CN201716395U - Aging test box - Google Patents
Aging test box Download PDFInfo
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- CN201716395U CN201716395U CN 201020207501 CN201020207501U CN201716395U CN 201716395 U CN201716395 U CN 201716395U CN 201020207501 CN201020207501 CN 201020207501 CN 201020207501 U CN201020207501 U CN 201020207501U CN 201716395 U CN201716395 U CN 201716395U
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- test box
- ageing test
- temperature
- temperature sensor
- burn
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Abstract
The utility model discloses an aging test box comprising a plurality of aging test boards, wherein each aging test board is provided with a plurality of aging test sockets; the aging test box is also provided with a plurality of heaters and at least one temperature sensor; the temperature in the aging test box is detected by the temperature sensor, and at least one temperature detection value is obtained; and the heaters are started or shut down according to the temperature detection value and the temperature set value of the aging test box. The utility model also discloses a corresponding aging test system. The aging test box and the aging test system can improve the heating uniformity as well as the accuracy of the aging test result.
Description
Technical field
The utility model relates to semiconductor manufacturing and field of machining, particularly a kind of ageing test box.
Background technology
Integrated circuit (IC) chip must be tested after making, the burn-in test that this test is normally carried out under the temperature that improves.Burn-in test can speed-up chip aging, can in manufacturing process, early discern and abandon defective chip.
Stipulate that the purpose of burn-in test is quality or the reliability of device in the whole working time that rated condition is born in checking in the aging standard of country.It is the durability test of carrying out under nominal working conditions, test period is answered long enough, to guarantee that its result does not have the feature of initial failure or " initial failure ", during whole durability test, also should carry out routine observation, to monitor whether crash rate has significant change in time.In order to obtain correct result at short notice or with less stress,, must provide corresponding failure probability with the enough big sample of accelerated test conditioned disjunction to guarantee to be used for highly reliable occasion after the device.This test condition comprises electric input, load and biasing and corresponding maximum operating temperature or test temperature etc.
In addition, regulation also in aging standard, device is watt level no matter, should decide that working temperature wears out or durability test with maximum amount.And for integrated circuit, the test temperature of regulation should be to make all devices in the chamber all stablize actual minimum environment temperature or the skin temperature that reaches.The setting of the position of this structure to chamber, load, controller or monitor and air-flow etc. and adjustment have all proposed strict requirement.
Fig. 1 is existing aging testing system synoptic diagram, and Fig. 2 is existing ageing test box synoptic diagram; As shown in Figure 1, 2, aging testing system mainly is made up of ageing test box 100, test and control circuit 101.Be provided with burn-in test district, well heater and temperature sensor in the ageing test box 100, wherein, the burn-in test district is provided with a plurality of burn-in boards 210, and each burn-in board 210 is provided with a plurality of testing base 220 that test component to be aging is linked to each other with the test circuit of outside.The ageing test box bottom is provided with well heater 240, in order to ageing test box is heated by desired temperature, the burn-in test upper box part is provided with temperature sensor 230, utilize this temperature sensor 230 can detect the temperature in the ageing test box and deliver to and be positioned at the outer control circuit of ageing test box, by control circuit relatively this detected temperatures with the size of temperature is set, if detected temperatures is less than temperature is set, then control heater starts so that ageing test box is heated, otherwise, then close well heater.
Along with the high speed development of integrated circuit (IC) chip, the complexity of integrated circuit (IC) chip further improves, and various high integration, high speed or high-power integrated circuit have occurred.Accuracy to the burn-in test of device is had higher requirement.
In addition, for enhancing productivity, wish to strengthen a test component quantity of existing ageing test box.At this moment, the heating control system of above-mentioned existing ageing test box has been difficult to meet the demands.
The utility model content
The utility model provides a kind of ageing test box, has solved in the existing ageing test box, and the burn-in test number of devices is less, and the relatively poor problem of temperature control homogeneity.
For achieving the above object, a kind of ageing test box that the utility model provides, comprise a plurality of burn-in boards, each described burn-in board is provided with a plurality of burn-in test sockets, described ageing test box also has a plurality of well heaters and at least one temperature sensor, described temperature sensor detects the temperature in the described ageing test box, obtain at least one temperature detection value, described a plurality of well heaters start according to the desired temperature of described at least one temperature detection value and ageing test box or cut out.
Wherein, described a plurality of burn-in boards are along vertical arrangement of described ageing test box, and are provided with the recirculating air device in the described ageing test box, to form circulation air path between each burn-in board.
And described a plurality of well heater can be arranged in the air channel of the bottom of described ageing test box and/or described ageing test box.
Wherein, described at least one temperature sensor is positioned at the top of described ageing test box or/and described ageing test box central area.
Alternatively, described a plurality of burn-in boards are transversely arranged along described ageing test box, and are provided with the recirculating air device in the described ageing test box, to form circulation air path between each burn-in board.
Wherein, described a plurality of well heater is arranged in the air channel of the sidepiece of described ageing test box and/or described ageing test box.
Alternatively, described at least one temperature sensor is positioned at the sidepiece of described ageing test box or/and described ageing test box central area.
Preferably, described at least one temperature sensor is uniformly distributed in the described ageing test box.
The utlity model has a kind of aging testing system of identical or relevant art feature, comprise ageing test box and control circuit, be provided with a plurality of burn-in boards in the described ageing test box, each described burn-in board is provided with a plurality of burn-in test sockets, described ageing test box also has a plurality of well heaters and at least one temperature sensor, described temperature sensor detects the temperature in the described ageing test box, obtain at least one temperature detection value, described control circuit controls the startup of a plurality of well heaters according to the desired temperature of described at least one temperature detection value and ageing test box or cuts out.
Wherein, when described at least one temperature sensor comprises first temperature sensor and second temperature sensor, described control circuit first temperature detection value that detection obtains according to first temperature sensor is respectively controlled the startup of a plurality of well heaters that are positioned at the described first temperature sensor surveyed area or is closed, and second temperature detection value that detection obtains according to second temperature sensor is controlled the startup of a plurality of well heaters that are positioned at the described second temperature sensor surveyed area or closed.
Compared with prior art, the utlity model has following advantage:
Ageing test box of the present utility model, the diverse location place in ageing test box is provided with a plurality of well heaters and temperature sensor respectively, has improved the homogeneity of Temperature Distribution in the ageing test box, has improved the accuracy of ageing test result.
Description of drawings
Fig. 1 is existing aging testing system synoptic diagram;
Fig. 2 is existing ageing test box synoptic diagram;
Fig. 3 is the ageing test box synoptic diagram of the utility model first embodiment;
Fig. 4 is the temperature control synoptic diagram of the aging testing system of explanation the utility model second embodiment;
Fig. 5 is the ageing test box synoptic diagram of the utility model second embodiment.
Reference numeral:
100: ageing test box; 101: test and control circuit;
210: burn-in board; 220: the burn-in test socket;
230: temperature sensor; 240: well heater;
310: burn-in board; 301: the air channel;
330: temperature sensor; 340: well heater;
401: control circuit; 430: the first temperature sensors; More than 440: the first well heater;
450: the second temperature sensors; More than 460: the second well heater;
510: burn-in board.
Embodiment
For above-mentioned purpose of the present utility model, feature and advantage can be become apparent more, embodiment of the present utility model is described in detail below in conjunction with accompanying drawing.
Specific embodiment of the utility model can be widely used in the every field; be to be illustrated below by preferred embodiment; certainly the utility model is not limited to this specific embodiment, and the known general replacement of one of ordinary skilled in the art is encompassed in the protection domain of the present utility model far and away.
Secondly, the utility model utilizes synoptic diagram to describe in detail, and when the utility model embodiment was described in detail in detail, for convenience of explanation, the synoptic diagram of indication device structure can be disobeyed general ratio and be done local the amplification, should be with this as to qualification of the present utility model.
Traditional aging testing system only ageing test box is carried out unified temperature sense and temperature adds heat control, and this coarse control mode can not satisfy the test request of existing integrated circuits device.
In order to tackle the high speed development of integrated circuit (IC)-components, the utility model proposes a kind of new aging testing system, its diverse location place in ageing test box is provided with a plurality of well heaters and temperature sensor respectively, improve the homogeneity of Temperature Distribution in the ageing test box, improved the accuracy of ageing test result.
First embodiment:
Fig. 3 is the structural representation of the ageing test box among explanation the utility model first embodiment; Below in conjunction with Fig. 3 first embodiment of the present utility model is elaborated.
As shown in Figure 3, the ageing test box of present embodiment, comprise a plurality of burn-in boards 310, each described burn-in board 310 is provided with a plurality of burn-in test socket (not shown), wherein, described ageing test box also has a plurality of well heaters 340 and at least one temperature sensor 330, the temperature that described temperature sensor 330 detects in the described ageing test box, obtain at least one temperature detection value, described a plurality of well heaters 340 start according to the desired temperature of described at least one temperature detection value and ageing test box or cut out.
In the present embodiment, in ageing test box, be provided with at least one burn-in board 310, each burn-in board 310 can be laterally (as shown in Figure 3, be parallel to the ageing test box bottom) or vertically (as shown in Figure 5, perpendicular to the ageing test box bottom) be placed in the ageing test box, a plurality of burn-in test socket (not shown) can be installed, as 16,32 etc. on each burn-in board 310.
Among first embodiment of the present utility model, be provided with two well heaters 340 in the bottom of ageing test box, it is positioned at the bottom of ageing test box, and heat upwards is sent to ageing test box inside, under the drive of circulating current ageing test box is carried out the integral body heating.
In other embodiment of the present utility model, plural well heater can also be set,, can evenly be arranged at it in ageing test box as 3,4,5,8,10 etc., as being arranged at respectively in ageing test box bottom or the circulation air path, to realize heating more equably.For example, except that below ageing test box, being provided with respectively two, 2 to 3 well heaters 340 can also be set evenly respectively in the air channel of both sides.In addition, can also in the center of ageing test box or air channel, top, well heater be set, particularly, can decide, to reach the purpose of even control burn-in test the temperature inside the box according to the air-flow distribution situation in the ageing test box.
In the present embodiment, in ageing test box, be provided with the recirculating air device, this recirculating air device can be one or more fan, it is installed on the bottom and/or the sidepiece of ageing test box, change the air flow direction in the test ageing oven, form circulating current in the test ageing oven, the Temperature Distribution in the order test ageing oven is comparatively even.Particularly, in the design of the both sides of test ageing oven the circulating air air channel is arranged, hot blast is produced by test ageing oven bottom and/or position, both sides, respectively test burn-in board 310 for testing aging device heats through parallel the blowing in air channel, both sides, the design temperature of each well heater 340 can be the desired temperature of ageing test box, it normally requires to set according to the aging temperature of burn-in test device, can be between 20 ℃-250 ℃, as be 20 ℃, 100 ℃, 150 ℃, 200 ℃ or 250 ℃.
Also be provided with temperature sensor 330 in ageing test box, they can be for one or more.In the present embodiment, as shown in Figure 3, be provided with a temperature sensor 330 in the burn-in test box top.The temperature that this temperature sensor 330 detects in the described ageing test box, obtain temperature detection value, this temperature detection value is sent to the control circuit 401 of aging testing system, compare with the desired temperature of ageing test box, if temperature detection value greater than this setting value, is then closed the well heater 340 of ageing test box; If temperature detection value less than this setting value, then starts the well heater 340 of (or not closing) ageing test box.
In other embodiment of the present utility model, two desired temperatures can also be set:, close the well heater 340 of ageing test box when described temperature detection value during greater than first desired temperature; When temperature detection value during, open or do not close the well heater 340 of ageing test box less than second desired temperature.At this moment, second desired temperature can be provided with greater than first desired temperature usually, is 140 ℃ as first desired temperature, and second desired temperature is 145 ℃; Or first desired temperature be 135 ℃, second desired temperature is 138 ℃ etc.
Second embodiment:
Fig. 4 is the temperature control synoptic diagram of the aging testing system of the utility model second embodiment, and Fig. 5 is the ageing test box synoptic diagram of the utility model second embodiment; Below in conjunction with Fig. 4 and Fig. 5 the utility model second embodiment is described in detail.
Second embodiment of the present utility model is a kind of aging testing system, it comprises ageing test box and control circuit, as shown in Figure 5, be provided with a plurality of burn-in boards 510 in the described ageing test box, each described burn-in board 510 is provided with a plurality of burn-in test socket (not shown), wherein, described ageing test box also has a plurality of well heaters 540 and at least one temperature sensor 530, the temperature that described temperature sensor 530 detects in the described ageing test box, obtain at least one temperature detection value, described control circuit 401 controls the startup of a plurality of well heaters 540 according to the desired temperature of described at least one temperature detection value and ageing test box or cuts out.As, when first temperature detection value is lower than the desired temperature of ageing test box, heater or keep well heater 540 and be in starting state; Otherwise, close well heater 540.
As, top and described ageing test box central area at ageing test box among second embodiment of the present utility model are provided with first, second temperature sensor 530 respectively.At this moment, the well heater 540 of ageing test box can open or cut out simultaneously, also can be by the position of each temperature sensor 530, well heater in the ageing test box is divided into many groups, as being called more than first well heater with adjoining one or more well heater of first temperature sensor, one or more well heater adjoining with second temperature sensor can be called more than second well heater.
At this moment, the temperature of its pairing aging testing system control situation as shown in Figure 4.Control circuit 401 first temperature detection value that 430 detections obtain according to first temperature sensor is respectively controlled the startup of more than first well heater 440 that is positioned at described first temperature sensor, 430 surveyed areas or is closed, and second temperature detection value that 450 detections obtain according to second temperature sensor is controlled the startup of more than second well heater 460 that is positioned at described second temperature sensor, 450 surveyed areas or closed.
Among other embodiment of the present utility model, at least one well heater can be arranged in the air channel of the sidepiece of described ageing test box and/or described ageing test box.
Among other embodiment more of the present utility model, the sidepiece that at least one temperature sensor can be positioned at described ageing test box is or/and described ageing test box central area.
As, in other embodiment of the present utility model, can be with a plurality of temperature sensors, evenly be arranged at as 3,4,5,6 and be uniformly distributed in the ageing test box air channel.For example, can 2 temperature sensors be set respectively, in all the other air channels, as evenly distributing 4 in four corners of ageing test box in the top and the center of ageing test box.
In addition, the foregoing description of the present utility model all is example with the high temperature ageing, be understood that, aging testing system of the present invention is applicable to the situation of low temperature aging too, implementation method and the above-mentioned high temperature ageing situation of technical scheme of the present invention under the low temperature aging situation is similar, only need carry out some simple substitution, as at the burn-in test below 20 ℃, for example-20 ℃ ,-50 ℃ etc., then need change the well heater among above each embodiment into refrigeratory, particularly, can be various refrigerating plants, as pipeline of filled with liquid nitrogen or liquid helium etc.
Should understand, in the low temperature aging test, well heater in the utility model replaces with the refrigeratory, suitable equally to it in the utility model the foregoing description for the even measure of adopting that realizes temperature, under the enlightenment of the utility model the various embodiments described above, those of ordinary skill in the art should realize, not repeat them here.
Though the utility model with preferred embodiment openly as above; but it is not to be used for limiting the utility model; any those skilled in the art are not in breaking away from spirit and scope of the present utility model; can make possible change and modification, therefore protection domain of the present utility model should be as the criterion with the scope that the utility model claim is defined.
Claims (10)
1. ageing test box, comprise a plurality of burn-in boards, each described burn-in board is provided with a plurality of burn-in test sockets, it is characterized in that: described ageing test box also has a plurality of well heaters and at least one temperature sensor, described temperature sensor detects the temperature in the described ageing test box, obtain at least one temperature detection value, described a plurality of well heaters start according to the desired temperature of described at least one temperature detection value and ageing test box or cut out.
2. ageing test box as claimed in claim 1 is characterized in that: described a plurality of burn-in boards are along vertical arrangement of described ageing test box, and are provided with the recirculating air device in the described ageing test box, to form circulation air path between each burn-in board.
3. ageing test box as claimed in claim 2 is characterized in that: described a plurality of well heaters are arranged in the air channel of the bottom of described ageing test box and/or described ageing test box.
4. ageing test box as claimed in claim 3 is characterized in that: described at least one temperature sensor is positioned at the top of described ageing test box or/and described ageing test box central area.
5. ageing test box as claimed in claim 1 is characterized in that: described a plurality of burn-in boards are transversely arranged along described ageing test box, and are provided with the recirculating air device in the described ageing test box, to form circulation air path between each burn-in board.
6. ageing test box as claimed in claim 5 is characterized in that: described a plurality of well heaters are arranged in the air channel of the sidepiece of described ageing test box and/or described ageing test box.
7. ageing test box as claimed in claim 5 is characterized in that: described at least one temperature sensor is positioned at the sidepiece of described ageing test box or/and described ageing test box central area.
8. as claim 3 or 6 described ageing test boxes, it is characterized in that: described at least one temperature sensor is uniformly distributed in the described ageing test box.
9. aging testing system, comprise ageing test box and control circuit, be provided with a plurality of burn-in boards in the described ageing test box, each described burn-in board is provided with a plurality of burn-in test sockets, it is characterized in that: described ageing test box also has a plurality of well heaters and at least one temperature sensor, described temperature sensor detects the temperature in the described ageing test box, obtain at least one temperature detection value, described control circuit controls the startup of a plurality of well heaters according to the desired temperature of described at least one temperature detection value and ageing test box or cuts out.
10. aging testing system as claimed in claim 9, it is characterized in that: when described at least one temperature sensor comprises first temperature sensor and second temperature sensor, described control circuit first temperature detection value that detection obtains according to first temperature sensor is respectively controlled the startup of a plurality of well heaters that are positioned at the described first temperature sensor surveyed area or is closed, and second temperature detection value that detection obtains according to second temperature sensor is controlled the startup of a plurality of well heaters that are positioned at the described second temperature sensor surveyed area or closed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201020207501 CN201716395U (en) | 2010-05-27 | 2010-05-27 | Aging test box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201020207501 CN201716395U (en) | 2010-05-27 | 2010-05-27 | Aging test box |
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| CN201716395U true CN201716395U (en) | 2011-01-19 |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102890204A (en) * | 2011-07-18 | 2013-01-23 | 神讯电脑(昆山)有限公司 | Constant temperature aging device |
| CN103543300A (en) * | 2013-10-29 | 2014-01-29 | 路旺培 | LED power panel aging testing case |
| CN103913412A (en) * | 2014-04-22 | 2014-07-09 | 苏州华周胶带有限公司 | Tape vacuum aging box |
| CN105606990A (en) * | 2015-11-24 | 2016-05-25 | 北京新润泰思特测控技术有限公司 | Aging test box |
| CN105676104A (en) * | 2014-11-18 | 2016-06-15 | 上海宏测半导体科技有限公司 | Ageing treatment device and method |
| CN105759193A (en) * | 2016-04-27 | 2016-07-13 | 杭州华扬电子有限公司 | Thermal ageing testing apparatus and using method thereof |
| CN107238734A (en) * | 2017-04-18 | 2017-10-10 | 深圳市帝晶光电科技有限公司 | A kind of reliability testing system board protector |
| CN107450522A (en) * | 2017-08-29 | 2017-12-08 | 芜湖莫森泰克汽车科技股份有限公司 | ECU ageing testing equipments |
| CN107680635A (en) * | 2017-11-04 | 2018-02-09 | 深圳市时创意电子有限公司 | A kind of large high-temperature test equipment applied to solid state hard disc reliability testing |
| CN109119127A (en) * | 2018-08-30 | 2019-01-01 | 武汉精鸿电子技术有限公司 | A kind of semiconductor memory high/low temperature ageing test box |
| CN111984042A (en) * | 2020-08-20 | 2020-11-24 | 无锡摩斯法特电子有限公司 | Heating device for power device aging examination |
-
2010
- 2010-05-27 CN CN 201020207501 patent/CN201716395U/en not_active Expired - Lifetime
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102890204A (en) * | 2011-07-18 | 2013-01-23 | 神讯电脑(昆山)有限公司 | Constant temperature aging device |
| CN103543300A (en) * | 2013-10-29 | 2014-01-29 | 路旺培 | LED power panel aging testing case |
| CN103913412A (en) * | 2014-04-22 | 2014-07-09 | 苏州华周胶带有限公司 | Tape vacuum aging box |
| CN105676104A (en) * | 2014-11-18 | 2016-06-15 | 上海宏测半导体科技有限公司 | Ageing treatment device and method |
| CN105676104B (en) * | 2014-11-18 | 2023-11-17 | 南京宏泰半导体科技股份有限公司 | Aging treatment device and method |
| CN105606990A (en) * | 2015-11-24 | 2016-05-25 | 北京新润泰思特测控技术有限公司 | Aging test box |
| CN105759193B (en) * | 2016-04-27 | 2018-10-02 | 杭州华扬电子有限公司 | A kind of thermal ageing test device and its application method |
| CN105759193A (en) * | 2016-04-27 | 2016-07-13 | 杭州华扬电子有限公司 | Thermal ageing testing apparatus and using method thereof |
| CN107238734A (en) * | 2017-04-18 | 2017-10-10 | 深圳市帝晶光电科技有限公司 | A kind of reliability testing system board protector |
| CN107238734B (en) * | 2017-04-18 | 2019-11-05 | 深圳市帝晶光电科技有限公司 | A kind of reliability test system board protective device |
| CN107450522A (en) * | 2017-08-29 | 2017-12-08 | 芜湖莫森泰克汽车科技股份有限公司 | ECU ageing testing equipments |
| CN107680635A (en) * | 2017-11-04 | 2018-02-09 | 深圳市时创意电子有限公司 | A kind of large high-temperature test equipment applied to solid state hard disc reliability testing |
| CN107680635B (en) * | 2017-11-04 | 2023-12-08 | 深圳市时创意电子有限公司 | Large-scale high-temperature test equipment applied to solid state disk reliability test |
| CN109119127A (en) * | 2018-08-30 | 2019-01-01 | 武汉精鸿电子技术有限公司 | A kind of semiconductor memory high/low temperature ageing test box |
| CN111984042A (en) * | 2020-08-20 | 2020-11-24 | 无锡摩斯法特电子有限公司 | Heating device for power device aging examination |
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