CN113534430A - Design method and device of dark field condenser for metallographic microscope - Google Patents
Design method and device of dark field condenser for metallographic microscope Download PDFInfo
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Abstract
The invention discloses a design method and a device of a dark field condenser for a metallographic microscope, wherein the method comprises the steps of drawing a design image in a drawing surface of drawing software based on objective lens parameters of the metallographic microscope to be designed; drawing at least two parallel light rays parallel to the optical axis of the system in a design image, calculating a convergence point of the parallel light rays according to a preset boundary condition, and generating divergent light rays passing through the convergence point according to a dark field light illumination range; determining intersection points of the divergent light rays and the parallel light rays, and fitting according to the intersection points to generate a reflection paraboloid curve; and rotating the reflecting paraboloid curve by taking the optical axis of the system as an axis to determine the dark field condenser lens surface. The invention realizes the adoption of an integrated design idea, the whole design process is simple, convenient and quick, and the design can be finished only by one person. Compared with the conventional methods such as theoretical calculation and optical software design, the design result is more visual and convenient, and the design success rate is high.
Description
Technical Field
The application relates to the technical field of metallographic microscopes, in particular to a design method and device of a dark field condenser for the metallographic microscope.
Background
The metallographic microscope is a multipurpose industrial detecting instrument, and the product is widely applied to micro parts and integrated circuits in industries such as integrated circuits related to the electronic industry, novel display, chemical engineering, instruments and meters and the like, and is used for observing opaque substances and transparent substances, such as observation, assembly and inspection of metals, ceramics, integrated circuits, electronic chips, printed circuit boards, liquid crystal boards, films, powder, carbon powder, wires, fibers, plating layers and other non-metallic materials.
According to different observation objects, the metallographic microscope observation mode is divided into a bright field and a dark field. The bright field is that the incident beam is vertically irradiated to the surface of the sample through the objective lens, and the reflected light enters the objective lens for imaging. Dark field is where the incident beam bypasses the objective lens, is tilted at a very large angle to the specimen surface, and then the scattered light (diffused light) enters the objective lens for imaging. Such dark field illumination mode is achieved by means of an annular mirror and a dark field condenser. Compared with a bright field, the dark field is illuminated by oblique light, the aperture angle of the objective lens is fully utilized, and the actual resolution capability and contrast of the microscope are improved by dark field illumination. Due to the advantages of the dark field illumination mode, the dark field lens is required to be arranged on top-grade metallurgical microscope at home and abroad, and an important mark for measuring the quality of the dark field lens is the quality of the dark field illumination system. The good dark field lens is expensive, wherein the main reason is that the dark field illumination system in the lens structure is complex and tedious in design and needs to be completed by means of special optical design software, and related key technologies are not disclosed and are not widely applied.
In the prior art, two methods are generally used for designing a dark field condenser, one method is a classical theoretical design method, the method does not rely on Zemax software, but calculates according to a classical design formula of the dark field condenser, and calculates and optimizes a data table according to optical performance parameters of an objective lens. The method has extremely high requirements on designers, requires a deep optical design basis, and requires a great deal of effort of the designers in the whole process. The theoretical calculation method is limited by the theoretical level of the optical engineers of the current optical processing enterprises, and is not popularized. One method is to design by an off-axis parabolic curve, optimize an optical system by using optical design software, and realize the imaging matching of an illumination spot and a dark field objective lens by controlling the size and the divergence angle of the spot. This design may simplify a portion of the computation process, but still requires a computation process. The whole process has high requirements on optical designers and long design period. The theoretical calculation of the two methods is based on a hyperboloid model, and the curve models selected by different companies are different, have no integrated standard and cannot be widely applied. In addition, the conventional high-grade metallurgical microscope is equipped with six types of objective lenses, i.e., 5 × (BD), 10 × (BD), 20 × (BD), 40 × (BD), 50 × (BD), and 100 × (BD), and each type of objective lens is different in parameters, which requires a large amount of data calculation and trial production costs. For ordinary optical instrument enterprises with weak design and processing capabilities, the method cannot be realized at all. In summary, no method for designing a dark field illumination system is available, which is simple, fast and inexpensive.
Disclosure of Invention
In order to solve the above problems, embodiments of the present application provide a method and an apparatus for designing a dark field condenser for a metallographic microscope.
In a first aspect, an embodiment of the present application provides a method for designing a dark field condenser for a metallographic microscope, where the method includes:
drawing a design image in a drawing surface of drawing software based on objective lens parameters of a metallographic microscope to be designed, wherein the design image comprises an objective lens structure, a system optical axis and a dark field light illumination range;
drawing at least two parallel light rays parallel to the optical axis of the system in the design image, calculating a convergence point of the parallel light rays according to a preset boundary condition, and generating divergent light rays passing through the convergence point according to the illumination range of the dark field light rays;
determining intersection points of the divergent light rays and the parallel light rays, and fitting according to the intersection points to generate a reflection paraboloid curve;
and rotating the reflecting paraboloid curve by taking the optical axis of the system as an axis to determine a dark field condenser mirror surface.
Preferably, the drawing a design image in a drawing plane of drawing software based on objective parameters of the metallurgical microscope to be designed includes:
acquiring objective lens parameters of a metallographic microscope to be designed, wherein the objective lens parameters comprise an objective lens central optical axis, a working distance parameter and an objective lens magnification;
determining the center point of the specimen surface of the observed specimen based on the central optical axis of the objective lens and the working distance parameter;
drawing a horizontal central line passing through the center point of the specimen surface in drawing software, and determining the horizontal central line as a system optical axis;
calculating the view range of the observed specimen according to the magnification of the objective lens, and determining the view range as a dark view field light illumination range;
and drawing a design image according to the optical axis of the system, the dark field light illumination range and the objective lens structure.
Preferably, the calculating the convergence point of the parallel light rays according to the preset boundary condition includes:
determining a constraint relation corresponding to a preset boundary condition, wherein the boundary condition is obtained based on a boundary condition analysis method;
and calculating and determining a convergence point of the parallel light rays so that the convergence point simultaneously satisfies a plurality of constraint relations.
Preferably, the generating a reflection parabolic curve according to fitting of each intersection point includes:
measuring a first distance between the convergence point and any intersection point, and determining a parabola directrix so as to enable a straight-line distance from the intersection point to the parabola directrix to be the first distance;
fitting the intersection points to generate a reflection paraboloid curve;
and determining a parabolic focus of the reflecting parabolic curve based on the parabolic quasi-curve, and calculating to obtain a parabolic equation of the reflecting parabolic curve according to the offset between the central line of the parabola and the optical axis of the system.
Preferably, at least three parallel light rays are arranged;
the calculating the convergence point of the parallel light according to the preset boundary condition and generating the divergent light passing through the convergence point according to the illumination range of the dark field light comprises the following steps:
dividing two adjacent parallel light rays into a group, respectively calculating convergence points of the parallel light rays of each group according to a preset boundary condition, and generating each divergent light ray passing through each convergence point according to the dark field light ray illumination range;
the determining the intersection points of the divergent light rays and the parallel light rays and fitting according to each intersection point to generate a reflection paraboloid curve comprises the following steps:
determining intersection points of the divergent light rays and the parallel light ray groups corresponding to the divergent light rays, and fitting according to the intersection points to generate a reflection paraboloid curve segment;
and progressively superposing the reflection paraboloid curve segments to obtain a reflection paraboloid curve.
Preferably, the rotating the reflective parabolic curve with the system optical axis as an axis to determine a dark field condenser lens includes:
intercepting a curve section of the reflecting parabolic curve, wherein the curve section is a curve segment between the reflecting parabolic curve and the intersection of the objective structure;
and rotating the curve section by taking the optical axis of the system as an axis to obtain the dark field condenser lens.
In a second aspect, an embodiment of the present application provides an apparatus for designing a dark field condenser for a metallographic microscope, the apparatus including:
the drawing module is used for drawing a design image in a drawing surface of drawing software based on objective lens parameters of the metallographic microscope to be designed, wherein the design image comprises an objective lens structure, a system optical axis and a dark field light illumination range;
the calculation module is used for drawing at least two parallel light rays parallel to the optical axis of the system in the design image, calculating a convergence point of the parallel light rays according to a preset boundary condition, and generating divergent light rays passing through the convergence point according to the dark field light ray illumination range;
the determining module is used for determining intersection points of the divergent light rays and the parallel light rays and generating a reflection paraboloid curve according to the fitting of each intersection point;
and the rotating module is used for rotating the reflecting paraboloid curve by taking the optical axis of the system as an axis to determine the dark field condenser lens surface.
In a third aspect, an embodiment of the present application provides an electronic device, which includes a memory, a processor, and a computer program stored on the memory and executable on the processor, where the processor executes the computer program to implement the steps of the method as provided in the first aspect or any one of the possible implementation manners of the first aspect.
In a fourth aspect, the present application provides a computer-readable storage medium, on which a computer program is stored, where the computer program, when executed by a processor, implements the method as provided in the first aspect or any one of the possible implementations of the first aspect.
The invention has the beneficial effects that: 1. the integrated design idea is adopted, the whole design process is simple, convenient and quick, and the design can be completed only by one person. Compared with the conventional methods such as theoretical calculation and optical software design, the design result is more visual and convenient, and the design success rate is high.
2. Whether the reflected light can be sheltered from by the first group of mirror of objective lens can be judged directly to the design process, whether the incident parallel light beam effectively utilizes, whether gather the facula at working distance position evenly distributed, whether the facula is abundant whole visual field, and these factors have directly decided the illuminating effect of dark field condensing lens. Repeated matching calculation is not required for multiple cooperation of an optical design engineer and a structural design engineer.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
Fig. 1 is a schematic flow chart of a design method of a dark field condenser for a metallographic microscope according to an embodiment of the present application;
FIG. 2 is a schematic diagram of a design image of a dark field condenser for a 10 × objective lens according to an embodiment of the present disclosure;
fig. 3 is a schematic diagram illustrating a principle of generating a reflection parabolic curve of a dark field condenser for a 10-fold objective lens according to an embodiment of the present disclosure;
FIG. 4 is a schematic diagram of a design image in a case of multi-stage parabolic progression according to an embodiment of the present application;
FIG. 5 is an enlarged partial view of a portion a of FIG. 4 according to an embodiment of the present disclosure;
FIG. 6 is an enlarged partial view of a portion b in FIG. 4 according to an embodiment of the present disclosure;
FIG. 7 is a schematic structural diagram of a design device of a dark field condenser for a metallographic microscope according to an embodiment of the present application;
fig. 8 is a schematic structural diagram of an electronic device according to an embodiment of the present application.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application.
In the following description, the terms "first" and "second" are used for descriptive purposes only and are not intended to indicate or imply relative importance. The following description provides embodiments of the present application, where different embodiments may be substituted or combined, and thus the present application is intended to include all possible combinations of the same and/or different embodiments described. Thus, if one embodiment includes feature A, B, C and another embodiment includes feature B, D, then this application should also be considered to include an embodiment that includes one or more of all other possible combinations of A, B, C, D, even though this embodiment may not be explicitly recited in text below.
The following description provides examples, and does not limit the scope, applicability, or examples set forth in the claims. Changes may be made in the function and arrangement of elements described without departing from the scope of the disclosure. Various examples may omit, substitute, or add various procedures or components as appropriate. For example, the described methods may be performed in an order different than the order described, and various steps may be added, omitted, or combined. Furthermore, features described with respect to some examples may be combined into other examples.
Referring to fig. 1, fig. 1 is a schematic flow chart of a design method of a dark field condenser for a metallographic microscope according to an embodiment of the present application. In an embodiment of the present application, the method includes:
s101, drawing a design image in a drawing surface of drawing software based on objective lens parameters of a metallographic microscope to be designed, wherein the design image comprises an objective lens structure, a system optical axis and a dark field light illumination range.
In the embodiment of the application, the drawing software can adopt AutoCAD software, and the application draws the design image based on the related parameters of the objective lens of the metallographic microscope in the drawing software, so that the design image can contain data images such as an objective lens structure, a system optical axis, a dark field light illumination range and the like.
In one possible embodiment, step S101 includes:
acquiring objective lens parameters of a metallographic microscope to be designed, wherein the objective lens parameters comprise an objective lens central optical axis, a working distance parameter and an objective lens magnification;
determining the center point of the specimen surface of the observed specimen based on the central optical axis of the objective lens and the working distance parameter;
drawing a horizontal central line passing through the center point of the specimen surface in drawing software, and determining the horizontal central line as a system optical axis;
calculating the view range of the observed specimen according to the magnification of the objective lens, and determining the view range as a dark view field light illumination range;
and drawing a design image according to the optical axis of the system, the dark field light illumination range and the objective lens structure.
The observation specimen can be understood as a target sample needing to be observed through a designed dark field condenser in the embodiment of the application.
In the embodiment of the application, the objective lens parameters of the metallographic microscope to be designed are obtained, so that the objective lens central optical axis, the working distance parameter, the objective lens magnification and other parameters of the objective lens corresponding to the objective lens are obtained. As shown in fig. 2, taking the 10-fold objective lens as an example, the specimen plane center point O1 can be determined according to the objective lens central optical axis and the working distance parameter of 10 mm. A horizontal center line is drawn through O1, which can be used as the optical axis of the system. And calculating the field range of the observed specimen to be 2mm according to the magnification of the objective lens by 10x, namely determining the light illumination range of the dark field to be 2 mm. After the data are obtained, a design image can be drawn on the drawing.
S102, drawing at least two parallel light rays parallel to the optical axis of the system in the design image, calculating a convergence point of the parallel light rays according to a preset boundary condition, and generating divergent light rays passing through the convergence point according to the dark field light ray illumination range.
The convergence point can be understood in the embodiment of the present application as a point where the designed parallel rays are calculated to be expected to converge after being reflected by the paraboloid.
The divergent light rays in the embodiment of the present application can be understood as light rays that are diverged out after each light ray in the dark field light illumination range passes through the convergence point.
In the embodiment of the present application, the parallel light rays are drawn according to the spatial position of the incident parallel light rays in the horizontal direction, and the parallel light rays are parallel to the optical axis of the system. After the parallel light rays are drawn, a convergence point of the expected parallel light rays for convergence is calculated according to a preset boundary condition, then divergent light rays passing through the convergence point are generated according to a determined dark field light ray illumination range, and then the divergence condition of the light rays passing through the convergence point after convergence is determined.
In one embodiment, the calculating the convergence point of the parallel light rays according to the preset boundary condition includes:
determining a constraint relation corresponding to a preset boundary condition, wherein the boundary condition is obtained based on a boundary condition analysis method;
and calculating and determining a convergence point of the parallel light rays so that the convergence point simultaneously satisfies a plurality of constraint relations.
In the embodiment of the application, a plurality of boundary conditions can be determined and obtained by using a boundary condition analysis method. Each boundary condition corresponds to a constraint relation, and the integral design of the reflecting surface curve of the dark field condenser can be simply and conveniently realized by using the boundary constraint relation and drawing software. The calculation of the determined convergence point requires that a plurality of constraint relationships be satisfied simultaneously.
Specifically, there may be five boundary conditions, which are: 1. the illumination boundary, namely the annular parallel light passing through the objective lens group, is determined by the size of the annular diaphragm of the objective lens rear seat, and the corresponding constraint relationship can be expressed that the outermost parallel light and the innermost parallel light are both reflected and utilized. 2. The light spot size, namely the oblique illumination range of the observation specimen converged by the reflector, is determined by the observation ranges of the objective lenses with different magnifications, and the constraint relation can be expressed as that the light spot size is equal to the field size of the objective lens. 3. The divergence angle, namely the inclination angle of the reflected illumination light incident on the observation specimen, is determined by the curved surface of the dark field condenser, and the constraint relation can be expressed as the reflected light of the dark field condenser and can not enter the main imaging light path of the objective lens. 4. The working distance, namely the distance from the front group of the objective lens to the observed specimen, is determined by the optical imaging system of the objective lens, and the constraint relation can be expressed by adding a dark field condenser structure, so that the working distance of the high power objective lens cannot be lost. 5. The structure characteristic, namely the front group structure of the lens, is determined by an objective lens imaging system and an objective lens mechanical mechanism, and the constraint relation can be expressed as the reflected light reflected by the dark field condenser and can not be shielded by the front group structure.
Illustratively, taking a 10-time objective lens as an example, the divergence condition of the light rays passing through the convergence point O after being converged is determined according to the numerical aperture parameter of the 10-time objective lens. In this case, the convergence point needs to satisfy three important boundary conditions, and firstly, the light rays which are emitted to the surface of the specimen through the O point need to cover the illumination range of the whole specimen; then the illumination light can not enter the imaging main light path after being reflected by the specimen mirror surface, namely can not enter the glass lens closest to the observation specimen. The internal structural characteristics of the objective lens are also considered, and the diverging light beam passing through the point O is ensured not to be shielded by the objective lens assembly (namely, the glass lens and the metal structure which are closest to the observed sample). It should also be taken into account that the working distance of the objective lens cannot be lost, the original working distance of the objective lens is 10, and after the paraboloid of the condenser lens is set, the new working distance of the objective lens is equal to the horizontal distance between the point O1 and the point A, and in order to ensure the final effect, the distance cannot be reduced too much.
Furthermore, as can be seen in fig. 2, the O-point is not on the objective lens imaging system optical axis, but is offset around the parabolic center line. This is to expand the illumination range and meet the requirement of 2mm field of view.
S103, determining intersection points of the divergent light rays and the parallel light rays, and fitting according to the intersection points to generate a reflection paraboloid curve.
In the embodiment of the present application, after the divergent light rays are generated by drawing, the intersection points of the divergent light rays and the generated parallel light rays can be determined, and the reflection parabolic curve can be generated by fitting each intersection point, so as to generate the dark field condenser mirror surface in the following.
In one embodiment, the generating a reflected parabolic curve according to each intersection fitting includes:
measuring a first distance between the convergence point and any intersection point, and determining a parabola directrix so as to enable a straight-line distance from the intersection point to the parabola directrix to be the first distance;
fitting the intersection points to generate a reflection paraboloid curve;
and determining a parabolic focus of the reflecting parabolic curve based on the parabolic quasi-curve, and calculating to obtain a parabolic equation of the reflecting parabolic curve according to the offset between the central line of the parabola and the optical axis of the system.
In the embodiment of the present application, the distance from a point on the parabola to the focus of the parabola is equal to the distance from the point to the parabola directrix. As shown in fig. 3, after the first distance of the AO line segment is measured based on the measuring tool, a parabola is drawn and generated so that the distance from the parabola to the point a is the same as the first distance. Fitting each intersection point to generate a reflection paraboloid curve, and then utilizing a parabolic equation
It can be seen that p is the distance from the quasi-line D to the focus of the parabola, and the value of p can be measured according to the curve fitted in the figure. Considering that the paraboloid rotates around the center line of the parabola, an offset needs to be added to the equation, and the equation becomes:
wherein y1 denotes the parabolic criterion
And measuring the distance between the central line of the parabola and the two lines of the optical axis of the system to be y1 by the displacement deviated along the y axis, wherein the obtained parabola equation is the final parabola equation of the curve of the reflecting paraboloid.
And S104, rotating the reflection paraboloid curve by taking the optical axis of the system as an axis to determine a dark field condenser mirror surface.
In the embodiment of the application, after the reflection paraboloid curve is obtained, the generated dark field condenser lens surface can be obtained by rotating the reflection paraboloid curve based on the optical axis of the system.
In one possible embodiment, step S104 includes:
intercepting a curve section of the reflecting parabolic curve, wherein the curve section is a curve segment between the reflecting parabolic curve and the intersection of the objective structure;
and rotating the curve section by taking the optical axis of the system as an axis to obtain the dark field condenser lens.
In the present embodiment, as shown in FIG. 3, only a partial curve segment of the reflective parabolic curve is required to generate the dark field condenser lens. Therefore, a curve segment is firstly cut from the generated reflection paraboloid curve, and then the dark field condenser lens surface is obtained by rotating based on the curve segment.
In one embodiment, at least three of the parallel light rays are provided;
the calculating the convergence point of the parallel light according to the preset boundary condition and generating the divergent light passing through the convergence point according to the illumination range of the dark field light comprises the following steps:
dividing two adjacent parallel light rays into a group, respectively calculating convergence points of the parallel light rays of each group according to a preset boundary condition, and generating each divergent light ray passing through each convergence point according to the dark field light ray illumination range;
the determining the intersection points of the divergent light rays and the parallel light rays and fitting according to each intersection point to generate a reflection paraboloid curve comprises the following steps:
determining intersection points of the divergent light rays and the parallel light ray groups corresponding to the divergent light rays, and fitting according to the intersection points to generate a reflection paraboloid curve segment;
and progressively superposing the reflection paraboloid curve segments to obtain a reflection paraboloid curve.
In the embodiment of the present application, as shown in fig. 4, 5, and 6, for the paraboloid of the dark field condenser mirror to be designed and generated, in order to ensure the accuracy thereof, the paraboloid may be split into multiple sections of paraboloids, and the reflection paraboloid curve corresponding to each section of paraboloid may be calculated respectively. Specifically, as long as two intersection points of two parallel light rays and divergent light rays passing through the set convergence point are determined, a parabolic curve can be calculated, so that two adjacent parallel light rays are divided into a parallel light ray group, the convergence point is calculated for each group of parallel light ray group according to boundary conditions, and the divergent light rays passing through each convergence point are generated according to the illumination range of the dark field light rays. Because each divergent light ray corresponds to a convergent point, and each convergent point has a group of parallel light rays corresponding to the convergent point, the intersection point of each group of parallel light rays and the corresponding divergent light rays is respectively calculated and determined, and a reflection paraboloid curve segment is generated through intersection point fitting. And after all the groups of the reflecting paraboloid curve segments are obtained, progressively superposing all the reflecting paraboloid curve segments to obtain a final reflecting paraboloid curve. Each section of paraboloid can provide once uniform illumination for observing a specimen, light rays are fully utilized, and multiple times of illumination superposition are performed, so that the brightness and the uniformity of dark field illumination are improved.
The following describes in detail the design apparatus of the dark field condenser for a metallographic microscope according to an embodiment of the present application with reference to fig. 7. It should be noted that the apparatus for designing a darkfield condenser for a metallurgical microscope shown in fig. 7 is used for executing the method of the embodiment shown in fig. 1 of the present application, and for convenience of description, only the portion related to the embodiment of the present application is shown, and details of the technology are not disclosed, please refer to the embodiment shown in fig. 1 of the present application.
Referring to fig. 7, fig. 7 is a schematic structural diagram of a design apparatus of a darkfield condenser for a metallographic microscope according to an embodiment of the present application. As shown in fig. 7, the apparatus includes:
the drawing module 701 is used for drawing a design image in a drawing surface of drawing software based on objective lens parameters of a metallographic microscope to be designed, wherein the design image comprises an objective lens structure, a system optical axis and a dark field light illumination range;
a calculating module 702, configured to draw at least two parallel light rays parallel to the optical axis of the system in the design image, calculate a convergence point of the parallel light rays according to a preset boundary condition, and generate divergent light rays passing through the convergence point according to the dark field light illumination range;
a determining module 703, configured to determine intersection points of the divergent light rays and the parallel light rays, and generate a reflection parabolic curve according to fitting of each intersection point;
and a rotating module 704 for rotating the reflective parabolic curve with the system optical axis as an axis to determine a dark field condenser mirror.
In one possible implementation, the rendering module 701 includes:
the objective lens parameter acquiring unit is used for acquiring objective lens parameters of the metallographic microscope to be designed, wherein the objective lens parameters comprise an objective lens central optical axis, a working distance parameter and an objective lens magnification;
the specimen surface central point determining unit is used for determining the specimen surface central point of the observed specimen based on the objective lens central optical axis and the working distance parameter;
the system optical axis determining unit is used for drawing a horizontal central line passing through the center point of the specimen surface in drawing software and determining the horizontal central line as a system optical axis;
the visual field range calculating unit is used for calculating the visual field range of the observed specimen according to the magnification of the objective lens and determining the visual field range as a dark visual field light illumination range;
and the design image drawing unit is used for drawing a design image according to the system optical axis, the dark field light illumination range and the objective lens structure.
In one possible implementation, the calculation module 702 includes:
the constraint relation determining unit is used for determining a constraint relation corresponding to a preset boundary condition, and the boundary condition is obtained based on a boundary condition analysis method;
and the convergence point calculation unit is used for calculating and determining the convergence point of the parallel light rays so as to enable the convergence point to simultaneously satisfy a plurality of constraint relations.
In one possible implementation, the determining module 703 includes:
a first distance measuring unit, configured to measure a first distance between the convergence point and any one of the intersection points, and determine a parabolic directrix, so that a linear distance from the intersection point to the parabolic directrix is the first distance;
the fitting unit is used for fitting the intersection points to generate a reflection paraboloid curve;
and the parabolic focus determining unit is used for determining the parabolic focus of the reflecting parabolic curve based on the parabolic quasi-curve and calculating a parabolic equation of the reflecting parabolic curve according to the offset between the parabolic center line and the system optical axis.
In one possible implementation, the calculation module 702 includes:
the dividing unit is used for dividing two adjacent parallel light rays into one group, respectively calculating convergence points of the parallel light rays of each group according to a preset boundary condition, and generating each divergent light ray passing through each convergence point according to the dark field light ray illumination range;
the determining module 703 includes:
the curve segment determining unit is used for determining the intersection point of each divergent light ray and the parallel light ray group corresponding to the divergent light ray and generating a reflective paraboloid curve segment according to the fitting of each intersection point;
and the progressive superposition unit is used for progressively superposing the reflection paraboloid curve segments to obtain a reflection paraboloid curve.
In one possible implementation, the rotation module 704 includes:
the intercepting unit is used for intercepting a curve section of the reflecting parabolic curve, wherein the curve section is a curve segment between two intersection positions of the reflecting parabolic curve and the objective lens structure;
and the rotating unit is used for rotating the curve section by taking the optical axis of the system as an axis to obtain the dark field condenser lens.
It is clear to a person skilled in the art that the solution according to the embodiments of the present application can be implemented by means of software and/or hardware. The "unit" and "module" in this specification refer to software and/or hardware that can perform a specific function independently or in cooperation with other components, where the hardware may be, for example, a Field-Programmable Gate Array (FPGA), an Integrated Circuit (IC), or the like.
Each processing unit and/or module in the embodiments of the present application may be implemented by an analog circuit that implements the functions described in the embodiments of the present application, or may be implemented by software that executes the functions described in the embodiments of the present application.
Referring to fig. 8, a schematic structural diagram of an electronic device according to an embodiment of the present application is shown, where the electronic device may be used to implement the method in the embodiment shown in fig. 1. As shown in fig. 8, the electronic device 800 may include: at least one central processor 801, at least one network interface 804, a user interface 803, a memory 805, at least one communication bus 802.
Wherein a communication bus 802 is used to enable connective communication between these components.
The user interface 803 may include a Display screen (Display) and a Camera (Camera), and the optional user interface 803 may also include a standard wired interface and a wireless interface.
The network interface 804 may optionally include a standard wired interface, a wireless interface (e.g., WI-FI interface).
The central processor 801 may include one or more processing cores, among others. The central processor 801 connects various parts within the entire electronic device 800 using various interfaces and lines, and performs various functions of the terminal 800 and processes data by executing or executing instructions, programs, code sets, or instruction sets stored in the memory 805 and calling data stored in the memory 805. Alternatively, the central Processing unit 801 may be implemented in at least one hardware form of Digital Signal Processing (DSP), Field-Programmable Gate Array (FPGA), and Programmable Logic Array (PLA). The CPU 801 may integrate one or a combination of a Central Processing Unit (CPU), a Graphics Processing Unit (GPU), a modem, and the like. Wherein, the CPU mainly processes an operating system, a user interface, an application program and the like; the GPU is used for rendering and drawing the content required to be displayed by the display screen; the modem is used to handle wireless communications. It is to be understood that the modem may be implemented by a single chip without being integrated into the central processing unit 801.
The Memory 805 may include a Random Access Memory (RAM) or a Read-Only Memory (Read-Only Memory). Optionally, the memory 805 includes a non-transitory computer-readable medium. The memory 805 may be used to store instructions, programs, code sets, or instruction sets. The memory 805 may include a stored program area and a stored data area, wherein the stored program area may store instructions for implementing an operating system, instructions for at least one function (such as a touch function, a sound playing function, an image playing function, etc.), instructions for implementing the various method embodiments described above, and the like; the storage data area may store data and the like referred to in the above respective method embodiments. The memory 805 may optionally be at least one memory device located remotely from the central processor 801 as previously described. As shown in fig. 8, memory 805, which is a type of computer storage media, may include an operating system, a network communication module, a user interface module, and program instructions.
In the electronic device 800 shown in fig. 8, the user interface 803 is mainly used as an interface for providing input for a user, and acquiring data input by the user; the cpu 801 may be configured to call up the design application program of the dark field condenser for the metallographic microscope stored in the memory 805, and specifically perform the following operations:
drawing a design image in a drawing surface of drawing software based on objective lens parameters of a metallographic microscope to be designed, wherein the design image comprises an objective lens structure, a system optical axis and a dark field light illumination range;
drawing at least two parallel light rays parallel to the optical axis of the system in the design image, calculating a convergence point of the parallel light rays according to a preset boundary condition, and generating divergent light rays passing through the convergence point according to the illumination range of the dark field light rays;
determining intersection points of the divergent light rays and the parallel light rays, and fitting according to the intersection points to generate a reflection paraboloid curve;
and rotating the reflecting paraboloid curve by taking the optical axis of the system as an axis to determine a dark field condenser mirror surface.
The present application also provides a computer-readable storage medium having stored thereon a computer program which, when executed by a processor, performs the steps of the above-described method. The computer-readable storage medium may include, but is not limited to, any type of disk including floppy disks, optical disks, DVD, CD-ROMs, microdrive, and magneto-optical disks, ROMs, RAMs, EPROMs, EEPROMs, DRAMs, VRAMs, flash memory devices, magnetic or optical cards, nanosystems (including molecular memory ICs), or any type of media or device suitable for storing instructions and/or data.
It should be noted that, for simplicity of description, the above-mentioned method embodiments are described as a series of acts or combination of acts, but those skilled in the art will recognize that the present application is not limited by the order of acts described, as some steps may occur in other orders or concurrently depending on the application. Further, those skilled in the art should also appreciate that the embodiments described in the specification are preferred embodiments and that the acts and modules referred to are not necessarily required in this application.
In the foregoing embodiments, the descriptions of the respective embodiments have respective emphasis, and for parts that are not described in detail in a certain embodiment, reference may be made to related descriptions of other embodiments.
In the embodiments provided in the present application, it should be understood that the disclosed apparatus may be implemented in other manners. For example, the above-described embodiments of the apparatus are merely illustrative, and for example, the division of the units is only one type of division of logical functions, and there may be other divisions when actually implementing, for example, a plurality of units or components may be combined or may be integrated into another system, or some features may be omitted, or not implemented. In addition, the shown or discussed mutual coupling or direct coupling or communication connection may be an indirect coupling or communication connection of some service interfaces, devices or units, and may be an electrical or other form.
The units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of the embodiment.
In addition, functional units in the embodiments of the present application may be integrated into one processing unit, or each unit may exist alone physically, or two or more units are integrated into one unit. The integrated unit can be realized in a form of hardware, and can also be realized in a form of a software functional unit.
The integrated unit, if implemented in the form of a software functional unit and sold or used as a stand-alone product, may be stored in a computer readable memory. Based on such understanding, the technical solution of the present application may be substantially implemented or a part of or all or part of the technical solution contributing to the prior art may be embodied in the form of a software product stored in a memory, and including several instructions for causing a computer device (which may be a personal computer, a server, or a network device) to execute all or part of the steps of the method described in the embodiments of the present application. And the aforementioned memory comprises: various media capable of storing program codes, such as a usb disk, a Read-Only Memory (ROM), a Random Access Memory (RAM), a removable hard disk, a magnetic disk, or an optical disk.
Those skilled in the art will appreciate that all or part of the steps in the methods of the above embodiments may be implemented by a program, which is stored in a computer-readable memory, and the memory may include: flash disks, Read-Only memories (ROMs), Random Access Memories (RAMs), magnetic or optical disks, and the like.
The above description is only an exemplary embodiment of the present disclosure, and the scope of the present disclosure should not be limited thereby. That is, all equivalent changes and modifications made in accordance with the teachings of the present disclosure are intended to be included within the scope of the present disclosure. Embodiments of the present disclosure will be readily apparent to those skilled in the art from consideration of the specification and practice of the disclosure herein. This application is intended to cover any variations, uses, or adaptations of the disclosure following, in general, the principles of the disclosure and including such departures from the present disclosure as come within known or customary practice within the art to which the disclosure pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the disclosure being indicated by the following claims.
Claims (9)
1. A method for designing a dark field condenser for a metallographic microscope, the method comprising:
drawing a design image in a drawing surface of drawing software based on objective lens parameters of a metallographic microscope to be designed, wherein the design image comprises an objective lens structure, a system optical axis and a dark field light illumination range;
drawing at least two parallel light rays parallel to the optical axis of the system in the design image, calculating a convergence point of the parallel light rays according to a preset boundary condition, and generating divergent light rays passing through the convergence point according to the illumination range of the dark field light rays;
determining intersection points of the divergent light rays and the parallel light rays, and fitting according to the intersection points to generate a reflection paraboloid curve;
and rotating the reflecting paraboloid curve by taking the optical axis of the system as an axis to determine a dark field condenser mirror surface.
2. The method of claim 1, wherein the drawing of the design image in the drawing plane of the drawing software based on objective lens parameters of the metallurgical microscope to be designed comprises:
acquiring objective lens parameters of a metallographic microscope to be designed, wherein the objective lens parameters comprise an objective lens central optical axis, a working distance parameter and an objective lens magnification;
determining the center point of the specimen surface of the observed specimen based on the central optical axis of the objective lens and the working distance parameter;
drawing a horizontal central line passing through the center point of the specimen surface in drawing software, and determining the horizontal central line as a system optical axis;
calculating the view range of the observed specimen according to the magnification of the objective lens, and determining the view range as a dark view field light illumination range;
and drawing a design image according to the optical axis of the system, the dark field light illumination range and the objective lens structure.
3. The method of claim 1, wherein the calculating the convergence point of the parallel light rays according to a preset boundary condition comprises:
determining a constraint relation corresponding to a preset boundary condition, wherein the boundary condition is obtained based on a boundary condition analysis method;
and calculating and determining a convergence point of the parallel light rays so that the convergence point simultaneously satisfies a plurality of constraint relations.
4. The method of claim 1, wherein said fitting from each of said intersection points to generate a reflected parabolic curve comprises:
measuring a first distance between the convergence point and any intersection point, and determining a parabola directrix so as to enable a straight-line distance from the intersection point to the parabola directrix to be the first distance;
fitting the intersection points to generate a reflection paraboloid curve;
and determining a parabolic focus of the reflecting parabolic curve based on the parabolic quasi-curve, and calculating to obtain a parabolic equation of the reflecting parabolic curve according to the offset between the central line of the parabola and the optical axis of the system.
5. The method of claim 1, wherein there are at least three of the parallel light rays;
the calculating the convergence point of the parallel light according to the preset boundary condition and generating the divergent light passing through the convergence point according to the illumination range of the dark field light comprises the following steps:
dividing two adjacent parallel light rays into a group, respectively calculating convergence points of the parallel light rays of each group according to a preset boundary condition, and generating each divergent light ray passing through each convergence point according to the dark field light ray illumination range;
the determining the intersection points of the divergent light rays and the parallel light rays and fitting according to each intersection point to generate a reflection paraboloid curve comprises the following steps:
determining intersection points of the divergent light rays and the parallel light ray groups corresponding to the divergent light rays, and fitting according to the intersection points to generate a reflection paraboloid curve segment;
and progressively superposing the reflection paraboloid curve segments to obtain a reflection paraboloid curve.
6. The method of claim 1, wherein said rotating said reflective parabolic curve about said system optical axis to define a dark field condenser lens comprises:
intercepting a curve section of the reflecting parabolic curve, wherein the curve section is a curve segment between the reflecting parabolic curve and the intersection of the objective structure;
and rotating the curve section by taking the optical axis of the system as an axis to obtain the dark field condenser lens.
7. A device for designing a dark field condenser for a metallurgical microscope, the device comprising:
the drawing module is used for drawing a design image in a drawing surface of drawing software based on objective lens parameters of the metallographic microscope to be designed, wherein the design image comprises an objective lens structure, a system optical axis and a dark field light illumination range;
the calculation module is used for drawing at least two parallel light rays parallel to the optical axis of the system in the design image, calculating a convergence point of the parallel light rays according to a preset boundary condition, and generating divergent light rays passing through the convergence point according to the dark field light ray illumination range;
the determining module is used for determining intersection points of the divergent light rays and the parallel light rays and generating a reflection paraboloid curve according to the fitting of each intersection point;
and the rotating module is used for rotating the reflecting paraboloid curve by taking the optical axis of the system as an axis to determine the dark field condenser lens surface.
8. An electronic device comprising a memory, a processor and a computer program stored on the memory and executable on the processor, characterized in that the steps of the method according to any of claims 1-6 are implemented when the computer program is executed by the processor.
9. A computer-readable storage medium, on which a computer program is stored which, when being executed by a processor, carries out the steps of the method according to any one of claims 1 to 6.
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