CN209706830U - A kind of small size piezoelectric transducer - Google Patents
A kind of small size piezoelectric transducer Download PDFInfo
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- CN209706830U CN209706830U CN201920275166.2U CN201920275166U CN209706830U CN 209706830 U CN209706830 U CN 209706830U CN 201920275166 U CN201920275166 U CN 201920275166U CN 209706830 U CN209706830 U CN 209706830U
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- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 12
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Abstract
The utility model discloses a kind of small size piezoelectric transducers, including pedestal, the first adhesive layer being set on the base, piezoelectric thin film layer on first adhesive layer is set, the second adhesive layer on piezoelectric thin film layer is set, mass block on second adhesive layer is set, and the first pad and the second pad on piezoelectric thin film layer are set, the piezoelectric thin film layer includes supporter, the first electrode being successively set on supporter, piezoelectric membrane and second electrode, the piezoelectric membrane with a thickness of 0.1-10 μm, first pad and first electrode are conductively connected, second pad and second electrode are conductively connected, first pad and the second pad are located at the same side of mass block.The piezoelectric sensor structure of the utility model is simple, small in size, light-weight and be suitable for mass production.
Description
Technical field
The utility model relates to sensor technical field more particularly to a kind of small size piezoelectric transducers.
Background technique
Piezoelectric transducer is the sensor based on piezoelectric effect.Piezoelectric transducer can be to various dynamic forces, machinery
Shock and vibration measure, and power or deformation are converted into electric signal, are widely used in the neck such as acoustics, medicine, mechanics, navigation
Domain.
Lead zirconate titanate (PZT) is a kind of PbZrO3And PbTiO3Mixing material, have excellent piezoelectric property and dielectric special
Property, therefore, PZT is most widely used piezoelectric material in existing piezoelectric transducer.Wherein, Zr/Ti proportion becomes in PZT
Change or add one or two kinds of other microelements (such as antimony, tin, manganese, tungsten), performance can also change.
PZT piezoelectric acceleration sensor is one of PZT piezoelectric transducer.It is broadly divided into compression and shearing two is big
Class, compression sensor have higher response frequency compared with shearing-type.Fig. 1 is that traditional uniaxial compression formula piezoelectric acceleration passes
The structural schematic diagram of sensor, traditional uniaxial compression formula piezoelectric acceleration sensor includes newel 1, piezoelectric patches 2, mass block 3, pre-
Pressing spring 4, fixation member 5, shell 6 and pedestal 7.
Existing piezoelectric patches 2 is piezoelectric ceramic piece, is formed by ceramic powder compacting sintering, due to the particle ratio of powder
It is larger, inevitably there is gap in the piezoelectric ceramic piece being fired into, and material composition, density, there is also deviations for thickness.
In order to reduce inhomogeneities, before use, need to carry out grinding process to each piezoelectric ceramic piece, but remain in the presence of uneven
Property.In addition, piezoelectric ceramic piece is more crisp, especially thickness than it is relatively thin in the case where, once firmly unevenness be easy to cause breaking-up
Property it is broken.It is crushed in order to prevent, the thickness of existing piezoelectric ceramic piece is generally in 0.1mm or more.Due to the intrinsic resonance frequency of device
The thickness of rate and material is inversely proportional, and increases the thickness of piezoelectric ceramic piece, can reduce the resonant frequency of device, reduces the use of device
The highest resonant frequency of frequency range, existing piezoelectric transducer only has 60kHz.
Further, since the material of each component of piezoelectric ceramic piece is different, Density Distribution is also not quite similar, and machining is deposited
In error, so the position of newel is difficult to be overlapped with the mass centre of each component, to generate eccentric phenomena.
Further, the size and quality of component are increased due to the presence of newel, existing piezoelectric transducer it is general
Outer diameter is in 9mm, and weight is in 5g or more, to limit the use of device.
Summary of the invention
Technical problem to be solved by the utility model is to provide a kind of small size piezoelectric transducer, structure is simple, body
Product is small, light-weight and is suitable for mass production.
In order to solve the above-mentioned technical problem, the utility model provides a kind of small size piezoelectric transducer, including pedestal, sets
Set the first adhesive layer on pedestal, the piezoelectric thin film layer being arranged on the first adhesive layer, be arranged on piezoelectric thin film layer
Two adhesive layers, the mass block being arranged on the second adhesive layer and the first pad being arranged on piezoelectric thin film layer and the second weldering
Disk, the piezoelectric thin film layer include supporter, first electrode, piezoelectric membrane and the second electrode being successively set on supporter,
The piezoelectric membrane with a thickness of 0.1-10 μm, first pad and first electrode are conductively connected, second pad and the
The connection of two electrodes conducts, first pad and the second pad are located at the same side of mass block.
As an improvement of the above scheme, first pad and the second pad by Au, Ti, Pt, Ir, Ni, La, Ru, Sr,
One of Ag, Cr, Al, Cu are made.
As an improvement of the above scheme, second pad is formed by conductor wire and second electrode and is conductively connected.
As an improvement of the above scheme, the supporter is made of the hard material for not generating charge, or by generating electricity
Lotus quantity be less than piezoelectric membrane generate amount of charge hard material be made, the supporter with a thickness of 0.05-2mm.
As an improvement of the above scheme, the piezoelectric membrane is pzt thin film, BaTiO film, BiFeO3Film, BaSrO3It is thin
Film, LiNbO3Film, KNbO3Film or LiTaO3Film.
As an improvement of the above scheme, the first electrode and second electrode by Au, Ti, Pt, Ir, Ni, La, Ru, Sr,
One of Ag, Cr, Al, Cu are made.
As an improvement of the above scheme, the mass block is made of copper, tungsten or tungsten copper.
As an improvement of the above scheme, first adhesive layer and the second adhesive layer are by silicon rubber, epoxide-resin glue, propylene
One of acid esters glue and polyurethane adhesive are made.
As an improvement of the above scheme, the pedestal is made of one of stainless steel, Ti, Al and Cu.
Implement the utility model, has the following beneficial effects:
1, the small size piezoelectric transducer of the utility model on supporter by forming piezoelectric membrane, and cooperates the first electricity
Pole and second electrode are to form piezoelectric thin film layer, for substituting traditional piezoelectric ceramic piece, can greatly reduce the size of device,
In addition, the utility model is by forming piezoelectric thin film layer, and by the first adhesive layer and the second adhesive layer by piezoelectric thin film layer, matter
Gauge block and substrate form connection, do not need setting newel, can be to avoid the mass eccentricity of traditional compression type acceleration transducer
The problem of, mechanical part is reduced, the resonant frequency and uniformity of device is further turned up.
2, the same side of mass block is arranged in the first pad and the second pad by the utility model, it is possible to reduce single corpusculum
The area of electric transducer is overstock, so that more small size piezoelectric transducers can be cut on the substrate of same size, from
And save cost.
3, it is right under temperature change or change in shape can also to reduce adhesive layer or pedestal for the supporter of the utility model
The influence of piezoelectric membrane guarantees the accuracy of measurement result.
4, compared with existing piezoelectric ceramic piece, the piezoelectric thin film layer of the utility model uses this structure of supporter, causes
So that piezoelectric membrane is formed on the carrier of large area, production efficiency can not only be improved, additionally it is possible to improve piezoelectric membrane
Uniformity controls the thickness error of piezoelectric membrane within ± 5%, and surface roughness adds in nm magnitude with existing machinery
Work mode is compared, and the piezoelectric membrane of the utility model has having greatly improved in terms of uniformity.
5, since the piezoelectric membrane of the utility model is formed on supporter, so the thickness of the utility model piezoelectric membrane
Degree can control in 0.1-10 μ m, and thickness is only the 1/10 of conventional piezoelectric potsherd thickness hereinafter, therefore can be big
Width improves the intrinsic vibration frequency of device, expands the use scope of device.In addition, the thickness of the utility model piezoelectric membrane is very
It is small, it is possible to reduce the error that transverse movement imports.
6, the piezoelectric thin film layer that the small size piezoelectric transducer of the utility model uses is in large-sized piezoelectric membrane material
It is cut into material, therefore the piezoelectric membrane similar performance of each small pieces, transverse dimension error can control below 1%
μm magnitude, is conducive to the mass production of small size piezoelectric transducer.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of traditional uniaxial compression formula piezoelectric acceleration sensor；
Fig. 2 is the structural schematic diagram of the utility model small size piezoelectric transducer；
Fig. 3 is the top view of the utility model small size piezoelectric transducer；
Fig. 4 is the structural schematic diagram of the utility model piezoelectric thin film layer.
Specific embodiment
It is practical new to this below in conjunction with attached drawing to keep the purpose of this utility model, technical solution and advantage clearer
Type is described in further detail.
Referring to figs. 2 and 3, a kind of small size piezoelectric transducer provided by the utility model, including pedestal 1, setting are the bottom of at
Seat 1 on the first adhesive layer 2, be arranged on the first adhesive layer 2 piezoelectric thin film layer 3, be arranged on piezoelectric thin film layer 3 second
Adhesive layer 4, the mass block 5 being arranged on the second adhesive layer 4 and the first pad 7 and second being arranged on piezoelectric thin film layer
Pad 8.
Referring to fig. 4, the piezoelectric thin film layer 3 includes supporter 31, the first electrode 32 being arranged on supporter 31, setting
In the piezoelectric membrane 33 in first electrode 32 and the second electrode 34 being arranged on piezoelectric membrane 33, wherein the piezoelectricity is thin
Film 33 with a thickness of 0.1-10 μm.
Specifically, first pad 7 is arranged on supporter 31 and is conductively connected with first electrode 32, second weldering
Disk 8 is arranged on piezoelectric membrane 33 and is conductively connected with second electrode 34, and first pad 7 and the second pad 8 are located at quality
The same side of block 5.Wherein, second pad 8 is formed by conductor wire and second electrode 34 and is conductively connected.The utility model
First pad 7 and first electrode 32 can also be monolithic construction.
It should be noted that the piezoelectric transducer can also include insulating layer 6, the setting of insulating layer 6 is in the first electricity
On extremely, and extend on piezoelectric membrane.
Preferably, first pad 7 and the second pad 8 are by Au, Ti, Pt, Ir, Ni, La, Ru, Sr, Ag, Cr, Al, Cu
One of be made.
The supporter 31 is made of hard material, in the course of work of sensor, supporter 31 do not generate charge or
Person generate amount of charge be less than piezoelectric membrane generate charge number, in this way in action process, can to avoid or reduce by
The introduced influence of the charge that supporter generates.Preferably, the material of the supporter 31 is Si, Al2O3Or SiO2。
The supporter 31 of the utility model is for reducing adhesive layer or pedestal under temperature change or change in shape to pressure
The influence of conductive film guarantees the accuracy of measurement result.Wherein, supporter 31 with a thickness of 0.05-2mm.The thickness of supporter 31
Degree is less than 0.05mm, and supporter is easily deformed in gluing fixation procedure, to influence the piezoelectric property of piezoelectric membrane；Supporter
When 31 thickness is greater than 2mm, effect is no longer obvious, will increase the size and weight of device instead.Preferably, supporter 31
With a thickness of 0.1-1mm.Specifically, supporter with a thickness of 0.05mm, 0.1mm, 0.3mm, 0.5mm, 0.8mm, 1mm, 1.2mm,
1.5mm, 1.8mm or 2mm.
It should be noted that the piezoelectric membrane 33 of the utility model is using physics or chemical deposition mode in large area
It is formed on supporter 31, wherein the size of supporter 31 can be 4 cun, 6 cun or 8 cun.Specifically, magnetron sputtering can be used
Method, hydro-thermal method, electrochemical process, sol-gel method, organic chemical vapor deposition, pulsed laser deposition or the injection of high pressure powder
Substrate method forms the piezoelectric membrane of large area on supporter.
Compared with existing piezoelectric ceramic piece, the piezoelectric thin film layer 3 of the utility model uses this structure of supporter, causes
Piezoelectric membrane 33 can be formed on the carrier of large area, can not only improve production efficiency, additionally it is possible to improve piezoelectric membrane 33
Uniformity, make piezoelectric membrane 33 thickness error control within ± 5%, surface roughness is in nm magnitude, with existing machine
Tool processing method is compared, and the piezoelectric membrane of the utility model has having greatly improved in terms of uniformity.
Since the piezoelectric membrane 33 of the utility model is formed on supporter 31, so the utility model piezoelectric membrane 33
Thickness can control in 0.1-10 μ m, thickness is only conventional piezoelectric potsherd thickness 1/10 hereinafter, therefore may be used
To greatly improve the intrinsic vibration frequency of device, expand the use scope of device, the utility model small size piezoelectric transducer
Vibration frequency is up to 100kHz.Since the sensor in Fig. 1 uses thicker piezoelectric ceramic piece, transverse movement can be generated
The error of importing in addition, and the thickness of the utility model piezoelectric membrane 33 is very small, therefore transverse movement importing can be reduced
Error.Preferably, the piezoelectric membrane 33 with a thickness of 0.3-5 μm.Specifically, the piezoelectric membrane 33 with a thickness of 0.1 μm,
0.3 μm, 0.5 μm, 0.8 μm, 1 μm, 1.5 μm, 2 μm, 3 μm, 4 μm, 5 μm, 6 μm, 7 μm, 8 μm, 9 μm or 10 μm.
Preferably, the piezoelectric membrane 33 is pzt thin film, BaTiO film, BiFeO3Film, BaSrO3Film, LiNbO3
Film, KNbO3Film or LiTaO3Film.
The small size piezoelectric transducer of the utility model cooperates first electrode by forming piezoelectric membrane on supporter
With second electrode to form piezoelectric thin film layer, for substituting traditional piezoelectric ceramic piece, the size of device can be greatly reduced, this
Outside, the utility model is by forming piezoelectric thin film layer, and passes through the first adhesive layer and the second adhesive layer for piezoelectric thin film layer, quality
Block and substrate form connection, do not need setting newel, can be to avoid the mass eccentricity of traditional compression type acceleration transducer
Problem reduces mechanical part, the resonant frequency and uniformity of device is further turned up.
Secondly, the piezoelectric membrane that the small size piezoelectric transducer of the utility model uses is in large-sized piezoelectric membrane
It is cut into, therefore the piezoelectric membrane similar performance of each small pieces, transverse dimension error can control in 1% micron below
Magnitude is conducive to the mass production of small size piezoelectric transducer, specifically, piezoelectric membrane such as uses square cut, side length can
With less than 5mm, after assembling, the weight of the utility model small size piezoelectric transducer can drop to 3g.
Again, the same side of mass block is arranged in the first pad and the second pad by the utility model, it is possible to reduce single
The area of small size piezoelectric transducer, so that more small size piezoelectric sensings can be cut on the substrate of same size
Device, to save cost.
It should be noted that the first electrode 32 and second electrode 34 by Au, Ti, Pt, Ir, Ni, La, Ru, Sr, Ag,
One of Cr, Al, Cu are made.In the other embodiments of the utility model, first electrode 32 and second electrode 34 can be with
By SrRuO3、LaNiO3、InTiO3Equal oxide conductings material is made.
Wherein, the pedestal 1 is made of the metal of lightweight.Preferably, the pedestal 1 is by stainless steel, Ti, Al and Cu
One kind be made, but not limited to this.
Preferably, the mass block 5 is made of copper, tungsten or tungsten copper.First adhesive layer 2 and the second adhesive layer 4 are by silicon
One of rubber, epoxide-resin glue, acrylic adhesive and polyurethane adhesive are made.
Above disclosed is only a kind of preferred embodiment of the utility model, certainly cannot be practical to limit with this
Novel interest field, therefore equivalent variations made according to the claim of the utility model still belong to what the utility model was covered
Range.
Claims (9)
1. a kind of small size piezoelectric transducer, which is characterized in that including pedestal, the first adhesive layer being set on the base, setting
On the first adhesive layer piezoelectric thin film layer, be arranged on piezoelectric thin film layer the second adhesive layer, be arranged on the second adhesive layer
Mass block and the first pad and the second pad that are arranged on piezoelectric thin film layer, the piezoelectric thin film layer includes supporter,
First electrode, piezoelectric membrane and the second electrode being successively set on supporter, the piezoelectric membrane with a thickness of 0.1-10 μm,
First pad and first electrode are conductively connected, and second pad and second electrode are conductively connected, first pad and
Second pad is located at the same side of mass block.
2. small size piezoelectric transducer as described in claim 1, which is characterized in that first pad and the second pad by
One of Au, Ti, Pt, Ir, Ni, La, Ru, Sr, Ag, Cr, Al, Cu are made.
3. small size piezoelectric transducer as claimed in claim 2, which is characterized in that second pad passes through conductor wire and the
Two electrodes, which are formed, to be conductively connected.
4. small size piezoelectric transducer as described in claim 1, which is characterized in that the supporter is not by generating the hard of charge
Material is made, or is made of the hard material that generation amount of charge is less than piezoelectric membrane generation amount of charge, the support
Body with a thickness of 0.05-2mm.
5. small size piezoelectric transducer as described in claim 1, which is characterized in that the piezoelectric membrane be pzt thin film,
BaTiO film, BiFeO3Film, BaSrO3Film, LiNbO3Film, KNbO3Film or LiTaO3Film.
6. small size piezoelectric transducer as described in claim 1, which is characterized in that the first electrode and second electrode by
One of Au, Ti, Pt, Ir, Ni, La, Ru, Sr, Ag, Cr, Al, Cu are made.
7. small size piezoelectric transducer as described in claim 1, which is characterized in that the mass block is by copper, tungsten or tungsten copper system
At.
8. small size piezoelectric transducer as described in claim 1, which is characterized in that first adhesive layer and the second adhesive layer
It is made of one of silicon rubber, epoxide-resin glue, acrylic adhesive and polyurethane adhesive.
9. small size piezoelectric transducer as described in claim 1, which is characterized in that the pedestal is by stainless steel, Ti, Al and Cu
One of be made.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920275166.2U CN209706830U (en) | 2019-03-04 | 2019-03-04 | A kind of small size piezoelectric transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920275166.2U CN209706830U (en) | 2019-03-04 | 2019-03-04 | A kind of small size piezoelectric transducer |
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| Publication Number | Publication Date |
|---|---|
| CN209706830U true CN209706830U (en) | 2019-11-29 |
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ID=68643214
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114113680A (en) * | 2021-12-17 | 2022-03-01 | 上海凸申科技有限公司 | Piezoelectric film acceleration or vibration sensor |
-
2019
- 2019-03-04 CN CN201920275166.2U patent/CN209706830U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114113680A (en) * | 2021-12-17 | 2022-03-01 | 上海凸申科技有限公司 | Piezoelectric film acceleration or vibration sensor |
| CN114113680B (en) * | 2021-12-17 | 2024-05-14 | 上海凸申科技有限公司 | Piezoelectric film acceleration sensor |
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