CN201959759U - Drainage perturbator and backflow liquid storage device - Google Patents
Drainage perturbator and backflow liquid storage device Download PDFInfo
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- CN201959759U CN201959759U CN2010206899530U CN201020689953U CN201959759U CN 201959759 U CN201959759 U CN 201959759U CN 2010206899530 U CN2010206899530 U CN 2010206899530U CN 201020689953 U CN201020689953 U CN 201020689953U CN 201959759 U CN201959759 U CN 201959759U
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- drainage
- perturbator
- pipe
- liquid
- isocon
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Abstract
The utility model provides a drainage perturbator and a backflow liquid storage device. The drainage perturbator is connected to a backflow pipe and comprises a main flow pipe, a shunt pipe and a drainage perturbation pipe, wherein the inlet of the main flow pipe is connected to the backflow pipe; the inlet of the shunt pipe is connected to the outlet of the main flow pipe and is vertical to the main flow pipe; and the drainage perturbation pipe is connected to the outlet of the shunt pipe. The backflow liquid storage device comprises the drainage perturbator and a fixing device, wherein the drainage perturbator is positioned in a liquid storage container and is connected to the tail end of the backflow pipe and the fixing device is used for fixing the drainage perturbator. The drainage perturbator provided by the utility model utilizes a pump in the backflow liquid storage device to drive the liquid to flow back, to guide liquid and adjust the pressure generated by the liquid, so as to enhance the perturbation of the liquid, achieve a stirring effect and reduce generated sediment and crystal.
Description
Technical field
The utility model relates to a kind of integrated circuit fabrication process device, relates in particular to a kind of drainage perturbator and backflow sump assemblies.
Background technology
In semiconductor technology, chemically mechanical polishing (Chemical Mechanical Polishing, CMP) technology is the technology of mechanical skiving and chemical attack combination, chemical Mechanical Polishing Technique forms bright and clean smooth plane by the chemical attack effect of ultramicronized abrasive action and slurry on polished dielectric surface.
CMP is to use the lapping liquid (Slurry) of abrasive grains such as containing silicon nitride, silica and other chemical liquids to come method to the semiconductor flattening wafer surface, the object that grinds comprises silicon oxide layer, distribution, connector (Plug) etc., between grinding pad and wafer, add lapping liquid (Slurry), to improve grinding efficiency.
Static being placed on of lapping liquid and other chemical liquids placed very easily crystallization in the air, the lapping liquid of crystallization can cause cut (Scratch) to wafer in process of lapping, influence output.When prior art, lapping liquid are positioned in storage liquid container or the backflow sump assemblies, need utilize paddle and self circulatory system to help lapping liquid to increase certain stirring, reduce the formation of crystallization.
Fig. 1 is the structural representation of backflow sump assemblies in the prior art, as shown in Figure 1, described backflow sump assemblies 20 uses equipment 30 pipeline connections with liquid, described backflow sump assemblies 20 and described liquid use the pipeline between the equipment 30 to be provided with the valve member 32 of regulating action, and described backflow sump assemblies 20 comprises: storage liquid container 21; Supply pipe 24, head end are connected in described storage liquid container 21 bottoms, and tail end uses equipment 30 pipelines to communicate with liquid; Pump 25 is arranged on the described supply pipe 24; Return duct 22, head end are connected on the described supply pipe 24, and tail end is positioned at storage liquid container 21 tops; Valve member 23 is arranged on the described return duct 22; Also comprise paddle 10, described paddle 10 needs its rotation work of external power source.Yet, for easily, only be used for provisional storage liquid, the test usefulness the backflow sump assemblies, often can not be equipped with agitating devices such as paddle, because only need offer one road source of the gas for pump wherein, just can keep system works, usually need connect one road power supply again otherwise increase paddle 10 agitating devices such as grade, then increase the difficulty and the cost of provisional test.
Even for provisional test, the liquid of being supplied, for example chemical liquid or lapping liquid also can be easy to generate precipitation and crystallization in default of stirring, thereby increase the generation of defects such as contaminating impurity, scuffing of product greatly.Therefore needing increases liquid disturbance in the backflow sump assemblies under a kind of situation that need not external other energy, and fully agitated liquid reduces the device of precipitation and crystallization.
The utility model content
The technical problems to be solved in the utility model is, a kind of easy drainage perturbator and backflow sump assemblies are provided, can under the situation that does not need external other energy, increase the disturbance of liquid in the backflow sump assemblies, fully agitated liquid reduces the generation of precipitation and crystallization.
For addressing the above problem, the utility model provides a kind of drainage perturbator, comprising: main flow pipe; Isocon comprises at least two outlets, and inlet is connected in the outlet of described main flow pipe; At least two drainage disturbance pipes are connected to the outlet of described isocon.
Further, the perturbation direction of described drainage disturbance pipe forms same hour hands rotation direction at grade.
Optionally, the bearing of trend of described drainage disturbance pipe and described main flow pipe is 30 °～90 ° angles.
Further, the inlet of described isocon is arranged at the middle part.
Further, described isocon and described main flow pipe are perpendicular.
Further, described isocon is straight tube two outlet isocon or isogonism three outlet isocons.
Further, described drainage perturbator is a resistant material.
Further, the utility model also provides a kind of backflow sump assemblies, uses the equipment pipeline to communicate with liquid, comprising: supply pipe, head end are connected in described storage liquid container bottom, and tail end uses the equipment pipeline to communicate with liquid; Pump is arranged on the described supply pipe; Return duct, head end are connected on the described supply pipe, and tail end is positioned at storage liquid container top; Valve member is arranged on the described return duct; Comprise that also described drainage perturbator is arranged in described storage liquid container, is connected in described return duct tail end; Fixture, fixing described drainage perturbator.
In sum, pump drives the backflow of liquid in the drainage perturbator utilization backflow sump assemblies described in the utility model, and liquid is guided, the pressure that described liquid produces is regulated, thereby increased the disturbance of liquid, reached the effect of stirring, reduced the generation of precipitation and crystallization.
Description of drawings
Fig. 1 is the structural representation of backflow sump assemblies in the prior art.
Fig. 2 is the structural representation of backflow sump assemblies described in the utility model one embodiment.
Fig. 3～Fig. 6 be this practical described in the structural representation of embodiment of drainage perturbator.
The specific embodiment
For making content of the present utility model clear more understandable,, content of the present utility model is described further below in conjunction with Figure of description.Certainly the utility model is not limited to this specific embodiment, and the known general replacement of those skilled in the art also is encompassed in the protection domain of the present utility model.
Secondly, the utility model utilizes schematic diagram to carry out detailed statement, and when the utility model example was described in detail in detail, for convenience of explanation, schematic diagram did not amplify according to general ratio is local, should be with this as to qualification of the present utility model.
Fig. 2 is the structural representation of backflow sump assemblies described in the utility model one embodiment.As shown in Figure 2, backflow sump assemblies 200 described in the utility model one embodiment uses equipment 300 pipelines to communicate with liquid, and described backflow sump assemblies 200 and described liquid use between the equipment 300 and is provided with control valve 302, and described backflow sump assemblies 200 comprises:
Storage liquid container 201 is used for contain fluid, in order to extracting, measuring;
Supply pipe 204, head end are connected in described storage liquid container 201 bottoms, and tail end uses equipment 300 pipelines to communicate with liquid;
Pump 205 is arranged on the described supply pipe 204, and described pump 205 promotes described liquid and flows back into storage liquid container 201 from supply pipe 204 through return duct 202, forms the liquid circulation;
Return duct 202, head end are connected on the described supply pipe 204, and tail end is positioned at storage liquid container 201 tops;
Valve member 203 is arranged on the described return duct 202, in order to regulate flow velocity, the flow of the liquid that flows into storage liquid container 201.
Wherein preferably, described backflow sump assemblies also comprises, drainage perturbator 100 is arranged in described storage liquid container 201, be connected in described return duct 202 tail ends, as shown in Figure 2, described drainage perturbator is introduced withdrawing fluid, and shunting is flowed out, trickle forms a certain conterclockwise rotation hydraulic pressure in described storage liquid container 201, thereby the liquid that drives in the storage liquid container 201 rotates along clockwise, thereby reaches the abundant stirring of liquid, prevents to produce precipitation and crystallization;
Fixture 400, fixing described drainage perturbator 100, the described withdrawing fluids of described drainage perturbator 100 shunting guiding flow when forming hydraulic pressure, and described hydraulic pressure gives described drainage perturbator 100 opposite power, drainage perturbator 100 is produced rock, influence the perturbation direction of liquid.Described fixture 400 is set,, thereby produces stable perturbation direction with fixing described drainage perturbator 100.
Fig. 3～Fig. 6 be this practical described in the structural representation of embodiment of drainage perturbator.In conjunction with Fig. 3～shown in Figure 6, the perturbator of drainage described in the utility model 100, can be connected in the return duct 202 of above-mentioned backflow sump assemblies 200, also can be connected on the pipeline of other devices and be used for the drainage disturbance, described drainage perturbator 100 comprises: main flow pipe 101, and inlet is connected with described return duct 202; Isocon 103 comprises at least two outlets, and inlet is connected in the outlet of described main flow pipe 101; At least two drainage disturbance pipes 105 are connected to the outlet of described isocon 103.
Further, the inlet of described isocon 103 is arranged at the middle part, and inlet is arranged at the middle part and helps the gravity equilibrium mutually that liquid forms in isocon, thereby described isocon 103 is stressed even, increases the service life.
Further, described isocon 103 and described main flow pipe 101 are perpendicular, and in use, liquid vertically stays through described main flow pipe 101, change horizontal direction into after entering isocon 103, then the liquid of Liu Chuing can form the disturbance of horizontal direction to the liquid in the described sump assemblies.
Further, described isocon 103 is straight tube two outlet isocon or isogonism three outlet isocons.
Further, described drainage perturbator 100 is a resistant material, can be vinyon etc., and material source is extensive, is easy to make moulding, and is with low cost.
Further, the perturbation direction of described drainage disturbance pipe 105 forms same hour hands rotation direction at grade.Described drainage disturbance pipe 105 is 30 °～90 ° angles with the bearing of trend of described main flow pipe 101.It is vertical to be that the tail end of described drainage disturbance pipe 105 is parallel to the bearing of trend of described main flow pipe 101, and pressure horizontal plane storage liquid container 201 that described liquid flows out from drainage tube 105 forms the disturbance of same hour hands, for example clockwise or counterclockwise; Or the bearing of trend of described drainage disturbance pipe 105 and described main flow pipe 101 forms greater than 30 ° of angles less than 90 °, the direction that liquid flows out from drainage tube 105 is what tilt, the pressure of liquid on horizontal plane that flows out forms the rotation direction of same hour hands, and the pressure on vertical plane forms disturbance to storage liquid container 201 above and belows.
Quantity, direction and the angle of the drainage disturbance pipe 105 of wherein said drainage perturbator 100 can have multiple choices, particularly, are example with following several embodiment:
[specific embodiment one]
As shown in Figure 3, described isocon 103 is the two outlets of straight tube, and inlet is arranged at the middle part of described isocon 103.103 outlets of described isocon all are connected with drainage disturbance pipe 105, and described drainage disturbance pipe 105 outlets are towards on the contrary.Described drainage disturbance pipe 105 is vertical with the bearing of trend of described main flow pipe 101.Liquid flows out from drainage disturbance pipe 105 after described isocon 103 shuntings, and the hydraulic pressure of liquid flow forms the disturbance as a certain hour hands (clockwise is not defined) among the figure on horizontal plane.
[specific embodiment two]
As shown in Figure 4, described isocon 103 is the two outlets of straight tube, and inlet is arranged at the middle part of described isocon 103.Described isocon 103 outlets all are connected with drainage disturbance pipe 105.Described drainage disturbance pipe 105 is 60 ° of angles with the bearing of trend of described main flow pipe 101, direction all tilted up when liquid flowed out through described drainage disturbance pipe 105, liquid is after described isocon 103 shuntings, drainage disturbance pipe 105 flows out, the hydraulic pressure of liquid flow form in the horizontal direction as among the figure in the disturbance of a certain hour hands (clockwise is not defined).And flow out direction and the liquid level above the storage liquid container 201 has also been realized perturbation action in the vertical direction.
[specific embodiment three]
As shown in Figure 5, described isocon 103 is the two outlets of straight tube, and inlet is arranged at the middle part of described isocon 103.Described isocon 103 outlets all are connected with drainage disturbance pipe 105.Described drainage disturbance pipe 105 is 45 ° of angles with the bearing of trend of described main flow pipe 101, and described drainage disturbance pipe 105 Way outs respectively up, down.Liquid direction when described drainage disturbance pipe 105 flows out tilts up respectively and tilts down in the present embodiment, then liquid is after described isocon 103 shuntings, drainage disturbance pipe 105 flows out, the hydraulic pressure of liquid flow form in the horizontal direction as among the figure in the disturbance of a certain hour hands (clockwise is not defined).And flow out direction and the liquid level of storage liquid container 201 above and belows has been realized perturbation action simultaneously in the vertical direction.
[specific embodiment four]
As shown in Figure 6, described isocon 103 is three outlets, and inlet is arranged at the middle part of described isocon 103.103 outlets of described isocon all are connected with drainage disturbance pipe, and described drainage disturbance pipe 105 outlets are oriented same clockwise on the horizontal plane, and described drainage disturbance pipe 105 is vertical with the bearing of trend of described main flow pipe 101.Liquid flows out from three drainage disturbance pipes 105 after described isocon 103 shuntings in the present embodiment, and the pressure that liquid flows out described drainage disturbance pipe is bigger, more even, and the disturbance liquid level drives liquid level and rotates better.
In addition, quantity, direction and the angle of the drainage disturbance pipe 105 of described drainage perturbator 100 can also have more kinds of selections, select according to the capacity and the characteristic of liquid, produce different drainage effects, all in thought range of the present utility model.
When liquid uses equipment 300 to need the liquid supply, open control valve 302, described backflow sump assemblies 200 uses equipment 300 supply liquid to liquid, when liquid uses equipment 300 not need the liquid supply, close control valve 302, in backflow sump assemblies 200 inner loop, described drainage perturbator 100 utilizes the pressure of liquid flow to stir the liquid of storing in the liquid container 201 down to liquid, thereby prevents liquid crystalization under the effect of pump 205.
Pump drives the backflow of liquid in the drainage perturbator utilization backflow sump assemblies described in the utility model, liquid is guided, the pressure that described liquid produces is regulated, thereby increased the disturbance of liquid, reach the effect of stirring, reduce the generation of precipitation and crystallization.
Though the utility model discloses as above with preferred embodiment; right its is not in order to limit the utility model; have in the technical field under any and know the knowledgeable usually; in not breaking away from spirit and scope of the present utility model; when doing a little change and retouching, therefore protection domain of the present utility model is as the criterion when looking claims person of defining.
Claims (8)
1. a drainage perturbator is characterized in that, comprising:
Main flow pipe;
Isocon comprises at least two outlets, and inlet is connected in the outlet of described main flow pipe;
At least two drainage disturbance pipes are connected to the outlet of described isocon.
2. drainage perturbator as claimed in claim 1 is characterized in that, the perturbation direction of described drainage disturbance pipe forms same hour hands rotation direction at grade.
3. drainage perturbator as claimed in claim 2 is characterized in that, the bearing of trend of described drainage disturbance pipe and described main flow pipe is 30 °～90 ° angles.
4. drainage perturbator as claimed in claim 1 is characterized in that, the inlet of described isocon is arranged at the middle part.
5. drainage perturbator as claimed in claim 1 is characterized in that, described isocon and described main flow pipe are perpendicular.
6. drainage perturbator as claimed in claim 1 is characterized in that, described isocon is straight tube two outlet isocon or isogonism three outlet isocons.
7. drainage perturbator as claimed in claim 1 is characterized in that, described drainage perturbator is a resistant material.
8. a backflow sump assemblies uses the equipment pipeline to communicate with liquid, comprising:
The storage liquid container;
Supply pipe, head end are connected in described storage liquid container bottom, and tail end uses the equipment pipeline to communicate with liquid;
Pump is arranged on the described supply pipe;
Return duct, head end are connected on the described supply pipe, and tail end is positioned at storage liquid container top;
Valve member is arranged on the described return duct;
It is characterized in that, also comprise,
Drainage perturbator as claimed in claim 1 is arranged in described storage liquid container, is connected in described return duct tail end;
Fixture, fixing described drainage perturbator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206899530U CN201959759U (en) | 2010-12-30 | 2010-12-30 | Drainage perturbator and backflow liquid storage device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206899530U CN201959759U (en) | 2010-12-30 | 2010-12-30 | Drainage perturbator and backflow liquid storage device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201959759U true CN201959759U (en) | 2011-09-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010206899530U Expired - Fee Related CN201959759U (en) | 2010-12-30 | 2010-12-30 | Drainage perturbator and backflow liquid storage device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201959759U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106255322A (en) * | 2016-08-16 | 2016-12-21 | 生益电子股份有限公司 | A kind of device for storing liquid |
-
2010
- 2010-12-30 CN CN2010206899530U patent/CN201959759U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106255322A (en) * | 2016-08-16 | 2016-12-21 | 生益电子股份有限公司 | A kind of device for storing liquid |
| CN106255322B (en) * | 2016-08-16 | 2019-03-05 | 生益电子股份有限公司 | A kind of device for storing liquid |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION Effective date: 20130326 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20130326 Address after: 100176 No. 18, Wenchang Avenue, Beijing economic and Technological Development Zone Patentee after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
|
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110907 Termination date: 20131230 |