CN201722238U

CN201722238U - Ultra-pure-water treatment system

Info

Publication number: CN201722238U
Application number: CN2010200592552U
Authority: CN
Inventors: 郑彬棋
Original assignee: XIAMEN YOUSHENG ELECTRONIC TECHNOLOGY Co Ltd
Current assignee: XIAMEN YOUSHENG ELECTRONIC TECHNOLOGY Co Ltd
Priority date: 2009-12-31
Filing date: 2009-12-31
Publication date: 2011-01-26
Anticipated expiration: 2019-12-31

Abstract

The utility model discloses an ultra-pure-water treatment system which mainly comprises a filter jar connected with a tap-water tank and sequentially connected with antiscalant adding equipment, an ultrafilter, reverse osmosis water generating equipment, a mixed bed and another ultrafilter finally connected with an ultra-pure-water tank; and the mixed bed is a container containing mixed cation resin and anion resin and capable of realizing exchange of the cation resin and the anion resin. The ultra-pure-water treatment system abandons a device which can not produce ultra-pure-water with resistance value of more than 15.8 M Omega in the prior art. The mixed bed is added behind osmosis water generating equipment, the resistance value of the ultra-pure-water (with the resistance value of more than 15.8 M Omega) generated by the exchange of cation resin and anion resin in the mixed bed is monitored and obtained by a resistance meter at a water-generating opening of the mixed bed, the life cycle of the resin in the mixed bed is about 300H; when the resistance value decreases, the production is stopped temporarily and the regeneration of the mixed bed is conducted immediately, the cation resin absorbs 5.5-6% of acid liquid from an acid liquid inlet, and the anion resin absorbs 3.5-4% of alkali liquid from a liquid alkali inlet to be mixed with saturated resin, thus completing the exchange of resin ions.

Description

The ultrapure water treatment system

Technical field

The utility model relates to a kind of pure water treatment unit.

Background technology

Along with developing rapidly of semiconductor science, wafer product is used in a large amount of electron devices, and owing to exist the wafer surface electrostatic to produce in research and development of a large amount of wafers and the design, therefore the function that in the wafer cutting cleaning process of reality, has potential electrostatic breakdown wafer, in order to reduce the static assurance function of wafer surface, adopt yin and yang resin ion-exchange output resistance value to reach the above ultrapure water of 15.8M Ω and come into operation, can effectively eliminate the static of wafer surface.

At present, pure water is handled the groundwork tap water and is filtered through the sand cylinder fs, dirts such as iron in the water of source are removed, filter through carbon cylinder subordinate phase again, granulometric impurities such as manganese in the clear water remove are generated clear water, again through infiltration be water from dilute solution one side by semi-permeable membranes to the spontaneous process of flowing of strong solution one side.Semi-permeable membranes only allows water to pass through, and stops passing through of dissolved solid (salt), and strong solution is constantly diluted along with the person who lives in exile of water.When water flows and the pressure that produces to strong solution " when enough being used to stop water to continue net inflow; infiltration is in equilibrium state; during balance; water equates to the quantity that the other side flows into from arbitrary limit by semi-permeable membranes; promptly be in dynamic balance state; and this moment, pressure p was called the osmotic pressure (note: on one side semi-permeable membranes is a pure water, the other side is a salts solution) of solution.Below the resistance value 1.5M Ω of this pure water, then can't satisfy the requirement of present high-tech wafer product.

The utility model content

At the deficiencies in the prior art part, the utility model provides a kind of ultrapure water treatment system.But its production resistance value reaches the above ultrapure water of 15.8M Ω, this ultrapure water can effectively be eliminated the static of wafer surface, solved the function that has potential electrostatic breakdown wafer in the wafer cutting cleaning process, the service quality that has improved production efficiency and wafer product guarantees.

For achieving the above object, technical solutions of the utility model are:

The ultrapure water treatment system, be characterised in that: it comprises that mainly one connects the filtering cloth jar of city water tank, and this filtering cloth jar is connected with a Scale inhibitors adding equipment, an accurate filter, a reverse osmosis water generation equipment, a mixed bed and a last accurate filter that connects ultrapure water tank in regular turn; Described mixed bed is one to be mixed with the container of positive resin and negative resin.

The usefulness of technique scheme is:

The utility model is abandoned in the prior art device that can't the production resistance value reaches the above ultrapure water of 15.8M Ω.It has set up mixed bed behind the infiltration water generation equipment, the ultrapure water of (resistance value reaches more than the 15.8M Ω) through mixing bed yin and yang resin ion-exchange output, produce mouth of a river resistance value instrument monitoring to resistance value by mixing bed, mix the interior resin life cycle of bed and be about 300H, when resistance value descends, need suspend production and carry out reproduction operation to mixing bed immediately, the sun resin is drawn the acid solution of 5.5-6% from " liquid acid inlet ", the alkali lye that negative resin is drawn 3.5-4% from " liquid caustic soda inlet " mixes full resin, thereby finishes resin ion-exchange work.

Description of drawings

Fig. 1 is the utility model workflow synoptic diagram.

Embodiment

The utility model now is described in conjunction with the accompanying drawings and embodiments.

Ultrapure water treatment system as shown in Figure 1 is characterised in that: it comprises that mainly one connects the filtering cloth jar of city water tank, and this filtering cloth jar connects an activated charcoal filter by a quartz sand filtration device and forms.This filtering cloth jar is connected with a Scale inhibitors adding equipment, an accurate filter, a reverse osmosis water generation equipment, an intermediate water tank, a mixed bed and a last accurate filter that connects ultrapure water tank in regular turn.Described mixed bed is one to be mixed with the container of positive resin and negative resin.

At first tap water filtered through the quartz sand filtration device fs, dirts such as iron in the former water are removed, filter through the activated charcoal filter subordinate phase again, granulometric impurities such as manganese in the clear water are removed the clear water process accurate filter that the back generates, through the reverse osmosis water generation equipment that water is spontaneous mobile to strong solution one side by semi-permeable membranes from dilute solution one side again.The semi-permeable membranes of reverse osmosis water generation equipment only allows water to pass through, and stop passing through of dissolved solid (salt) (comprising metal object, suspended solids, virosome, bacterial body, organic compound), the pure water of output is deposited to intermediate water tank, uses middle water pump that pure water is drawn into the mixed bed of yin, yang resin and carries out ion-exchange.Produce use from mixing bed water side output ultrapure water through the accurate filter supply.

Claims

1. ultrapure water treatment system, be characterised in that: it comprises that mainly one connects the filtering cloth jar of city water tank, and this filtering cloth jar is connected with a Scale inhibitors adding equipment, an accurate filter, a reverse osmosis water generation equipment, a mixed bed and a last accurate filter that connects ultrapure water tank in regular turn; Described mixed bed is one to be mixed with positive resin and negative resin, but and the container of resin ion-exchange.

2. ultrapure water treatment system as claimed in claim 1 is characterized in that: the filtering cloth jar of described city water tank connects an activated charcoal filter by a quartz sand filtration device and forms.

3. ultrapure water treatment system as claimed in claim 1 or 2 is characterized in that: also be provided with an intermediate water tank between described reverse osmosis water generation equipment and the mixed bed.