CN101586748A - Illuminating apparatus - Google Patents
Illuminating apparatus Download PDFInfo
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- CN101586748A CN101586748A CNA2009100490476A CN200910049047A CN101586748A CN 101586748 A CN101586748 A CN 101586748A CN A2009100490476 A CNA2009100490476 A CN A2009100490476A CN 200910049047 A CN200910049047 A CN 200910049047A CN 101586748 A CN101586748 A CN 101586748A
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- light
- light source
- concave mirror
- transparent area
- lighting device
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Abstract
The invention, in particular, relates an illuminating apparatus which belongs to the optical etching device field. The illuminating apparatus comprises a light source, further a concave mirror and convex mirror that are coaxial. The concave mirror has a transparent area and a non transparent area. There are at least two light sources which are arranged on a same circle with optical axis as a central axis. The light emitted by the at least two light sources pass through the non transparent area of the concave mirror and the emitted light reflected by the convex mirror passes through the transparent area of the convex mirror and the two lights are focused on the illuminating surface. Because of multi-light source focused on the same illuminating surface, therefore actual use light power of the illuminating surface can be improved so that alignment accuracy requirement is improved. The multi-light source is arranged evenly, which therefore improves evenness of illumination in an alignment system, further improving linear sensitivity in the alignment area to improve alignment accuracy requirement.
Description
Technical field
The invention belongs to the lithographic equipment field, relate in particular to a kind of lighting device.
Background technology
Use a lot of alignment systems in the litho machine system, aim at as smart prealignment of mask and mask CHUCK, its alignment precision need be realized micron level, usually the method that adopts as shown in Figure 1: directly use LD laser light source or led light source to shine on certain specific markers, under mark, use 4 quadrant detector to survey light intensity, in the process of marker motion, 4 quadrant detector detects intensity variations, the intensity variations amount is converted to the location variation of mark by algorithm.The shortcoming of this method is that illumination uniformity is poor, luminous power is low, causes alignment precision poor.
In view of this, how solving illumination uniformity difference and the low problem of luminous power in the said method, is the technical problem that those skilled in the art needs to be resolved hurrily.
Summary of the invention
In view of this, main purpose of the present invention is to improve the actual use of illuminated area luminous power, thereby improves the alignment precision requirement.Another object of the present invention is to improve the uniformity of throwing light in the alignment system, thereby improves the alignment precision requirement.
For solving the problems of the technologies described above, the present invention has adopted following technical scheme:
A kind of lighting device, comprise light source, also comprise concave mirror and convex reflecting mirror, and described concave mirror and convex reflecting mirror are coaxial, described concave mirror has transparent area and light tight district, described light source is at least two and to be located at described optical axis be on the same circumference of central shaft, and the light that described at least two light sources send passes through the transparent area of concave mirror respectively and converges at illuminated area through the light tight district of described concave mirror and the emergent light after the convex reflecting mirror reflection successively.A field of illumination of specifying size is collected and converged to two above light sources simultaneously, can improve the actual use of illuminated area luminous power, thereby improve the alignment precision requirement.
Described transparent area is positioned at the central authorities of concave mirror.
Described transparent area is circular.
It is on the same circumference of central shaft that described light source is distributed in the optical axis.Because therefore the uniform setting of multiple light courcess, can improve the uniformity of throwing light in the alignment system, thereby further improve the alignment precision requirement.
Described light source is LD LASER Light Source or led light source.
Beneficial effect of the present invention:
Therefore the present invention, can improve the actual use of illuminated area luminous power owing to adopt multiple light courcess to be pooled on the illuminated area, thereby improves the alignment precision requirement.Because therefore the uniform setting of multiple light courcess can improve the uniformity of throwing light in the alignment system, and then improves the linear sensitivity in the alignment area scope, thereby further improves the alignment precision requirement.
Description of drawings
Fig. 1 is the schematic diagram of existing lighting device;
Fig. 2 is lighting device embodiment 1 structural representation of the present invention;
Fig. 3 is the schematic side view of lighting device embodiment 1 of the present invention;
Fig. 4 is the schematic side view of lighting device embodiment 2 of the present invention;
Among the figure: the 1-light source; The 2-concave mirror, 21-(concave mirror) transparent area; The light tight district of 22-(concave mirror), the 3-convex reflecting mirror; The 4-illuminated area.
The specific embodiment
Below in conjunction with accompanying drawing the present invention is done explanation clearly and completely:
See also Fig. 2 and Fig. 3, this lighting device comprises light source 1, concave mirror 2 and convex reflecting mirror 3, and described concave mirror 2 and convex reflecting mirror 3 are coaxial.Described concave mirror 2 has transparent area 21 and light tight district 22.Described light source 1 is at least two and to be located at described optical axis be on the same circumference of central shaft.Described light source 1 is LD LASER Light Source or led light source, also can use the light source of other illuminations simultaneously.Light source described in the present embodiment 1 is two LD light sources 1.Described concave mirror 2 and illumination colimated light system of convex reflecting mirror 3 common compositions according to the demand of actual alignment system, are adjusted the focal length of illumination colimated light system, thereby can be obtained the radius of curvature of concave mirror 2 and convex reflecting mirror 3.The light that described two LD light sources 1 send passes through the transparent area 21 of concave mirror 2 respectively and converges at illuminated area 4 after the light tight district 22 of described concave mirror 2 and convex reflecting mirror 3 reflections successively.Owing to adopting multiple light courcess 1 and these light sources being pooled on the same illuminated area 4, can improve total luminous energy of illuminated area 4, promptly improve the actual use luminous power of illuminated area 4, thereby can effectively improve alignment precision.
Described transparent area 21 is positioned at the central authorities of concave mirror 2.Described transparent area 21 is circular.The diameter of described transparent area 21 need satisfy is enough to make the reverberation of convex reflecting mirror 3 to pass through, and promptly can not block the light beam that reflects from convex reflecting mirror 3.
Of course, it is on the same circumference of central shaft that described two LD light sources 1 evenly are arranged at the optical axis, promptly makes each light source 1 equate with circumference between the light source 1.Because multiple light courcess 1 evenly is provided with, and these light sources are aligned on the same illuminated area 4 simultaneously, can improve the uniformity of throwing light in this alignment system, and then improve the linear sensitivity in the alignment area scope, thereby improve alignment precision.In addition, also can utilize the adjusting (inclination, eccentric or rotation) of single source 1 relative position to improve illumination uniformity, and then improve the alignment precision requirement.
Embodiment 2
See also Fig. 4, the difference of present embodiment and embodiment 1 is that light source 1 adopts 5 uniform led light sources.Light source 1 is many more, and the luminous energy that is pooled to illuminated area 4 is many more, can improve the illuminated area 4 actual luminous powers of using.4 led light source 1 uniform being collimated to simultaneously on the same illuminated area 4 can be improved illumination uniformity, thereby improve the alignment precision requirement.
Therefore the present invention, can improve the actual use of illuminated area luminous power owing to adopt multiple light courcess to be pooled on the illuminated area, thereby improves the alignment precision requirement.Because therefore the uniform setting of multiple light courcess can improve the uniformity of throwing light in the alignment system, and then improves the linear sensitivity in the alignment area scope, thereby further improves the alignment precision requirement.In a word, this lighting device can be realized better illumination uniformity and bigger luminous power.
Though the present invention discloses as above with preferred embodiment, so it is not in order to limit the present invention.The persond having ordinary knowledge in the technical field of the present invention, without departing from the spirit and scope of the present invention, when being used for a variety of modifications and variations.Therefore protection scope of the present invention is as the criterion when looking claims person of defining.
Claims (5)
1. lighting device, comprise light source, it is characterized in that: also comprise concave mirror and convex reflecting mirror, and described concave mirror and convex reflecting mirror are coaxial, described concave mirror has transparent area and light tight district, described light source is at least two and to be located at described optical axis be on the same circumference of central shaft, and the light that described at least two light sources send passes through the transparent area of concave mirror respectively and converges at illuminated area through the light tight district of described concave mirror and the emergent light after the convex reflecting mirror reflection successively.
2. lighting device as claimed in claim 1 is characterized in that: described transparent area is positioned at the central authorities of concave mirror.
3. lighting device as claimed in claim 2 is characterized in that: described transparent area is for circular.
4. as any described lighting device of claim 1, it is characterized in that: it is on the same circumference of central shaft that described light source is distributed in the optical axis.
5. lighting device as claimed in claim 1 is characterized in that: described light source is LD LASER Light Source or led light source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2009100490476A CN101586748A (en) | 2009-04-09 | 2009-04-09 | Illuminating apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2009100490476A CN101586748A (en) | 2009-04-09 | 2009-04-09 | Illuminating apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101586748A true CN101586748A (en) | 2009-11-25 |
Family
ID=41371116
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2009100490476A Pending CN101586748A (en) | 2009-04-09 | 2009-04-09 | Illuminating apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101586748A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103105737A (en) * | 2011-11-10 | 2013-05-15 | 上海微电子装备有限公司 | Photolithography apparatus adopting spliced multiple light sources |
| CN105651779A (en) * | 2016-04-08 | 2016-06-08 | 核工业理化工程研究院 | Reflection type multiband laser focusing device |
| CN107797295A (en) * | 2017-11-14 | 2018-03-13 | 海信集团有限公司 | A kind of light source shrink beam system, laser light-source device and laser projection system |
| CN109114472A (en) * | 2018-09-03 | 2019-01-01 | 广东玖洲机场建设有限公司 | A kind of adjust automatically airport runway lights angular system |
-
2009
- 2009-04-09 CN CNA2009100490476A patent/CN101586748A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103105737A (en) * | 2011-11-10 | 2013-05-15 | 上海微电子装备有限公司 | Photolithography apparatus adopting spliced multiple light sources |
| CN105651779A (en) * | 2016-04-08 | 2016-06-08 | 核工业理化工程研究院 | Reflection type multiband laser focusing device |
| CN105651779B (en) * | 2016-04-08 | 2020-06-16 | 核工业理化工程研究院 | Reflective laser multiband focusing device |
| CN107797295A (en) * | 2017-11-14 | 2018-03-13 | 海信集团有限公司 | A kind of light source shrink beam system, laser light-source device and laser projection system |
| CN109114472A (en) * | 2018-09-03 | 2019-01-01 | 广东玖洲机场建设有限公司 | A kind of adjust automatically airport runway lights angular system |
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Application publication date: 20091125 |