CN201748901U - Optical film thickness measurement control system - Google Patents
Optical film thickness measurement control system Download PDFInfo
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- CN201748901U CN201748901U CN2009202985163U CN200920298516U CN201748901U CN 201748901 U CN201748901 U CN 201748901U CN 2009202985163 U CN2009202985163 U CN 2009202985163U CN 200920298516 U CN200920298516 U CN 200920298516U CN 201748901 U CN201748901 U CN 201748901U
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- monochromator
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Abstract
The utility model discloses an optical film thickness measurement control system which solves the problems that the current system broad spectrum measuring light causes chromatic dispersion and results in small signal amplitude, low measurement accuracy and high equipment cost. A light source is focused to an optical modulator through a reflecting system, the output modulation frequency electrical signal is used as the interference signal for an optical film thickness tester, the input of a light source transmitting coupler is connected with a first optical fiber, the output light with a light source receiving coupler B reaches an entrance slit of a monochromator through a second optical fiber, the output light with a light source receiving coupler A reaches the entrance slit of the monochromator through a third optical fiber, a comparison strip is arranged in a vacuum chamber, the control end of a rotary device of the grating of the monochromator is connected with the output end of an industrial control computer, the exit slit of the monochromator is respectively connected with the incident end of a photomultiplier detector or a lead sulfide detector, and then the output electrical signal is used as the main signal of the optical film thickness tester, a singlechip of the optical film thickness tester outputs a signal from a serial port to the input end of the industrial control computer, and the other end of the industrial control computer is connected with a film coating system.
Description
Technical field:
The utility model is relevant with the blooming measurement mechanism of online photometry thickness in the vacuum coating.
Background technology:
The primary input signal of existing blooming tester connects programable logic device through differential amplifier, trapper, main signal amplifier, low-pass filter and the biasing superimposer input analog-to-digital converter of series connection, the output of analog to digital converter successively, reference-input signal is through reference signal treatment circuit input logic programming device, the output of programable logic device is connected with single-chip microcomputer, and single-chip microcomputer is connected with display.Main signal and reference signal are modulated with single light source, can not realize wide spectral measurement thickness, adopt transmission-type transmission optic path measuring light, and chromatic dispersion takes place when wide spectral transmissions, influence measuring accuracy.Signal amplitude in the equipment is little, very easily is subjected to external disturbance, even incorporates in the noise fully.Handle the installation cost height of weak output signal.
The utility model content:
The purpose of this utility model provides a kind of wide spectral measurement thickness of realizing, can handle the weak output signal of ultraviolet light and infrared light, measuring accuracy height, the blooming Measurement and Control System that cost is low.
The utility model is achieved in that
The utility model blooming Measurement and Control System, the tritium lamp is arranged in the modulated light source 4 or/and bromine tungsten filament lamp as light source, have through light source switch 13 selection one as the both, light source converges to photomodulator 14 through reflecting system, photomodulator 14 is a mechanical modulator, the light of output transmits by the first smooth pricker 6 through fibre-optical splice, the modulating frequency electric signal of output is as the reference signal of blooming tester, treated circuit is to programable logic device, there is the input of transmitting illuminant coupling mechanism 2 to receive first optical fiber 6 on one sidewall of vacuum chamber 12, the output light that receives light source coupler B4 is arranged through the entrance slit of second optical fiber 7 to monochromator 9, the output light that receives light source coupler A3 is arranged through the entrance slit of the 3rd optical fiber 8 on the opposing sidewalls of vacuum chamber 12 to monochromator 9, vacuum chamber 12 has comparison sheet 5, the output terminal of the wheelwork control termination industrial computer 17 of the grating of monochromator 9, the exit slit of monochromator 9 connects the incident end of photomultiplier tube detectors 10 or ead sulfide detector 11 respectively through optical fiber, the electric signal of photomultiplier tube detectors 10 and ead sulfide detector 11 outputs is as the main signal of blooming tester, the single-chip microcomputer of blooming tester is 17 input end from the serial ports output signal to industrial computer, and another output terminal of industrial computer is connected with coating system.
The diverging light that described transmitting illuminant coupling mechanism 2 has reflecting optics that incident optical is introduced is converted into collimated light and shines on the comparison sheet, and reception light source coupler A, reception light source coupler B respectively have reflecting optics will compare sheet 5 projections, reflected light is converted to and focuses light onto the optical fiber transmission.
Principle of work of the present utility model is as follows:
The complex modulated light source of numeral light control system is under the effect of light source controller, (deuterium lamp is that 200～400nm/ bromine tungsten filament lamp is 400～3000nm) to shine the transmitting illuminant coupling mechanism by Transmission Fibers by the light of selected wavelength place spectral range, after the optical processing that the transmitting illuminant coupling mechanism is sent light source here, forming collimated light beam sends in the vacuum chamber, beam Propagation is behind sheet relatively, and a part of light is compared sheet (and relatively on the sheet by coatings) reflection and is transferred to and receives light source coupler B.Light another part light transmission relatively sheet (and relatively on the sheet by coatings) is transferred to and receives light source coupler A, principle: the diverging light of being introduced by luminous source optical fiber enters the reflection source coupling mechanism eyeglass that is reflected and is converted into collimated light and shines on the comparison sheet.One the road projects the catoptron that receives in the light source coupler A is converted to and focuses light onto optical fiber and transmit; Another route comparison sheet reflexes to the catoptron that receives in the light source coupler B and is converted to and focuses light onto optical fiber and transmit.The thickness of plated film and selected wavelength on reflected light or transmitted light luminous energy size and the sheet relatively
Wavelength becomes the cycle to change,
Luminous energy size and the proportional variation of thicknesses of layers in the wavelength coverage.Reflected light or transmitted light (depending on the plated film form) pool imaging by receiving light source coupler, arrive monochromator by Optical Fiber Transmission then, monochromator allows the single wavelength light (wavelength requires selected by the outer computer automatic or manual according to coating process) of certain luminous energy to export by monochromator under the situation of selected slit size (selected by the outer computer automatic or manual).The monochromatic light of monochromator output at the monochromator exit radiation in photo-detector (as: 10 photomultiplier tube detectors, 11 ead sulfide detectors).In photo-detector, realize the opto-electronic conversion of measured signal, the electric signal of output of conversion back and the proportional variation of thicknesses of layers, this electric signal is given the blooming tester by cable transmission, the electric signal that the blooming tester transmits photo-detector is given Industrial Control Computer by the proportional digital signal of thickness transient change on phase-locked amplification, AC-DC conversion output and the sheet relatively, and Industrial Control Computer is realized the automatic control of coating system according to the size of thickness transient change.
The utility model can be in real time, the thicknesses of layers of film growth in the on-line testing optical coating system, and the output technical parameter relevant with thickness, and the full-automatic optical coating machine can be according to the quality of these parameter controlling diaphragm layer growths.
The utility model is mainly used in measurement and the control of optical coating system to the thickness of coating growth in the coating process.
In vacuum coating equipment, the coating film thickness of online detection optical device often uses extremum method to differentiate, yet the signal amplitude in the equipment is little, very easily be subjected to external disturbance, even incorporate fully in noise, use the utility model can extract useful signal, and steady display goes out signal magnitude, 0.1% precision is provided.
(350～1600nm) adopt reflective transmission light path to the utility model in order to satisfy wide spectrum.
Transmitting illuminant coupling mechanism 2, reception light source coupler A, reception light source coupler B should satisfy wide spectral transmissions, and energy loss is little again.Adopt the light reflection way to realize that converging light becomes measuring light (collimated light) and enters vacuum chamber, receiving also is the convergence that realizes measuring light with the reflection mode.This mode great advantage is that chromatic dispersion is little, can realize wide spectral transmissions.
Advantage:
1, adopt composite light source (deuterium lamp and bromine tungsten filament lamp combination) to realize that (300 ~ 1600nm) measure thickness to wide spectrum.
2, adopt reflective light path transmission measurement light, overcome the chromatic dispersion of transmission-type transmission light path when wide spectral transmissions, realize that (350～1600nm) measure thickness to wide spectrum.
Description of drawings:
Fig. 1 is a structured flowchart of the present utility model.
Fig. 2 is the modulated light source structural drawing.
Fig. 3 is the monochromator structural drawing.
Fig. 4 is a blooming tester structured flowchart.
Fig. 5 is the transmission principle figure of vacuum chamber light.
Embodiment:
Light source switch 13, photomodulator 14, light source power 15 are connected respectively to control end, modulator interface, the light source power interface of modulated light source 1.It is that the modulated light source of 1000Hz is connected to the input end of transmitting illuminant coupling mechanism 2 by delivery outlet to optical fiber 6 through modulators modulate that modulated light source 1 is selected inner deuterium lamp light source or halogen light source, and light is processed into collimated light by transmitting illuminant coupling mechanism 2 and reflexes to comparison sheet 5.Relatively be divided into 2 bundle light (projection light and reflected light) on the sheet 5, transmitted light enters and receives light source coupler A, and reflected light enters and receives light source coupler B.Receive light source coupler the criterion optically-coupled is entered optical fiber 7 and 8 (use wavelength when 800nm is above, 6,7,8 must use infrared optical fiber to connect), enter the input end of 9 monochromators more respectively.Output to photomultiplier tube detectors 10 or ead sulfide detector 11 behind the monochromator selection monochromatic light and be converted to electric signal as the main signal input end of main signal to the blooming tester; Export the modulation signal of electric TTL as the reference signal input end of reference signal by photomodulator 14 to blooming tester 16.The signal strength signal of optical film thickness meter output carries out analyzing and processing by rs 232 serial interface signal to industrial computer.The monochromatic light output of monochromator 9 is by the rs 232 serial interface signal control of industrial computer 17.
The utility model is in order to guarantee system spectrum scope (350～1600nm) and luminous power (by the requirement decision of the luminous power of selected photo-detector input) requirement, composite light source select for use electric power greater than the deuterium lamp of 30W as ultraviolet source, select for use electric power greater than the bromine tungsten filament lamp of 75W light source as visible light and infrared light.The spectral range of light source reality can reach 200～3000nm like this.
For satisfying the phase-locked amplification requirement of film thickness measuring, composite light source adopts light modulated output, and modulator approach adopts simple mechanical modulation method.
For adapting to the requirement of output light transmission, composite light source adopts the modular connection of SM905 to connect with external fiber.
Among Fig. 2, composite light source sends light by the deuterium lamp or the bromine tungsten filament lamp (wavelength coverage that is required by coating process determines) of inside, pools the center of imaging source to the SM905 joint by reflective optical assembly.The copped wave sheet of chopper is installed near on the light path of SM905 joint.
The light that optical receiver of the present utility model (emission/reception) transmits by optical fiber projects on the object lens of standard after importing the entrance slit of monochromator into, form parallel beam and project on the grating, the grating pair incident light is imaged onto the exit slit place by focus lamp after producing chromatic dispersion.The exit slit place only by grating when counterclockwise rotating by the tactic spectrum of wavelength.By selecting the big I of exit slit to make output light is the very little monochromic beam of width, exports monochromatic luminous energy size and is directly proportional with I/O slit size.
Reference signal main signal from the film thickness measuring light path system, main signal is carried out low noise, low drift, high anti-interference, variable-gain amplification by amplifier, reference signal is converted to digital signal by analog to digital converter again and enters programable logic device after amplifying shaping.The signal of this moment amplifies, but harmonic wave is abundant, needs to extract the useful signal of frequency 1000Hz.
Blooming tester of the present utility model is formed structure as shown in Figure 4.Among the figure, single-chip microcomputer adopts the 89LE516RD single-chip microcomputer, uses 64,67,68,69,70,72,80,81 pins of 8～13,17～22 pins and programable logic device (EP2C5Q208CN) to connect communication.5,7 pin of single-chip microcomputer are connected to 11,12 of MAX232 chip and finish with extraneous RS232 serial ports current.34～37 connect key board.23～25 are connected to 1,2,16 pin of MAX6951, show sign indicating number for 87 sections by MAX6951 control.Reference signal circuit inserts 180 pin of programable logic device.46 pin that this signal processing circuit inserts AD7655 are converted to digital signal, and 21,22,29 serials by AD7655 insert 60～63 of programable logic device again.
The employed commercially available prod of the utility model is as follows:
1, the modulated light source (Chinese light of standing upright: DZLHD30T75)
2, transmitting illuminant coupling mechanism (south, Chengdu light: the RKGLF33-1A system)
3, receive photo-coupler A (south, Chengdu light: the RKGLF33-1A system)
4, receive light source coupler B (south, Chengdu light: the RKGLF33-1A system)
5, compare sheet (glass coupon)
6, optical fiber
7, optical fiber
8, optical fiber
9, the monochromator (Chinese light of standing upright: omin5005)
10, the photomultiplier tube detectors (Chinese light of standing upright: PMTH-S1-CR131)
11, the ead sulfide detector (Chinese light of standing upright: DPS2900)
12, vacuum chamber
13, light source switch (Chinese light of standing upright: DZLHD3075 joins controller)
14, photomodulator (scitec:300CD)
15, the light source power (Chinese light of standing upright: DZLHD30175 distribution source)
16, the blooming tester (patent No.: zl200820141227.8)
17, industrial computer
Claims (2)
1. blooming Measurement and Control System, it is characterized in that in the modulated light source (4) the tritium lamp being arranged or/and bromine tungsten filament lamp as light source, have through light source switch (13) selection one as the both, light source converges to photomodulator (14) through reflecting system, photomodulator (14) is a mechanical modulator, the light of output transmits by the first smooth pricker (6) through fibre-optical splice, the modulating frequency electric signal of output is as the reference signal of blooming tester, treated circuit is to programable logic device, there is the input of transmitting illuminant coupling mechanism (2) to receive first optical fiber (6) on one sidewall of vacuum chamber (12), the output light that receives light source coupler B (4) is arranged through the entrance slit of second optical fiber (7) to monochromator (9), the output light that receives light source coupler A (3) is arranged through the entrance slit of the 3rd optical fiber (8) on the opposing sidewalls of vacuum chamber (12) to monochromator (9), vacuum chamber (12) has comparison sheet (5), the output terminal of the wheelwork control termination industrial computer (17) of the grating of monochromator (9), the exit slit of monochromator (9) connects the incident end of photomultiplier tube detectors (10) or ead sulfide detector (11) respectively through optical fiber, the electric signal of photomultiplier tube detectors (10) and ead sulfide detector (11) output is as the main signal of blooming tester, the single-chip microcomputer of blooming tester is the input end of (17) from the serial ports output signal to industrial computer, and another output terminal of industrial computer is connected with coating system.
2. system according to claim 1, it is characterized in that diverging light that described transmitting illuminant coupling mechanism (2) has reflecting optics that incident optical is introduced is converted into collimated light and shines on the comparison sheet, receive light source coupler A, receive light source coupler B and respectively have reflecting optics will compare sheet (5) projection, reflected light to be converted to and to focus light onto optical fiber and transmit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202985163U CN201748901U (en) | 2009-12-25 | 2009-12-25 | Optical film thickness measurement control system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202985163U CN201748901U (en) | 2009-12-25 | 2009-12-25 | Optical film thickness measurement control system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201748901U true CN201748901U (en) | 2011-02-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009202985163U Expired - Fee Related CN201748901U (en) | 2009-12-25 | 2009-12-25 | Optical film thickness measurement control system |
Country Status (1)
| Country | Link |
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| CN (1) | CN201748901U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104395690A (en) * | 2012-06-13 | 2015-03-04 | 株式会社新柯隆 | Device for measuring film thickness and device for forming film |
| CN108359963A (en) * | 2018-03-12 | 2018-08-03 | 信利（惠州）智能显示有限公司 | A kind of film-forming method and film formation device |
| CN108844473A (en) * | 2018-04-19 | 2018-11-20 | 嘉善卡勒机车零部件有限公司 | The detection device of locomotive element processing |
-
2009
- 2009-12-25 CN CN2009202985163U patent/CN201748901U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104395690A (en) * | 2012-06-13 | 2015-03-04 | 株式会社新柯隆 | Device for measuring film thickness and device for forming film |
| CN104395690B (en) * | 2012-06-13 | 2017-05-31 | 株式会社新柯隆 | Film thickness measurement device and film formation device |
| CN108359963A (en) * | 2018-03-12 | 2018-08-03 | 信利（惠州）智能显示有限公司 | A kind of film-forming method and film formation device |
| CN108359963B (en) * | 2018-03-12 | 2020-06-30 | 信利（惠州）智能显示有限公司 | Film forming method and film forming device |
| CN108844473A (en) * | 2018-04-19 | 2018-11-20 | 嘉善卡勒机车零部件有限公司 | The detection device of locomotive element processing |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110216 Termination date: 20171225 |