CN201669077U - Quartz vibrator corrosive liquid shaftless automatic stirrer - Google Patents
Quartz vibrator corrosive liquid shaftless automatic stirrer Download PDFInfo
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- CN201669077U CN201669077U CN2010201805560U CN201020180556U CN201669077U CN 201669077 U CN201669077 U CN 201669077U CN 2010201805560 U CN2010201805560 U CN 2010201805560U CN 201020180556 U CN201020180556 U CN 201020180556U CN 201669077 U CN201669077 U CN 201669077U
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- corrosive liquid
- corrosion
- temperature control
- bath temperature
- bath
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Abstract
The utility model relates to a quartz wafer piezoelectric vibrator machining device, in particular to a quartz vibrator corrosive liquid shaftless automatic stirrer, which comprises a water bath temperature control tank, a corrosive liquid tank, a corrosive basket and a temperature control heating pipe. The corrosive liquid tank is placed into the water bath temperature control tank containing heat conducting water, the temperature control heating pipe is installed on the water bath temperature control tank, bipolar magnetic heads driven by a stroke control speed reducer to rotate are arranged below and outside the water bath temperature control tank, and a magnetic stirring impeller matching with the bipolar magnetic heads is arranged inside the corrosive liquid tank. The stirrer eliminates corrosion and pollution on environment by corrosive liquid leakage, and reduces frequency dispersion difference of a corroded wafer. The stirrer with simple structure creates fine condition for frequency gearing and coating film procedure subsequent to resonator production, increases use ratio of fractional frequency and film coating equipment, reduces waste and defective products, and efficiently increases final yield of resonators.
Description
Technical field
The utility model relates to quartz wafer piezoelectric vibrator process equipment, and particularly a kind of quartz vibrator corrosive liquid does not have a transit mixer.
Background technology
At present, to the core part of quartz-crystal resonator---in the quartz wafer piezoelectric vibrator appearance profile size corrosion processing process, mainly adopt the NH of variable concentrations, temperature
4HF
2(hydrogen fluoride ammonia) corrosive liquid (corrosive liquid conducts by water-bath heat and heats) carries out corrosion processing to the quartz wafer piezoelectric vibrator of different size, frequency, shape, to obtain needed frequency and surface smoothness to improve its vibration vigor; Corrosive liquid is in the corrosion wafer process, and its concentration, temperature part can change, and particularly the temperature localized variation is bigger, and it is very big to the influence of wafer homogeneous corrosion that corrosive liquid produces the temperature difference.Keep concentration, the temperature of corrosive liquid uniform and stable relatively for making, need stirring that corrosive liquid is not stopped, adjust the concentration and the temperature of corrosive liquid with it, agitator adopts with outside and directly is connected, and very easily makes the liquid leakage cause environmental corrosion and pollution.
Summary of the invention
The utility model is intended to solve the problems referred to above that prior art exists, and provide a kind of interlayer not have the through-drive agitator arm corrosive liquid is not stopped to stir, the concentration, the temperature that realize corrosive liquid keep relative stability, to improve the wafer corrosion uniformity, to reduce that the quartz vibrator corrosive liquid of frequency scattered error does not have a transit mixer after the wafer corruption.
The technical solution adopted in the utility model is: a kind of quartz vibrator corrosive liquid does not have a transit mixer, comprise water-bath temperature controlling groove, corrosion liquid bath, corrosion basket, temperature control heating tube, the corrosion liquid bath places in the water-bath temperature controlling groove that fills heat transfer medium water and the temperature control heating tube is installed, the outer below of the groove of this water-bath temperature controlling groove is provided with the two poles of the earth magnetic head by programmed deceleration machine driven rotary, is provided with the magnetization agitator arm that cooperates with this two poles of the earth magnetic head magnetic force in the groove of this corrosion liquid bath.Described the two poles of the earth magnetic head rotates by procedure control unit control, and NS utmost point magnetic line of force interlayer is conducted to the magnetization agitator arm in the corrosion liquid bath.Under the effect of the NS utmost point magnetic line of force, the magnetization agitator arm is rotated stirring to groove internal corrosion liquid, makes its groove internal corrosion liquid not stop to rotate along cell wall, thereby the heat that drives cell wall is constantly replaced to the low place of groove medium temperature; One is with the concentration that reaches groove internal corrosion liquid, the purpose that temperature keeps relative stability; Its two corrosive liquid rotatablely moves and can impel stirring that wafer do not stop in corrosion process, makes it reach wafer corrosion effect of uniform.
Compared with prior art, the beneficial effects of the utility model are: fundamentally stopped corrosion and the pollution of corrosive liquid leakage to environment, and kept the concentration of corrosive liquid, temperature uniform and stable relatively, effectively improved the wafer corrosion uniformity, reduced frequency scattered error after the wafer corruption.The utility model is simple in structure, make the frequency of postorder for resonator and divide retaining, filming process to create good condition, has improved the utilization rate of frequency division, filming equipment, has reduced that product is useless, the generation of substandard products, has effectively improved the final qualification rate of resonator.
Description of drawings
Fig. 1 is a structural representation of the present utility model.
Among the figure: quartz wafer 1; Corrosion basket 2; Corrosion liquid bath 3; Temperature control heating tube 4; Magnetization agitator arm 5; Control module 6; Programmed deceleration machine 7; The two poles of the earth magnetic head 8; Water-bath temperature controlling groove 9; Corrosive liquid 10; Heat transfer medium water 11; Corrosion basket control arm 12.
The specific embodiment
The utility model is described in further detail below in conjunction with drawings and Examples.
Referring to Fig. 1, the quartz vibrator corrosive liquid that present embodiment provides does not have a transit mixer, by corrosion basket 2, corrosion liquid bath 3, temperature control heating tube 4, magnetization agitator arm 5, control module 6, program control motor 7, the two poles of the earth magnetic head 8, water-bath temperature controlling groove 9 is formed, corrosion liquid bath 3 places in the water-bath temperature controlling groove 9 that fills heat transfer medium water 11 and temperature control heating tube 4 is installed, the outer below of the groove of water-bath temperature controlling groove 9 is provided with the two poles of the earth magnetic head 8 by programmed deceleration machine 7 driven rotary, be provided with the magnetization agitator arm 5 that cooperates with these the two poles of the earth magnetic head 8 magnetic force in the groove of corrosion liquid bath 3, corrode basket 2 and place the quartz wafer 1 in it to be dipped in the corrosive liquid 10 that corrodes in the liquid bath 3.
In the present embodiment, described corrosion basket 2 is fixed on the corrosion basket control arm 12 that drives its upper and lower stroke and left and right swing.
In the present embodiment, described programmed deceleration machine 7, temperature control heating tube 4 and corrosion basket control arm 12 all are electrically connected with control module 6.
During the utility model work, the two poles of the earth magnetic head 8 is dragged by control module 6 programme controlled control reductors 7 and makes its rotation, magnetization agitator arm 5 rotates synchronously with its two poles of the earth magnetic head 8 under the effect of the two poles of the earth magnetic head 8 magnetic lines of force, stirs corrosive liquid 10 and forms the whirlpool rotation along corrosion liquid bath 3 cell walls; Heat transfer medium water 11 is by 4 heating of temperature control heating tube, and not dig is led to corrosion liquid bath 3 cell walls, and the corrosive liquid 10 that the heat of cell wall is rotated absorbs, and plays corrosive liquid 10 and constantly heats the effect that keeps constant temperature.Simultaneously, under the drive of corrosion basket control arm 12, corrosion basket 2 carries out upper and lower stroke and left and right swing, makes stirring to reach the uniform purpose of corrosion that quartz wafer 1 do not stop in corrosion process.Control module 6 also carries out programme-control to corrosion basket control arm 12 and temperature control heating tube 4 simultaneously except that the motion of control programmed deceleration machine 7.
Magnetization agitator arm 5 described in the utility model also can vary in size according to corrosion liquid bath 3, magnetizes stirring rod with straight through different corrosion resistants through different magnetization agitator arms or length and change over directly.
Claims (3)
1. a quartz vibrator corrosive liquid does not have a transit mixer, comprise water-bath temperature controlling groove, corrosion liquid bath, corrosion basket, temperature control heating tube, the corrosion liquid bath places in the water-bath temperature controlling groove that fills heat transfer medium water and the temperature control heating tube is installed, it is characterized in that, the outer below of the groove of this water-bath temperature controlling groove is provided with the two poles of the earth magnetic head by programmed deceleration machine driven rotary, is provided with the magnetization agitator arm that cooperates with this two poles of the earth magnetic head magnetic force in the groove of this corrosion liquid bath.
2. quartz vibrator corrosive liquid according to claim 1 does not have a transit mixer, it is characterized in that, described corrosion basket is fixed on the corrosion basket control arm that drives its upper and lower stroke and left and right swing.
3. quartz vibrator corrosive liquid according to claim 1 does not have a transit mixer, it is characterized in that, described programmed deceleration machine, temperature control heating tube and corrosion basket control arm all are electrically connected with control module.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201805560U CN201669077U (en) | 2010-04-30 | 2010-04-30 | Quartz vibrator corrosive liquid shaftless automatic stirrer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201805560U CN201669077U (en) | 2010-04-30 | 2010-04-30 | Quartz vibrator corrosive liquid shaftless automatic stirrer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201669077U true CN201669077U (en) | 2010-12-15 |
Family
ID=43326490
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010201805560U Expired - Fee Related CN201669077U (en) | 2010-04-30 | 2010-04-30 | Quartz vibrator corrosive liquid shaftless automatic stirrer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201669077U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109371456A (en) * | 2018-10-17 | 2019-02-22 | 山东博达光电有限公司 | The corrosion device and caustic solution of synthetic quartzcrystal seed wafer |
| CN113512764A (en) * | 2021-06-21 | 2021-10-19 | 泰晶科技股份有限公司 | Titration method for reducing quartz wafer corrosion dispersion |
-
2010
- 2010-04-30 CN CN2010201805560U patent/CN201669077U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109371456A (en) * | 2018-10-17 | 2019-02-22 | 山东博达光电有限公司 | The corrosion device and caustic solution of synthetic quartzcrystal seed wafer |
| CN113512764A (en) * | 2021-06-21 | 2021-10-19 | 泰晶科技股份有限公司 | Titration method for reducing quartz wafer corrosion dispersion |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: TONGFANG GUOXIN ELECTRONICS CO., LTD. Free format text: FORMER NAME: TANGSHAN JINGYUAN YUFENG ELECTRONICS CO., LTD. |
|
| CP03 | Change of name, title or address |
Address after: 064000 No. 3129 west end street, Yutian County, Hebei, Tangshan City Patentee after: Tongfang Guoxin Electronics Co., Ltd. Address before: 064100 Yutian County, Hebei Province, no end of West Street, No. 3129, No. Patentee before: Tangshan Jingyuan Yufeng Electronics Co., Ltd. |
|
| C56 | Change in the name or address of the patentee | ||
| CP03 | Change of name, title or address |
Address after: 064100 Yutian County, Hebei Province, no end of West Street, No. 3129, No. Patentee after: Violet Guoxin Limited by Share Ltd Address before: 064000 No. 3129 west end street, Yutian County, Hebei, Tangshan City Patentee before: Tongfang Guoxin Electronics Co., Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101215 Termination date: 20170430 |