CN201886198U - Illuminating system of reflective dark-field microscope - Google Patents
Illuminating system of reflective dark-field microscope Download PDFInfo
- Publication number
- CN201886198U CN201886198U CN2010205779048U CN201020577904U CN201886198U CN 201886198 U CN201886198 U CN 201886198U CN 2010205779048 U CN2010205779048 U CN 2010205779048U CN 201020577904 U CN201020577904 U CN 201020577904U CN 201886198 U CN201886198 U CN 201886198U
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- Prior art keywords
- reflective
- field microscope
- curve surface
- parabolic curve
- reflective dark
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- Expired - Fee Related
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Abstract
The utility model relates to an illuminating system of a reflective dark-field microscope, which comprises a luminous source, a ring-shaped diaphragm and a reflective parabolic curve surface. The illuminating system is characterized in that the installation position of the reflective parabolic curve surface meets the requirements that the light which is emitted from the luminous source is incident into the reflective parabolic curve surface in parallel through the ring-shaped diaphragm, the convergent focal point of the light which is reflected by the reflective parabolic curve surface is deviated from the central axis of an objective lens of the reflective dark-field microscope, and an objective table of the reflective dark-field microscope is installed in a reflected light region of the reflective parabolic curve surface. Compared with the prior art, the illuminating system has the advantage that the installation position of the reflective parabolic curve surface meets the requirement that the convergent focal point of the light which is reflected by the reflective parabolic curve surface is deviated from the central axis of an objective lens of the reflective dark-field microscope, so that the use ratio of the luminous source can be effectively improved, and the computing process can be simplified.
Description
Technical field
The utility model relates to the microscope field, is specifically related to a kind of illuminator of reflective dark field microscope.
Background technology
Along with the fast development of electronics and information industry, the integrated level of large scale integrated circuit improves constantly, and the detection in manufacture process and the analysis of metallographic, measurement all need to relate to the use of reflective dark field microscope.Reflective dark field microscope is to utilize optic Tyndall effect, light source central beam by condenser system is stopped by annular diaphragm, do not pass through the lens combination direct irradiation of object lens on sample, but illuminating ray is shone obliquely on sample, make and send the sample that diffuses and received imaging, can reach the resolution of 6nm by object lens.
In the prior art, illumination system layout about reflective dark field microscope, have with two kinds of axis of a parabola and coaxial hyperbolic curve reflecting curved surfaces, in these two kinds of illuminators, the focus of the optical convergence after described reflection parabolic surface emission all drops on the object lens central shaft of reflective dark field microscope, and have shortcoming in various degree: 1), with the calculating of axis of a parabola reflecting curved surface simply, but shortcoming is lower to the utilization factor of the outer light of axle, and illumination zone is little; 2), coaxial hyperbolic curve reflecting curved surface can remedy the shortcoming with the axis of a parabola reflecting curved surface, but shortcoming is that utilization factor again can be not enough under the short situation of high power objective and operating distance, and computation complexity is very high.
The utility model content
Technical problem to be solved in the utility model be at above-mentioned prior art provide a kind of calculate simple, under each multiplying power, all can effectively utilize luminous energy and the illuminator of the uniform reflective dark field microscope that throws light on.
The utility model solves the problems of the technologies described above the technical scheme that is adopted: the illuminator of this reflective dark field microscope, comprise light emitting source, annular diaphragm, the reflection parabolic surface, it is characterized in that: the following requirement satisfied in the installation site of described reflection parabolic surface: the light that sends from described light emitting source through described annular diaphragm is parallel be incident to described reflection parabolic surface after, the focus of the optical convergence after described reflection parabolic surface emission departs from the object lens central shaft of described reflective dark field microscope, and the objective table of described reflective dark field microscope is arranged in the reflected light territory of described reflection parabolic surface.
Compared with prior art, advantage of the present utility model is: after the position that will reflect the parabolic surface setting is satisfied focus through the optical convergence after the emission of reflection parabolic surface and departed from the object lens central shaft of described reflective dark field microscope, can effectively improve the utilization factor of light source, simplify computation process.
Description of drawings
Fig. 1 is the structure and the light path synoptic diagram of the illuminator of reflective dark field microscope among the utility model embodiment.
Embodiment
Embodiment describes in further detail the utility model below in conjunction with accompanying drawing.
See also the illuminator of reflective dark field microscope shown in Figure 1, it comprises the light emitting source (not shown), annular diaphragm 1, reflection parabolic surface 2, the following requirement satisfied in the installation site of wherein said reflection parabolic surface 2: the light 1-1 that sends from described light emitting source through described annular diaphragm 1 is parallel be incident to described reflection parabolic surface 2 after, focal point F 1 through described reflection parabolic surface 2 emission post-concentrations, F2 departs from the central shaft O1O2 of the objective lens 3 of described reflective dark field microscope, and the objective table 4 of described reflective dark field microscope is arranged in the reflected light territory of described reflection parabolic surface 2.
Claims (1)
1. the illuminator of a reflective dark field microscope, comprise light emitting source, annular diaphragm, the reflection parabolic surface, it is characterized in that: the following requirement satisfied in the installation site of described reflection parabolic surface: the light that sends from described light emitting source through described annular diaphragm is parallel be incident to described reflection parabolic surface after, the focus of the optical convergence after described reflection parabolic surface emission departs from the object lens central shaft of described reflective dark field microscope, and the objective table of described reflective dark field microscope is arranged in the reflected light territory of described reflection parabolic surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205779048U CN201886198U (en) | 2010-10-25 | 2010-10-25 | Illuminating system of reflective dark-field microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205779048U CN201886198U (en) | 2010-10-25 | 2010-10-25 | Illuminating system of reflective dark-field microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201886198U true CN201886198U (en) | 2011-06-29 |
Family
ID=44183746
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010205779048U Expired - Fee Related CN201886198U (en) | 2010-10-25 | 2010-10-25 | Illuminating system of reflective dark-field microscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201886198U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107193107A (en) * | 2017-05-22 | 2017-09-22 | 高亚贵 | A kind of concentrator debugging tunes device with curved reflector clamping |
| CN113534430A (en) * | 2021-06-08 | 2021-10-22 | 浙江工商职业技术学院 | Design method and device of dark field condenser for metallographic microscope |
-
2010
- 2010-10-25 CN CN2010205779048U patent/CN201886198U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107193107A (en) * | 2017-05-22 | 2017-09-22 | 高亚贵 | A kind of concentrator debugging tunes device with curved reflector clamping |
| CN107193107B (en) * | 2017-05-22 | 2019-10-29 | 李卫青 | A kind of clamping of condenser debugging curved reflector tunes device |
| CN113534430A (en) * | 2021-06-08 | 2021-10-22 | 浙江工商职业技术学院 | Design method and device of dark field condenser for metallographic microscope |
| CN113534430B (en) * | 2021-06-08 | 2023-10-10 | 浙江工商职业技术学院 | Design method and device of dark field condenser for metallographic microscope |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110629 Termination date: 20181025 |