CN201940738U - Welding device for silicon pressure sensitive elements and metal parts - Google Patents
Welding device for silicon pressure sensitive elements and metal parts Download PDFInfo
- Publication number
- CN201940738U CN201940738U CN2010206844203U CN201020684420U CN201940738U CN 201940738 U CN201940738 U CN 201940738U CN 2010206844203 U CN2010206844203 U CN 2010206844203U CN 201020684420 U CN201020684420 U CN 201020684420U CN 201940738 U CN201940738 U CN 201940738U
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- bottom electrode
- electrode base
- metal parts
- silicon pressure
- top electrode
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Abstract
The utility model relates to a welding device for silicon pressure sensitive elements and metal parts, which comprises an upper electrode device and a lower electrode device. The upper electrode device and the lower electrode device are fixed to the upper end and the lower end of a precision linear shaft guide column respectively, the upper electrode device comprises an upper electrode, an upper electrode base and a connecting plate, wherein the upper electrode is mounted on the upper electrode base connected with the connecting plate which is fixed to the upper electrode through a first screw. The lower electrode device comprises a lower electrode, a lower electrode base and a pedestal, wherein the lower electrode is mounted on the lower electrode seat which is fixed to the pedestal through a second screw, and the pedestal is fixed to the bottom of the lower electrode through a positioning pin and a third screw. The axes of the upper electrode, the lower electrode and the positioning pin are on the same line. By means of the welding device, precision welding of the silicon pressure sensitive elements and metal parts can be realized, and nonuniformity in welding, influence of welding stress and micro leakage can be eliminated.
Description
Technical field
The utility model relates to the manufacturing field of silicon pressure sensor, particularly a kind of welder that is used for Silicon pressure sensing element and metal parts.
Background technology
Silicon pressure/differential pressure pick-up is widely used in various field, as medicine equipment, Industry Control, pressure control, Aero-Space etc.Development along with microelectromechanical systems (MEMS:Micro Electro Mechanical systems) technology, silicon pressure sensor is demonstrating apparent in view advantage aspect the sensor performance and on the development potentiality, obtain the approval and the use of increasing company.Silicon pressure sensing element in the existing silicon pressure sensor all is directly to be welded on the metal parts usually, and the mode that employing is directly welded, not only can make between Silicon pressure sensing element and the metal parts and produce welding stress, make the metal parts distortion, have a strong impact on sensor accuracy, and exist welding inhomogeneous, weld shortcomings such as little leakage.
Therefore, how to make the accurate welding of Silicon pressure sensing element and metal parts, avoid in the welding manufacture process because of produce welding stress, welding is inhomogeneous causes welding deformation and weld little leakage, is present association area personnel's problem demanding prompt solution.
Summary of the invention
The purpose of this utility model is at the deficiencies in the prior art, a kind of welder that is used for Silicon pressure sensing element and metal parts is provided, it has realized the precision welding of Silicon pressure sensing element and metal parts, eliminates influence and the little leakage to the Silicon pressure sensing element of welding inhomogeneities, welding stress.
The technical solution of the utility model is: a kind of welder that is used for Silicon pressure sensing element and metal parts, comprise the top electrode device, lower electrode device, top electrode device and lower electrode device are separately fixed at the upper and lower end of accurate linear axis lead, described top electrode device comprises top electrode, top electrode base and connecting plate, described top electrode is installed on the top electrode base, and described top electrode base is connected with connecting plate, and described connecting plate and top electrode are fixed by first screw; Described lower electrode device comprises bottom electrode, bottom electrode base and pedestal, described bottom electrode is installed on the bottom electrode base, bottom electrode base and pedestal are fixed by second screw, described pedestal is fixed by the bottom of alignment pin and the 3rd screw and bottom electrode, and the axis of described top electrode, bottom electrode, alignment pin is located on the same line.
The top of described bottom electrode is equipped with positioning sleeve.
The installation place of the bottom of described bottom electrode and bottom electrode base is provided with first insulation sleeve.
Between described bottom electrode base and the pedestal insulation board is installed.
Be provided with felt pad between second screw and the bottom electrode base.
Described bottom electrode base is provided with through hole, and second insulation sleeve is installed in the through hole of bottom electrode base.
The both sides of described bottom electrode base are provided with projection, and projection is provided with installing hole.
The top electrode base plate is slidingly fitted in the upper end of accurate linear axis lead by bearing holder (housing, cover), and the bottom electrode base plate is fixed on the lower end of accurate linear axis lead by the 5th screw.
The bottom of described bearing holder (housing, cover) is provided with outer rim, and the upper surface of described outer rim contacts with the lower surface of top electrode base.
Adopt technique scheme: the utility model comprises the top electrode device, lower electrode device, top electrode device and lower electrode device are separately fixed at the upper and lower end of accurate linear axis lead, wherein the top electrode device comprises top electrode, top electrode base and connecting plate, top electrode is installed on the top electrode base, the top electrode base is connected with connecting plate, and described connecting plate and top electrode are fixed by first screw; Lower electrode device comprises bottom electrode, bottom electrode base and pedestal, bottom electrode is installed on the bottom electrode base, bottom electrode base and pedestal are fixed by second screw, pedestal is fixed by the bottom of alignment pin and the 3rd screw and bottom electrode, the axis of top electrode, bottom electrode, alignment pin is located on the same line, thereby finishes this Unit Installation.During use, the power supply of this device with medium frequency inverter dc point welding machine (or resistance welder) is connected, just can realizes the precision welding of Silicon pressure sensing unit and metal parts.Owing to adopt said structure, Silicon pressure sensing unit and metal parts can not produce welding stress in welding process, and welding evenly, greatly improved the precision of sensor, eliminate the influence that the Silicon pressure sensing element causes the Silicon pressure sensing element because of welding inhomogeneities, welding stress in manufacture process, eliminated the little leakage problem of welding simultaneously.In addition, the utility model makes isolated insulation between bottom electrode and bottom electrode base, the pedestal by the setting of first insulation sleeve, insulation board, felt pad and second insulation sleeve, has guaranteed the security in use of this device.
Description of drawings
Fig. 1 is a structural representation of the present utility model;
Fig. 2 is the structural representation of top electrode base of the present utility model;
Fig. 3 is the structural representation of bottom electrode base of the present utility model.
In the accompanying drawing, 1 is the top electrode device, and 2 is lower electrode device, 3 is accurate linear axis lead, and 4 is top electrode, and 5 is the top electrode base, 5a is a connecting hole, and 6 is connecting plate, and 7 is first screw, 8 is second screw, and 9 is bottom electrode, and 10 is the bottom electrode base, 10a is a through hole, and 10b is a projection, and 10c is an installing hole, 11 is pedestal, and 12 is the 3rd screw, and 13 is alignment pin, 14 is the 4th screw, and 15 is the 5th screw, and 16 is bearing holder (housing, cover), 16a is an outer rim, 17 is positioning sleeve, and 18 is first insulation sleeve, and 19 is insulation board, 20 is felt pad, and 21 is second insulation sleeve.
The specific embodiment
Referring to Fig. 1 to Fig. 3, a kind of welder that is used for Silicon pressure sensing element and metal parts comprises top electrode device 1, lower electrode device 2, and top electrode device 1 and lower electrode device 2 are separately fixed at the upper and lower end of accurate linear axis lead 3.Top electrode device 1 comprises top electrode 4, top electrode base 5 and connecting plate 6, top electrode 4 is installed on the top electrode base 5, the both sides of top electrode base 5 are provided with and are used for being fixedly coupled hole 5a with accurate linear axis lead 3, top electrode base plate 5 is slidingly fitted in the upper end of accurate linear axis lead 3 by bearing holder (housing, cover) 16, the bottom of bearing holder (housing, cover) 16 is provided with outer rim 16a, the upper surface of outer rim 16a contacts with the lower surface of top electrode base 5, top electrode base 5 can be moved up and down with bearing holder (housing, cover) 16, ensured the mobile accuracy and the positioning accuracy of top electrode 4.Top electrode base 5 is fixedlyed connected by the 4th screw 14 with connecting plate 6, and connecting plate 6 is fixing by first screw 7 with top electrode 4, makes top electrode 4 firm being installed on the top electrode base 5, produces in electrodes base 5 axially and moves radially to prevent top electrode 4.Lower electrode device 2 comprises bottom electrode 9, bottom electrode base 10 and pedestal 11, bottom electrode 9 is installed on the bottom electrode base 10, the installation place of the bottom of bottom electrode 9 and bottom electrode base 10 is provided with first insulation sleeve 18, and making can isolated insulation between bottom electrode 9 and the bottom electrode base 10.The top of bottom electrode 9 is equipped with positioning sleeve 17, is used to proofread and correct the depth of parallelism, axiality between top electrode 4 and the bottom electrode 9, and reaches the precision of regulation.The both sides of bottom electrode base 10 are provided with protruding 10b, and protruding 10b is provided with installing hole 10c, and bottom electrode base plate 10 is fixed on the lower end of accurate linear axis lead by the 5th screw 15.The bottom electrode base is provided with through hole 10a, second insulation sleeve 21 is installed in the through hole 10a, bottom electrode base 10 is fixing by second screw 8 with pedestal 11, be provided with felt pad 20 between second screw 8 and the bottom electrode base 10, between bottom electrode base 10 and the pedestal 11 insulation board 19 is installed, making between bottom electrode base 10, pedestal 11, second screw 8 can isolated insulation, has guaranteed the security in use of this device.Pedestal 11 is fixed with the bottom of bottom electrode 9 by alignment pin 13 and the 3rd screw 12, the axis of top electrode 4, bottom electrode 9, alignment pin 13 is located on the same line, guaranteed that Silicon pressure sensing unit and metal parts can not produce welding stress in welding process, and welding evenly, greatly improved the precision of sensor, eliminate the influence that the Silicon pressure sensing element causes the Silicon pressure sensing element because of welding inhomogeneities, welding stress in manufacture process, eliminated the little leakage problem of welding simultaneously.
During use, the power supply of this device with medium frequency inverter dc point welding machine (or resistance welder) is connected, just can realizes the precision welding of Silicon pressure sensing unit and metal parts.
Claims (9)
1. welder that is used for Silicon pressure sensing element and metal parts, it is characterized in that: comprise top electrode device (1), lower electrode device (2), top electrode device (1) and lower electrode device (2) be separately fixed at accurate linear axis lead (3) on, the lower end, described top electrode device (1) comprises top electrode (4), top electrode base (5) and connecting plate (6), described top electrode (4) is installed on the top electrode base (5), described top electrode base (5) is connected with connecting plate (6), and described connecting plate (6) is fixing by first screw (7) with top electrode (4); Described lower electrode device (2) comprises bottom electrode (9), bottom electrode base (10) and pedestal (11), described bottom electrode (9) is installed on the bottom electrode base (10), bottom electrode base (10) is fixing by second screw (8) with pedestal (11), described pedestal (11) is fixed with the bottom of bottom electrode (9) by alignment pin (13) and the 3rd screw (12), and the axis of described top electrode (4), bottom electrode (9), alignment pin (13) is located on the same line.
2. the welder that is used for Silicon pressure sensing element and metal parts according to claim 1 is characterized in that: the top of described bottom electrode (9) is equipped with positioning sleeve (17).
3. the welder that is used for Silicon pressure sensing element and metal parts according to claim 1 is characterized in that: the installation place of the bottom of described bottom electrode (9) and bottom electrode base (10) is provided with first insulation sleeve (18).
4. the welder that is used for Silicon pressure sensing element and metal parts according to claim 1 is characterized in that: between described bottom electrode base (10) and the pedestal (11) insulation board (19) is installed.
5. the welder that is used for Silicon pressure sensing element and metal parts according to claim 1 is characterized in that: be provided with felt pad (20) between second screw (8) and the bottom electrode base (10).
6. the welder that is used for Silicon pressure sensing element and metal parts according to claim 1 is characterized in that: described bottom electrode base is provided with through hole (10a), and second insulation sleeve (21) is installed in the through hole of bottom electrode base (10a).
7. the welder that is used for Silicon pressure sensing element and metal parts according to claim 1 is characterized in that: the both sides of described bottom electrode base (10) are provided with projection (10b), and projection (10b) is provided with installing hole (10c).
8. the welder that is used for Silicon pressure sensing element and metal parts according to claim 1, it is characterized in that: top electrode base (5) is slidingly fitted in the upper end of accurate linear axis lead (3) by bearing holder (housing, cover) (16), and bottom electrode base (10) is fixed on the lower end of accurate linear axis lead by the 5th screw (15).
9. the welder that is used for Silicon pressure sensing element and metal parts according to claim 8, it is characterized in that: the bottom of described bearing holder (housing, cover) (16) is provided with outer rim (16a), and the upper surface of described outer rim (16a) contacts with the lower surface of top electrode base (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206844203U CN201940738U (en) | 2010-12-28 | 2010-12-28 | Welding device for silicon pressure sensitive elements and metal parts |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206844203U CN201940738U (en) | 2010-12-28 | 2010-12-28 | Welding device for silicon pressure sensitive elements and metal parts |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201940738U true CN201940738U (en) | 2011-08-24 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010206844203U Expired - Lifetime CN201940738U (en) | 2010-12-28 | 2010-12-28 | Welding device for silicon pressure sensitive elements and metal parts |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201940738U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109794709A (en) * | 2018-12-26 | 2019-05-24 | 昂纳信息技术（深圳）有限公司 | A kind of welder of photoelectric device |
| CN112025028A (en) * | 2020-09-25 | 2020-12-04 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | Tool and method for correcting parallelism and coaxiality of upper and lower working tables of cap sealing machine |
-
2010
- 2010-12-28 CN CN2010206844203U patent/CN201940738U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109794709A (en) * | 2018-12-26 | 2019-05-24 | 昂纳信息技术（深圳）有限公司 | A kind of welder of photoelectric device |
| CN112025028A (en) * | 2020-09-25 | 2020-12-04 | 西北电子装备技术研究所(中国电子科技集团公司第二研究所) | Tool and method for correcting parallelism and coaxiality of upper and lower working tables of cap sealing machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20110824 |