CN201697936U - Piezoelectric high-frequency vibration table - Google Patents
Piezoelectric high-frequency vibration table Download PDFInfo
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- CN201697936U CN201697936U CN2010202037760U CN201020203776U CN201697936U CN 201697936 U CN201697936 U CN 201697936U CN 2010202037760 U CN2010202037760 U CN 2010202037760U CN 201020203776 U CN201020203776 U CN 201020203776U CN 201697936 U CN201697936 U CN 201697936U
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Abstract
The utility model relates to a piezoelectric high-frequency vibration table, and belongs to the field of mechanical vibration measurement. In order to solve the problem of the influence on the long-time stability of a vibration table due to viscose glue ageing of the conventional high-frequency vibration table and to further improve the key technical indicators of the distortion degree and the resonance peak of vibration tables, the utility model provides a piezoelectric high-frequency vibration table, which comprises a base, a prestress bolt and a piezoceramic stack, wherein the piezoceramic stack is stacked at the upper end of the base, and a table board is stacked at the upper end of the piezoceramic stack; the prestress bolt is arranged in the central position at the bottom of the inner surface of the base, and is inserted in the table board after penetrating through the base and the piezoceramic stack; and an insulated sleeve is sleeved in the part where the bolt is positioned in the piezoceramic stack; the piezoceramic stack is wrapped outside the insulated sleeve, and electrodes are arranged among all layers inside. The technical scheme of the utility model guarantees the long-time stability of the vibration table, achieves the purposes of enhanced power capacity and improved resonance frequency, can realize no resonance peak within the range of working frequency, and can enable the vibration table to meet the large amplitude calibration of a high-frequency accelerometer.
Description
Technical field
The utility model belongs to mechanics vibration measurement field, is specifically related to a kind of piezoelectric type high-frequency vibrating table.
Background technology
The dither benchmark is being born the transmission of quantity value work of national each province and city metrological service, Aero-Space and military project, each the highest vibration standard high frequency of ministries and commissions.The dither benchmark mainly is made up of high-frequency vibrating table, laser interferometer and data acquisition processing system three parts.Be mainly used in the dither pumping signal that produces 2kHz～50kHz at dither benchmark medium-high frequency shaking table.The performance of this benchmark plays crucial effects to unitarity and the accuracy that guarantees China's high frequency value.Piezoelectric type high-frequency vibrating table is the very important ingredient of this dither standard apparatus.So the long-time stability of piezoelectric type high-frequency vibrating table and the performance that key technical index directly influences the dither benchmark.The piezoelectric type high-frequency vibrating table of development China seventies as shown in Figure 1, wherein, 101: table top; 102: pedestal; 103: shell; 104: piezoelectric stack; 105: electrode; The at present main two aspect problems that exist of this high-frequency vibrating table: (1) has two harmonic peaks between 26kHz～28kHz, so this shaking table can't operate as normal in 26kHz～28kHz frequency range; (2) adopt epoxy bond between existing vibration table surface, piezoelectric patches, electrode and the base, aging along with adhesive glue can't guarantee key technical index such as the long-time stability of shaking table and degree of distortion, harmonic peak.And former shaking table can't accurately be controlled prestressed size in the process that adopts the epoxy bond piezoelectric patches, and therefore many piezoelectric type high-frequency vibrating table consistance of development are relatively poor simultaneously.And high-frequency vibrating table is as the core component of high frequency standard, and its long-time stability are extremely important.
The utility model content
(1) technical matters that will solve
The technical problems to be solved in the utility model is to overcome the aging influence to the shaking table long-time stability of existing high-frequency vibrating table adhesive glue, and further improve key technical index such as shaking table degree of distortion, harmonic peak, and further guarantee national dither value accurately and reliably, for providing metering, technical supervision department guarantees.
(2) technical scheme
For solving the problems of the technologies described above, the utility model provides a kind of piezoelectric type high-frequency vibrating table, comprises that pedestal, piezoelectric ceramics stack, table top and pre-stressed bolt;
The stacked described piezoelectric ceramics in described pedestal upper end stacks, and described piezoelectric ceramics stacks the stacked described table top in upper end;
Described pre-stressed bolt is arranged at the middle position of described pedestal inside surface bottom, and be set to pass described pedestal and piezoelectric ceramics and stack the back and insert in the described table top, and described pre-stressed bolt is positioned at the part that described piezoelectric ceramics stacks and is with insulating sleeve;
Described piezoelectric ceramics stacks and is wrapped in described insulating sleeve outside, is provided with electrode between each layer that described piezoelectric ceramics stacks.
Described piezoelectric ceramics stacks by the material that for the piezoelectric modulus scope is 250～400C/N and makes.
The flatness and the depth of parallelism that described piezoelectric ceramics stacks both ends of the surface are 0.001mm～0.01mm.
Described piezoelectric ceramics stacks to be piled up by piezoelectric ceramic piece and forms, and the thickness of described piezoelectric ceramic piece is 3mm～5mm;
The height that described piezoelectric ceramics stacks is 12.20mm～25.12mm.
Described electrode is a copper foil electrode, is used for stacking with described piezoelectric ceramics carrying out same polarity and linking to each other;
The negative electrode that described piezoelectric ceramics stacks connects described pedestal and table top respectively.
Described table top is (4.0 * 10 by density value
3～8.0 * 10
3) Kg/m
3, and elastic mould value be (1.3 * 10
11～1.5 * 10
11The material of)/Gpa is made, and its size is according to object designs to be calibrated.
Described pedestal is (14.0 * 10 by density value
3～17.5 * 10
3) Kg/m
3, and elastic mould value be (1.3 * 10
11～1.5 * 10
11The material of)/Gpa is made.
Described pre-stressed bolt is made by high strength bolting steel after heat treatment;
Pre-stressed bolt is that 0.75mm～1.25mm, mechanical strength value are that 900～1600Mpa and length are the bolt of 45mm～55mm for the pitch value.
(3) beneficial effect
Technical solutions of the utility model contrast prior art, possess the feature of following several respects:
(1) utilize the inverse piezoelectric effect of piezoelectric ceramic vibrator, promptly the piezoelectric ceramics of radial polarization stacks and produce axial alternating deformation in alternating electric field, makes vibration table surface produce sinusoidal vibration;
(2) by adopting table top, base and pre-stressed bolt to stack the prestress replacement epoxy bond method that applies to piezoelectric ceramics, make piezoelectric ceramics stack the persistence of keeping compressive state when bearing dither in the course of the work and be significantly improved, and then effectively avoid in the prior art because of aging former of epoxy bond glue thereby the problem that causes piezoelectric ceramic piece easily to break; This technical scheme has guaranteed the long-time stability of shaking table, reaches the purpose that improves power capacity and improve resonance frequency;
(3) by the ANSYS limited element analysis technique one-piece construction of high-frequency vibrating table is carried out theoretical analysis, in conjunction with the development experience, the shaking table of final development can be implemented in operating frequency range (no harmonic peak in the 2kHz～50kHz) substantially;
(4) principle with the luffing bar is applied on the mesa designs of high-frequency vibrating table, makes shaking table produce the effect that amplitude amplifies under identical thrust, and this design can make the shaking table of development newly satisfy the large amplitude calibration of high frequency accelerometer.
Description of drawings
Fig. 1 is the structural representation of piezoelectric type high-frequency vibrating table in the prior art;
The structural representation of the piezoelectric type high-frequency vibrating table that Fig. 2 is provided for the utility model embodiment;
The synoptic diagram that Fig. 3 stacks for piezoelectric ceramics among the utility model embodiment;
The inner structure synoptic diagram that Fig. 4 stacks for piezoelectric ceramics among the utility model embodiment;
Fig. 5 shows the difference performance of piezoelectric type high-frequency vibrating table contrast prior art on degree of distortion and harmonic peak that the utility model embodiment is provided.
Embodiment
For making the purpose of this utility model, content and advantage clearer,, embodiment of the present utility model is described in further detail below in conjunction with drawings and Examples.Following examples only are used for the technical solution of the utility model more clearly is described, and can not limit protection domain of the present utility model with this.
Present embodiment specifically describes the architectural feature and the functional character of the piezoelectric type shaking table that technical solutions of the utility model provided.
As shown in Figure 2, a kind of piezoelectric type high-frequency vibrating table comprises that shell 203, pedestal 202, piezoelectric ceramics stack 204, table top 201 and pre-stressed bolt 207;
The stacked described piezoelectric ceramics in described pedestal 202 upper ends stacks 204, and described piezoelectric ceramics stacks the stacked described table top 201 in 204 upper ends, and described table top 201 upper surfaces are used to accept object to be calibrated (for example sensor);
Described pre-stressed bolt 207 is arranged at the middle position of described pedestal 202 inside surfaces bottom, and be set to pass described pedestal 202 and piezoelectric ceramics and stack 204 backs and insert described table top 201 inside, and pre-stressed bolt 207 is positioned at piezoelectric ceramics and stacks 204 part and be with insulating sleeve 206;
Described piezoelectric ceramics stacks 204, is arranged between described table top 201 and the pedestal 202, and is wrapped in described insulating sleeve 206 outsides, and described piezoelectric ceramics stacks between 204 inner each layers and is provided with electrode 205.
Described piezoelectric ceramics stacks the material that 204 materials are the big and deformation good linearity of piezoelectric modulus;
Preferably, to stack 204 be that the material of 250～400C/N is made by the piezoelectric modulus scope to described piezoelectric ceramics.
The flatness and the depth of parallelism that described piezoelectric ceramics stacks 204 both ends of the surface are 0.001mm～0.01mm.
Described piezoelectric ceramics stacks to be piled up by piezoelectric ceramic piece and forms, and described piezoelectric ceramic piece thickness is 3mm～5mm;
To stack 204 overall height range of choice be 12.20mm～25.12mm to piezoelectric ceramics in the described high-frequency vibrating table.
As shown in Figure 4, piezoelectric element (for example piezoelectric ceramic piece) is formed when stacking, for guaranteeing the interpolar conduction, all serve as a contrast between two piezoelectric patches with copper foil electrode 402, be used for being connected with extraneous electric power system, and described piezoelectric ceramics is stacked 401 carry out same polarity and link to each other, forming the state of circuit parallel connection, and described piezoelectric ceramics stacks 401 negative electrode and connects pedestal 202 and table top 201 respectively.
Described table top 201 manufacturing materials are the big material of the little rigidity of density, and its size is according to object designs to be calibrated;
Preferably, described table top 201 is (4.0 * 10 by the density value scope
3～8.0 * 10
3) Kg/m
3, and the elastic mould value scope be (1.3 * 10
11～1.5 * 10
11The material of)/Gpa is made.
Described pedestal 202 manufacturing materials are the big material of the big rigidity of density;
Preferably, described pedestal 202 is (14.0 * 10 by the density value scope
3～17.5 * 10
3) Kg/m
3, and the elastic mould value scope be (1.3 * 10
11～1.5 * 10
11The material of)/Gpa is made.
Described pre-stressed bolt 207 manufacturing materials are high strength bolting steel after heat treatment.
Described pre-stressed bolt 207 is the bolt of 45mm～55mm for thin pitch, physical strength height and length;
Preferred pitch value scope is that 0.75mm～1.25mm, mechanical strength value scope are 900～1600Mpa.
Below above-mentioned each parts are elaborated:
1〉about the design proposal of piezo ceramic element (being above-mentioned piezoelectric ceramic piece)
The design size of piezo ceramic element is meant that piezoelectric ceramics stacks physical dimension and the whole piezoelectric ceramics cumulative volume that stack of discrete component on direction of vibration.Piezoelectric element can be selected lead zirconate titanate Series P ZT-4, PZT-5 and PZT-8 material for use, their dielectric loss tg δ＜0.4%.Qm is bigger.Its geomery as shown in Figure 3, described 301 is piezoelectric ceramic piece, optional thickness is 5mm, its internal diameter diameter may be selected to be 12mm, the external diameter diameter may be selected to be 40mm.Because the piezoelectricity high-frequency vibrating table is worked under weak electric field, so its material selects to be not limited to emission type.Take all factors into consideration, piezoelectric modulus should be controlled in the scope of 250～400C/N, preferentially selects for use piezoelectric modulus to receive section bar material PZT-5 or PZT-8 preferably than big and deformation linearity.Element all controls in the 0.01mm flatness of both ends of the surface and the depth of parallelism through grinding behind sintering, and the scope of 0.001mm～0.01mm preferably guarantees the distortion of vibration table surface and laterally less from physical dimension.
The thickness of piezoelectric ceramic piece and quantity are selected, and also need conscientiously to consider all sidedly, and electrical impedance, Qm and the electromechanical coupling factor of this and shaking table all have relation.Piezoelectric ceramic piece can not be too thick, otherwise be difficult for excitation; But can not be too thin, otherwise can cause the surface of contact between sheet and the sheet too many, form a plurality of reflection horizon, the propagation of influence vibration.According to practical experience, as shown in Figure 4, the general thickness of piezoelectric ceramic piece 401 is chosen as 3mm～5mm scope, and is preferred, can select the piezoelectric ceramic piece of thickness 5mm; The overall height range of choice that piezoelectric ceramics stacks in the described high-frequency vibrating table is 12.20mm～25.12mm, to guarantee suitable electromechanical coupling factor;
Described piezoelectric stack overall height is to be drawn by following formula: h=d
1* s
1+ d
2* s
2
Wherein, h is the overall height of piezoelectric stack, d
1Thickness for piezoelectric patches; s
1Be the piezoelectric patches number, get 4～5 according to theoretical simulation and experimental result piezoelectric patches number and be advisable; d
2Be thickness of electrode, s
2Be number of electrodes.
2〉about the design proposal of table top and pedestal
Can be considered as effect one alternating force between table top and pedestal roughly to the high-frequency vibrating table exciting, the motion of table top and pedestal and their quality are inversely proportional to.For making table top output than large amplitude, table top wants light and quality pedestal wants big, and the material of table top should be considered the big feature of the little stiffness of density, and preferentially selecting the density value scope is (4.0 * 10
3～8.0 * 10
3) Kg/m
3, the elastic mould value scope is (1.3 * 10
11～1.5 * 10
11The material of)/Gpa; Such as titanium alloy, titanium alloy has the big characteristic of the little stiffness of density, to make table top have enough big motional amplitude and higher resonance frequency like this, the physical dimension of table top is to consider when doing calibration test, its mechanical stiffness should be than being installed in big by the school sensor on the table top, like this, table top can be considered the to-and-fro movement of finishing approximate stiff piston.
For the requirement of pedestal, mainly select for use proportion bigger, the material that rigidity is also bigger, in the hope of reducing the motion of pedestal itself, the density value scope is controlled to be made as (14.0 * 10
3～17.5 * 10
3) Kg/m
3, the elastic mould value scope is controlled is made as (1.3 * 10
11～1.5 * 10
11)/Gpa.The material that can select for use has the hard tungsten-cobalt alloy, but further cut difficulty.Another kind is a tungsten-copper alloy, and it can carry out cut, but rigidity is less.
3〉about the design proposal of prestress associated components
The tensile strength of piezo ceramic element material is lower, and its numerical value is about 2 * 10
7N/m
2～5 * 10
7N/m
2, its compressive strength is then higher, probably is about 10 times of its tensile strength.Therefore under high-power state, piezoelectric ceramics damages easily.Take place for fear of this phenomenon, technical solutions of the utility model adopt the prestressed method that applies during about the development high-frequency vibrating table.Requirement for pre-stressed bolt is to produce a very big constant prestress, and better elastic is arranged again.Pre-stressed bolt will be made with high-intensity bolting steel, and the mechanical strength value scope should be chosen in the material of 900～1600Mpa, and commonly used have chromium steel, tool steel and titanium alloy etc. No. 40.In order to guarantee the performance of bolt material, the reply bolt material carries out suitable thermal treatment.On the other hand, prestressed size is very big to the performance impact of high-frequency vibrating table.Through a large number of experiments show that prestressed size should have a more suitable scope, added prestress size should be adjusted to the maximum stretching stress that is run into greater than in the shaking table course of work in the technical solutions of the utility model research process.If prestress is too little, the flexible stress that produces in the shaking table course of work may make the bigger energy loss of generation between each surface of contact of shaking table greater than prestress, has reduced the electromechanical conversion efficiency of shaking table, may cause piezoelectric ceramic piece to break when serious, thereby damage shaking table.On the other hand, the prestress of shaking table again can not be too big, because too big prestress may make the vibration of piezoelectric ceramic piece be affected, reduces the electromechanical coupling factor that piezoelectric ceramics stacks, and may also can cause piezoelectric patches to break sometimes.
The prestressed pressue device of the use lifting jack transformation of the way and the method that torque spanner combines of applying.At first apply certain pressure to shaking table, and then utilize the fastening pre-stressed bolt of torque spanner with pressue device.It should be noted that in the process that prestress applies at first and two pressurization planes of pressue device to be adjusted to parallel that pressure boost stops pressurization when reaching the force value of design in advance lentamente, uses torque spanner with the fastening good pre-stressed bolt of certain moment then.In the process of reality development shaking table, prestressed control will be the more important thing is the accumulation by practical experience after the repetition test by means of the result of theoretical research on the one hand.
About the prestressed influence of high-frequency vibrating table, can reduce following some: the first, prestress can make the resonance frequency of high-frequency vibrating table produce small variation, thereby can make the performances such as resonant frequency of a plurality of shaking tables reach consistent by changing prestress; The second, the prestress that is of moderate size can not change the material parameter of shaking table composition material basically; The 3rd, along with prestressed increase, the resonant frequency of shaking table is raise, and finally reach a stationary value; The 4th, prestressed increase can increase effective contact area of shaking table, increases the reach of elastic wave, thereby reduces mechanical loss.The 5th, for piezoceramic material commonly used, as PZT-8 section bar material, it is comparatively suitable that prestress is chosen in about 30MPa; Certainly the size of this numerical value is not absolute, because prestressed size is relevant with many factors, and the smooth degree of surface of contact for example, the machining precision of mechanical component and piezo ceramic element performance inconsistent etc.
By above analysis as can be known, applying prestress is very important to piezoelectric type high-frequency vibrating table, it is the key in the piezoelectric type high-frequency vibrating table development technology, and it is high-power that the piezoelectric type shaking table is born, and improves reliability, stability and the consistance of shaking table.
In addition, the screw thread form of pre-stressed bolt and physical dimension also are influential to the vibration performance of shaking table.The factor that the long-pending design of screw cross-section should be considered is a lot, vibration frequency for example, and the power of shaking table etc., and the prestress tight association of all these and pre-stressed bolt, thereby its selection is very complicated.Generally speaking, the cross-sectional area that depends on the shaking table pre-stressed bolt.Therefore, rule of thumb and in conjunction with actual conditions, piezoelectric type high-frequency vibrating table is preferentially selected the bolt of M10 for use, to guarantee enough physical strengths.About the length of pre-stressed bolt, the longer the better in principle, but consider problems such as technology and actual use, and the optimum length of pre-stressed bolt should be more than three times of piezo ceramic element total length.As for concrete length, also to consider the influence of the factors such as pitch of the power of shaking table and bolt, preferred, selectable lengths is the bolt of 45mm～55mm.In the selection course of shaking table pre-stressed bolt, it is very important that the pitch of bolt is selected, and it is very big to the performance impact of shaking table.According to general principle, fine thread is better than coarse thread, and the pitch of screw thread is not more than 2mm, and for a kind of bolt of specification, for example is all fine thread, and then pitch is thin more, and the performance of shaking table is good more, and preferred pitch value scope is 0.75mm～1.25mm.Concrete is presented as: the pitch of prestress screw thread is thin more, the prestress that is subjected between the surface of contact of the table top of shaking table and base and piezoelectric ceramics is even more, the stress distribution that the screw rod of pre-stressed bolt is subjected to itself is also even more, thereby can guarantee Qm that whole piezoelectricity high-frequency vibrating table is higher and lower mechanical loss, to improve the conversion efficiency of shaking table.Below only analyze qualitatively,, then must set up comparatively complicated finite element model, for example the elastic deformation model of the rubbing contact model of bolt, bolt and plastic deformation model if study pre-stressed bolt in great detail to the shaking table Effect on Performance for some.
4〉influencing each other between each parts contact interface of shaking table in the comprehensive technique scheme
In the development process of piezoelectric type shaking table, each process of machining precision and mounting process all has very big influence to the performance of shaking table.The first, the surface of contact between each element of composition piezoelectric type high-frequency vibrating table should be smooth smooth.So the surface of each bound fraction will be ground, generally should reach level near minute surface; The second, between every adjacent two potsherds, and to fill up one deck foil between potsherd and the front and back metal cover board usually as metal electrode, its material can be selected phosphorus bronze sheet for use.The thickness of electrode can be divided into two kinds of situations.A kind of is the thin electrodes situation, and its thickness is generally about 0.2mm; Another kind is the thick electrode situation, and its thickness can be selected according to concrete requirement.For the thick electrode situation, its effect also has heat radiation and other function except as the electrode connection, as being connected with extraneous electric power system etc.The 3rd, generally, between wafer, electrode slice and metal front and rear cover plate,, with pre-stressed bolt each parts of shaking table are fixed together then and tighten with epoxy resin gummed.If the surface of contact of each building block of shaking table is to handle through special grinding technics, also can directly use pre-stressed bolt fastening without epoxy resin binder.But in order to eliminate the existence of air-gap, improve the conversion efficiency of shaking table, the method that can use epoxy resin binder to bond earlier before fastening with pre-stressed bolt.In addition, should guarantee as far as possible that the xsect of pre-stressed bolt and each parts of shaking table keeps vertical, can't operate as normal or cause piezoelectric ceramic wafer to break otherwise high-frequency vibrating table is possibly.
Be also noted that in addition high-frequency vibrating table is when work, if it is placed directly on the ground, the vibration meeting and the external world of shaking table produce vibration coupling.In order to reduce this coupling as far as possible, shaking table should be placed on the rubber ring with the identical size of shaking table base, realize the vibration isolation between shaking table and the ground.
Through a large amount of experiments relatively, the piezoelectric type high-frequency vibrating table that present embodiment provided when all is better than former shaking table on the prior art medium-high frequency vibration benchmark in aspect such as harmonic peak in degree of distortion, transverse vibration, through substituting the former shaking table on the former dither benchmark behind the stability assessment of a period of time.This achievement in research not only can further be improved the dither benchmark, and on the basis of this achievement in research, participates in international comparison for the dither benchmark of China National Measuring Science Research Inst. the important techniques guarantee is provided.
Through experimental test, the shaking table that present embodiment provided is compared as follows table and shown in Figure 5 for existing shaking table in the data aspect degree of distortion and the harmonic peak:
By last table and Fig. 5 as can be seen, former high frequency standard shaking table is very big in the degree of distortion of 28kHz, 30kHz, 34kHz Frequency point, almost can't measure.And newly the development high-frequency vibrating table in 2kHz～50kHz whole frequency degree of distortion all less than 1.5%.The quality of degree of distortion index is most important to vibration survey, and Yan Zhi shaking table improvement to the degree of distortion index in whole frequency newly has great importance to the performance that improves high frequency standard; And can find relatively from Fig. 5 degree of distortion, there are two tuning-pointss in the shaking table of former high frequency standard, and newly the shaking table of development has effectively suppressed tuning-points, in fact, in conjunction with the development experience, the shaking table of final development is implemented in operating frequency range (no harmonic peak in the 2kHz～50kHz) substantially.
In sum, technical solutions of the utility model are utilized the ANSYS finite element method, high frequency platform to tens of kinds of different structure different sizes carries out the resonance frequency simulation analysis, finally determined the size of high-frequency vibrating table, effectively avoided the harmonic peak of shaking table from the angle of theoretical analysis, the experimental data and the theoretical analysis of the shaking table of finally developing fit like a glove;
Its core feature is:
(1) utilize the inverse piezoelectric effect of piezoelectric ceramic vibrator, promptly the piezoelectric ceramics of radial polarization stacks and produce axial alternating deformation in alternating electric field, makes vibration table surface produce sinusoidal vibration;
(2) by adopting table top, base and pre-stressed bolt to stack the prestress replacement epoxy bond method that applies to piezoelectric ceramics, make piezoelectric ceramics stack the persistence of keeping compressive state when bearing dither in the course of the work and be significantly improved, and then effectively avoid in the prior art because of aging former of epoxy bond glue thereby the problem that causes piezoelectric ceramic piece easily to break; This technical scheme has guaranteed the long-time stability of shaking table, reaches the purpose that improves power capacity and improve resonance frequency;
(3) by the ANSYS limited element analysis technique one-piece construction of high-frequency vibrating table is carried out theoretical analysis, in conjunction with the development experience, the shaking table of final development can be implemented in operating frequency range (no harmonic peak in the 2kHz～50kHz) substantially;
(4) principle with the luffing bar is applied on the mesa designs of high-frequency vibrating table, makes shaking table produce the effect that amplitude amplifies under identical thrust, and this design can make the shaking table of development newly satisfy the large amplitude calibration of high frequency accelerometer.
(5) as long as table top, base and piezoelectric ceramic piece physical dimension are reasonable in design, the temperature coefficient of piezoceramic material elastic constant just can obtain compensation by the temperature coefficient of metal material elastic constant, therefore what the temperature coefficient of piezoelectric type high-frequency vibrating table can be done is very little, its temperature stable fine;
(6) by thickness, shape and the table top of change piezoceramic material and the physical dimension and the shape of base, can be optimized design, obtain wider frequency and bigger vibration amplitude, to adapt to the dither calibration to shaking table.
The above only is a preferred implementation of the present utility model; should be understood that; for those skilled in the art; under the prerequisite that does not break away from the utility model know-why; can also make some improvement and distortion, these improvement and distortion also should be considered as protection domain of the present utility model.
Claims (8)
1. a piezoelectric type high-frequency vibrating table is characterized in that, comprises that pedestal, piezoelectric ceramics stack, table top and pre-stressed bolt;
The stacked described piezoelectric ceramics in described pedestal upper end stacks, and described piezoelectric ceramics stacks the stacked described table top in upper end;
Described pre-stressed bolt is arranged at the middle position of described pedestal inside surface bottom, and be set to pass described pedestal and piezoelectric ceramics and stack the back and insert in the described table top, and described pre-stressed bolt is positioned at the part that described piezoelectric ceramics stacks and is with insulating sleeve;
Described piezoelectric ceramics stacks and is wrapped in described insulating sleeve outside, is provided with electrode between each layer that described piezoelectric ceramics stacks.
2. piezoelectric type high-frequency vibrating table as claimed in claim 1 is characterized in that, described piezoelectric ceramics stacks by the material that for the piezoelectric modulus scope is 250～400C/N and makes.
3. piezoelectric type high-frequency vibrating table as claimed in claim 1 is characterized in that, the flatness and the depth of parallelism that described piezoelectric ceramics stacks both ends of the surface are 0.001mm～0.01mm.
4. piezoelectric type high-frequency vibrating table as claimed in claim 1 is characterized in that, described piezoelectric ceramics stacks to be piled up by piezoelectric ceramic piece and forms, and the thickness of described piezoelectric ceramic piece is 3mm～5mm;
The height that described piezoelectric ceramics stacks is 12.20mm～25.12mm.
5. piezoelectric type high-frequency vibrating table as claimed in claim 1 is characterized in that described electrode is a copper foil electrode, is used for stacking with described piezoelectric ceramics carrying out same polarity and linking to each other;
The negative electrode that described piezoelectric ceramics stacks connects described pedestal and table top respectively.
6. piezoelectric type high-frequency vibrating table as claimed in claim 1 is characterized in that, described table top is (4.0 * 10 by density value
3～8.0 * 10
3) Kg/m
3, and elastic mould value be (1.3 * 10
11～1.5 * 10
11The material of)/Gpa is made, and its size is according to object designs to be calibrated.
7. piezoelectric type high-frequency vibrating table as claimed in claim 1 is characterized in that, described pedestal is (14.0 * 10 by density value
3～17.5 * 10
3) Kg/m
3, and elastic mould value be (1.3 * 10
11～1.5 * 10
11The material of)/Gpa is made.
8. piezoelectric type high-frequency vibrating table as claimed in claim 1 is characterized in that described pre-stressed bolt is made by high strength bolting steel after heat treatment;
Pre-stressed bolt is that 0.75mm～1.25mm, mechanical strength value are that 900～1600Mpa and length are the bolt of 45mm～55mm for the pitch value.
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| CN101854153A (en) * | 2010-05-21 | 2010-10-06 | 中国计量科学研究院 | Piezoelectric type high-frequency vibrating table |
| CN105080820A (en) * | 2014-12-04 | 2015-11-25 | 湖北瑜晖超声科技有限公司 | Piezoelectric type longitudinal emitting high-power ultrasonic transducer |
| CN107238730A (en) * | 2017-04-28 | 2017-10-10 | 苏州东菱振动试验仪器有限公司 | A kind of piezoelectric type high-frequency vibrating table |
| CN107990859A (en) * | 2016-10-27 | 2018-05-04 | 中国科学院长春光学精密机械与物理研究所 | A kind of calibration device of micro-displacement sensor and its application |
| CN112113733A (en) * | 2020-10-14 | 2020-12-22 | 中国航空工业集团公司北京长城计量测试技术研究所 | Surface-fixed type prestress controllable vibration excitation method and device |
-
2010
- 2010-05-21 CN CN2010202037760U patent/CN201697936U/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101854153A (en) * | 2010-05-21 | 2010-10-06 | 中国计量科学研究院 | Piezoelectric type high-frequency vibrating table |
| CN105080820A (en) * | 2014-12-04 | 2015-11-25 | 湖北瑜晖超声科技有限公司 | Piezoelectric type longitudinal emitting high-power ultrasonic transducer |
| CN107990859A (en) * | 2016-10-27 | 2018-05-04 | 中国科学院长春光学精密机械与物理研究所 | A kind of calibration device of micro-displacement sensor and its application |
| CN107990859B (en) * | 2016-10-27 | 2021-04-13 | 中国科学院长春光学精密机械与物理研究所 | Micro-displacement sensor calibration device and application thereof |
| CN107238730A (en) * | 2017-04-28 | 2017-10-10 | 苏州东菱振动试验仪器有限公司 | A kind of piezoelectric type high-frequency vibrating table |
| CN107238730B (en) * | 2017-04-28 | 2023-08-25 | 苏州东菱振动试验仪器有限公司 | Piezoelectric high-frequency vibration table |
| CN112113733A (en) * | 2020-10-14 | 2020-12-22 | 中国航空工业集团公司北京长城计量测试技术研究所 | Surface-fixed type prestress controllable vibration excitation method and device |
| CN112113733B (en) * | 2020-10-14 | 2022-03-29 | 中国航空工业集团公司北京长城计量测试技术研究所 | Surface-fixed type prestress controllable vibration excitation method and device |
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