CN201837405U - Surface acoustic wave measuring sensor - Google Patents
Surface acoustic wave measuring sensor Download PDFInfo
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- CN201837405U CN201837405U CN2010205711492U CN201020571149U CN201837405U CN 201837405 U CN201837405 U CN 201837405U CN 2010205711492 U CN2010205711492 U CN 2010205711492U CN 201020571149 U CN201020571149 U CN 201020571149U CN 201837405 U CN201837405 U CN 201837405U
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Abstract
The utility model relates to a surface acoustic wave measuring sensor, which comprises a piezoelectric base, an interdigital transducer and a reflector, wherein the piezoelectric base is used for sensing physical quantity to be measured, the interdigital transducer and the reflector are deposited on the upper surface of the piezoelectric base by a surface micromachining technology, the interdigital transducer receives driving energy needed by the work of a surface acoustic wave sensor by an antenna connected with the interdigital transducer, the driving energy is returned back to a radio frequency pulse echo signal, and the reflector is used for generating radio frequency pulse echo signal. Compared with the existing sensor, the surface acoustic wave measuring sensor has the following technical characteristics: on the premise of guaranteeing a certain signal strength, physical quantity can be guaranteed to be measured in a large range and with high accuracy; the problem that the surface acoustic wave sensor in the prior art can meet only one rather than two indexes on the range and accuracy of signal measuring; the surface acoustic wave measuring sensor is simple in structure; and the physical quantity to be measured generates corresponding feedback signals by a method of analysis of a certain parameters, so that the problem of measuring the physical quantity accurately in a large range for the sensor is solved.
Description
Technical field
The utility model belongs to the surface acoustic wave field of sensing technologies, be specifically related to a kind of surface acoustic wave survey sensor, this sensor is a wireless passive sonic surface wave physical parameters measurement sensor, and it can detect the variation of extraneous measured physical quantity simultaneously on a large scale with pinpoint accuracy.
Background technology
Because surface acoustic wave sensor is simple in structure, volume is little, in light weight, good stability, wireless connections, need not power drives and susceptibility height, can be used in the multiple complicated rugged surroundings, from the eighties of last century the eighties, countries such as U.S., moral, day extensively carry out the research to the wireless passive sonic surface wave sensor.Surface acoustic wave sensor adopts the surface acoustic wave sensing technology, directly obtains work capacity from radiofrequency signal, need not the integrated power supply driving circuit, and institute's energy requirement is obtained by the external world, and produces corresponding data processing algorithm and measuring method.
The application of having achieved success of wireless passive sonic surface wave sensor in a lot of fields.In existing wherein a kind of scheme, surface acoustic wave sensor simple in structure, but because the characteristic of surface acoustic wave transmission, the measurement range of sensor measurement physical quantity and precision can not guarantee simultaneously, that is to say, if guarantee surface acoustic wave sensor big measurement range is arranged, then measuring accuracy is just lower; If guarantee surface acoustic wave sensor high measuring accuracy is arranged, then measurement range can be very not big, is difficult to find existing big measurement range in existing surface acoustic wave sensor, can guarantee high-precision surface acoustic wave sensor again simultaneously.In existing another scheme, reason owing to surface acoustic wave sensor structure itself, only send a radio-frequency pulse request signal to sensor the measuring period of each sensor, and therefore the sensor information amount that obtains is few, can not realize the measurement of large scale and high accuracy.
The utility model content
The technical problems to be solved in the utility model provides a kind of surface acoustic wave survey sensor, it can overcome existing defective, the pinpoint accuracy on a large scale that can realize measurand detects, and have wireless and passive, simple in structure, characteristics such as volume is little, in light weight and zero ageing rate, be adapted at work under the complex environment.
For achieving the above object, the technical scheme that the utility model adopted is:
A kind of surface acoustic wave survey sensor comprises: piezoelectric substrate, interdigital transducer, reverberator and antenna;
Above-mentioned piezoelectric substrate is used to respond to measured physical quantity;
Above-mentioned interdigital transducer and described reverberator are deposited on described piezoelectric substrate upper surface through surperficial micro fabrication;
Above-mentioned interdigital transducer receives the required driving energy of surface acoustic wave sensor work, and returns the radio-frequency pulse echoed signal by antenna;
Above-mentioned reverberator produces the radio-frequency pulse echoed signal thereby be used to be reflected in the surface acoustic wave that transmits on the piezoelectric substrate.
Preferably, above-mentioned reverberator comprises first reverberator, second reverberator and the 3rd reverberator, and described first reverberator, second reverberator and the 3rd reverberator are positioned on the surface acoustic wave transmission path that is produced by described interdigital transducer.
Preferably, above-mentioned piezoelectric substrate is to adopt the piezoelectric crystal thin slice to be made.
Preferably, above-mentioned piezoelectric crystal thin slice is that Y cuts the Z direction.
Preferably, the metal finger direction of above-mentioned first reverberator, second reverberator, the 3rd reverberator and interdigital transducer is perpendicular to the Z direction of described piezoelectric substrate upper surface.
Above-mentioned surface acoustic wave survey sensor, it also further includes antenna, and described antenna is the antenna of exterior antenna or process impedance matching network.
Preferably, above-mentioned interdigital transducer and described reverberator are metallic film, and preferably, it is the metallic aluminium film.
Preferably, the first above-mentioned reverberator is a reference reflector.
Preferably, the combination of above-mentioned first reverberator and second reverberator is as the reference reverberator.
After adopting technique scheme, the utility model is based on the lag line theory of surface acoustic wave and how the detected physical quantity feedback signal of surface acoustic wave sensor is used the SAW (Surface Acoustic Wave) delay line theory carry out the method that parameter is analyzed.Compare with existing sensors, the utlity model has following technical characterstic: produce characteristics according to the surface acoustic wave signal, width by control RF pulse request signal, make full use of the signal that reverberator returns, make the utility model under the prerequisite that guarantees certain signal intensity, to guarantee with high precision physical quantity to be detected on a large scale; Solve surface acoustic wave sensor in the prior art and on the scope of measuring-signal and precision, can only satisfy wherein index, the problem that cannot take into account; Simple in structure, by changing the ingenious difficult problem that solves prior art of width of RF pulse request signal; Make measured physical quantity produce the respective feedback signal by the certain parameter analytical approach, solved the problem that sensor detects physical quantity with a wide range of precise.
Description of drawings
Fig. 1 is the structural representation of the utility model sensor.
Embodiment
The utility model is described in further detail below in conjunction with drawings and Examples.
As shown in Figure 1, the utility model discloses a kind of surface acoustic wave survey sensor, and it comprises: piezoelectric substrate 1, interdigital transducer 2, reverberator 3 and antenna 4, wherein;
Piezoelectric substrate 1, it is the induction mechanism of measured physical quantity, its thickness can be according to the kind of the physical quantity that is detected and different (as the sizes of pressure, the variation of temperature scope) of range, and the carrying out of the wafer to be processed by choosing different-thickness when design adjusted accordingly.This piezoelectric substrate 1 is to be made of the wafer material with piezoelectric property, and in the present embodiment, this wafer material is the lithium niobate piezoelectric crystal thin slice that Y cuts the Z direction.
Fork can directly be connected with exterior antenna by the interdigital transducer extension line by transducer 2, perhaps, be connected with antenna 4 through impedance matching network, directly from the radio-frequency pulse request signal, obtain the required driving energy of surface acoustic wave sensor work, and return by first reverberator 31, second reverberator 32 and the 3rd reverberator 33 reflected backs corresponding to detecting the radio-frequency pulse echoed signal that physical quantity has out of phase information.
When carrying out the physical quantity detection, can be with first reverberator 31 as with reference to reverberator, RF (RF with second reverberator 32, it is the abbreviation of radio frequency, its meaning is meant radio frequency) pulse echo signal relatively detects physical quantity, the surface acoustic wave feedback signal of reference reflector records relative phase difference by comparing with the RF pulse echo signal of second reverberator 32, because phase place and measured physical quantity have certain corresponding relation, thereby records the actual value of physical quantity.Under the situation of first reverberator, 31 conducts, because reference reflector is identical with the time that the surface acoustic wave feedback signal of second reverberator 32 is consumed on travel path beyond the surface acoustic wave sensor, so cancel out each other with reference to reverberator.The phase differential of the radio-frequency pulse echoed signal of reference reflector by comparing like this with the surface acoustic wave feedback signal of second reverberator 32, the phase change that only reflects measured physical quantity and produced.
In addition, the utility model can also be with the combination of first reverberator 31 and second reverberator 32 as the reference reverberator, relatively detects physical quantity with the RF pulse echo signal of the 3rd reverberator 33.
During enforcement, by interdigital transducer 2 the RF pulse request signal of the characteristic frequency that receives by antenna 4 being converted to can be at the surface acoustic wave of piezoelectric substrate 1 upper surface transmission, the transmission direction of this surface acoustic wave is the upper surface Z direction of piezoelectric substrate 1, is also propagated along piezoelectric substrate 1 upper surface Z direction by the surface acoustic wave that first reverberator 31, second reverberator 32 and the 3rd reverberator 33 are reflected.Because the piezoelectric substrate 1 of surface acoustic wave sensor is the temperature variation sensitivity to external world, when the temperature on acting on surface acoustic wave sensor piezoelectric substrate 1 changes, surface acoustic wave is changed in the transport property of piezoelectric substrate 1 upper surface, at the piezoelectric substrate 1 upper surface interdigital transducer 2 and first reverberator 31, corresponding variation will take place in the distance between second reverberator 32 and the 3rd reverberator 33, thereby have influence on the travel-time of surface acoustic wave at piezoelectric substrate 1 upper surface, therefore by first reverberator 31, the phase place of the surface acoustic wave that second reverberator 32 and the 3rd reverberator 33 are reflected can be made corresponding variation with the variation of ambient temperature, also can change with the phase place of surface acoustic wave sensor temperature corresponding radio frequency pulse return signal.
Above-mentioned sensor is carrying out parameter when analyzing, and is especially carrying out temperature value when detecting, and for obtaining temperature measurement result with a wide range of precise, temperature detection was divided into for two steps and finishes.At first surface acoustic wave sensor can receive a RF pulse request signal that pulse width is narrower, at this moment first reverberator, 31 conducts are with reference to reverberator, by the relative phase difference between the RF pulse signal that detects first reverberator 31 and 32 reflections of second reverberator, can at first obtain the affiliated temperature range of measured ambient temperature, though this process can not guarantee the measurement of temperature very high precision is arranged, but can know the probable ranges of temperature to be measured, for next step accurate high-acruracy survey temperature as reference; Surface acoustic wave sensor can receive the RF pulse request signal of a pulse width broad then, at this moment the RF pulse return signal broad of first reverberator 31 and the reflection of second reverberator 32, overlapping part is arranged between them, therefore first reverberator 31 and 32 whiles of second reverberator as with reference to reverberator, regarding a reverberator as handles, by the relative phase difference between the RF pulse signal that detects reference reflector and 33 reflections of the 3rd reverberator, can further obtain measured ambient temperature temperature value accurately, though the measurement of this part can not reflect large-scale temperature variation, but the smart accuracy of measurement of the measurement that good temperature can be provided, this temperature measurement result analysis-by-synthesis of twice, just can obtain actual temperature value.Because this sensor is passive sensor, sensor is by the extraneous finite energy that obtains, and also can make in this way from the interdigital transducer 2 stable surface acoustic wave reflected signal of the 3rd reverberator 33 reflected backs far away.As seen, choosing of reference reflector in the utility model is that variation with RF pulse request signal width changes, the method of fixed reference reverberator was distinct in the past, by choosing of different reference reflectors, just can be that surface acoustic wave sensor reaches accurately measuring of temperature to external world on a large scale.
How, the detected radio-frequency pulse echoed signal of surface acoustic wave sensor to carry out the method that parameter is analyzed below by the theoretical analysis in detail explanation by being used the SAW (Surface Acoustic Wave) delay line theory.By the method, can make that the feedback signal after handling is spent high measurement with a wide range of precise to temperature.
Variable reference reverberator in the design (can be first reverberator 31, also can be the combination of first reverberator 31 and second reverberator 32) feedback signal by with the relative phase difference that relatively records of second reverberator, 32 radio-frequency pulse echoed signals or the 3rd reverberator 33 radio-frequency pulse echoed signals, the phase change that reflection surface acoustic wave sensor temperature influence is produced.
The intermediate-freuqncy signal frequency is to change along with the different of reverberator feedback signal time delay with the variation of phase place.Owing in the delay of time, be acted upon by temperature changes lessly relatively, reach the nanosecond order of magnitude, be difficult to realize accurate resolution with the hardware circuit of prior art level, so the variation of phase place a series of variations that can reflect temperature more exactly and taken place.Can provide by following formula through the RF pulse request signal that coupled exterior antenna 4 receives by interdigital transducer in the surface acoustic wave sensor 2:
S(t)＝A?cos[(ω
0+μt/2)t+θ
0] (1)
ω wherein
0It is the original frequency value of signal; μ is the integral multiple of 2 π; T is the time; θ
0With A be respectively the initial phase and the initial magnitude of signal.
The response of the corresponding radio-frequency (RF) pulse signal of being returned by interdigital transducer 2 after by frequency mixer and low-pass filter can be represented as:
Wherein, ω
i=μ t
i,
B
iAmplitude for signal.
From top formula as can be seen, frequency μ t
iAnd phase shift
All with t time delay
iRelevant.Because ω generally
0Than μ t
iBig a lot, so phase place is more remarkable than frequency to the influence of time delay.
In the present embodiment, by being used to measure the general variation range interval of ambient temperature as the phase differential of the radio-frequency pulse echoed signal of reference reverberator and second reverberator, 32 radio-frequency pulse echoed signals, by be used to measure the exact value of ambient temperature jointly as the phase differential of the radio-frequency pulse echoed signal of reference reverberator and the 3rd reverberator 33 radio-frequency pulse echoed signals with first reverberator 31 and second reverberator 32 with first reverberator 31.The difference of the radio-frequency pulse echoed signal of reference reflector (i.e. first reverberator 31) and the phase change of second reverberator, 32 radio-frequency pulse echoed signals can be used following formulate:
Wherein, K
1=ω
0-μ (t
2+ t
1)/2
,τ
T1=t
2-t
1 ,And τ
T1=2d
T1/ v,
Wherein,
Be that surface acoustic wave is at initial temperature T
0Return the total delay time that first reverberator 31 produces again from first reverberator, 31 to second reverberators 32 down;
Be at initial temperature T
0Distance between following first reverberator 31 and second reverberator 32; τ
T1And d
T1It is the respective value that under temperature T, records; V is the velocity of propagation of surface acoustic wave on piezoelectric substrate 1.
The difference of the phase change of radio-frequency pulse echoed signal of reference reflector (i.e. the combination of first reverberator 31 and second reverberator 32) and the 3rd reverberator 33 radio-frequency pulse echoed signals can be used following formulate:
Wherein, K
2=ω
0-μ (t
3+ t
12)/2, τ
T2=t
3-t
12, and τ
T2=2d
T2/ v,
Wherein,
Be that surface acoustic wave is at initial temperature T
0Return the total delay time that reference reflector produces again from reference reflector to the three reverberators down;
Be at initial temperature T
0Distance between following reference reflector and the 3rd reverberator; τ
T2And d
T2It is the respective value that under temperature T, records.
Very responsive with the time delay that acoustic surface wave speed is inversely proportional to variation of temperature, delay time T as can be known from prior art
TAnd following relation of plane arranged between the temperature T:
Wherein α is the temperature coefficient of piezoelectric substrate 1 in the sensor.
By equation (3) and equation (7), can obtain following equation
Wherein,
From following formula as can be known, if the respective phase deviation be
The variation of temperature value can be expressed as so:
With reason equation (5) and equation (7), can obtain following equation
In equation (9) and the equation (10), all variablees on the equation right side all are known, therefore can obtain the variation of temperature value by the difference that records phase change.
According to the requirement in the surface acoustic wave sensor design, at initial temperature T
0Distance between following reference reflector and the 3rd reverberator 33
With at initial temperature T
0Distance between following first reverberator 31 and second reverberator 32
Compare to go out greatly a lot, generally
Therefore according to surface acoustic wave detected temperatures principle of sensors, as seen the range of temperature that is reflected by equation (9) can be a scope than broad, but the absolute measurement precision of sensor is not high, can only pass through the probable ranges that equation (9) obtains measured temperature, and equation (10) can reach the measuring accuracy of equation more than (9) ten times, but measurement range is limited, therefore under prerequisite, just can obtain the measurement result of the surface acoustic wave sensor of wide region and high measurement accuracy by equation (10) based on equation (9).
T
1And T
2Between certain functional relation is arranged.T
1Resolution to temperature is not high, and main expression obtains to measure the probable ranges of temperature, T
2The exact value of temperature in certain scope.T=/T
1/ m|*360+T
2, wherein m is for working as T
2T when variation 360 is spent
1The angle number that changes is then to T
1The numerical value an of/m round numbers part, T is the temperature value that sensor finally records like this, and the variation range of phase place is spent between 360* (m+1) degree 0.Therefore as seen, by this structure Design of the utility model, realized the with a wide range of precise measurement of surface acoustic wave sensor to measured physical quantity in simple mode.
The above; it only is the preferable embodiment of the utility model; but protection domain of the present utility model is not limited thereto; anyly be familiar with those skilled in the art in the technical scope that the utility model discloses; the variation that can expect easily or replacement all should be encompassed within the protection domain of the present utility model.Therefore, protection domain of the present utility model should be as the criterion with the protection domain of claim.
Claims (9)
1. a surface acoustic wave survey sensor is characterized in that: comprising: piezoelectric substrate, interdigital transducer, reverberator and antenna;
Described piezoelectric substrate is used to respond to measured physical quantity;
Described interdigital transducer and described reverberator are deposited on described piezoelectric substrate upper surface through surperficial micro fabrication;
Described interdigital transducer receives the required driving energy of surface acoustic wave sensor work, and returns the radio-frequency pulse echoed signal by antenna;
Described reverberator produces the radio-frequency pulse echoed signal thereby be used to be reflected in the surface acoustic wave that transmits on the piezoelectric substrate.
2. surface acoustic wave survey sensor as claimed in claim 1, it is characterized in that: described reverberator comprises first reverberator, second reverberator and the 3rd reverberator, and described first reverberator, second reverberator and the 3rd reverberator are positioned on the surface acoustic wave transmission path that is produced by described interdigital transducer.
3. surface acoustic wave survey sensor as claimed in claim 1 or 2 is characterized in that: described piezoelectric substrate is to adopt the piezoelectric crystal thin slice to be made.
4. surface acoustic wave survey sensor as claimed in claim 3 is characterized in that: described piezoelectric crystal thin slice is that Y cuts the Z direction.
5. surface acoustic wave survey sensor as claimed in claim 2 is characterized in that: the metal finger direction of described first reverberator, second reverberator, the 3rd reverberator and interdigital transducer is perpendicular to the Z direction of described piezoelectric substrate upper surface.
6. surface acoustic wave survey sensor as claimed in claim 1 or 2 is characterized in that: it also further includes antenna, and described antenna is the antenna of exterior antenna or process impedance matching network.
7. surface acoustic wave survey sensor as claimed in claim 1 or 2 is characterized in that: described interdigital transducer and described reverberator are metallic film.
8. surface acoustic wave survey sensor as claimed in claim 2 is characterized in that: described first reverberator is a reference reflector.
9. surface acoustic wave survey sensor as claimed in claim 2 is characterized in that: the combination of described first reverberator and second reverberator is as the reference reverberator.
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| CN2010205711492U CN201837405U (en) | 2010-10-20 | 2010-10-20 | Surface acoustic wave measuring sensor |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102042844A (en) * | 2010-10-20 | 2011-05-04 | 李天利 | Sound surface wave measuring sensor and parameter analytical method |
| CN103471631A (en) * | 2013-04-22 | 2013-12-25 | 江苏声立传感技术有限公司 | Multi-target anti-collision coding method of delay line type SAW (surface acoustic wave) sensor |
| WO2014015577A1 (en) | 2012-07-27 | 2014-01-30 | 上海赛赫信息科技有限公司 | Wireless temperature and humidity sensor and system, and measurement method |
| CN103604864A (en) * | 2013-10-25 | 2014-02-26 | 中国电子科技集团公司第三十八研究所 | Surface acoustic wave formaldehyde gas sensor based on electric conduction composite sensitive material |
| CN105890661A (en) * | 2016-05-10 | 2016-08-24 | 全球能源互联网研究院 | Multi-physical-parameter sensor based on multi-channel surface acoustic wave |
| CN106053609A (en) * | 2016-06-08 | 2016-10-26 | 徐洪军 | Device for monitoring hydrogen leakage of steam turbine generator set on line on basis of wireless passive technology |
| CN107192472A (en) * | 2017-08-02 | 2017-09-22 | 武汉泽塔电气科技有限公司 | A kind of SAW Temperature Sensors |
| CN108802433A (en) * | 2018-03-15 | 2018-11-13 | 中国科学院苏州纳米技术与纳米仿生研究所 | Atomic force microscope probe, preparation method based on surface acoustic wave and characterizing method |
| CN111366768A (en) * | 2018-12-26 | 2020-07-03 | 中国科学院声学研究所 | Wireless passive surface acoustic wave current sensor based on reflection delay line |
| CN114144568A (en) * | 2019-05-28 | 2022-03-04 | 第六元素（英国）有限公司 | Sensor system, cutter element, cutting tool and method of use thereof |
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- 2010-10-20 CN CN2010205711492U patent/CN201837405U/en not_active Expired - Fee Related
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102042844B (en) * | 2010-10-20 | 2012-12-26 | 李天利 | Sound surface wave measuring sensor and parameter analytical method |
| CN102042844A (en) * | 2010-10-20 | 2011-05-04 | 李天利 | Sound surface wave measuring sensor and parameter analytical method |
| WO2014015577A1 (en) | 2012-07-27 | 2014-01-30 | 上海赛赫信息科技有限公司 | Wireless temperature and humidity sensor and system, and measurement method |
| CN103471631B (en) * | 2013-04-22 | 2016-03-30 | 江苏声立传感技术有限公司 | The multiple goal anti-collision coding method of delay line type surface acoustic wave sensor |
| CN103471631A (en) * | 2013-04-22 | 2013-12-25 | 江苏声立传感技术有限公司 | Multi-target anti-collision coding method of delay line type SAW (surface acoustic wave) sensor |
| CN103604864A (en) * | 2013-10-25 | 2014-02-26 | 中国电子科技集团公司第三十八研究所 | Surface acoustic wave formaldehyde gas sensor based on electric conduction composite sensitive material |
| CN103604864B (en) * | 2013-10-25 | 2016-02-10 | 中国电子科技集团公司第三十八研究所 | A kind of surface acoustic wave formaldehyde gas sensor based on electric conduction composite sensitive material |
| CN105890661A (en) * | 2016-05-10 | 2016-08-24 | 全球能源互联网研究院 | Multi-physical-parameter sensor based on multi-channel surface acoustic wave |
| CN106053609A (en) * | 2016-06-08 | 2016-10-26 | 徐洪军 | Device for monitoring hydrogen leakage of steam turbine generator set on line on basis of wireless passive technology |
| CN107192472A (en) * | 2017-08-02 | 2017-09-22 | 武汉泽塔电气科技有限公司 | A kind of SAW Temperature Sensors |
| CN108802433A (en) * | 2018-03-15 | 2018-11-13 | 中国科学院苏州纳米技术与纳米仿生研究所 | Atomic force microscope probe, preparation method based on surface acoustic wave and characterizing method |
| CN108802433B (en) * | 2018-03-15 | 2020-12-22 | 中国科学院苏州纳米技术与纳米仿生研究所 | Atomic force microscope probe based on surface acoustic wave, preparation method and characterization method |
| CN111366768A (en) * | 2018-12-26 | 2020-07-03 | 中国科学院声学研究所 | Wireless passive surface acoustic wave current sensor based on reflection delay line |
| CN114144568A (en) * | 2019-05-28 | 2022-03-04 | 第六元素（英国）有限公司 | Sensor system, cutter element, cutting tool and method of use thereof |
| US11970908B2 (en) | 2019-05-28 | 2024-04-30 | Element Six (Uk) Limited | Sensor system, cutter element, cutting tool and method of using same |
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