CN201637843U - Test monitoring device of probe station - Google Patents
Test monitoring device of probe station Download PDFInfo
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- CN201637843U CN201637843U CN2010201428023U CN201020142802U CN201637843U CN 201637843 U CN201637843 U CN 201637843U CN 2010201428023 U CN2010201428023 U CN 2010201428023U CN 201020142802 U CN201020142802 U CN 201020142802U CN 201637843 U CN201637843 U CN 201637843U
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Abstract
The utility model relates to a test monitoring device of a probe station, which is used for receiving a test result sent by the probe station and comprises a memory, a misjudgment counting module and a judging module, wherein the memory stores the test result and a misjudgment threshold; the misjudgment counting module records the number of continuous defective products according to the test result; and the judging module is connected with the misjudgment counting module and the memory and decides whether a command of stopping testing is sent to the probe station or not by judging whether the number of the continuous defective products recorded by the misjudgment counting module is larger than the misjudgment threshold or not. The test monitoring device can monitor the continuous misjudgment of the probe station automatically in real time, and send the command of stopping testing to the probe station when the test monitoring device judges mistakenly, thereby improving testing accuracy and testing efficiency; furthermore, the existing probe station device does not need to be replaced, thereby saving cost and avoiding waste.
Description
[technical field]
The utility model relates to the measuring technology in the semi-conductor industry, particularly relates to a kind of probe station test monitoring device.
[background technology]
In the process of wafer sort, the equipment of use or parts (as tester, probe, probe station etc.) can break down because of various factors, thereby cause test unusual.When probe that test machine and wafer be electrically connected and wafer loose contact for example are provided, can cause whether test machine is the erroneous judgement of defective products to chip under test.Test result will be shown as a large amount of chips and is judged to be defective products continuously in this case.In actual production, this unusual if operating personnel can't find in real time and handle, continuous erroneous judgement will appear in test, finally causes the decline of accuracy of test and efficient.
Because the probe station of new model is comparatively expensive, many manufacturers both domestic and external are still using some more old probe stations.Some does not possess the function of the continuity erroneous judgement that monitor for faults causes these probe stations, though some possesses imperfection.The EG2001 series probe station produced of ELECTROGLAS company for example, can only realize that single-chip test (the every bundle of probe is the chip piece on the test wafer once) continuous bad chip down reports to the police, and can't realize the continuous bad chip warning under the multicore built-in testing (the every bundle of probe is once tested the polylith chip).
Though can solve this problem by changing new model probe station with better function, this has increased cost greatly, also can cause the waste of existing equipment.
[utility model content]
The problem that does not possess the monitoring function of erroneous judgement for the probe station that solves old model, being necessary to provide a kind of can not change under the probe station situation, in real time, automatically the continuity in the test is judged by accident and monitored, and send the probe station test monitoring device of instruction, time-out test.
A kind of probe station test monitoring device receives the test result that probe station sends, and this device comprises: storer, store described test result and erroneous judgement threshold value; The erroneous judgement counting module writes down continuous defective products quantity according to described test result; Judge module links to each other with storer with the erroneous judgement counting module, and by whether judging the continuous defective products quantity of judging the counting module record by accident greater than described erroneous judgement threshold value, whether decision sends the instruction that stops to test to probe station.
Preferably, also comprise the load module that is connected with described storer, the erroneous judgement threshold value of described memory stores is imported by load module.
Preferably, also comprise the display module that is connected with described erroneous judgement counting module, receive the continuous defective products quantity of described erroneous judgement counting module record and show.
Preferably, described display module also is connected with described storer, shows the erroneous judgement threshold value.
Preferably, described display module adopts charactron to show.
Preferably, also comprise the alarm that is connected with described judge module; When described judge module sends the instruction that stops to test to probe station, also send alarm command, the indication alarm equipment alarm to alarm.
Preferably, also comprise the alarm that is connected with described judge module; When described judge module sends the instruction that stops to test to probe station, also send alarm command, the indication alarm equipment alarm to alarm; Described load module comprises button, and described button comprises the warning cancel key.
Preferably, any one of the described warning cancel key button that is load module or a plurality of.
Preferably, also comprise the serial data counting module, described serial data counting module is connected with storer and erroneous judgement counting module, and the data of the described test result with fixed word joint number that record storage receives receive that whenever a byte data of test result just adds 1; The serial data counting module judges according to the value of record whether described storer has received the data of a complete test result, when judgement has received the data of a complete test result, the value zero clearing of record and indication erroneous judgement counting module are read the data of described complete test result.
Preferably, described erroneous judgement counting module receives that the product of expression test adds 1 when being the test result of defective products, the zero clearing when product of receiving the expression test is the non-defective unit test result.
Above-mentioned probe station test monitoring device can in real time, automatically be judged by accident the continuity of probe station and be monitored, and when judgement has produced erroneous judgement, sends the instruction that stops to test to probe station.Accuracy of test and testing efficiency have been improved.And do not need to change existing probe station equipment, provide cost savings, avoided waste.
[description of drawings]
Fig. 1 is the connection diagram of probe station test monitoring device;
Fig. 2 is the synoptic diagram of the structure of an embodiment middle probe platform test monitoring device;
Fig. 3 is the synoptic diagram of the structure of another embodiment middle probe platform test monitoring device.
[embodiment]
As shown in Figure 1, the utility model is probe station 100 external probe station test monitoring devices 200, on the basis of ingenious analysis and Control signal data, realized comprising continuous bad chip (being defective products) the erroneous judgement monitoring under the various patterns of multicore built-in testing and single-chip test.
Fig. 2 is the synoptic diagram of the structure of an embodiment middle probe platform test monitoring device.Probe station test monitoring device 200 comprises storer 210, erroneous judgement counting module 230 and judge module 240.Storer 210 is connected with erroneous judgement counting module 230 and judge module 240.
Erroneous judgement counting module 230 is used to write down the continuous defective products quantity of test process chips.Specifically be the test result that reads storer 210 storages, if the test result of expression defective products then adds 1; If the test result of expression non-defective unit shows that then previous continuous defective products result is not the erroneous judgement that causes owing to fault, but occurred defective products really, therefore judge counting module 230 zero clearings by accident.
Fig. 3 is the synoptic diagram of the structure of another embodiment middle probe platform test monitoring device.Probe station test monitoring device 200 comprises storer 210, serial data counting module 220, erroneous judgement counting module 230, judge module 240, display module 250, alarm 260 and load module 270.
Serial data counting module 220 is connected the data of the described test result with fixed word joint number that record storage 210 receives with storer 210, erroneous judgement counting module 230 and load module 270.
Because serial ports 110 once can only be by the data of a byte, and the test result of each chip is the data of a plurality of bytes, for example the test result of each chip of the EG2001 series probe station of ELECTROGLAS company production is the data of 4 bytes, and erroneous judgement counting module 230 need write down the wafer sort result's of probe station 100 continuous defective products number of chips according to 4 complete byte datas.Storer 210 is whenever received a byte data of the test result of sending of serial ports 110, and serial data counting module 220 just adds 1.When the value of serial data counting module 220 reaches 4, show and received a complete test result data that serial data counting module 220 is with regard to zero clearing, and indication erroneous judgement counting module 230 reads this test result that is stored in the storer 210.
Serial data counting module 220 judges according to the value of record whether storer 210 has received the data of a complete test result, when decision data when being complete, just indicates and judges 230 pairs of test results of counting module by accident and read.Because test result is the data that comprise the fixed word joint number, therefore adopt serial data counting module 220 can guarantee the integrality of the data of the test result that reads, can not cause makeing mistakes because of having read incomplete data.In addition, when probe station test monitoring device 200 was applied to the different probe station of the data length of test result, indication erroneous judgement counting module 230 read test results set in the time of can also correspondingly why being worth serial data counting module 220.Setting can be undertaken by load module 270.
Erroneous judgement counting module 230 is connected with storer 210, serial data counting module 220, judge module 240 and display module 250, from storer 210, read and write down wafer sort result's continuous defective products number of chips, if the test result of expression defective products then adds 1; If the test result of expression non-defective unit shows that then previous continuous defective products result is not the erroneous judgement that fault causes, but has occurred defective products really, therefore carry out zero clearing.The value that erroneous judgement counting module 230 also will write down sends display module 250 to and shows.
Above-mentioned probe station test monitoring device can in real time, automatically be judged by accident the continuity of probe station and be monitored, and when judgement has produced erroneous judgement, sends the instruction that stops to test to probe station.Accuracy of test and testing efficiency have been improved.And do not need to change existing probe station equipment, provide cost savings, avoided waste.
The above embodiment has only expressed several embodiment of the present utility model, and it describes comparatively concrete and detailed, but can not therefore be interpreted as the restriction to the utility model claim.Should be pointed out that for the person of ordinary skill of the art under the prerequisite that does not break away from the utility model design, can also make some distortion and improvement, these all belong to protection domain of the present utility model.Therefore, the protection domain of the utility model patent should be as the criterion with claims.
Claims (10)
1. a probe station test monitoring device receives the test result that probe station sends, and it is characterized in that this device comprises:
Storer is stored described test result and erroneous judgement threshold value;
The erroneous judgement counting module writes down continuous defective products quantity according to described test result;
Judge module links to each other with storer with the erroneous judgement counting module, and by whether judging the continuous defective products quantity of judging the counting module record by accident greater than described erroneous judgement threshold value, whether decision sends the instruction that stops to test to probe station.
2. probe station test monitoring device according to claim 1 is characterized in that, also comprises the load module that is connected with described storer, and the erroneous judgement threshold value of described memory stores is imported by load module.
3. probe station test monitoring device according to claim 1 is characterized in that, also comprises the display module that is connected with described erroneous judgement counting module, receives the continuous defective products quantity of described erroneous judgement counting module record and shows.
4. probe station test monitoring device according to claim 3 is characterized in that described display module also is connected with described storer, shows the erroneous judgement threshold value.
5. probe station test monitoring device according to claim 3 is characterized in that, described display module adopts charactron to show.
6. probe station test monitoring device according to claim 1 is characterized in that, also comprises the alarm that is connected with described judge module; When described judge module sends the instruction that stops to test to probe station, also send alarm command, the indication alarm equipment alarm to alarm.
7. probe station test monitoring device according to claim 2 is characterized in that, also comprises the alarm that is connected with described judge module;
When described judge module sends the instruction that stops to test to probe station, also send alarm command, the indication alarm equipment alarm to alarm;
Described load module comprises button, and described button comprises the warning cancel key.
8. probe station test monitoring device according to claim 7 is characterized in that, any one of the button that described warning cancel key is a load module or a plurality of.
9. according to any described probe station test monitoring device among the claim 1-8, it is characterized in that, also comprise the serial data counting module, described serial data counting module is connected with storer and erroneous judgement counting module, the data of the described test result with fixed word joint number that record storage receives receive that whenever a byte data of test result just adds 1; The serial data counting module judges according to the value of record whether described storer has received the data of a complete test result, when judgement has received the data of a complete test result, the value zero clearing of record and indication erroneous judgement counting module are read the data of described complete test result.
10. according to any described probe station test monitoring device among the claim 1-8, it is characterized in that, described erroneous judgement counting module receives that the product of expression test adds 1 when being the test result of defective products, the zero clearing when product of receiving the expression test is the non-defective unit test result.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201428023U CN201637843U (en) | 2010-03-22 | 2010-03-22 | Test monitoring device of probe station |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201428023U CN201637843U (en) | 2010-03-22 | 2010-03-22 | Test monitoring device of probe station |
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| CN201637843U true CN201637843U (en) | 2010-11-17 |
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| CN2010201428023U Expired - Fee Related CN201637843U (en) | 2010-03-22 | 2010-03-22 | Test monitoring device of probe station |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102135581A (en) * | 2010-12-21 | 2011-07-27 | 上海华岭集成电路技术股份有限公司 | Method for monitoring probe test utilization rate in real time |
| CN102135768A (en) * | 2010-12-21 | 2011-07-27 | 上海华岭集成电路技术股份有限公司 | Real-time probe test monitor system |
| CN104588332A (en) * | 2014-12-20 | 2015-05-06 | 佛山市多谱光电科技有限公司 | Method for reducing gear mixing rate of automatic LED testing machine |
| CN105203941A (en) * | 2014-06-20 | 2015-12-30 | 旺宏电子股份有限公司 | Inspection method of wafer test special pattern and probe card defect |
| CN107085416A (en) * | 2017-03-08 | 2017-08-22 | 青岛海尔（胶州）空调器有限公司 | The feedback and system of a kind of station flame |
| CN109445317A (en) * | 2018-09-14 | 2019-03-08 | 上海华岭集成电路技术股份有限公司 | The unmanned workshop technical grade APP application system of class |
| CN109726234A (en) * | 2018-09-14 | 2019-05-07 | 上海华岭集成电路技术股份有限公司 | Integrated circuit testing Information Management System based on industry internet |
| CN110757501A (en) * | 2018-07-25 | 2020-02-07 | 鸿富锦精密电子(天津)有限公司 | Monitoring terminal, manipulator and product placing method |
| CN111983412A (en) * | 2020-07-21 | 2020-11-24 | 深圳安博电子有限公司 | Monitoring system, monitoring method, monitoring terminal and storage medium |
| CN112345547A (en) * | 2020-10-29 | 2021-02-09 | 东方蓝天钛金科技有限公司 | Fluorescent inspection visual data processing system based on MES and processing method thereof |
-
2010
- 2010-03-22 CN CN2010201428023U patent/CN201637843U/en not_active Expired - Fee Related
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102135768A (en) * | 2010-12-21 | 2011-07-27 | 上海华岭集成电路技术股份有限公司 | Real-time probe test monitor system |
| CN102135581A (en) * | 2010-12-21 | 2011-07-27 | 上海华岭集成电路技术股份有限公司 | Method for monitoring probe test utilization rate in real time |
| CN105203941B (en) * | 2014-06-20 | 2018-01-16 | 旺宏电子股份有限公司 | The method of inspection of wafer sort special pattern and probe card defect |
| CN105203941A (en) * | 2014-06-20 | 2015-12-30 | 旺宏电子股份有限公司 | Inspection method of wafer test special pattern and probe card defect |
| CN104588332A (en) * | 2014-12-20 | 2015-05-06 | 佛山市多谱光电科技有限公司 | Method for reducing gear mixing rate of automatic LED testing machine |
| CN107085416B (en) * | 2017-03-08 | 2020-08-25 | 青岛海尔（胶州）空调器有限公司 | Feedback control method and system for station bad information |
| CN107085416A (en) * | 2017-03-08 | 2017-08-22 | 青岛海尔（胶州）空调器有限公司 | The feedback and system of a kind of station flame |
| CN110757501A (en) * | 2018-07-25 | 2020-02-07 | 鸿富锦精密电子(天津)有限公司 | Monitoring terminal, manipulator and product placing method |
| CN109445317A (en) * | 2018-09-14 | 2019-03-08 | 上海华岭集成电路技术股份有限公司 | The unmanned workshop technical grade APP application system of class |
| CN109726234A (en) * | 2018-09-14 | 2019-05-07 | 上海华岭集成电路技术股份有限公司 | Integrated circuit testing Information Management System based on industry internet |
| CN109726234B (en) * | 2018-09-14 | 2023-10-17 | 上海华岭集成电路技术股份有限公司 | Integrated circuit test informatization management system based on industrial Internet |
| CN111983412A (en) * | 2020-07-21 | 2020-11-24 | 深圳安博电子有限公司 | Monitoring system, monitoring method, monitoring terminal and storage medium |
| CN111983412B (en) * | 2020-07-21 | 2021-12-31 | 深圳米飞泰克科技有限公司 | Monitoring system, monitoring method, monitoring terminal and storage medium |
| CN112345547A (en) * | 2020-10-29 | 2021-02-09 | 东方蓝天钛金科技有限公司 | Fluorescent inspection visual data processing system based on MES and processing method thereof |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101117 Termination date: 20190322 |