CN110749563A - Method for telemetering gas components based on tunable mid-infrared laser - Google Patents
Method for telemetering gas components based on tunable mid-infrared laser Download PDFInfo
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- CN110749563A CN110749563A CN201810809258.4A CN201810809258A CN110749563A CN 110749563 A CN110749563 A CN 110749563A CN 201810809258 A CN201810809258 A CN 201810809258A CN 110749563 A CN110749563 A CN 110749563A
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- 238000000034 method Methods 0.000 title claims abstract description 16
- 238000001514 detection method Methods 0.000 claims abstract description 14
- 238000006243 chemical reaction Methods 0.000 claims abstract description 6
- 238000000862 absorption spectrum Methods 0.000 claims abstract description 4
- 230000003287 optical effect Effects 0.000 claims abstract description 4
- 239000004065 semiconductor Substances 0.000 claims abstract description 4
- 238000012544 monitoring process Methods 0.000 claims description 4
- 239000013307 optical fiber Substances 0.000 claims description 2
- 238000001228 spectrum Methods 0.000 claims description 2
- 238000005259 measurement Methods 0.000 abstract description 4
- 238000005057 refrigeration Methods 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 28
- 238000005516 engineering process Methods 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000004847 absorption spectroscopy Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 238000004868 gas analysis Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 231100000331 toxic Toxicity 0.000 description 2
- 230000002588 toxic effect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000622 liquid--liquid extraction Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000000956 solid--liquid extraction Methods 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
Abstract
The invention relates to the technical field of optical remote sensing measurement, in particular to a method for telemetering gas components based on tunable mid-infrared laser. The invention is realized by the following mode that tunable intermediate infrared laser emitted by a laser 1 is expanded by a telescope collimation 2, is emitted to pass through a target area, is reflected back by a backward reflector array 3 in parallel, is converged on a photoelectric detector 4 of semiconductor refrigeration by a detection telescope, is amplified in a frequency selection mode through a main control circuit 5, improves the signal-to-noise ratio, and then is subjected to A/D conversion 6, and a computer 7 collects and records intermediate infrared absorption spectrum data of an open path. And (4) giving the existence and concentration values of the target gas through difference calculation software which is developed independently and displaying 8.
Description
[ technical field ] A method for producing a semiconductor device
The invention relates to the technical field of optical remote sensing measurement, in particular to a method for telemetering gas components based on tunable mid-infrared laser.
[ background of the invention ]
At present, in the existing gas detection technology, the main methods for detecting gas components are various, but most of the methods are chemical methods, the biggest defects are that the methods are difficult to use on site, a sample is required to be prepared in advance, the operation also needs early-stage treatment processes such as liquid-liquid extraction or solid-liquid extraction, and the like, the requirements of prevention and sudden accidents are difficult to meet, particularly in the face of toxic and harmful gases, a laser gas detector using an absorption spectroscopy is a gas detection technology with high sensitivity, high resolution and quick response, and is widely applied to the fields of atmospheric detection and the like.
When the absorption spectroscopy laser gas detector is used for detecting the concentration of a plurality of gas components, the spectral absorption lines of the plurality of gas components are desirably measured at the same time, but in practical application, the existing tunable laser has a small tuning range and cannot cover the wavelength absorbed by the plurality of gases, so that most gas detectors can only realize single-type gas component detection.
[ summary of the invention ]
The invention aims to provide a method for telemetering gas components based on tunable mid-infrared laser aiming at the defect of small tuning range of the existing laser.
The invention can realize real-time on-line monitoring of the concentration of toxic and harmful gases in the industrial process, and can also be used for preventing and monitoring harmful gases in the field of security protection.
The invention realizes the continuous tunable laser output with narrow line width (the laser output with the continuous tunable intermediate infrared wavelength can be realized in the spectral line width of 1.5 cm-1 cm through the grating dispersion element by using the quantum cascade chip with wide gain and simultaneously adopting the laser resonant cavity structure with optimized design, and the wave band of the laser output is 930cm-1～1370cm-1In the middle), the aim of covering the wavelength absorbed by various gases is achieved, and the concentration of various gas components is detected simultaneously.
The method is realized by adopting the following technology that tunable quantum cascade intermediate infrared laser penetrates through gas in a monitoring area, and then an intermediate infrared detector is used for collecting the absorption spectrum of an open path, so that whether the area contains gas to be detected or not and the content of the gas to be detected can be monitored by using a fingerprint spectrum gas detection principle.
The invention mainly comprises the following steps: the device comprises a tunable intermediate infrared laser, a transmitting receiver, a telescope, a collimating mirror, a pyramid array, a power supply, a driving and scanning circuit, a photoelectric detector, a data acquisition device, a computer and the like.
Under the working state, light emitted by a laser is collimated and expanded through a telescope, then passes through a monitored atmospheric region and reaches an angle reflector array, a suspension device is adjusted to align a light path with the angle reflector array, then a pyramid array positioned at the micro end of the atmospheric region reflects parallel light of a light beam back, the reflected parallel light enters a photoelectric detector after being converged through a detection telescope, optical signals are directly converted into electric signals without adopting optical fibers, the electric signals are sent into a digital-to-analog conversion system after frequency selection, amplification and signal-to-noise ratio improvement, and finally a computer compares collected information with a constructed polluted gas database to form a differential absorption spectrogram of a measurement waveband, so that a measurement result is obtained, and the concentration of a measured body is obtained and displayed.
The tunable laser has the advantages that the tunable laser adopts an optimally designed resonant cavity structure, and the tunable range of the laser is increased by depending on the QCL chip with wide gain bandwidth and the grating dispersion element, so that the output of the narrow-linewidth continuously tunable intermediate infrared laser is realized.
[ description of the drawings ]
The attached figure is a schematic diagram of a method for telemetering gas components based on tunable mid-infrared laser
[ detailed description ] embodiments
The device for telemetering the gas components based on the tunable mid-infrared laser mainly comprises a gas detection part and a gas analysis processing part, wherein the gas detection part comprises a laser 1, a telescope collimation 2, an angle reflector array 3 and a photoelectric detector 4.
The gas analysis processing part comprises a main control circuit 5, a photoelectric signal conversion device 6, a computer software system 7 and a display 8.
As shown in the attached drawing, tunable intermediate infrared laser emitted by a laser 1 is expanded by a telescope collimation 2, is emitted to pass through a target area, is reflected in parallel by a retro-reflector array 3, is converged on a photoelectric detector 4 of semiconductor refrigeration by a detection telescope, is subjected to frequency selection amplification by a main control circuit 5, is subjected to A/D conversion 6 after the signal to noise ratio is improved, and is collected and recorded by a computer 7. And (4) giving the existence and concentration values of the target gas through difference calculation software which is developed independently and displaying 8.
Claims (4)
1. The method for telemetering gas components based on tunable mid-infrared laser is characterized by comprising a laser, telescope collimation, an angle reflector array, a photoelectric detector, a main control circuit, a photoelectric signal conversion device, a computer software system, a display and other devices; the method is realized according to the following steps: tunable mid-infrared laser emitted by the TQCL is collimated and expanded by a telescope, is emitted to pass through a target area, is reflected back in parallel by a retro-reflector array, is converged on a photoelectric detector refrigerated by a semiconductor by a detection telescope, is amplified through frequency selection, is improved in signal to noise ratio and then is subjected to A/D conversion, and the computer collects and records mid-infrared absorption spectrum data of an open path, and gives the existence and concentration values of target gas through difference calculation software which is independently researched and developed.
2. The method of claim 1 wherein the laser wavenumber detection range is 930cm-1～1370cm-1。
3. The method of claim 1, wherein the gas in the monitoring area is monitored by using tunable quantum cascade mid-infrared laser to pass through the gas, and then collecting the absorption spectrum of the open path by using a mid-infrared detector, so as to monitor whether the area contains the gas to be detected and the content of the gas, and the detection principle of the gas is realized by using a fingerprint spectrum.
4. The device of claim 1, wherein the reflected parallel light is converged by the detection telescope and then enters the photoelectric detector, and the optical signal is directly converted into the electric signal without using an optical fiber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810809258.4A CN110749563A (en) | 2018-07-24 | 2018-07-24 | Method for telemetering gas components based on tunable mid-infrared laser |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810809258.4A CN110749563A (en) | 2018-07-24 | 2018-07-24 | Method for telemetering gas components based on tunable mid-infrared laser |
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| CN110749563A true CN110749563A (en) | 2020-02-04 |
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| CN201810809258.4A Pending CN110749563A (en) | 2018-07-24 | 2018-07-24 | Method for telemetering gas components based on tunable mid-infrared laser |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112611730A (en) * | 2020-11-27 | 2021-04-06 | 深圳市英宝硕科技有限公司 | Unmanned aerial vehicle gas detection method, system and storage medium |
| CN112684472A (en) * | 2020-12-10 | 2021-04-20 | 西安理工大学 | Mid-infrared differential absorption laser radar for detecting benzene concentration in atmosphere and inversion method |
| CN117147441A (en) * | 2023-07-18 | 2023-12-01 | 镭友芯科技(苏州)有限公司 | Gas detector and preparation method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101109701A (en) * | 2007-07-30 | 2008-01-23 | 天津大学 | On-line detecting method and apparatus for multi-component gas |
| US20080144677A1 (en) * | 2006-12-15 | 2008-06-19 | Belkin Mikhail A | Broadly tunable single-mode quantum cascade laser sources and sensors |
| CN102539377A (en) * | 2012-01-19 | 2012-07-04 | 广州昂昇环境分析仪器有限公司 | Intermediate infrared absorption spectra based method for multi-component mixed gas qualitative and quantitative analysis and system thereof |
| US20150268159A1 (en) * | 2013-01-11 | 2015-09-24 | Fuji Electric Co., Ltd. | Laser-type gas analyzer |
| US20160231239A1 (en) * | 2015-02-06 | 2016-08-11 | Block Engineering, Llc | Quantum Cascade Laser (QCL) Based Gas Sensing System and Method |
| CN105911022A (en) * | 2016-06-06 | 2016-08-31 | 安徽大学 | Hazardous chemical substance remote sensing detection method and device based on wide tuning external cavity quantum cascade laser |
| CN106970392A (en) * | 2017-05-31 | 2017-07-21 | 南京先进激光技术研究院 | High sensitivity gaseous contamination detecting laser radar system |
| CN206362699U (en) * | 2017-01-16 | 2017-07-28 | 杭州码客信息技术有限公司 | Pollution Gas detection means |
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2018
- 2018-07-24 CN CN201810809258.4A patent/CN110749563A/en active Pending
Patent Citations (8)
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|---|---|---|---|---|
| US20080144677A1 (en) * | 2006-12-15 | 2008-06-19 | Belkin Mikhail A | Broadly tunable single-mode quantum cascade laser sources and sensors |
| CN101109701A (en) * | 2007-07-30 | 2008-01-23 | 天津大学 | On-line detecting method and apparatus for multi-component gas |
| CN102539377A (en) * | 2012-01-19 | 2012-07-04 | 广州昂昇环境分析仪器有限公司 | Intermediate infrared absorption spectra based method for multi-component mixed gas qualitative and quantitative analysis and system thereof |
| US20150268159A1 (en) * | 2013-01-11 | 2015-09-24 | Fuji Electric Co., Ltd. | Laser-type gas analyzer |
| US20160231239A1 (en) * | 2015-02-06 | 2016-08-11 | Block Engineering, Llc | Quantum Cascade Laser (QCL) Based Gas Sensing System and Method |
| CN105911022A (en) * | 2016-06-06 | 2016-08-31 | 安徽大学 | Hazardous chemical substance remote sensing detection method and device based on wide tuning external cavity quantum cascade laser |
| CN206362699U (en) * | 2017-01-16 | 2017-07-28 | 杭州码客信息技术有限公司 | Pollution Gas detection means |
| CN106970392A (en) * | 2017-05-31 | 2017-07-21 | 南京先进激光技术研究院 | High sensitivity gaseous contamination detecting laser radar system |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112611730A (en) * | 2020-11-27 | 2021-04-06 | 深圳市英宝硕科技有限公司 | Unmanned aerial vehicle gas detection method, system and storage medium |
| CN112684472A (en) * | 2020-12-10 | 2021-04-20 | 西安理工大学 | Mid-infrared differential absorption laser radar for detecting benzene concentration in atmosphere and inversion method |
| CN112684472B (en) * | 2020-12-10 | 2024-02-02 | 西安理工大学 | Medium-infrared differential absorption laser radar for detecting benzene concentration in atmosphere and inversion method |
| CN117147441A (en) * | 2023-07-18 | 2023-12-01 | 镭友芯科技(苏州)有限公司 | Gas detector and preparation method thereof |
| CN117147441B (en) * | 2023-07-18 | 2024-04-12 | 镭友芯科技(苏州)有限公司 | Gas detector and preparation method thereof |
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