CN201908132U - Cantilever type push-and-pull boat system used for plasma enhanced chemical vapor deposition (PECVD) device - Google Patents
Cantilever type push-and-pull boat system used for plasma enhanced chemical vapor deposition (PECVD) device Download PDFInfo
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- CN201908132U CN201908132U CN2010205903416U CN201020590341U CN201908132U CN 201908132 U CN201908132 U CN 201908132U CN 2010205903416 U CN2010205903416 U CN 2010205903416U CN 201020590341 U CN201020590341 U CN 201020590341U CN 201908132 U CN201908132 U CN 201908132U
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Abstract
The utility model discloses a cantilever type push-and-pull boat system used for a plasma enhanced chemical vapor deposition (PECVD) device. The system comprises a cantilever bar mechanism, a side surface connecting mechanism and a rolling straight-line guide sleeve sub-mechanism, wherein the rolling straight-line guide sleeve sub-mechanism can be used for guiding the cantilever bar mechanism to perform horizontal movement and vertical movement; the rolling straight-line guide sleeve sub-mechanism is arranged on a rack of the PECVD device and comprises a fixing plate, a horizontal transmission assembly and a vertical transmission assembly; and the horizontal transmission assembly and the vertical transmission assembly respectively control the cantilever bar mechanism to drive the raw material to perform horizontal movement and vertical movement. The cantilever type push-and-pull boat system adopts the form that a cantilever bar stretches into a reaction cavity to take and put a graphite boat, therefore, a transport system is simplified, and the transport efficiency is improved; the side-surface fixing form is adopted, so that the fragment of a silicon wafer on the graphite boat is prevented from dropping on the system to affect the normal movement of the system, the space is saved, and a plurality of push-and-pull boats can move at the same time.
Description
Technical field
The utility model relates to the source material delivery system field of PECVD device, particularly a kind of cantilevered push-and-pull boat system that is used for the PECVD device.
Background technology
The push-and-pull boat delivery system that is used for the solar silicon wafers processing units is the important composition parts of solar silicon wafers processing units, being mainly used in a raw material and raw material placing mechanism is transported in the reaction chamber and reacts, question response finishes the back raw material and raw material placing mechanism is carried back original position, fetch by the workman, reinstall raw material again, constantly circulation.The speed of delivery system affects the production efficiency of solar silicon wafers processing units, and because solar silicon wafers is broken easily, delivery system must guarantee its stability, simultaneously because the productivity requirement of solar silicon wafers processing units, an equipment can independently be reacted by a plurality of (generally being four) reaction chamber simultaneously, this requires delivery system under the prerequisite that satisfies rapidity and stability, and simplified construction is realized many push-and-pulls boat (being reaction chamber) self-movement in real time as far as possible.Push-and-pull boat delivery system generally is made up of propulsion source, transmission rig, topworks, control unit four parts, and the selection of propulsion source is generally adopted alternating current machine or stepper-motor by the weight decision of the raw material that will carry and grip device; Transmission rig adopts band transmission or ball screw transmission; Topworks is used for accepting raw material or accepting the mechanism of laying raw material.
Push-and-pull boat delivery system structure such as Fig. 1 of existing solar silicon wafers processing units, (1 is guide rail among the figure shown in 2,2 is two bars, 3 is raw material, 4 is reaction chamber, 5 are the V band, 6 is contiguous block, 7 is alternating current machine), propulsion source adopts alternating current machine, transmission rig adopts the transmission of V band, topworks is a double pole push-and-pull boat, the raw material support structure directly is placed on two bars, provide power and torque by alternating current machine, driving the V band rotates, driving double pole push-and-pull boat simultaneously moves forward and backward, by double pole push-and-pull boat raw material is sent into reaction chamber, wait question response to finish after, return initial point behind the double pole push-and-pull boat, the workman gets material, constantly circulation.
The push-and-pull boat delivery system of existing solar silicon wafers processing units is simple and practical, cost is lower, at various solar power silicon plate machining devices such as diffusion furnace equipment wider application is arranged, but also have multiple weak point: (1) adopts alternating current machine to be difficult to speed governing, is not suitable for the occasion that some need be regulated the speed; (2) adopt the transmission of V band to be easy to generate vibration and relatively sliding, make the location inaccurate, the vibration meeting causes damage to raw material, influences device work-ing life; (3) longer for reaction chamber, excessive by the support structure length that two bars are formed when range ability is big, rigidity and intensity are difficult to guarantee; (4) because propulsion source and transmission rig are installed in the bottom of topworks, make the vertical range of whole push-and-pull boat system bigger, institute takes up space bigger, is difficult to realize that a plurality of push-and-pull boats work alone simultaneously; (5) during the reaction chamber internal reaction, raw material and double pole push-and-pull boat all rest in the reaction chamber and react, and easily reaction process are caused interference, influence reaction efficiency, while, to the demanding reaction of vacuum tightness, the stopping property of reaction chamber was difficult to assurance for some, thereby influenced the vacuum tightness of reaction chamber.
The utility model content
The purpose of this utility model is to overcome above-mentioned the deficiencies in the prior art, and the cantilevered push-and-pull boat system that is used for the PECVD device that a kind of transport efficiency is higher, course of conveying is stable is provided.
The technical solution of the utility model is: a kind of cantilevered push-and-pull boat system that is used for PECVD equipment, comprise the secondary mechanism of cantilever lever mechanism, side connection mechanism and rolling linear guide pin bushing, be used for being located at the frame of PECVD equipment as the secondary mechanism of rolling linear guide pin bushing of tangential movement of cantilever lever mechanism and vertical movement guiding, cantilever lever mechanism is fixed in the connection mechanism of side, and side connection mechanism is connected with the secondary mechanism of rolling linear guide pin bushing.
Cantilever lever mechanism comprises an extra heavy pipe and two tubules, two tubules are set up in parallel, and be connected with an end of extra heavy pipe by the rear portion contiguous block, the other end of extra heavy pipe is provided with extra heavy pipe Connection Block and extra heavy pipe contiguous block, extra heavy pipe is fixedlyed connected with side connection mechanism with the extra heavy pipe contiguous block by the extra heavy pipe Connection Block, and the end of two tubules is connected and fixed by anterior contiguous block.
The secondary mechanism of rolling linear guide pin bushing comprises retaining plate, horizontal transmission component and vertical transmission component, horizontal transmission component comprises horizontal motor, short band synchronously, long band and guide rail synchronously, horizontal motor, short band synchronously is connected successively with long band synchronously, guide rail is fixed on the retaining plate, guide rail and long band synchronously be arranged in parallel, side connection mechanism is located on the guide rail and with long band synchronously and contacts, vertical transmission component comprises motor vertical, transmission shaft, worm screw, worm gear, screw rod and vertical guide stem, motor vertical, transmission shaft, worm screw, worm gear is connected successively with screw rod, vertical guide stem is vertical at the retaining plate two ends, and vertical guide stem and screw rod be arranged in parallel.
Described side connection mechanism is constituted by a plurality of aluminium sheets, comprise upper mounted plate, bottom plate, deep floor, the first side retaining plate and the second side retaining plate, upper mounted plate is with first the side retaining plate is vertical is connected, the end below that upper mounted plate is connected with the first side retaining plate is provided with deep floor, the other end below of upper mounted plate is provided with bottom plate, and fixedly connected with the extra heavy pipe contiguous block with the extra heavy pipe Connection Block of cantilever lever mechanism by bottom plate, the side of the first side retaining plate is provided with the second side retaining plate, and the second side retaining plate is connected by the guide rail that is fixed in the secondary mechanism of slide block and rolling linear guide pin bushing on the slide block retaining plate.
The junction of described upper mounted plate and bottom plate, upper mounted plate are provided with the bar shaped bolt hole that position, a plurality of adjusting cantilever lever left and right sides is used.After regulating the position of bolt in corresponding bar shaped bolt hole, lock, can adjust the relative position between bottom plate and the upper mounted plate, because cantilever lever mechanism fixedlys connected with bottom plate, therefore also just regulated the left and right sides position of cantilever lever mechanism in reaction chamber.
Be bolted to connection between each aluminium sheet in the connection mechanism of described side.
Guide rail in the secondary mechanism of described straight line guide pin bushing is two guide rail structures, and four slide blocks are set on the slide block retaining plate, corresponding two slide blocks of each guide rail, and it is more steady to make cantilever lever mechanism be in operation.
Described extra heavy pipe and tubule are open tube, are used to place raw material (being graphite boat) on two tubules arranged side by side.
Also be provided with the lower stroke switch that is used for detection of vertical transmission component down stroke on the retaining plate of the secondary mechanism of described rolling linear guide pin bushing, be used for the upper stroke switch of detection of vertical transmission component up stroke and be used for the laser sensor of detection level transmission component movement travel, lower stroke switch, upper stroke switch and laser sensor be the control unit of external PECVD equipment respectively.
The composite stepper motor that described horizontal motor and motor vertical all adopt sub-circuit to drive can effectively improve the stability that motor rotates, thereby improves the stability of cantilever lever mechanism operation.
When the cantilevered push-and-pull boat system that originally is used for PECVD equipment used, its principle of work was: this system realizes that round-robin puts boat and get the boat action; When the boat action is put in realization, horizontal motor by horizontal transmission rig provides power, power passes to short band synchronously and long band synchronously successively, the transmission of long band synchronously drives side connection mechanism and advances along guide rail, thereby drive cantilever lever mechanism and raw material advance and send into reaction chamber, when laser sensor detects advancing of cantilever lever mechanism and puts in place, control unit controlled levels motor stops, start motor vertical, the power that motor vertical provides passes to transmission shaft successively, worm screw, worm gear and screw rod, thereby driving retaining plate descends along vertical guide stem, drive side connection mechanism, cantilever lever mechanism and raw material descend, when the decline of lower stroke switch detection cantilever lever mechanism puts in place, control unit control motor vertical stops, start horizontal motor, horizontal transmission component is controlled cantilever lever mechanism and is withdrawed from reaction chamber, and raw material enters step of reaction in reaction chamber; When the boat action is got in realization, driving cantilever lever mechanism by horizontal transmission component earlier advances, advance put in place after, driving cantilever lever mechanism by vertical transmission component rises, when the rising of upper stroke switch detection cantilever lever mechanism puts in place, drive cantilever lever mechanism by horizontal transmission component again and withdraw from, thereby take reacted raw material out of reaction chamber.
When the cantilevered push-and-pull boat system that originally is used for PECVD equipment uses, can also be earlier by the upper mounted plate in the connection mechanism of adjustment side and the relative position of bottom plate, thereby adjust the position, the left and right sides of cantilever lever mechanism, make two tubules arranged side by side just in time be in the middle part of reaction chamber, the position of graphite boat inside reaction chamber was about reaction chamber centrosymmetry, not deflection when the boat action was put in assurance; After adjusting the position of cantilever lever mechanism, refill other aluminium sheet of joining side connection mechanism.
The utility model has following beneficial effect with respect to prior art:
This cantilevered push-and-pull boat system adopts and stretches into the form that reaction chamber picks and places graphite boat by cantilever lever, can simplify delivery system, improves transport efficiency; This system adopts side fixed form, makes guide rail be installed in the side of cantilever lever, can avoid that the silicon chip fragment drops in the system on the graphite boat, influences system's regular event, and can save the space, can realize that many push-and-pulls boat moves simultaneously; This system adopts composite stepper motor, uses sub-circuit to drive, and improves the stability that motor rotates, and better realizes control.
This cantilevered push-and-pull boat system adopts the secondary mechanism of rolling linear guide pin bushing to realize the guiding of tangential movement and vertical movement, and adopts the form of two guide rails, Four-slider, makes motion more steady; This system adopts band transmission synchronously, can reduce slip and oscillation phenomenon in the motion; The transmission of employing worm and gear combines with worm drive, can reduce the power and the torque request of motor, thereby reduce cost.This cantilevered push-and-pull boat system can realize the motion of level and vertical direction, can realize picking and placeing the action of graphite boat reposefully.
Description of drawings
Fig. 1 is the structural representation of push-and-pull boat system in the existing solar silicon wafers processing units.
Fig. 2 is the left view of push-and-pull boat system among Fig. 1.
Fig. 3 is the structural representation of this cantilevered push-and-pull boat system.
Fig. 4 is the structural representation of cantilever lever mechanism in this cantilevered push-and-pull boat system.
Fig. 5 is the structural representation of side connection mechanism in this cantilevered push-and-pull boat system.
Fig. 6 is the structural representation of the secondary mechanism of rolling linear guide pin bushing in this cantilevered push-and-pull boat system.
Fig. 7 is the structural representation of horizontal transmission component among Fig. 6.
Fig. 8 is the structural representation of vertical transmission component among Fig. 6.
Embodiment
Below in conjunction with embodiment and accompanying drawing, the utility model is described in further detail, but embodiment of the present utility model is not limited thereto.
Embodiment
A kind of cantilevered push-and-pull boat system that is used for PECVD equipment of present embodiment, its structure as shown in Figure 3, comprise the secondary mechanism of cantilever lever mechanism, side connection mechanism and rolling linear guide pin bushing, be used for being located at the frame of PECVD equipment as the secondary mechanism of rolling linear guide pin bushing of tangential movement of cantilever lever mechanism and vertical movement guiding, cantilever lever mechanism is fixed in the connection mechanism of side, and side connection mechanism is connected with the secondary mechanism of rolling linear guide pin bushing;
The concrete structure of cantilever lever mechanism as shown in Figure 4, comprise an extra heavy pipe 8 and two tubules 9, two tubules 9 are set up in parallel, and be connected with an end of extra heavy pipe 8 by rear portion contiguous block 10, the other end of extra heavy pipe 8 is provided with extra heavy pipe Connection Block 11 and extra heavy pipe contiguous block 12, extra heavy pipe 8 is fixedlyed connected with side connection mechanism with extra heavy pipe contiguous block 12 by extra heavy pipe Connection Block 11, and the end of two tubules is connected and fixed by anterior contiguous block 36;
The concrete structure of the secondary mechanism of rolling linear guide pin bushing as shown in Figure 6, comprise retaining plate, horizontal transmission component and vertical transmission component, as shown in Figure 7, horizontal transmission component comprises horizontal motor 13, weak point is with 14 synchronously, long be with 15 and guide rail 16 synchronously, horizontal motor 13, short be with 14 and grow and be with 15 to be connected successively synchronously synchronously, guide rail 16 is fixed on the retaining plate 17, guide rail 16 and length are with 15 to be arranged in parallel synchronously, side connection mechanism is located on the guide rail 16 and with long and is with 16 to contact synchronously, as shown in Figure 8, vertical transmission component comprises motor vertical 18, transmission shaft 19, worm screw 20, worm gear 21, screw rod 22 and vertical guide stem 23, motor vertical 18, transmission shaft 19, worm screw 20, worm gear 21 is connected successively with screw rod 22, vertical guide stem 23 is vertical at retaining plate 17 two ends, and vertical guide stem 23 be arranged in parallel with screw rod 22;
The concrete structure of side connection mechanism as shown in Figure 5, constitute by a plurality of aluminium sheets, comprise upper mounted plate 24, bottom plate 25, deep floor 26, the first side retaining plate 27 and the second side retaining plate 28, upper mounted plate 24 and 27 vertical connections of the first side retaining plate, the end below that upper mounted plate 24 is connected with the first side retaining plate 27 is provided with deep floor 26, the other end below of upper mounted plate 24 is provided with bottom plate 25, and fixedly connected with extra heavy pipe contiguous block 12 with the extra heavy pipe Connection Block 11 of cantilever lever mechanism by bottom plate 25, the side of the first side retaining plate 27 is provided with the second side retaining plate, 28, the second side retaining plates 28 and is connected by the guide rail 16 that is fixed in the secondary mechanism of slide block 30 and rolling linear guide pin bushing on the slide block retaining plate 29.
The junction of upper mounted plate 24 and bottom plate 25, upper mounted plate 24 are provided with the bar shaped bolt hole 31 that position, a plurality of adjusting cantilever lever left and right sides is used.After regulating the position of bolt in corresponding bar shaped bolt hole 31, lock, can adjust the relative position between bottom plate 25 and the upper mounted plate 24, because cantilever lever mechanism fixedlys connected with bottom plate 25, therefore also just regulated the left and right sides position of cantilever lever mechanism in reaction chamber.
In the said system structure, be bolted to connection between each aluminium sheet in the connection mechanism of side.
As shown in Figure 6, the guide rail 16 in the secondary mechanism of straight line guide pin bushing is two guide rail structures, and four slide blocks 30 are set on the slide block retaining plate 29, each guide rail 16 corresponding two slide block 30, and it is more steady to make cantilever lever mechanism be in operation.
Extra heavy pipe 8 and tubule 9 are open tube, are used to place raw material (being graphite boat 32 shown in Figure 3) on two tubules 9 arranged side by side.
As Fig. 6 or shown in Figure 7, also be provided with the lower stroke switch 33 that is used for detection of vertical transmission component down stroke on the retaining plate 17 of the secondary mechanism of rolling linear guide pin bushing, be used for the upper stroke switch 34 of detection of vertical transmission component up stroke and be used for the laser sensor 35 of detection level transmission component movement travel, lower stroke switch 33, upper stroke switch 34 and laser sensor 35 be the control unit of external PECVD equipment respectively.
The composite stepper motor that horizontal motor 13 and motor vertical 18 all adopt sub-circuit to drive can effectively improve the stability that motor rotates, thereby improves the stability of cantilever lever mechanism operation.
When the cantilevered push-and-pull boat system that originally is used for PECVD equipment used, its principle of work was: this system realizes that round-robin puts boat and get the boat action; When the boat action is put in realization, horizontal motor 13 by horizontal transmission rig provides power, power passes to successively short is with 14 and longly be with 15 synchronously synchronously, long drive side connection mechanism with 15 transmission synchronously and advance along guide rail 16, thereby drive cantilever lever mechanism and raw material advance and send into reaction chamber, when laser sensor 35 detects advancing of cantilever lever mechanism and puts in place, control unit controlled levels motor 13 stops, start motor vertical 18, the power that motor vertical 18 provides passes to transmission shaft 19 successively, worm screw 20, worm gear 21 and screw rod 22, thereby driving retaining plate 17 descends along vertical guide stem, drive side connection mechanism, cantilever lever mechanism and raw material descend, when the decline of lower stroke switch 33 detection cantilever lever mechanisms puts in place, control unit control motor vertical 18 stops, start horizontal motor 13, horizontal transmission component is controlled cantilever lever mechanism and is withdrawed from reaction chamber, and raw material enters step of reaction in reaction chamber; When the boat action is got in realization, driving cantilever lever mechanism by horizontal transmission component earlier advances, advance put in place after, driving cantilever lever mechanism by vertical transmission component rises, when the rising of upper stroke switch 34 detection cantilever lever mechanisms puts in place, drive cantilever lever mechanism by horizontal transmission component again and withdraw from, thereby take reacted raw material out of reaction chamber.
When the cantilevered push-and-pull boat system that originally is used for PECVD equipment uses, can also be earlier by the upper mounted plate 24 in the connection mechanism of adjustment side and the relative position of bottom plate 25, thereby adjust the position, the left and right sides of cantilever lever mechanism, make two tubules 9 arranged side by side just in time be in the middle part of reaction chamber, the position of graphite boat 32 inside reaction chamber was about reaction chamber centrosymmetry, not deflection when the boat action was put in assurance; After adjusting the position of cantilever lever mechanism, refill other aluminium sheet of joining side connection mechanism.
As mentioned above, just can realize the utility model preferably, the foregoing description is preferred embodiment of the present utility model only, is not to be used for limiting practical range of the present utility model; Be that all equalizations of being done according to the utility model content change and modification, all contained by the utility model claim scope required for protection.
Claims (10)
1. cantilevered push-and-pull boat system that is used for the PECVD device, it is characterized in that, comprise the secondary mechanism of cantilever lever mechanism, side connection mechanism and rolling linear guide pin bushing, be used for being located at the frame of PECVD equipment as the secondary mechanism of rolling linear guide pin bushing of tangential movement of cantilever lever mechanism and vertical movement guiding, cantilever lever mechanism is fixed in the connection mechanism of side, and side connection mechanism is connected with the secondary mechanism of rolling linear guide pin bushing.
2. according to the described a kind of cantilevered push-and-pull boat system that is used for the PECVD device of claim 1, it is characterized in that, described cantilever lever mechanism comprises an extra heavy pipe and two tubules, two tubules are set up in parallel, and be connected with an end of extra heavy pipe by the rear portion contiguous block, the other end of extra heavy pipe is provided with extra heavy pipe Connection Block and extra heavy pipe contiguous block, and extra heavy pipe is fixedlyed connected with side connection mechanism with the extra heavy pipe contiguous block by the extra heavy pipe Connection Block, and the end of two tubules is connected and fixed by anterior contiguous block.
3. according to the described a kind of cantilevered push-and-pull boat system that is used for the PECVD device of claim 1, it is characterized in that, the secondary mechanism of described rolling linear guide pin bushing comprises retaining plate, horizontal transmission component and vertical transmission component, horizontal transmission component comprises horizontal motor, short band synchronously, long band and guide rail synchronously, horizontal motor, short band synchronously is connected successively with long band synchronously, guide rail is fixed on the retaining plate, guide rail and long band synchronously be arranged in parallel, side connection mechanism is located on the guide rail and with long band synchronously and contacts, vertical transmission component comprises motor vertical, transmission shaft, worm screw, worm gear, screw rod and vertical guide stem, motor vertical, transmission shaft, worm screw, worm gear is connected successively with screw rod, vertical guide stem is vertical at the retaining plate two ends, and vertical guide stem and screw rod be arranged in parallel.
4. according to the described a kind of cantilevered push-and-pull boat system that is used for the PECVD device of claim 1, it is characterized in that, described side connection mechanism is constituted by a plurality of aluminium sheets, comprise upper mounted plate, bottom plate, deep floor, the first side retaining plate and the second side retaining plate, upper mounted plate is with first the side retaining plate is vertical is connected, the end below that upper mounted plate is connected with the first side retaining plate is provided with deep floor, the other end below of upper mounted plate is provided with bottom plate, and fixedly connected with the extra heavy pipe contiguous block with the extra heavy pipe Connection Block of cantilever lever mechanism by bottom plate, the side of the first side retaining plate is provided with the second side retaining plate, and the second side retaining plate is connected by the guide rail that is fixed in the secondary mechanism of slide block and rolling linear guide pin bushing on the slide block retaining plate.
5. according to the described a kind of cantilevered push-and-pull boat system that is used for the PECVD device of claim 4, it is characterized in that, the junction of described upper mounted plate and bottom plate, upper mounted plate is provided with the bar shaped bolt hole that position, a plurality of adjusting cantilever lever left and right sides is used.
6. according to the described a kind of cantilevered push-and-pull boat system that is used for the PECVD device of claim 4, it is characterized in that, be bolted to connection between each aluminium sheet in the connection mechanism of described side.
7. according to the described a kind of cantilevered push-and-pull boat system that is used for the PECVD device of claim 4, it is characterized in that the guide rail in the secondary mechanism of described straight line guide pin bushing is two guide rail structures, and four slide blocks are set on the slide block retaining plate, corresponding two slide blocks of each guide rail.
8. according to the described a kind of cantilevered push-and-pull boat system that is used for the PECVD device of claim 2, it is characterized in that described extra heavy pipe and tubule are open tube.
9. according to the described a kind of cantilevered push-and-pull boat system that is used for the PECVD device of claim 3, it is characterized in that, also be provided with the lower stroke switch that is used for detection of vertical transmission component down stroke on the retaining plate of the secondary mechanism of described rolling linear guide pin bushing, be used for the upper stroke switch of detection of vertical transmission component up stroke and be used for the laser sensor of detection level transmission component movement travel, lower stroke switch, upper stroke switch and laser sensor be the control unit of external PECVD equipment respectively.
10. according to the described a kind of cantilevered push-and-pull boat system that is used for the PECVD device of claim 3, it is characterized in that the composite stepper motor that described horizontal motor and motor vertical all adopt sub-circuit to drive.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205903416U CN201908132U (en) | 2010-10-29 | 2010-10-29 | Cantilever type push-and-pull boat system used for plasma enhanced chemical vapor deposition (PECVD) device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205903416U CN201908132U (en) | 2010-10-29 | 2010-10-29 | Cantilever type push-and-pull boat system used for plasma enhanced chemical vapor deposition (PECVD) device |
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| CN201908132U true CN201908132U (en) | 2011-07-27 |
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| CN2010205903416U Expired - Fee Related CN201908132U (en) | 2010-10-29 | 2010-10-29 | Cantilever type push-and-pull boat system used for plasma enhanced chemical vapor deposition (PECVD) device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102061456A (en) * | 2010-10-29 | 2011-05-18 | 华南理工大学 | Cantilever-type push-pull boat system for plasma enhanced chemical vapor deposition (PECVD) device |
| CN102709212A (en) * | 2012-03-20 | 2012-10-03 | 深圳市大族光伏科技股份有限公司 | Automatic loading and unloading device for PECVD (plasma enhanced chemical vapor deposition) equipment |
-
2010
- 2010-10-29 CN CN2010205903416U patent/CN201908132U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102061456A (en) * | 2010-10-29 | 2011-05-18 | 华南理工大学 | Cantilever-type push-pull boat system for plasma enhanced chemical vapor deposition (PECVD) device |
| CN102061456B (en) * | 2010-10-29 | 2012-08-22 | 华南理工大学 | Cantilever-type push-pull boat system for plasma enhanced chemical vapor deposition (PECVD) device |
| CN102709212A (en) * | 2012-03-20 | 2012-10-03 | 深圳市大族光伏科技股份有限公司 | Automatic loading and unloading device for PECVD (plasma enhanced chemical vapor deposition) equipment |
| CN102709212B (en) * | 2012-03-20 | 2015-01-07 | 深圳丰盛装备股份有限公司 | Automatic loading and unloading device for PECVD (plasma enhanced chemical vapor deposition) equipment |
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Granted publication date: 20110727 Termination date: 20141029 |
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| EXPY | Termination of patent right or utility model |