CN201817572U - Guide rail column part of silicon single crystal furnace - Google Patents
Guide rail column part of silicon single crystal furnace Download PDFInfo
- Publication number
- CN201817572U CN201817572U CN2010205778134U CN201020577813U CN201817572U CN 201817572 U CN201817572 U CN 201817572U CN 2010205778134 U CN2010205778134 U CN 2010205778134U CN 201020577813 U CN201020577813 U CN 201020577813U CN 201817572 U CN201817572 U CN 201817572U
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- CN
- China
- Prior art keywords
- guide rail
- rail column
- steel plate
- steel
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model relates to a guide rail column part of a silicon single crystal furnace, which is welded by an upper steel plate, a flat steel, a square steel, a lower steel plate and a plate rib. The flat steel which plays a part in supporting is internally provided with shock absorbing material; the installing surface and the installing threaded hole of a linear slide rail are machined on the square steel; an installing hole of the upper steel plate for installing a screw rod bearing seat is provided with a gap, so that a screw rod is conveniently installed and changed; and the lower steel plate is provided with three holes for fixing the guide rail column. The guide rail column part is good in shock absorbing performance, good in rigidity, and low in machining cost, and does not need to readjust the levelness and the concentricity between a shaft of a crucible and a chassis of a furnace when the parts are changed such as the screw rod, the bearing on the screw rod and the like, thereby improving the work efficiency.
Description
Affiliated technical field
The utility model relates to a kind of crystal growing furnace parts of semicon industry, adopts this parts to make the guide rail column integral rigidity of monocrystal stove good, and absorbing is good, and tooling cost is low, and is easy to install and use.
Background technology
Guide rail column is one of key part of crystal growing furnace, and its stability is that can decision pull out one of key element of high quality silicon single crystal rod.Present known guide rail column parts adopt foundry goods guide rail column or steel plate welding guide rail column more, and foundry goods guide rail column structure rigidity is low, when the guide rail column structure is adjusted, also needs to do again model, cost height, and the guide rail column that is welded into by steel plate, and shock absorption is very poor again; During parts such as bearing on present known guide rail column part replacement leading screw or the leading screw, unload whole underdrive down, refill after finishing changing, readjust the levelness and the concentricity of crucible shaft and furnace hearth plate, the amount of working is big like this, inefficiency.
Summary of the invention
In order to solve the problems referred to above that existing monocrystal stove guide rail column parts exist, the utility model provides a kind of guide rail column parts of monocrystal stove, this component processing cost is low, good rigidly, shock absorption is good, and need not readjust the levelness and the concentricity of crucible shaft and furnace hearth plate behind the parts of changing on leading screw or the leading screw such as bearing.
The technical scheme that the utility model adopted is: guide rail column is welded by last lower steel plate, band steel, square steel and plate muscle.Upper steel plate is as the mount pad of leading screw head bearing, band steel is welded between the lower steel plate, cushioning material is housed in it, square steel is welded on the band steel front, be used for installing linear slide rail, upper steel plate lower surface welding rectangular slab muscle and triangular plate muscle are used for reinforcing upper steel plate, have three through holes on the lower steel plate, be used for fixing guide rail column.
The beneficial effects of the utility model are: compare with known guide rail column parts, the utlity model has good shock absorption, good rigidly, tooling cost is low, and behind the parts of changing on leading screw and the leading screw such as bearing, need not to readjust the level and the concentricity of crucible shaft and furnace hearth plate, high efficiency.
Description of drawings
Below in conjunction with accompanying drawing the utility model is further specified.
Fig. 1 is a structure iron of the present utility model
Fig. 2 is the vertical view of Fig. 1
Fig. 3 is the A-A sectional view of Fig. 1
1. upper steel plates among the figure, 2. band steel, 3. square steel, 4. lower steel plate, 5. trilateral gusset, 6. rectangle gusset
Embodiment
Among Fig. 1, on lower steel plate 4, be symmetrically welded two band steels 2, welding upper steel plate 1 on two band steels 2, band steel 2 plays support function, open a hole in band steel 2 back, adorn an amount of cushioning material inward, then the hole is blocked up, make the guide rail column parts have good suction damping property, and inhale the effect that cushioning material plays counterweight.
Among Fig. 1, respectively weld a square steel 3, process mounting face and open holes, be used for installing linear slide rail at the front surface of square steel 3 in two band steels, 2 fronts.
Among Fig. 1, a vertical rectangular plate muscle 6 of welding and two leg-of-mutton plate muscle 5 below upper steel plate 1, rectangular slab muscle 6 is positioned at the back of two band steels 2, length and width can adjust according to practical structures, triangular plate muscle 5 is gone back simultaneously and the right flank of square steel 3 welds, size also can adjust according to practical structures, and plate muscle 5 and plate muscle 6 are mainly used to reinforce upper steel plate 1.
Among Fig. 2, process a circular hole on upper steel plate 1, as the open holes of leading screw top chock, make leading screw top chock and the guide rail column formula structure that becomes one, this integral structure has good strength and stiffness.On the open holes of leading screw top chock, open a gap, when parts such as replacing leading screw and leading screw head bearing, do not need underdrive is disassembled fully, just can take out leading screw and install from indentation, there, remove levelness and this step work of concentricity of looking for crucible shaft and furnace hearth plate again like this from, improved working efficiency in the time of handled easily.
Among Fig. 3, process 3 open holess on lower steel plate 4, one of back is used for fixing guide rail column on medullary ray about centrosymmetry in two of fronts, and the load-bearing center of gravity of entire structure is positioned within 3, and underdrive has good stability like this.
Claims (5)
1. the guide rail column parts of a monocrystal stove, it is characterized in that: it is by last lower steel plate, band steel, the integral structure that square steel and plate muscle are welded.
2. according to the guide rail column parts of claim 1 described a kind of monocrystal stove, it is characterized in that: two band steels are symmetrical to be welded between the lower steel plate, and the shock absorption material is housed in the band steel.
3. according to the guide rail column parts of claim 1 described a kind of monocrystal stove, it is characterized in that: before two band steels, respectively be welded with a square steel, mounting face arranged on the square steel surface and screw is installed.
4. according to the guide rail column parts of claim 1 described a kind of monocrystal stove, it is characterized in that: on the upper steel plate open holes, open a gap, be welded with the plate muscle below the breach.
5. according to the guide rail column parts of claim 1 described a kind of monocrystal stove, it is characterized in that: open the through hole of three mounting screws on lower steel plate, two of fronts are about centrosymmetry, and one of back is on medullary ray.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205778134U CN201817572U (en) | 2010-10-27 | 2010-10-27 | Guide rail column part of silicon single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205778134U CN201817572U (en) | 2010-10-27 | 2010-10-27 | Guide rail column part of silicon single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201817572U true CN201817572U (en) | 2011-05-04 |
Family
ID=43915535
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010205778134U Expired - Fee Related CN201817572U (en) | 2010-10-27 | 2010-10-27 | Guide rail column part of silicon single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201817572U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105729141A (en) * | 2016-04-08 | 2016-07-06 | 武汉理工大学 | Precise linear two-dimensional double-drive workbench based on control of open numerical-control system |
-
2010
- 2010-10-27 CN CN2010205778134U patent/CN201817572U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105729141A (en) * | 2016-04-08 | 2016-07-06 | 武汉理工大学 | Precise linear two-dimensional double-drive workbench based on control of open numerical-control system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110504 Termination date: 20141027 |
|
| EXPY | Termination of patent right or utility model |