CN201923846U - Integral heat exchange type polycrystalline silicon hydrogenation furnace - Google Patents
Integral heat exchange type polycrystalline silicon hydrogenation furnace Download PDFInfo
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- CN201923846U CN201923846U CN2010206880981U CN201020688098U CN201923846U CN 201923846 U CN201923846 U CN 201923846U CN 2010206880981 U CN2010206880981 U CN 2010206880981U CN 201020688098 U CN201020688098 U CN 201020688098U CN 201923846 U CN201923846 U CN 201923846U
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Abstract
The utility model discloses an integral heat exchange type polycrystalline silicon hydrogenation furnace, which comprises a reactor and a heat exchanger for heating mixture of silicon tetrachloride and hydrogen by the aid of reacted gas of the reactor, wherein the heat exchanger is positioned on the lower portion of the reactor and fixedly connected with the reactor. The hydrogenation furnace is integrated with the heat exchanger, the hydrogen and the silicon tetrachloride are preheated by the high-temperature gas after reaction, heat is used sufficiently, consumption of energy needed for heating the hydrogen and the silicon tetrachloride is decreased, production cost is reduced, the high-temperature gas out of a reaction chamber does not need to be cooled by cooling water, a cooling water device can be omitted by the aid of other modification structures, and complexity of the device is reduced. Simultaneously, the cooling and heat exchanging area of the high-temperature tail gas is increased, and the treatment capacity of the silicon tetrachloride can be improved greatly.
Description
Technical field
The utility model relates to a kind of conversion unit that is used for field of polysilicon production by silicon tetrachloride conversion trichlorosilane, and particularly heat exchange is arranged comparatively compact polysilicon hydrogenation furnace with reaction.
Background technology
In polysilicon production process, it is comparatively general processing method that the hot hydrogenation of silicon tetrachloride is converted into trichlorosilane.
In the prior art, the hot hydrogenation of silicon tetrachloride is converted into trichlorosilane and generally adopts hydrogenation furnace to react to finish.Hydrogenation furnace generally comprises body of heater, heat insulation tube, electrode, and heating unit and offgas duct constitute.For fear of hydrogenation furnace internal heat infringement body of heater, be provided with cooling water cavity in stove tube, end socket, chassis, offgas duct.The electrode of heating unit is fixed in the chassis.Reaction back gas enters by tail pipe and enters the hypomere operation after interchanger cools off.
Because hydrogenation furnace and interchanger split are provided with, reaction back high-temperature gas needs just can enter interchanger by water quench, water coolant is taken away a large amount of heats, add the water coolant on upper cover and the cylindrical shell, silicon tetrachloride and hydrogen reaction process in these process of cooling and the hydrogenation furnace contradict, thereby make the more relatively heat energy of hydrogenation furnace reaction consumes, cause the hydrogenation furnace energy consumption higher; Cooling water system also needs supporting, has increased the complexity of device; Simultaneously, split type layout can increase floor space, increases construction cost.
Therefore, need a kind of polysilicon hydrogenation furnace, can energy efficient, simplification device reduces to build floor space, saves production cost and manufacturing cost.
The utility model content
In view of this, the purpose of this utility model provides a kind of one heat exchange type polysilicon hydrogenation furnace, can energy efficient, improve treatment capacity, and reduce to build floor space, save production cost and manufacturing cost.
One heat exchange type polysilicon hydrogenation furnace of the present utility model, the interchanger of gas heating silicon tetrachloride and hydrogen mixture after comprising reactor and passing through the reaction of reactor, described interchanger is positioned at reactor lower part and fixedlys connected with it.
Further, described reactor comprises reactor shell and insulation plate, and described insulation plate internal space is a reaction chamber, forms vertical interlayer between insulation plate outside surface and the reactor shell internal surface; Perhaps, insulation plate itself forms vertical interlayer; Mixed gas entered the mouth before described vertical interlayer bottom was provided with reaction, and vertical interlayer upper opening is communicated with reaction chamber;
Further, described interchanger is vertical tubular heat exchange, the tube side of described vertical tubular heat exchange upwards is communicated in reaction chamber, reaction back pneumatic outlet is set downwards, the shell side bottom of described vertical tubular heat exchange is provided with hydrogen inlet and silicon tetrachloride import, and top is provided with heated mixing raw material gas outlet;
Further, the mode of communicating of the tube side of described vertical tubular heat exchange and reaction chamber is that tubulation directly is communicated in reaction chamber;
Further, between described reaction chamber and the vertical tubular heat exchange upper tubesheet thermal baffle is set, gas production well after thermal baffle and the tubulation of vertical tubular heat exchange is relatively set with reaction chamber is communicated with the reaction;
Further, described reaction chamber top is provided with cover plate, is distributed with the air inlet port that is communicated in reaction chamber and vertical interlayer on the cover plate;
Further, the tubulation of described vertical tubular heat exchange is the refractory metal pipe, and the refractory metal pipe is provided with high temperature resistance protective layer in the pipe of upper tubular section at least;
Further, the thermal source of described reaction chamber is an an electric heating element, and the electrode of described an electric heating element is positioned at reaction chamber top and is fixedly set in reactor shell;
Further, described reactor shell is provided with upper cover, and the electrode of described an electric heating element is fixedly set in upper cover, and upper cover is provided for feeding second hydrogen inlet of cold hydrogen;
Further, described reactor shell is fixedlyed connected removably with heat exchanger shell or is fixedly connected by welding.
The beneficial effects of the utility model are: one heat exchange type polysilicon hydrogenation furnace of the present utility model, hydrogenation furnace and interchanger are wholely set, and by pre-hot hydrogen of reacted high-temperature gas and silicon tetrachloride, heat is fully used, minimizing adds hot hydrogen and the required energy consumption of silicon tetrachloride, reduces production costs; The high-temperature gas that goes out reaction chamber need not pass through water quench, adopt interchanger to increase high-temperature tail gas cooling heat transferring area, can increase substantially the treatment capacity of silicon tetrachloride, be equipped with other reconstruction structure again, can save chilled water unit, reduce the complexity of device, simultaneously, simplified construction, thus manufacturing cost and construction cost reduced.
Description of drawings
Below in conjunction with drawings and Examples the utility model is further described.
Accompanying drawing is the utility model structural representation.
Embodiment
Accompanying drawing is the utility model structural representation, as shown in the figure: the one heat exchange type polysilicon hydrogenation furnace of present embodiment, the interchanger 17 of gas heating silicon tetrachloride and hydrogen mixture after comprising reactor 13 and passing through the reaction of reactor 13, described interchanger 17 is positioned at reactor 13 bottoms and fixedlys connected with it.
In the present embodiment, described reactor 13 comprises reactor shell 5 and insulation plate 6, and described insulation plate 6 internal spaces are reaction chamber 25, forms vertical interlayer 11 between insulation plate 6 outside surfaces and reactor shell 5 internal surfaces; Mixed gas entered the mouth 19 before described vertical interlayer 11 bottoms were provided with reaction, and vertical interlayer 11 upper openings are communicated with reaction chamber 25; Silicon tetrachloride and hydrogen are further heated by reaction back gas through interchanger 17 heating backs and through other interchanger, enter vertical interlayer 11 from reacting preceding mixed gas inlet 19, because gas has relatively poor thermal conductivity, and in vertical interlayer 11, flow fast, prevent that effectively the heat in the insulation plate 6 from passing to reactor shell 5 and can take away heat, is beneficial to guard reactor housing 5; Simultaneously, mixed gas further absorbs the heat of insulation plate 6 walls and improves temperature before the reaction in vertical interlayer 11, relatively prior art, improve and enter reaction chamber 25 gas temperatures, save energy consumption of reaction, be beneficial to the rapid reaction after gas mixture enters reaction chamber, enhance productivity.
Certainly, also can be that insulation plate 6 itself forms vertical interlayer; Also can serve the same role, still can not take away the heat of shell inner surface fast.
In the present embodiment, described interchanger 17 is vertical tubular heat exchange, the tube side of described vertical tubular heat exchange upwards is communicated in reaction chamber 25, reaction back pneumatic outlet 14 is set downwards, the shell side bottom of described vertical tubular heat exchange is provided with hydrogen inlet 16 and silicon tetrachloride import 12, and top is provided with heated mixing raw material gas outlet 10; Be beneficial to and fully carry out heat exchange, guarantee the heat exchange effect; Simultaneously, make the syndeton of reactor 13 and interchanger 17 comparatively compact, be easy to install; Hydrogenation furnace compared to existing technology, the utility model be owing to adopt the heat transfer tube of a greater number, significantly increases the high temperature refrigerative heat interchanging area of giving vent to anger, and can improve the silicon tetrachloride treatment capacity greatly, increases the device processing power, enhances productivity.
In the present embodiment, the mode of communicating of the tube side of described vertical tubular heat exchange and reaction chamber 25 is that tubulation 18 directly is communicated in reaction chamber 25; Save intermediate connection structure, be beneficial to and make full use of heat.
In the present embodiment, between described reaction chamber 25 and the vertical tubular heat exchange upper tubesheet 9 thermal baffle 7 is set, thermal baffle 7 and gas production well 24 after the tubulation 18 of vertical tubular heat exchange is relatively set with the reaction that is communicated with reaction chamber 25; Effectively isolate interchanger 17 and reaction chamber 25, guarantee the work-ing life of heat exchanger tube sheet, and prevent that heat scatters and disappears; As shown in the figure, thermal baffle 7 is positioned at upper tubesheet 9 tops of interchanger 17, forms effective heat insulation structural, is beneficial to protection interchanger 17 parts and is not subjected to high temperature.
In the present embodiment, described reaction chamber 25 tops are provided with cover plate 21, are distributed with the air inlet port 3 that is communicated in reaction chamber and vertical interlayer on the cover plate 21; Air inlet port 3 is a plurality of structures that are distributed in cover plate 21, is beneficial to make gas evenly enter reaction chamber, be beneficial to and make full use of heat, and reaction evenly.
In the present embodiment, the tubulation 18 of described vertical tubular heat exchange is the refractory metal pipe, and the refractory metal pipe is provided with high temperature resistance protective layer in the pipe of upper tubular section at least; Present embodiment avoids vertical tubular heat exchange upper tubesheet 9 to contact high-temperature gas with tubulation 18, and material selects superalloy or high temperature steel, and top is thermal baffle, in conjunction with high temperature resistance protective layer, can effectively reduce tube sheet and heat transfer tube surface temperature.Compare with nonmetal high temperature pipe, metal tube has the pipe phenomenon of rupture that opposing causes when uneven in temperature, prolongs the work-ing life of interchanger; The high temperature resistance protective layer material can be graphite or carbon/carbon compound material etc.
In the present embodiment, the thermal source of described reaction chamber 25 is an an electric heating element 20, and the electrode 2 of described an electric heating element 20 is positioned at reaction chamber 25 tops and is fixedly set in reactor shell; Guarantee that effectively electrode and insulating sealer are not encroached on by high temperature, prolong its work-ing life.
In the present embodiment, described reactor shell 5 is provided with upper cover 4, and the electrode 2 of described an electric heating element 20 is fixedly set in upper cover 4, and upper cover 4 is provided for feeding second hydrogen inlet 22 of cold hydrogen; As shown in the figure, upper cover 4 is provided with end cap 1 removably, and end cap is connected in upper cover 4 by cylindrical shell 23, cylindrical shell 23 is one-body molded with upper cover, electrode 2 is arranged at upper cover 4 by end cap 1, and cylindrical shell 23 can be adapted to the length of electrode, is beneficial to the layout of electrode; Second hydrogen inlet 22 is positioned at the end cap center and feeds, and enters hydrogen by second hydrogen inlet 22 during use, with hydrogen cooling electrode 2, takes away the electrode heat and enters reaction chamber 25 participation reactions.
In the present embodiment, described reactor shell 5 is fixedlyed connected removably with heat exchanger shell 15 or is fixedly connected by welding; Adopt in the present embodiment and undertaken detachable fixedly connectedly by bolt 8, be convenient to maintenance and install.
The utility model in use, from battery limit (BL) pressure is 1.2Mpa, temperature is that 20 ℃ silicon tetrachloride liquid and pressure is 0.9Mpa, temperature is that 20 ℃ hydrogen is entered in the heat exchanger shell pass by hydrogen inlet and silicon tetrachloride import respectively, gas carries out heat exchange to mixed fluid by tubulation with after managing interior pyroreaction, silicon tetrachloride liquid is heated vaporization outside pipe, mixture temperature is about 150 ℃; Gas is cooled simultaneously after the pyroreaction, is cooled to 600 ℃ by 1000 ℃; Mixed gas after the heating is drawn by the outlet of mixing raw material gas, gas carries out heat exchange once more further and after the pyroreaction of being come out to be cooled by reaction back pneumatic outlet, temperature rises to about 250 ℃ by 150 ℃, is cooled to after 600 ℃ the pyroreaction temperature degree and drops to about 300 ℃ and go out the battery limit (BL).Be heated to the mixed gas about 250 ℃, enter vertical interlayer by mixed gas inlet before reacting, in the process that rises, the heat that is spread out of by insulation plate by reaction chamber is heated to 450 ℃, enter reaction chamber from the reaction chamber cover plate on insulation plate top, 1100 ℃ conversion reaction takes place in temperature.
Explanation is at last, above embodiment is only unrestricted in order to the explanation the technical solution of the utility model, although the utility model is had been described in detail with reference to preferred embodiment, those of ordinary skill in the art is to be understood that, can make amendment or be equal to replacement the technical solution of the utility model, and not breaking away from the aim and the scope of technical solutions of the utility model, it all should be encompassed in the middle of the claim scope of the present utility model.
Claims (10)
1. one heat exchange type polysilicon hydrogenation furnace is characterized in that: comprise reactor and the interchanger by gas heating silicon tetrachloride after the reaction of reactor and hydrogen mixture, described interchanger is positioned at reactor lower part and fixedlys connected with it.
2. one heat exchange type polysilicon hydrogenation furnace according to claim 1, it is characterized in that: described reactor comprises reactor shell and insulation plate, described insulation plate internal space is a reaction chamber, forms vertical interlayer between insulation plate outside surface and the reactor shell internal surface; Perhaps, insulation plate itself forms vertical interlayer; Mixed gas entered the mouth before described vertical interlayer bottom was provided with reaction, and vertical interlayer upper opening is communicated with reaction chamber.
3. one heat exchange type polysilicon hydrogenation furnace according to claim 2, it is characterized in that: described interchanger is vertical tubular heat exchange, the tube side of described vertical tubular heat exchange upwards is communicated in reaction chamber, reaction back pneumatic outlet is set downwards, the shell side bottom of described vertical tubular heat exchange is provided with hydrogen inlet and silicon tetrachloride import, and top is provided with heated mixing raw material gas outlet.
4. one heat exchange type polysilicon hydrogenation furnace according to claim 3 is characterized in that: the tube side of described vertical tubular heat exchange and the mode of communicating of reaction chamber are that tubulation directly is communicated in reaction chamber.
5. one heat exchange type polysilicon hydrogenation furnace according to claim 4, it is characterized in that: between described reaction chamber and the vertical tubular heat exchange upper tubesheet thermal baffle is set, gas production well after thermal baffle and the tubulation of vertical tubular heat exchange is relatively set with reaction chamber is communicated with the reaction.
6. one heat exchange type polysilicon hydrogenation furnace according to claim 5 is characterized in that: described reaction chamber top is provided with cover plate, is distributed with the air inlet port that is communicated in reaction chamber and vertical interlayer on the cover plate.
7. according to the described one heat exchange type of the arbitrary claim of claim 3 to 6 polysilicon hydrogenation furnace, it is characterized in that: the tubulation of described vertical tubular heat exchange is the refractory metal pipe, and the refractory metal pipe is provided with high temperature resistance protective layer in the pipe of upper tubular section at least.
8. according to the described one heat exchange type of the arbitrary claim of claim 1 to 6 polysilicon hydrogenation furnace, it is characterized in that: the thermal source of described reaction chamber is an an electric heating element, and the electrode of described an electric heating element is positioned at reaction chamber top and is fixedly set in reactor shell.
9. one heat exchange type polysilicon hydrogenation furnace according to claim 8, it is characterized in that: described reactor shell is provided with upper cover, the electrode of described an electric heating element is fixedly set in upper cover, and upper cover is provided for feeding second hydrogen inlet of cold hydrogen.
10. one heat exchange type polysilicon hydrogenation furnace according to claim 8, it is characterized in that: described reactor shell is fixedlyed connected removably with heat exchanger shell or is fixedly connected by welding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206880981U CN201923846U (en) | 2010-12-28 | 2010-12-28 | Integral heat exchange type polycrystalline silicon hydrogenation furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206880981U CN201923846U (en) | 2010-12-28 | 2010-12-28 | Integral heat exchange type polycrystalline silicon hydrogenation furnace |
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| Publication Number | Publication Date |
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| CN201923846U true CN201923846U (en) | 2011-08-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010206880981U Expired - Fee Related CN201923846U (en) | 2010-12-28 | 2010-12-28 | Integral heat exchange type polycrystalline silicon hydrogenation furnace |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102502656A (en) * | 2011-11-01 | 2012-06-20 | 赵新征 | Method for converting silicon tetrachloride into trichlorosilane |
| CN102838118A (en) * | 2012-09-19 | 2012-12-26 | 特变电工新疆硅业有限公司 | Heat recovery process and system in polycrystalline-silicon tail gas drying-method recovery system |
-
2010
- 2010-12-28 CN CN2010206880981U patent/CN201923846U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102502656A (en) * | 2011-11-01 | 2012-06-20 | 赵新征 | Method for converting silicon tetrachloride into trichlorosilane |
| CN102838118A (en) * | 2012-09-19 | 2012-12-26 | 特变电工新疆硅业有限公司 | Heat recovery process and system in polycrystalline-silicon tail gas drying-method recovery system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110810 Termination date: 20121228 |