharging opening direction rotation;
Be arranged on the described pallet, and the elevating mechanism that can make described pallet rise or descend along axis direction.
Preferably, in above-mentioned automatic plug-in sheet machine, described fixed mount comprises upper holder and lower fixed frame, and described upper holder is installed on the described lower fixed frame; Described slide block places between described upper holder and the described lower fixed frame; Described spring is arranged between described slide block and the described upper holder.
Preferably, in above-mentioned automatic plug-in sheet machine, described slide block is provided with at least one guide rod; Described upper holder is provided with the through hole that holds described guide rod; Described spring housing is on described guide rod, and the external diameter of described spring is greater than the aperture of described through hole.
Preferably, in above-mentioned automatic plug-in sheet machine, described drive unit comprises reducing motor, belt and drive pulley, and the shell of described reducing motor is fixed on the described slide block, on the output shaft of described reducing motor and the described drive pulley belt is set, described drive pulley is arranged on the described power transmission shaft.
Preferably, in above-mentioned automatic plug-in sheet machine, be positioned at place, described discharging opening both sides on the described pallet and be provided with baffle plate.
Preferably, in above-mentioned automatic plug-in sheet machine, described baffle plate is provided with lightening hole.
Preferably, in above-mentioned automatic plug-in sheet machine, described elevating mechanism comprises connecting plate, support and linear electric motors, and wherein, the shell of described linear electric motors is fixed on the described support, and a side of the output shaft of described linear electric motors and described connecting plate is fixedly linked; The another side of described connecting plate and described baffle plate are fixedly linked.
Preferably, in above-mentioned automatic plug-in sheet machine, also be provided with slide rail on the described support, also be provided with guide pad on the output shaft of described linear electric motors, have the groove that holds described slide rail on the described guide pad.
Preferably, in above-mentioned automatic plug-in sheet machine, also be provided with water injection system on the described fixed mount, comprising: adjusting rod and nozzle, described adjusting rod are fixed on the described fixed mount, and described nozzle is arranged on the described adjusting rod.
Preferably, in above-mentioned automatic plug-in sheet machine, described anti-slip parts are a plurality of O type circles.
From technique scheme as can be seen, the automatic plug-in sheet machine among the utility model embodiment comprises: the pallet of placing silicon chip; Fixed mount; Slide block; Power transmission shaft, described power transmission shaft is provided with the anti-slip parts; Can compress the spring of described slide block; Drive the drive unit that described power transmission shaft points to described discharging opening direction rotation; The elevating mechanism that can make described pallet rise or descend along axis direction.During use, establish the silicon chip that pallet is placed some,, make that the anti-slip parts on the power transmission shaft directly contact with silicon chip by regulating the distance between silicon chip and the power transmission shaft.When power transmission shaft rotates,, silicon chip is sent on the follow-up conveyer belt because of the effect of frictional force.Therefore the automatic plug-in sheet machine that passes through said structure can also be piled automatic sheet-fetching the silicon chip from whole, and not need the workman to carry out manual inserted sheet on the fragment rate basis that reduces silicon chip, has improved the production efficiency of silicon chip.
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, to do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below, apparently, accompanying drawing in describing below only is embodiment more of the present utility model, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
The structural representation of the automatic plug-in sheet machine that Fig. 1 provides for the utility model embodiment one;
The structural representation of the slide block that Fig. 2 provides for the utility model embodiment one;
The structural representation of the fixed mount that Fig. 3 provides for the utility model embodiment one;
The water injection system structural representation that Fig. 4 provides for the utility model embodiment one;
The structural representation of the automatic plug-in sheet machine that Fig. 5 provides for the utility model embodiment two;
The structural representation of the automatic plug-in sheet machine that Fig. 6 provides for the utility model embodiment three;
The structural representation of the automatic plug-in sheet machine that Fig. 7 provides for the utility model embodiment four.
Embodiment
For improving silicon chip production automation level, reduce the silicon chip fragment rate, on existing automatic plug-in sheet machine, increase new function, promptly carry the silicon chip function, improve the automatic inserted sheet function of plug-in sheet machine.Can reduce the artificial damage in the inserted sheet process on the one hand, improve the rate of finished products of silicon chip; On the other hand, help to improve the automated production level of enterprise, save cost of human resources, thereby improve the economic benefit of company.
Below in conjunction with the accompanying drawing among the utility model embodiment, the technical scheme among the utility model embodiment is clearly and completely described, obviously, described embodiment only is the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that is obtained under the creative work prerequisite, all belong to the scope of the utility model protection.
Embodiment one
The disclosed automatic plug-in sheet machine of the utility model embodiment please refer to Fig. 1, and wherein, 1 is pallet; 2 is fixed mount; 3 is slide block; 4 is power transmission shaft; 5 is drive unit; 6 is elevating mechanism; 7 is water injection system; 8 is silicon chip.
This automatic plug-in sheet machine comprises: pallet 1, fixed mount 2, slide block 3, power transmission shaft 4, drive unit 5, spring (not marking among the figure) and elevating mechanism 6, and wherein, pallet 1 is used to place silicon chip 8, has discharging opening on the pallet 1, and silicon chip 8 leaves pallet 1 by discharging opening;
Fixed mount 2 is arranged on a side of discharging opening, and fixed mount 2 is separated with pallet 1, and fixed mount 2 can be installed on the operating platform by bolt, perhaps directly is welded on the operating platform;
In installing hole, power transmission shaft 4 is provided with the anti-slip parts to one end of power transmission shaft 4 by Bearing Installation, and power transmission shaft 4 is when rotating, and the anti-slip parts produce frictional force with silicon chip 8, and the effect by frictional force can be separated silicon chip 8 and pallet 1;
Spring is arranged between fixed mount 2 and the slide block 3, but and pressed slider 3, can regulate the size that power transmission shaft 4 acts on the power on the silicon chip 8 by the effect of spring, silicon chip 8 initial tension of spring more for a long time is big more, the power that the anti-slip parts act on the silicon chip 8 is just big more, silicon chip 8 just easy more separation;
During use, establish pallet 1 and place the silicon chip 8 of some,, make that the anti-slip parts on the power transmission shaft 4 directly contact with silicon chip 8 by regulating the distance between silicon chip 8 and the power transmission shaft 4.When power transmission shaft 4 rotates,, silicon chip 8 is sent on the follow-up conveyer belt because of the effect of frictional force.Therefore the automatic plug-in sheet machine that passes through said structure can also be piled automatic sheet-fetching the silicon chip 8 from whole, and not need the workman to carry out manual inserted sheet on the fragment rate basis that reduces silicon chip 8, has improved the production efficiency of silicon chip 8.
The concrete shape of slide block 3 is not done qualification, but in order to make slide block 3 cooperate better the shape of the cooperation optimum of selection with fixed mount 2.In addition, realize that slide block 3 is a lot of in the form that fixed mount 2 upper edge axis directions move, for example: at least one guide rod can be set on fixed mount 2, slide block 3 is provided with the through hole that holds above-mentioned guide rod, and spring housing is on guide rod, and the external diameter of spring is greater than the aperture of described through hole, and slide block 3 is when axis direction moves, and through hole can move on guide rod; Perhaps on fixed mount 2 guide rail is set, slide block 3 is provided with the groove that can slide along above-mentioned guide rail, and this moment, spring was set directly between upper holder 2 and the slide block 3.
Certainly realize that slide block 3 moves form and is not limited only to above-mentioned form.Among the utility model embodiment, please refer to Fig. 3 and Fig. 2, slide block 3 comprises main body 31, main body 31 is provided with installing hole 32, installing hole 32 is used to install power transmission shaft 4, main body 31 is provided with at least one guide rod, be provided with four guide rods at this, comprise guide rod 33, guide rod 34, guide rod 35 and guide rod 36, spring 37 can be set on all guide rods, can also on a guide rod spring 37 be set, the guide rod of spring 37 is set, the aperture of the through hole 211 relative with this guide rod is less than the external diameter of spring 37 on the fixed mount 2.In the utility model embodiment, on guide rod 33, spring is set.Meanwhile upper holder 2 is provided with the through hole 211 that holds guide rod 33, guide rod 34, guide rod 35 and guide rod 36 respectively.The purpose of guide rod is set, can guarantees that on the one hand slide block 3 moves at fixing track; Spring 7 can be arranged on the guide rod on the other hand, can prevent effectively that like this power that spring 37 acts on slide block 3 from being axis direction all the time.
Owing to have cohesive force between silicon chip and the silicon chip, therefore in order better silicon chip 8 to be separated, also be provided with water injection system 7 among the utility model embodiment, please refer to Fig. 4, this water injection system 7 comprises adjusting rod 72 and nozzle 71, adjusting rod 72 is fixed on the fixed mount 2, and nozzle 71 is arranged on the adjusting rod 72.When work, the water inlet water receiving pipe 73 of nozzle 71, constantly water inlet can be sprayed onto water 74 on the side of silicon chip 8 by the hole on the nozzle 71 in the water pipe 73, therefore is easy to silicon chip 8 is separated.
Regulate the distance of nozzle 71 and silicon chip 8 for convenience, please refer to Fig. 4 and Fig. 2, adjusting rod 72 is provided with rectangular 721, and on the fixed mount 22 with it relative position be provided with at least one installing hole 221, screw or screw rod pass strip hole 721 and adjusting rod 72 can be fixed on the installing hole 221 of fixed mount 2.Because be strip hole on the adjusting rod 72, therefore, adjusting rod 72 can move along the strip hole length direction, behind definite good optimum position, can lock-screw or screw rod adjusting rod 72 is fixed on the fixed mount 2.
In addition, a plurality of installing holes 221 can be set on the fixed mount 2, can also be common through hole,, just can realize regulating the distance of nozzle 71 and silicon chip 8 by selecting different installing hole 221 and strip hole can be set on the adjusting rod 72.
In order to prevent that the anti-slip parts from scratching silicon chip 8, the anti-slip parts are a plurality of O type circles in the utility model embodiment, and a plurality of O type circles are evenly distributed on the power transmission shaft 4, can also be non-uniformly distributed on the power transmission shaft 4.More excellent, the O type circle of the material of selection silicon rubber among the utility model embodiment, because silicon rubber is softer, smooth surface can not scratch silicon chip 8 when contacting with silicon chip 8, and coefficient of friction is bigger, is convenient to regulate frictional force between silicon chip 8 and the O type circle.
Embodiment two
The disclosed automatic plug-in sheet machine of the utility model embodiment please refer to Fig. 5, and wherein, 1 is pallet; 11 is baffle plate; 12 is baffle plate; 2 is fixed mount; 3 is slide block; 4 is power transmission shaft; 5 is drive unit; 6 is elevating mechanism; 7 is water injection system; 8 is silicon chip.
This automatic plug-in sheet machine, comprise: pallet 1, fixed mount 2, slide block 3, power transmission shaft 4, drive unit 5, spring (not marking among the figure), elevating mechanism 6, baffle plate 11 and baffle plate 12, wherein, pallet 1 is used to place silicon chip 8, have discharging opening on the pallet 1, silicon chip 8 leaves pallet 1 by discharging opening;
Fixed mount 2 is arranged on a side of discharging opening, and fixed mount 2 is separated with pallet 1, and fixed mount 2 can be installed on the operating platform by bolt, perhaps directly is welded on the operating platform, is positioned at place, discharging opening both sides and is provided with baffle plate 11 and baffle plate 12;
In installing hole, power transmission shaft 4 is provided with the anti-slip parts to one end of power transmission shaft 4 by Bearing Installation, and power transmission shaft 4 is when rotating, and the anti-slip parts produce frictional force with silicon chip 8, and the effect by frictional force can be separated silicon chip 8 and pallet 1;
Spring is arranged between fixed mount 2 and the slide block 3, but and pressed slider 3, can regulate the size that power transmission shaft 4 acts on the power on the silicon chip 8 by the effect of spring, silicon chip 8 initial tension of spring more for a long time is big more, the power that the anti-slip parts act on the silicon chip 8 is just big more, silicon chip 8 just easy more separation;
During use, establish pallet 1 and place the silicon chip 8 of some,, make that the anti-slip parts on the power transmission shaft 4 directly contact with silicon chip 8 by regulating the distance between silicon chip 8 and the power transmission shaft 4.When power transmission shaft 4 rotates,, silicon chip 8 is sent on the follow-up conveyer belt because of the effect of frictional force.Therefore the automatic plug-in sheet machine that passes through said structure can also be piled automatic sheet-fetching the silicon chip 8 from whole, and not need the workman to carry out manual inserted sheet on the fragment rate basis that reduces silicon chip 8, has improved the production efficiency of silicon chip 8.
Embodiment three
Please refer to Fig. 6, wherein, 1 is pallet; 11 is baffle plate; 12 is baffle plate; 2 is fixed mount; 3 is slide block; 4 is power transmission shaft; 61 is linear electric motors; 62 is connecting plate; 63 is guide pad; 64 is support; 641 is slide rail; 7 is water injection system; 8 is silicon chip.
In the utility model embodiment, its improvement is that to elevating mechanism this elevating mechanism comprises: comprise connecting plate 62, support 64 and linear electric motors 61, wherein, the shell of linear electric motors 61 is fixed on the support 64, and a side of the output shaft of linear electric motors 61 and connecting plate 62 is fixedly linked; The another side of connecting plate 62 and baffle plate 11 and baffle plate 12 are fixedly linked.
For the stability that guarantees that linear electric motors 61 move, also be provided with slide rail 641 on the support 64, also be provided with guide pad 62 on the output shaft of linear electric motors 61, have the groove that holds slide rail 641 on the guide pad 62.
Embodiment four
Please refer to Fig. 7, wherein, 1 is pallet; 11 is baffle plate; 12 is baffle plate; 2 is fixed mount; 3 is slide block; 4 is power transmission shaft; 61 is linear electric motors; 62 is connecting plate; 63 is guide pad; 64 is support; 641 is slide rail; 7 is water injection system; 8 is silicon chip; 9 is lightening hole.
In the utility model embodiment, its improvement is on baffle plate 11 and baffle plate 12, and fixed mount 2 is provided with lightening hole 9, by the quality that lightening hole 9 can alleviate automatic plug-in sheet machine is set, can also reduce manufacturing cost.
Pallet is placed the silicon chip of some, regulates the distance between silicon chip and the power transmission shaft, makes that the O type circle on the power transmission shaft directly contacts with silicon chip.Frictional force between spring scalable O type circle and the silicon chip when power transmission shaft rotates, because of the effect of frictional force, is sent to silicon chip on the follow-up conveyer belt.
Power transmission shaft is generally stainless steel structure, for avoiding silicon chip and stainless steel, selects for use the O type snare of silicon rubber material directly to contact with silicon chip on power transmission shaft.The material of silicon rubber is softer, and smooth surface can not scratch silicon chip when contacting with silicon chip, and coefficient of friction is bigger, is convenient to regulate frictional force between silicon chip and the O type circle.
When the silicon chip quantity in the pallet reduced gradually, the frictional force between silicon chip and the O type circle also reduced gradually, and silicon chip and follow-up transport tape cause transmission to be interrupted not on one side.For guaranteeing to have certain frictional force between silicon chip and the O type circle, silicon chip can be transferred on the transport tape reposefully, can promote pallet gradually by elevating mechanism, remain with chip transmission speed synchronous.
In addition, the setting of water injection system can make the thin water column of ejection constantly wash away the side of silicon chip, helps the separation of silicon chip.
Each embodiment adopts the mode of going forward one by one to describe in this specification, and what each embodiment stressed all is and the difference of other embodiment that identical similar part is mutually referring to getting final product between each embodiment.
To the above-mentioned explanation of the disclosed embodiments, make this area professional and technical personnel can realize or use the utility model.Multiple modification to these embodiment will be conspicuous concerning those skilled in the art, and defined herein General Principle can realize under the situation that does not break away from spirit or scope of the present utility model in other embodiments.Therefore, the utility model will can not be restricted to these embodiment shown in this article, but will meet and principle disclosed herein and features of novelty the wideest corresponding to scope.
Claims (10)
1. an automatic plug-in sheet machine is characterized in that, comprising:
Place the pallet of silicon chip, described pallet comprises discharging opening;
Be arranged on the fixed mount of described discharging opening one side;
Be arranged on the described fixed mount, and the slide block that can move along axis direction, described slide block is provided with installing hole;
The one end is by the power transmission shaft of Bearing Installation in described installing hole, and described power transmission shaft is provided with the anti-slip parts;
Be arranged between described fixed mount and the described slide block, and can compress the spring of described slide block;
Drive the drive unit that described power transmission shaft points to described discharging opening direction rotation;
Be arranged on the described pallet, and the elevating mechanism that can make described pallet rise or descend along axis direction.
2. automatic plug-in sheet machine according to claim 1 is characterized in that described fixed mount comprises upper holder and lower fixed frame, and described upper holder is installed on the described lower fixed frame; Described slide block places between described upper holder and the described lower fixed frame; Described spring is arranged between described slide block and the described upper holder.
3. automatic plug-in sheet machine according to claim 2 is characterized in that described slide block is provided with at least one guide rod; Described upper holder is provided with the through hole that holds described guide rod; Described spring housing is on described guide rod, and the external diameter of described spring is greater than the aperture of described through hole.
4. automatic plug-in sheet machine according to claim 1 and 2, it is characterized in that, described drive unit comprises reducing motor, belt and drive pulley, the shell of described reducing motor is fixed on the described slide block, on the output shaft of described reducing motor and the described drive pulley belt is set, described drive pulley is arranged on the described power transmission shaft.
5. automatic plug-in sheet machine according to claim 1 and 2 is characterized in that, is positioned at place, described discharging opening both sides on the described pallet and is provided with baffle plate.
6. automatic plug-in sheet machine according to claim 5 is characterized in that described baffle plate is provided with lightening hole.
7. automatic plug-in sheet machine according to claim 5, it is characterized in that described elevating mechanism comprises connecting plate, support and linear electric motors, wherein, the shell of described linear electric motors is fixed on the described support, and a side of the output shaft of described linear electric motors and described connecting plate is fixedly linked; The another side of described connecting plate and described baffle plate are fixedly linked.
8. automatic plug-in sheet machine according to claim 7 is characterized in that, also is provided with slide rail on the described support, also is provided with guide pad on the output shaft of described linear electric motors, has the groove that holds described slide rail on the described guide pad.
9. automatic plug-in sheet machine according to claim 1 and 2 is characterized in that, also is provided with water injection system on the described fixed mount, comprising: adjusting rod and nozzle, described adjusting rod are fixed on the described fixed mount, and described nozzle is arranged on the described adjusting rod.
10. automatic plug-in sheet machine according to claim 1 and 2 is characterized in that, described anti-slip parts are a plurality of O type circles.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206763511U CN201975408U (en) | 2010-12-22 | 2010-12-22 | Automatic slice inserting machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206763511U CN201975408U (en) | 2010-12-22 | 2010-12-22 | Automatic slice inserting machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201975408U true CN201975408U (en) | 2011-09-14 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010206763511U Expired - Lifetime CN201975408U (en) | 2010-12-22 | 2010-12-22 | Automatic slice inserting machine |
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| CN (1) | CN201975408U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102544965A (en) * | 2011-12-14 | 2012-07-04 | 苏州工业园区高登威科技有限公司 | Mobile frame of sheet inserting machine for plugging products |
| CN103107576A (en) * | 2013-01-31 | 2013-05-15 | 浙江吉利汽车研究院有限公司杭州分公司 | Electric automobile wireless charging system |
| CN103268907A (en) * | 2013-05-30 | 2013-08-28 | 中节能太阳能科技（镇江）有限公司 | PE process semi-automatic wafer inserting machine |
| CN104342638A (en) * | 2013-08-03 | 2015-02-11 | 沙嫣 | Semiautomatic substrate inserting machine for plasma vapor deposition |
| CN109244032A (en) * | 2018-10-12 | 2019-01-18 | 苏州晋宇达实业股份有限公司 | A kind of silicon wafer rotary table of ion implantation apparatus |
-
2010
- 2010-12-22 CN CN2010206763511U patent/CN201975408U/en not_active Expired - Lifetime
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102544965A (en) * | 2011-12-14 | 2012-07-04 | 苏州工业园区高登威科技有限公司 | Mobile frame of sheet inserting machine for plugging products |
| CN103107576A (en) * | 2013-01-31 | 2013-05-15 | 浙江吉利汽车研究院有限公司杭州分公司 | Electric automobile wireless charging system |
| CN103107576B (en) * | 2013-01-31 | 2015-05-20 | 浙江吉利汽车研究院有限公司杭州分公司 | Electric automobile wireless charging system |
| CN103268907A (en) * | 2013-05-30 | 2013-08-28 | 中节能太阳能科技（镇江）有限公司 | PE process semi-automatic wafer inserting machine |
| CN103268907B (en) * | 2013-05-30 | 2015-10-14 | 中节能太阳能科技（镇江）有限公司 | The semi-automatic plug-in sheet machine of a kind of PE operation |
| CN104342638A (en) * | 2013-08-03 | 2015-02-11 | 沙嫣 | Semiautomatic substrate inserting machine for plasma vapor deposition |
| CN109244032A (en) * | 2018-10-12 | 2019-01-18 | 苏州晋宇达实业股份有限公司 | A kind of silicon wafer rotary table of ion implantation apparatus |
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