CN201733432U - Silicon-based microphone and vibrating membrane thereof - Google Patents
Silicon-based microphone and vibrating membrane thereof Download PDFInfo
- Publication number
- CN201733432U CN201733432U CN2010201849997U CN201020184999U CN201733432U CN 201733432 U CN201733432 U CN 201733432U CN 2010201849997 U CN2010201849997 U CN 2010201849997U CN 201020184999 U CN201020184999 U CN 201020184999U CN 201733432 U CN201733432 U CN 201733432U
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- vibrating diaphragm
- main body
- torsion beam
- diaphragm main
- described vibrating
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Abstract
The utility model provides a silicon-based microphone, which comprises a vibrating membrane body. A pair of protruded twisting beams is arranged at the edge of the vibrating membrane body, the vibrating membrane body comprises a first portion and a second portion which pass through two linear sides of the pair of twisting beams, and the weight of the first portion is larger than that of the second portion. Compared with the prior art, the vibrating membrane is supported via the two twisting beams, and stress of the vibrating membrane formed during sedimentation can be effectively released, thereby further increasing flexibility and uniformity of the microphone.
Description
[technical field]
The utility model relates to a kind of silica-based condenser microphone, relates in particular to the diaphragm structure of this silica-based microphone.
[background technology]
Development along with wireless telecommunications, Global Mobile Phone Users is more and more, the user not only is satisfied with conversation to the requirement of mobile phone, and want high-quality communication effect can be provided, especially at present the development of mobile multimedia technology, the speech quality of mobile phone becomes more important, and the microphone of mobile phone is as the voice pick device of mobile phone, and its design quality directly influences speech quality.
Use more microphone at present and comprise traditional electret microphone and emerging microelectromechanical-systems microphone (Micro-Electro-Mechanical-System Microphone, be called for short the MEMS microphone), the MEMS microphone is based on silicon-based semiconductor material and makes, so claim silica-based microphone again.Its encapsulation volume is littler than traditional electret microphone, and performance is also good.Thereby in recent years, silica-based MEMS microphone had been obtained very big development space.
As shown in Figure 1, for having the cross-sectional schematic of common MEMS silica-based microphone 1 now, it comprises that inside is provided with the substrate 10 and the vibrating diaphragm 11 of cavity.Vibrating diaphragm is relative with back pole plate (not shown) and keep at a certain distance away with back pole plate, to form capacity effect, when the sound air-flow is delivered on the vibrating diaphragm, the vibrating diaphragm up-down vibration is to produce displacement, change the capacitance of capacitor, the change of capacitance makes the output of capacitor produce corresponding alternating electric field, has formed the signal of telecommunication corresponding with acoustic signals, thereby finishes the function of acoustic-electric conversion.Vibrating diaphragm 11 links to each other with substrate, is fixed in the substrate by its peripheral 110 integral body.The peripheral integral body of such microphone diaphragm is fixed, and it is many to make that vibrating diaphragm is tied, and membrane stress is corresponding can be increased, thereby causes the sensitivity meeting of product to descend to some extent.
[utility model content]
The technical problem that the utility model need solve provides a kind of effectively release film stress, thereby further improves the sensitivity and the conforming vibrating diaphragm of product.
According to the above-mentioned technical problem that needs solution, designed a kind of vibrating diaphragm, it comprises the vibrating diaphragm main body, on the edge of described vibrating diaphragm main body, be provided with outstanding a pair of torsion beam, described vibrating diaphragm main body comprises that first's quality is greater than the second portion quality by this first and second portion to the both sides of the straight line of torsion beam.
The technical problem that the utility model also need solve has provided a kind of silica-based microphone, it comprises that inside is provided with the substrate of cavity and is positioned at suprabasil vibrating diaphragm, described vibrating diaphragm comprises the vibrating diaphragm main body, on the edge of described vibrating diaphragm main body, be provided with outstanding a pair of torsion beam, described vibrating diaphragm main body comprises by this first and second portion to the both sides of the straight line of torsion beam, first's quality is greater than the second portion quality, and described vibrating diaphragm links to each other with substrate by torsion beam.
Further improve as the utility model, described torsion beam is with respect to the center line symmetry of described vibrating diaphragm main body.
Further improve as the utility model, described vibrating diaphragm main body is a rectangle, and described torsion beam is positioned on the relative dual-side of described vibrating diaphragm main body.
Further improve as the utility model, described vibrating diaphragm main body is circular
Compared with prior art, the utility model vibrating diaphragm main body is supported by two torsion beam, can effectively discharge vibrating diaphragm formed stress in deposition process, thereby further improve the sensitivity and the consistency of microphone products.
[description of drawings]
Fig. 1 is the cutaway view that has common silica-based microphone now;
The cross-sectional schematic of Fig. 2 the utility model silica-based microphone;
Fig. 3 is the schematic diagram of the utility model vibrating diaphragm.
[embodiment]
The utility model is described in further detail below in conjunction with drawings and embodiments.
As shown in Figure 2, be a kind of embodiment of the utility model silica-based microphone, this silica-based microphone comprises substrate 1, vibrating diaphragm 2 and back pole plate 3.Substrate is provided with cavity 10, with the back cavity as the response of vibrating diaphragm.
Vibrating diaphragm 2 is relative with back pole plate 3, and certain at interval distance.Form capacity effect between vibrating diaphragm 2 and the back pole plate 3, when the sound air-flow is delivered on the vibrating diaphragm, the vibrating diaphragm up-down vibration is to produce displacement, change the capacitance of capacitor, the change of capacitance makes the output of capacitor produce corresponding alternating electric field, formed the signal of telecommunication corresponding, thereby finished the function of acoustic-electric conversion with acoustic signals.
As shown in Figure 3, this vibrating diaphragm 2 comprises vibrating diaphragm main body 20, and the vibrating diaphragm main body is an oblong-shaped.On the edge of the relative dual-side of oblong-shaped vibrating diaphragm main body 20, be respectively equipped with an outstanding torsion beam 21, promptly, a pair of outstanding torsion beam 21 is located at respectively on the relative dual-side of oblong-shaped vibrating diaphragm main body 20, rather than on the adjacent dual-side, and, on the major axis side.
Straight line L1 by this a pair of torsion beam 21 is divided into two parts with vibrating diaphragm main body 20, that is, vibrating diaphragm main body 20 is divided into first and second portion by straight line L1, and first and second portion are positioned at straight line L1 both sides.First's quality is greater than the second portion quality, that is, first and second portion quality are unequal, and torsion beam 21 is in the non-centre position of vibrating diaphragm main body dual-side.And torsion beam 21 is with respect to the center line beam L2 symmetry of vibrating diaphragm main body.
In the present embodiment, vibrating diaphragm is a rectangle, and its shape also can be circle or other shapes.When being circular, a pair of torsion beam is positioned at the two ends of the non-diameter of circular membrane,, is communicated with the string of the straight line of torsion beam for circle that is.Certainly, a pair of torsion beam mid diameter symmetry between them relatively.
Vibrating diaphragm links to each other with substrate to torsion beam by this, to be supported in the substrate by torsion beam.Because torsion beam is positioned at the non-centre position of vibrating diaphragm side, be about to vibrating diaphragm and be divided into two unequal parts, thereby unequal part can exist to be reversed, can effectively discharging vibrating diaphragm formed stress in deposition process, thereby further improve the sensitivity and the consistency of microphone products.
Above-described only is execution mode of the present utility model; should be pointed out that for the person of ordinary skill of the art at this, under the prerequisite that does not break away from the utility model creation design; can also make improvement, but these all belong to protection range of the present utility model.
Claims (8)
1. vibrating diaphragm, comprise the vibrating diaphragm main body, it is characterized in that: be provided with outstanding a pair of torsion beam on the edge of described vibrating diaphragm main body, described vibrating diaphragm main body comprises that first's quality is greater than the second portion quality by this first and second portion to the both sides of the straight line of torsion beam.
2. vibrating diaphragm according to claim 1 is characterized in that: described torsion beam is with respect to the center line symmetry of described vibrating diaphragm main body.
3. vibrating diaphragm according to claim 2 is characterized in that: described vibrating diaphragm main body is a rectangle, and described torsion beam is positioned on the relative dual-side of described vibrating diaphragm main body.
4. the vibrating diaphragm of moulding according to claim 2 is characterized in that: described vibrating diaphragm main body is for circular.
5. silica-based microphone, comprise that inside is provided with the substrate of cavity and is positioned at suprabasil vibrating diaphragm, described vibrating diaphragm comprises the vibrating diaphragm main body, it is characterized in that: on the edge of described vibrating diaphragm main body, be provided with outstanding a pair of torsion beam, described vibrating diaphragm main body comprises by this first and second portion to the both sides of the straight line of torsion beam, first's quality is greater than the second portion quality, and described vibrating diaphragm links to each other with substrate by torsion beam.
6. silica-based microphone according to claim 5 is characterized in that: described torsion beam is with respect to the center line symmetry of described vibrating diaphragm main body.
7. silica-based microphone according to claim 6 is characterized in that: described vibrating diaphragm main body is a rectangle, and described torsion beam is positioned on the relative dual-side of described vibrating diaphragm main body.
8. silica-based microphone according to claim 6 is characterized in that: described vibrating diaphragm main body is for circular.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201849997U CN201733432U (en) | 2010-05-04 | 2010-05-04 | Silicon-based microphone and vibrating membrane thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201849997U CN201733432U (en) | 2010-05-04 | 2010-05-04 | Silicon-based microphone and vibrating membrane thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201733432U true CN201733432U (en) | 2011-02-02 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010201849997U Expired - Lifetime CN201733432U (en) | 2010-05-04 | 2010-05-04 | Silicon-based microphone and vibrating membrane thereof |
Country Status (1)
| Country | Link |
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| CN (1) | CN201733432U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109417671A (en) * | 2016-07-08 | 2019-03-01 | 欧姆龙株式会社 | MEMS structure and capacitance type sensor, piezo-type sensor, sound transducer with MEMS structure |
-
2010
- 2010-05-04 CN CN2010201849997U patent/CN201733432U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109417671A (en) * | 2016-07-08 | 2019-03-01 | 欧姆龙株式会社 | MEMS structure and capacitance type sensor, piezo-type sensor, sound transducer with MEMS structure |
| CN109417671B (en) * | 2016-07-08 | 2020-10-27 | 欧姆龙株式会社 | MEMS structure, and capacitive sensor, piezoelectric sensor, and acoustic sensor having the same |
| US11064299B2 (en) | 2016-07-08 | 2021-07-13 | Omron Corporation | MEMS structure, capacitive sensor, piezoelectric sensor, acoustic sensor having mems structure |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20110202 |
|
| CX01 | Expiry of patent term |