CN201666870U - Duel mode long distance infrared gas sensor - Google Patents
Duel mode long distance infrared gas sensor Download PDFInfo
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- CN201666870U CN201666870U CN 201020142513 CN201020142513U CN201666870U CN 201666870 U CN201666870 U CN 201666870U CN 201020142513 CN201020142513 CN 201020142513 CN 201020142513 U CN201020142513 U CN 201020142513U CN 201666870 U CN201666870 U CN 201666870U
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Abstract
The utility model discloses a double module long distance infrared gas sensor including a circuit and man-machine exchange module, a first and a second semiconductor thermoelectricity refrigerator, a quantum cascaded laser, a first and a second off-axis magnitude, and a quantum well infrared detector. The circuit and man-machine exchange module is used for power supply control, system control, the amplification, collection, storage, analysis and read of the phase lock of signals, as well as man-machine interaction; the a first and a second semiconductor thermoelectricity refrigerator, connected to the circuit and man-machine exchange module, is used for realizing the temperature control; the quantum cascaded laser, fixed on the first semiconductor thermoelectricity refrigerator and connected to the circuit and man-machine exchange module, is used for reflecting infrared laser; the first and the second off-axis magnitude are used for changing the conduction direction of the infrared laser; and the quantum well infrared detector, fixed on the second semiconductor thermoelectricity refrigerator and connected to the circuit and man-machine exchange module, is used for receiving infrared laser. By using gas molecule to selectively absorb lights, the sensor realizes the qualitative and quantitative analysis of gases.
Description
Technical field
The utility model relates to a kind of infrared gas sensor, is specifically related to the remote infrared gas sensor of a kind of bimodulus, can be widely used in occasions such as environmental pollution gas detects at a distance, the remote detection of industrial and mineral gas.
Background technology
Entered since the industrial age, be accompanied by Human's production and life, a large amount of gas is discharged among the atmosphere, has caused serious environmental and Climatic issues day by day, comprises greenhouse effect, acid rain, ozonosphere attenuate etc.Thereupon, people with sharp increase, performance requirement also improves gradually to the demand of the gas sensor that can be used for environment measuring.Characteristics such as atmosphere pollution has that complicated component, concentration are low, wide material sources, influence factor are numerous have proposed very high requirement to gas sensor.Simultaneously, the analysis to environmental gas also often needs remote enforcement.Except that being used for the environmental gas analysis, remote infrared gas sensor also can be used for the gas analysis of industry and mining.
Most of asymmetric double atoms and polyatomic molecule gas all have the infrared signature absorption peak at infrared band, can carry out qualitative identification and quantitative test with its absorption spectrum, the infrared absorption gas analytical technology has become the mainstream technology and the important development direction of gas analysis.At present mature infrared absorption spectrum technology is a Fourier infrared spectrograph, its analyst coverage covered closely, in and far infrared band, can analyze multiple gases simultaneously, possess good reliability.But FTIR costs an arm and a leg; Bulky heaviness, constant carrying; For obtaining sensitivity preferably, its explorer portion need be used cooled with liquid nitrogen; Spectral scan and data computation are for a long time consuming time, and speed is very slow; Also possess complicated operation in addition, safeguard shortcomings such as constant.
In recent years, along with the development of semiconductor material and nano science, a kind of infrared-gas sensing technology of innovation occurred, that is exactly the infrared gas sensor of based semiconductor laser instrument.The advantage that possesses following uniqueness: the detection sensitivity height, can reach 1,000,000/(ppm) to part per billion (ppb) even part per trillion (ppt) grade, can satisfy high-end demand; In addition, their detectable regional extents are wide, gaseous species is many, the response time is fast.On this basis, we have invented a kind of bimodulus infrared gas sensor, in order to realize the long-range detection to environment and industrial and mineral gas.
The utility model content
Technical problem to be solved in the utility model provides the remote infrared gas sensor of a kind of bimodulus, utilizes gas molecule that the selectivity of light is absorbed the qualitative and quantitative analysis of realizing gas.
In order to solve above technical matters, the utility model provides a kind of bimodulus remote infrared gas sensor, comprising:
Circuit and man-machine Switching Module are used for power management, and system control, is analyzed and read at the phase-locked amplification of signal, collection, storage, and man-machine interaction;
The first semiconductor thermoelectric refrigeration device is connected with man-machine Switching Module with described circuit, is used to realize temperature control;
Quantum cascade laser is fixed on the described first semiconductor thermoelectric refrigeration device and with described circuit and is connected with man-machine Switching Module, is used to launch infrared laser;
First off-axis paraboloidal mirror is used to change the conduction orientation of the infrared laser of described quantum cascade laser emission;
The second semiconductor thermoelectric refrigeration device is connected with man-machine Switching Module with described circuit, is used to realize temperature control;
Quantum trap infrared detector is fixed on the described second semiconductor thermoelectric refrigeration device and with described circuit and is connected with man-machine Switching Module, is used to receive infrared laser;
With second off-axis paraboloidal mirror, be used to change the conduction orientation of infrared laser, thereby it is detected by described quantum trap infrared detector.
The utlity model has following advantage:
1. the remote infrared gas sensor of bimodulus of the present utility model possesses initiatively and passive two kinds of mode of operations, can switch easily in these two kinds of mode of operations according to the workplace.
2. measurement range is wide.During wavelength covers, far infrared band (promptly 3 to 10 microns).In this wavelength region may, most gases possess characteristic absorption peak, can carry out qualitative and detection by quantitative to tens of kinds of gases (comprising methane, ammonia, oxides of nitrogen, oxides of nitrogen, hydrocarbon, ether etc.).Can measure the multiple gases component simultaneously.
3. detection sensitivity, resolution height.Look probe gas kind difference, detection accuracy can reach part per billion (ppb) to 1,000,000/(ppm) magnitudes, far above the gas sensor of existing other types for example semiconductor type, catalytic combustion class, galvanochemistry class etc., also be higher than non-spectral type infrared gas sensor.
4. work under the room temperature.Common high-performance infrared absorption type gas sensing equipment all needs to utilize liquid nitrogen refrigerating, causes the apparatus expensive heaviness, operation inconvenience.The used light source of our product is a quantum cascade laser, and light intensity is very high, and used detector at room temperature just possesses very high absorption coefficient, so system at room temperature just can operate as normal, need not liquid nitrogen refrigerating.
Sweep time fast, be below 1 second.Think that the principal element of sweep velocity is the response speed of the tuned speed and the quantum trap infrared detector of quantum cascade laser, we can pass through electric current tuning at used quantum cascade laser, its speed is very fast, full spectral scan required time only is several milliseconds, and quantum trap infrared detector is the fastest detector of mid and far infrared wave band response speed, and response frequency can reach tens of (GHz).Integrate, the utility model can be finished thousands of multiple scannings in a short period of time, improves detection accuracy greatly.
Description of drawings
Below in conjunction with the drawings and specific embodiments the utility model is described in further detail.
Fig. 1 is the remote infrared gas sensor structural representation of bimodulus of the present utility model;
Fig. 2 is an active work mode principle schematic of the present utility model;
Fig. 3 is a passive work mode principle schematic of the present utility model.
Reference numeral among the figure is: 1, the first semiconductor thermoelectric refrigeration device; 2, quantum cascade laser; 3, first off-axis paraboloidal mirror; 4, semiconductor visible light laser instrument; 5, telescope; 6, second off-axis paraboloidal mirror; 7, the second semiconductor thermoelectric refrigeration device; 8, quantum trap infrared detector; 9, circuit and human-computer interaction module; 10,90 ° of three-dimensional catoptrons; 11, beam splitting chip; 12, local platform; 13, institute space exploration zone.
Embodiment
As shown in Figure 1, the remote infrared gas sensor of bimodulus of the present utility model comprises: circuit and man-machine Switching Module 9, be used for power management, and system control, is analyzed and is read at the phase-locked amplification of signal, collection, storage, and man-machine interaction; The first semiconductor thermoelectric refrigeration device 1 is connected with man-machine Switching Module 9 with circuit, is used to realize temperature control; Quantum cascade laser 2 is fixed on the first semiconductor thermoelectric refrigeration device 1 and with circuit and is connected with man-machine Switching Module 9, is used to launch infrared laser; First off-axis paraboloidal mirror 3 is used to change the conduction orientation of the infrared laser of quantum cascade laser 2 emissions; The second semiconductor thermoelectric refrigeration device 7 is connected with man-machine Switching Module 9 with circuit, is used to realize temperature control; Quantum trap infrared detector 8 is fixed on the second semiconductor thermoelectric refrigeration device 1 and with circuit and is connected with man-machine Switching Module 9, is used to receive infrared laser; With second off-axis paraboloidal mirror 6, be used to change the conduction orientation of infrared laser, thereby it is detected by quantum trap infrared detector 8.
The remote infrared gas sensor of bimodulus of the present utility model can also comprise: 90 ° of three-dimensional scintilloscopes 10 are used for reflective infrared laser.
The remote infrared gas sensor of bimodulus of the present utility model can also comprise: a beam splitting chip 11, be used for the infrared laser of quantum cascade laser 2 emissions is divided into two bundles, and wherein a branch of being used for measures, and another bundle is used for calibration; Or a semiconductor visible laser 4, be connected with man-machine Switching Module with circuit, be used for the infrared laser that transmitting calibration is used.Also need comprise a telescope 5 based on above-mentioned two kinds of structure the utility model, be used to observe the infrared laser of calibration usefulness, adjust the placement angle of 90 ° of three-dimensional catoptrons 10.
Quantum cascade laser of the present utility model is prepared by GaAs material, and wavelength coverage is at 3 to 12 microns.Can be distributed feed-back formula weight qc laser or external cavity type quantum cascade laser.
The remote infrared gas sensor of bimodulus of the present utility model has two kinds of mode of operations:
Active work mode, it is infrared laser that described quantum cascade laser is sent, pass through the gas zones of required detection, after gas molecule selectivity to be measured absorbs, absorb by quantum trap infrared detector, in view of the above atmosphere pollution is carried out qualitative detection and quantitative test (back is introduced in detail in conjunction with Fig. 2 and embodiment one);
And passive work mode, infrared signal promptly to be measured is collected through local optical system, carries out the signal amplification and analyzes (back is introduced in detail in conjunction with Fig. 3 and embodiment two) by heterodyne principle then.
Can in two kinds of mode of operations, switch easily according to the workplace.
Embodiment one
Be the active work mode of the remote infrared gas sensor of bimodulus of the present utility model as shown in Figure 2, need use local platform 12 and 90 ° of three-dimensional catoptron 10 these two parts.Local platform 12 and 90 ° of three-dimensional catoptrons 10 are placed the both sides in institute space exploration zone 13.In local platform 12, by tunable quantum cascade laser 2 laser that sends, pool directional light through first off-axis paraboloidal mirror 3, penetrate institute space exploration zone 13 and arrive 90 ° of three-dimensional catoptrons 10, the infrared eye of reflected light on local platform absorbs.In the middle of this process, infrared laser passes through institute space exploration zone 13 for twice, and gas molecule to be measured can carry out selectivity to it and absorb, and causes the light of specific wavelength to weaken.Through signal that infrared eye detected carry out in input circuit and the man-machine Switching Module 9 immediately signal phase-locked, amplify, analyze and store, in view of the above atmosphere pollution is carried out qualitative detection and quantitative test.
In this embodiment, a semiconductor visible laser 4 can be set, be connected with man-machine Switching Module, be used for the infrared laser that transmitting calibration is used with circuit; With a telescope 5, be used to observe the infrared laser of calibration usefulness, adjust the placement angle of 90 ° of three-dimensional catoptrons 10.
Embodiment two
Under passive work mode, only need use this part of local platform.External infrared signal is collected through local optical system, carries out signal amplification and analysis by heterodyne principle then.Concrete grammar is local part 12 to be aimed at institute space exploration zone 13, quantum trap infrared detector 8 collection infrared signals.In state shown in Figure 3, quantum cascade laser 2 has just become a local oscillator, and by beam splitting chip 11, external infrared signal will be carried out the heterodyne coupling with the infrared laser that quantum cascade laser 2 is sent.The light signal of coupling back gained is surveyed through infrared eye 8, and light signal is converted into electric signal, carry out in input circuit and the man-machine Switching Module 9 immediately signal phase-locked, amplify, analyze and store.Heterodyne technology can amplify very weak signal.
The used laser instrument of sensor of the present utility model is a quantum cascade laser.The excitation wavelength of traditional semiconductor laser is by the conduction band and the decision of the size of the band gap between the valence band of semiconductor material, and the excitation wavelength of quantum cascade laser and semiconductor material band gap are irrelevant, its principle of work and common semiconductor laser are completely different, have utilized the intersubband transitions in the conduction band.Its appearance is a breakthrough of mid and far infrared wave band semiconductor laser development, and it is big to possess output power, but working and room temperature, and wavelength tuning range is wide, the tuning precision advantages of higher.
The used infrared eye of sensor is the high quantum trap infrared detector that absorbs of room temperature.At present the used detector of people is InSb, and DTGS and HgCdTe compare with them, and quantum trap infrared detector possesses that response speed is fast, detectivity is high, survey wavelength can advantage such as be controlled by the adjustment of quantum well parameter.In addition, quantum trap infrared detector is based on the GaAs material of maturation, can utilize the semiconductor growing (mark beam epitaxy and metal organic chemical vapor deposition) and processing procedure (photoetching etc.) technology of standard to come growing and preparing, advantage such as material homogeneity is good, yield rate is high, with low cost.It works in room temperature or accurate room temperature state, and the detectivity under room temperature or accurate room temperature can reach or near theoretical boundary, absorption coefficient is more than 90% under the operate as normal, and the response speed height extremely is suitable for gas analysis.
Claims (8)
1. the remote infrared gas sensor of bimodulus is characterized in that, comprising:
Circuit and man-machine Switching Module are used for power management, and system control, is analyzed and read at the phase-locked amplification of signal, collection, storage, and man-machine interaction;
The first semiconductor thermoelectric refrigeration device is connected with man-machine Switching Module with described circuit, is used to realize temperature control;
Quantum cascade laser is fixed on the described first semiconductor thermoelectric refrigeration device and with described circuit and is connected with man-machine Switching Module, is used to launch infrared laser;
First off-axis paraboloidal mirror is used to change the conduction orientation of the infrared laser of described quantum cascade laser emission;
The second semiconductor thermoelectric refrigeration device is connected with man-machine Switching Module with described circuit, is used to realize temperature control;
Quantum trap infrared detector is fixed on the described second semiconductor thermoelectric refrigeration device and with described circuit and is connected with man-machine Switching Module, is used to receive infrared laser;
With second off-axis paraboloidal mirror, be used to change the conduction orientation of infrared laser, thereby it is detected by described quantum trap infrared detector.
2. the remote infrared gas sensor of bimodulus as claimed in claim 1 is characterized in that, also comprises 90 ° of three-dimensional scintilloscopes, is used for reflective infrared laser.
3. the remote infrared gas sensor of bimodulus as claimed in claim 2 is characterized in that, also comprises a beam splitting chip, is used for the infrared laser of described quantum cascade laser emission is divided into two bundles, and wherein a branch of being used for measures, and another bundle is used for calibration.
4. the remote infrared gas sensor of bimodulus as claimed in claim 2 is characterized in that, also comprises a semiconductor visible laser, is connected with man-machine Switching Module with described circuit, is used for the infrared laser that transmitting calibration is used.
5. as claim 3 or the remote infrared gas sensor of 4 described bimodulus, it is characterized in that, also comprise a telescope, be used to observe the infrared laser of calibration usefulness, adjust the placement angle of described 90 ° of three-dimensional catoptrons.
6. the remote infrared gas sensor of bimodulus as claimed in claim 1 is characterized in that described quantum cascade laser is prepared by GaAs material, and wavelength coverage is at 3 to 12 microns.
7. the remote infrared gas sensor of bimodulus as claimed in claim 1 is characterized in that, described quantum cascade laser is distributed feed-back formula weight qc laser or external cavity type quantum cascade laser.
8. the remote infrared gas sensor of bimodulus as claimed in claim 1 is characterized in that having active work mode and passive work mode;
Described active work mode by: described quantum cascade laser is sent infrared laser, pass through the gas zones of required detection, after gas molecule selectivity to be measured absorbs, absorb by quantum trap infrared detector, in view of the above atmosphere pollution is carried out qualitative detection and quantitative test;
Described passive work mode is: infrared signal to be measured is collected through local optical system, carries out signal amplification and analysis by heterodyne principle then.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201020142513 CN201666870U (en) | 2010-03-26 | 2010-03-26 | Duel mode long distance infrared gas sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201020142513 CN201666870U (en) | 2010-03-26 | 2010-03-26 | Duel mode long distance infrared gas sensor |
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| CN 201020142513 Expired - Fee Related CN201666870U (en) | 2010-03-26 | 2010-03-26 | Duel mode long distance infrared gas sensor |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102200506A (en) * | 2010-03-26 | 2011-09-28 | 无锡沃浦光电传感科技有限公司 | Dual-mode remote infrared gas sensor |
| CN103822891A (en) * | 2014-02-12 | 2014-05-28 | 无锡中科智能农业发展有限责任公司 | Optical structure of small-size NDIR (non-dispersive infrared) type gas sensor |
| CN107545720A (en) * | 2016-06-29 | 2018-01-05 | 北京小米移动软件有限公司 | Infrared signal processing method and processing device, electronic equipment |
| CN107807454A (en) * | 2017-12-04 | 2018-03-16 | 中国科学院上海微系统与信息技术研究所 | A kind of realization device and implementation method of the quasi- Gauss collimated laser beam of Terahertz |
| CN108072608A (en) * | 2016-11-16 | 2018-05-25 | 上海中冶横天智能科技股份有限公司 | Online quantum gas analyzer |
| CN108107015A (en) * | 2018-02-26 | 2018-06-01 | 宇星科技发展(深圳)有限公司 | A kind of method for measuring Water quality ammonia nitrogen |
-
2010
- 2010-03-26 CN CN 201020142513 patent/CN201666870U/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102200506A (en) * | 2010-03-26 | 2011-09-28 | 无锡沃浦光电传感科技有限公司 | Dual-mode remote infrared gas sensor |
| CN103822891A (en) * | 2014-02-12 | 2014-05-28 | 无锡中科智能农业发展有限责任公司 | Optical structure of small-size NDIR (non-dispersive infrared) type gas sensor |
| CN103822891B (en) * | 2014-02-12 | 2016-04-20 | 无锡中科智能农业发展有限责任公司 | A kind of optical texture of small size NDIR type gas sensor |
| CN107545720A (en) * | 2016-06-29 | 2018-01-05 | 北京小米移动软件有限公司 | Infrared signal processing method and processing device, electronic equipment |
| CN108072608A (en) * | 2016-11-16 | 2018-05-25 | 上海中冶横天智能科技股份有限公司 | Online quantum gas analyzer |
| CN107807454A (en) * | 2017-12-04 | 2018-03-16 | 中国科学院上海微系统与信息技术研究所 | A kind of realization device and implementation method of the quasi- Gauss collimated laser beam of Terahertz |
| CN107807454B (en) * | 2017-12-04 | 2024-04-23 | 中国科学院上海微系统与信息技术研究所 | Device and method for realizing terahertz quasi-Gaussian parallel laser beams |
| CN108107015A (en) * | 2018-02-26 | 2018-06-01 | 宇星科技发展(深圳)有限公司 | A kind of method for measuring Water quality ammonia nitrogen |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101208 Termination date: 20140326 |