CN201725010U - Multifunctional crystal grain spot measurement circuit of spot measurement machine and multifunctional spot measurement machine - Google Patents

Multifunctional crystal grain spot measurement circuit of spot measurement machine and multifunctional spot measurement machine Download PDF

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Publication number
CN201725010U
CN201725010U CN 201020234746 CN201020234746U CN201725010U CN 201725010 U CN201725010 U CN 201725010U CN 201020234746 CN201020234746 CN 201020234746 CN 201020234746 U CN201020234746 U CN 201020234746U CN 201725010 U CN201725010 U CN 201725010U
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CN
China
Prior art keywords
crystal grain
switch
electrode catheter
selector switch
point
Prior art date
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CN 201020234746
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Chinese (zh)
Inventor
袁九龙
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晶能光电(江西)有限公司
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Priority to CN 201020234746 priority Critical patent/CN201725010U/en
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Publication of CN201725010U publication Critical patent/CN201725010U/en

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Abstract

The utility model provides a multifunctional crystal grain spot measurement circuit of a spot measurement machine and a multifunctional sport measurement machine, which relate to the field of semiconductor measurement, are used for meeting the requirement of the measurement of different chips, can conveniently switch chips with vertical structures, chips with a horizontal structures, chip with small power and chips with high power, and improves the universality of the spot measurement machine. The special scheme of the utility model is that a crystal grain spot measurement power comprises two leading ends which are used for measuring two electrodes of a crystal grain, wherein the first leading end is connected with a first crystal grain electrode probe position, the second leading end is connected with a selection switch device, the selection output ends of the switch device are respectively connected with a work table and a second crystal grain electrode probe device, the first leading end is connected with at least two spliced first crystal grain electrode probe devices which are spliced through a switch, and when the switch is on, the two first crystal grain electrode probe devices are spliced.

Description

The multi-functional crystal grain point slowdown monitoring circuit structure and the multi-functional point measurement machine of point measurement machine

Technical field

The utility model relates to the point measurement machine that a kind of semiconductor test is used, and particularly relates to the test of led chip.

Background technology

LED crystal grain need be tested it by point measurement machine, to obtain its photoelectric parameter, according to photoelectric parameter LED crystal grain is carried out sorting.

Be used at present the point measurement machine that the silicon substrate LED chip is tested is comprised that probe portion, crystal grain detect supply unit and worktable, referring to shown in Figure 1, comprise in the preposition box that crystal grain detects supply unit, preposition box connects in electrostatic generator (being the static case), and two port N ports of preposition box and P port be linking probe device and worktable respectively.Because silicon substrate LED crystal grain is vertical stratification, and the conduction characteristics of worktable own, crystal grain is placed on the worktable, probe can constitute a survey time road acquisition point and survey data in a survey crystal grain.

Because the LED crystal grain of Sapphire Substrate on the market all is horizontal structure at present, the LED crystal grain of point measurement machine that it is used and silicon substrate is inequality, and it needs two probes, two electrodes of location on chip surface respectively, and worktable is non-conductive.

The point measurement machine that is used to make silicon substrate LED can not be general with the point measurement machine that is used to make Sapphire Substrate LED, if change substrate type, then needs point measurement machine is transformed, very inconvenience.

And, need a plurality of probe in detecting chips usually for high-power LED chip, and the equipment that is used to detect high-power chip can not be directly used in and detect little chip, and equipment interoperability is poor.

The utility model content

First technical matters to be solved in the utility model is: the multi-functional crystal grain point geodesic structure that a kind of point measurement machine is provided, this structure is used to satisfy the demand of different chip testings, can conveniently realize switching between chip, miniwatt chip and the high-power chip of chip, horizontal structure of vertical stratification, improve the versatility of point measurement machine.

Second technical matters to be solved in the utility model is: a kind of multi-functional point measurement machine is provided, it is used to satisfy the demand of different chip testings, can conveniently realize switching between chip, miniwatt chip and the high-power chip of chip, horizontal structure of vertical stratification, improve the versatility of point measurement machine.

In order to solve first technical matters of the present utility model, the utility model proposes a kind of multi-functional crystal grain point slowdown monitoring circuit structure of point measurement machine, comprise that crystal grain detects supply unit, crystal grain first electrode catheter device and the worktable;

Wherein, crystal grain detects supply unit and comprises two exits that are respectively applied for two electrodes that detect crystal grain, and first exit in two exits is connected to the crystal grain first electrode catheter device;

And also comprise crystal grain second electrode catheter device and selector switch device;

Second exit of described two exits connects described selector switch device, this switchgear comprises that two are selected output, select output to connect described worktable and the crystal grain second electrode catheter device respectively for two, survey for the point of vertical electrode crystal grain, the selector switch device is connected worktable; Point for horizontal electrode crystal grain is surveyed, and selector switch is connected the crystal grain second electrode catheter device;

First exit of described two exits connects at least two and the crystal grain first electrode catheter device that connects, and wherein, they are by switch and connect, and in switch connection, described two crystal grain, the first electrode catheter device also connects.Selector switch comprises that two are selected output, can be for selecting to select between the output to connect at two.

In order to solve above-mentioned second technical matters, the utility model proposes a kind of multi-functional point measurement machine, comprise that crystal grain detects supply unit, crystal grain first electrode catheter device and the worktable;

Wherein, crystal grain detects supply unit and comprises two exits that are respectively applied for two electrodes that detect crystal grain, and first exit in two exits is connected to the crystal grain first electrode catheter device;

And also comprise crystal grain second electrode catheter device and selector switch device;

Second exit of described two exits connects described selector switch device, this switchgear comprises that two are selected output, select output to connect described worktable and the crystal grain second electrode catheter device respectively for two, survey for the point of vertical electrode crystal grain, the selector switch device is connected worktable; Point for horizontal electrode crystal grain is surveyed, and selector switch is connected the crystal grain second electrode catheter device;

First exit of described two exits connects at least two and the crystal grain first electrode catheter device that connects, and wherein, they are by switch and connect, and in switch connection, described two crystal grain, the first electrode catheter device also connects.

Preferably: the crystal grain first electrode catheter device is two.

Preferably: described selector switch device and described switch are mechanical switch or electronic switch.

Preferably: described selector switch device is a single-pole double-throw switch (SPDT).

Preferably: described second exit connects one second selector switch device, select output to connect described selector switch device for one of this second selector switch device, another of this second selector switch device selected to export the joint that is connected to described a plurality of crystal grain first electrode catheter device, and is connected with described switch.Second selector switch comprises that two are selected output, can be for selecting to select between the output to connect at two.

The beneficial effects of the utility model:

Compared to existing technology, the multi-functional handover scheme of the point measurement machine that the utility model proposes, owing to be provided with several switches, can realize the switching between detection, high-power chip and the miniwatt chip of detection, light emitting diode (LED) chip with vertical structure of horizontal structure led chip very easily, need not equipment to be transformed because of the difference of chip type, realize the quick switching of the crystal grain of above-mentioned number of different types, solved point measurement machine for above-mentioned number of different types chip can not be general problem.

Description of drawings

Fig. 1 is the prior art constructions block diagram.

Fig. 2 is a structured flowchart of the present utility model.

Fig. 3 is that the point of vertical stratification low-power LED is surveyed constitutional diagram.

Fig. 4 is that the point of horizontal structure low-power LED is surveyed constitutional diagram.

Fig. 5 is that the point of vertical stratification great power LED is surveyed constitutional diagram.

Fig. 6 is that the point of horizontal structure great power LED is surveyed constitutional diagram.

Embodiment

The utility model proposes a kind of multi-functional crystal grain point slowdown monitoring circuit structure of point measurement machine and multi-functional point measurement machine with this structure.The technical solution of the utility model comprises that crystal grain detects supply unit, crystal grain first electrode catheter device and the worktable.

Wherein, crystal grain detects supply unit and comprises two exits that are respectively applied for two electrodes that detect crystal grain, and first exit in two exits is connected to the crystal grain first electrode catheter device.

And, also comprise crystal grain second electrode catheter device and selector switch device.

Second exit of these two exits connects the selector switch device, this switchgear comprises that two are selected output, select output to connect worktable and the crystal grain second electrode catheter device respectively for two, survey for the point of vertical electrode crystal grain, the selector switch device is connected worktable; Point for horizontal electrode crystal grain is surveyed, and selector switch is connected the crystal grain second electrode catheter device.

First exit of two exits connects at least two and the crystal grain first electrode catheter device that connects, and wherein, they are by switch and connect, and in switch connection, two crystal grain first electrode catheter devices also connect.

The structured flowchart of embodiment of the present utility model is referring to shown in Figure 2.

First exit that crystal grain detects supply unit is first electrode that is used for contacting LED crystal grain, and its second exit is second electrode that is used for contacting LED crystal grain.This first exit connects first crystal grain first electrode catheter device 1 and second crystal grain first electrode catheter device 8.First crystal grain first electrode catheter device 1 and second crystal grain first electrode catheter device 8 connect together by switch 9, when switch 9 is connected, promptly connect the C point, and two crystal grain first electrode catheter devices just are connected in parallel, a shared power end.

This second exit connects the second selector switch device 10, and an output of this second selector switch device 10 connects selector switch device 3.Another of this second selector switch device 10 selects output to be connected to the C point place of switch 9, is connected with second crystal grain, the first electrode catheter device.

Selector switch device 3 comprises two outputs, and these two output terminals are connected with worktable 5 with the crystal grain second electrode catheter device 2 respectively.Crystal grain detects supply unit and is responsible for giving the detection loop power supply, and it is located in the preposition box of point measurement machine, is connected with the static case, and the static case is an electrostatic generator.

Selector switch device 3 is preferably mechanical switch, for example can be single-pole double-throw switch (SPDT).This selector switch device also can be electronic switch, and electronic switch can be the crystal switch pipe circuit module of using always, and it is connected with controller, is controlled by controller.

Second device 10 of selecting to open the light is optional accessories, and it can often place the A point.If when not selecting for use second to select to open the light device 10, second exit is directly connected on the selector switch device 3, with second crystal grain, the first electrode catheter device 8 will be without any the port that can Gong be connected.

Use of the present utility model is as follows:

With the selector switch device 3 and the second selector switch device 10 is that manual single-pole double-throw switch (SPDT) is an example.Below said high-power chip and miniwatt chip comprise the big or small implication of chip area usually.

Referring to Fig. 2 and Fig. 3, when needs point measuring tool had the miniwatt silicon substrate LED of vertical stratification, key 30 was got to the E point, and key 100 is got to the A point, and switch 9 disconnects.At this moment, worktable 5 and second exit are connected, the silicon chip (silicon chip comprises crystal grain and the silicon substrate part that all crystal grain is connected together) of epitaxial wafer nation having been done electrode after fixed is placed on the worktable 5, also do not have silicon chip also not pass through sliver this moment, the silicon substrate 40 of the bottom of crystal grain 4 connects together, because silicon is conductor, when first crystal grain first electrode catheter device 1 touches the N electrode of crystal grain 4, crystal grain 4 and worktable 5 conductings, test can be carried out smoothly.At this moment, second crystal grain first electrode catheter device 8 opens circuit.

Referring to Fig. 2 and Fig. 4, when needs point measuring tool had the crystal grain 6 of miniwatt Sapphire Substrate LED of horizontal structure, key 30 was got to the D point, and key 100 is got to the A point, and switch 9 disconnects.At this moment, the crystal grain second electrode catheter device 2 and second exit are connected, and this moment, worktable and second crystal grain first electrode catheter device 8 all opened circuit.Because two electrodes of Sapphire Substrate LED are all on the upper surface of crystal grain, therefore, first electrode of first crystal grain first electrode catheter device 1 contact crystal grain, the crystal grain second electrode catheter device 2 contacts second electrode of crystal grain, can constitute the loop of test circuit like this.Different with front silicon substrate LED embodiment is that the epitaxial wafer of having done electrode is made the individual dies that is attached on the blue film 7 through sliver.

Referring to Fig. 2 and Fig. 5, when needs point was surveyed high-power silicon substrate LED crystal grain, key 30 was got to the E point, and key 100 is got to the A point, and switch 9 is connected.At this moment, worktable 5 and second exit are connected, the silicon slice placed that will not have sliver on worktable 5, silicon chip comprise silicon substrate 110 that the bottom connects together with and on crystal grain 11.When first crystal grain first electrode catheter device 1 and second crystal grain first electrode catheter device 8 touch the N electrode of crystal grain 11, crystal grain 11 and worktable 5 conductings, test can be carried out smoothly.

Referring to Fig. 2 and Fig. 6, when needs point was surveyed high-power Sapphire Substrate LED crystal grain, key 30 was got to the D point, and key 100 is got to the A point, and switch 9 is connected.At this moment, the crystal grain second electrode catheter device 2 and second exit are connected, and this moment, worktable opened circuit.Because two electrodes of Sapphire Substrate LED are all on the upper surface of crystal grain, therefore, first crystal grain first electrode catheter device 1 contacts first electrode of crystal grain with second crystal grain, the first electrode catheter device 8, the crystal grain second electrode catheter device 2 contacts second electrode of crystal grain, can constitute the loop of test circuit like this.

Claims (10)

1. the multi-functional crystal grain point slowdown monitoring circuit structure of a point measurement machine comprises that crystal grain detects supply unit, crystal grain first electrode catheter device and the worktable;
Wherein, crystal grain detects supply unit and comprises two exits that are respectively applied for two electrodes that detect crystal grain, and first exit in two exits is connected to the crystal grain first electrode catheter device;
It is characterized in that: also comprise crystal grain second electrode catheter device and selector switch device;
Second exit of described two exits connects described selector switch device, this switchgear comprises that two are selected output, select output to connect described worktable and the crystal grain second electrode catheter device respectively for two, survey for the point of vertical electrode crystal grain, the selector switch device is connected worktable; Point for horizontal electrode crystal grain is surveyed, and selector switch is connected the crystal grain second electrode catheter device;
First exit of described two exits connects at least two and the crystal grain first electrode catheter device that connects, and wherein, they are by switch and connect, and in switch connection, described two crystal grain, the first electrode catheter device also connects.
2. the multi-functional crystal grain point slowdown monitoring circuit structure of point measurement machine according to claim 1, it is characterized in that: the crystal grain first electrode catheter device is two.
3. the multi-functional crystal grain point slowdown monitoring circuit structure of point measurement machine according to claim 1, it is characterized in that: described selector switch device and described switch are mechanical switch or electronic switch.
4. the multi-functional crystal grain point slowdown monitoring circuit structure of point measurement machine according to claim 1, it is characterized in that: described selector switch device is a single-pole double-throw switch (SPDT).
5. the multi-functional crystal grain point slowdown monitoring circuit structure of point measurement machine according to claim 1, it is characterized in that: described second exit connects one second selector switch device, select output to connect described selector switch device for one of this second selector switch device, another of this second selector switch device selected to export the joint that is connected to described a plurality of crystal grain first electrode catheter device, and is connected with described switch.
6. a multi-functional point measurement machine comprises that crystal grain detects supply unit, crystal grain first electrode catheter device and the worktable;
Wherein, crystal grain detects supply unit and comprises two exits that are respectively applied for two electrodes that detect crystal grain, and first exit in two exits is connected to the crystal grain first electrode catheter device;
It is characterized in that: also comprise crystal grain second electrode catheter device and selector switch device;
Second exit of described two exits connects described selector switch device, this switchgear comprises that two are selected output, select output to connect described worktable and the crystal grain second electrode catheter device respectively for two, survey for the point of vertical electrode crystal grain, the selector switch device is connected worktable; Point for horizontal electrode crystal grain is surveyed, and selector switch is connected the crystal grain second electrode catheter device;
First exit of described two exits connects at least two and the crystal grain first electrode catheter device that connects, and wherein, they are by switch and connect, and in switch connection, described two crystal grain, the first electrode catheter device also connects.
7. multi-functional point measurement machine according to claim 6 is characterized in that: the crystal grain first electrode catheter device is two.
8. multi-functional point measurement machine according to claim 6 is characterized in that: described selector switch device and described switch are mechanical switch or electronic switch.
9. multi-functional point measurement machine according to claim 6 is characterized in that: described selector switch device is a single-pole double-throw switch (SPDT).
10. multi-functional point measurement machine according to claim 6, it is characterized in that: described second exit connects one second selector switch device, select output to connect described selector switch device for one of this second selector switch device, another of this second selector switch device selected to export the joint that is connected to described a plurality of crystal grain first electrode catheter device, and is connected with described switch.
CN 201020234746 2010-06-23 2010-06-23 Multifunctional crystal grain spot measurement circuit of spot measurement machine and multifunctional spot measurement machine CN201725010U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201020234746 CN201725010U (en) 2010-06-23 2010-06-23 Multifunctional crystal grain spot measurement circuit of spot measurement machine and multifunctional spot measurement machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 201020234746 CN201725010U (en) 2010-06-23 2010-06-23 Multifunctional crystal grain spot measurement circuit of spot measurement machine and multifunctional spot measurement machine

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CN201725010U true CN201725010U (en) 2011-01-26

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102360064A (en) * 2011-08-01 2012-02-22 上海宏力半导体制造有限公司 Chip test system
CN104360256A (en) * 2014-10-21 2015-02-18 华灿光电(苏州)有限公司 Diode photoelectricity test method
CN104101744B (en) * 2013-04-10 2017-05-24 佛山市国星半导体技术有限公司 Probe clamp, and LED rapid lightening testing apparatus and method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102360064A (en) * 2011-08-01 2012-02-22 上海宏力半导体制造有限公司 Chip test system
CN104101744B (en) * 2013-04-10 2017-05-24 佛山市国星半导体技术有限公司 Probe clamp, and LED rapid lightening testing apparatus and method
CN104360256A (en) * 2014-10-21 2015-02-18 华灿光电(苏州)有限公司 Diode photoelectricity test method

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GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
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Granted publication date: 20110126

Termination date: 20180623