CN102135581A - Method for monitoring probe test utilization rate in real time - Google Patents

Method for monitoring probe test utilization rate in real time Download PDF

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CN102135581A
CN102135581A CN 201010600189 CN201010600189A CN102135581A CN 102135581 A CN102135581 A CN 102135581A CN 201010600189 CN201010600189 CN 201010600189 CN 201010600189 A CN201010600189 A CN 201010600189A CN 102135581 A CN102135581 A CN 102135581A
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probe
signal
monitoring
station
probe station
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CN 201010600189
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Chinese (zh)
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凌俭波
叶阳平
季海英
岳小兵
张�杰
汪瑞祺
王静
祁建华
赵达君
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上海华岭集成电路技术股份有限公司
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Abstract

The invention discloses a method for monitoring probe test utilization rate in real time, which is used for monitoring working conditions of a plurality of probe stations. In the method, signals of the probe stations in various working conditions are exported from working condition display interfaces of the probe stations, and the signals are converted into level signals in a unified type by a comparator and are processed by a microprocessor; the level signals and corresponding probe station information are converted into communication protocol signals to be transmitted to a remote server by the microprocessor so as to monitor all the probe stations at a far end in a unified mode, and the technical problems that personnel continuously inspects each probe station to cause low efficiency and the like are solved. Moreover, a required number of comparators can be arranged according to different working condition display interfaces of different probe stations, different types of probe stations are managed in a unified mode, the real-time property of monitoring the probe stations is improved, and the utilization rate of the probe stations can be improved further.

Description

实时监控探针测试利用率的方法 Real-time monitoring of the utilization of probe test method

技术领域 FIELD

[0001] 本发明涉及半导体测试技术领域,特别是涉及一种实时监控探针测试利用率的方法。 [0001] The present invention relates to testing of semiconductor technology, and more particularly, to a real-time monitoring method of the utilization of a probe test.

背景技术 Background technique

[0002] 探针台是用在半导体领域对晶圆上的器件进行特性或故障分析而使用的精密机台。 [0002] Probe sets with the device characteristics of the wafer or fault analysis precision machine used in the semiconductor field. 对晶圆的测试过程由测试机、探针台等实现,通过探针台上的探针卡实现芯片上每个接脚与测试机的稳定连接,由测试机判定晶圆上芯片的特性。 A wafer testing process realized by the testing machine, and the like probe station, a stable connection pins on each chip and the tester probe station is achieved by a probe card, the characteristics of the wafer is determined by the chip tester.

[0003] 探针台种类繁多,从操作上可分为手动、半自动以及全自动探针台;从功能上可分为高温探针台,低温探针台,RF探针台,LCD平板探针台,霍尔效应探针台,表面电阻率探针α寸。 [0003] a wide range of probe station, from the operation can be divided into manual, semi-automatic and fully automatic probe station; functionally divided into a high temperature from the probe station, cryogenic probe station, the RF probe station, the LCD flat probe station, a Hall effect probe station, the surface resistivity probe α inch.

[0004] 通常,在半导体测试领域,一个实验室或者企业需要配备多台或多个种类的探针台,以满足不同产品的测试需求。 [0004] In general, semiconductor testing, a laboratory or enterprise needs with multiple units or more types of probes to meet the testing requirements of different products. 为了提高测试效率,往往希望对这些探针台的使用状态进行监控,然而,目前的监控方式为人工方式,即配备专门的工作人员,不断地到各个探针台前巡视,这不仅浪费人力,而且会影响操作人员的工作,监控效果也不理想。 In order to improve test efficiency, often want to use these stations to monitor the status of the probe, however, the current monitor mode to manual mode, that is equipped with a dedicated staff to constantly patrol the stage each probe, which is not only a waste of manpower, and will affect the work of the operator, monitoring the effect is not ideal. 即使,有些探针台制造厂商为其探针台配备了监控系统,可是,其成本较高,需要另外购买,而且对于其他厂商的探针台无法实现兼容,对于整个监控系统的扩展十分不利。 Even some prober manufacturers to equip their probe station monitoring system, however, its high cost, need to buy, but also for other manufacturers of compatible probe station can not be achieved, the monitoring system for the extension of very unfavorable. 为此,如何提供一种有效的探针台实时监控方法实为本领域一重要课题。 To do this, how to provide an effective method for real-time monitoring probe station known to those of a important issue.

发明内容 SUMMARY

[0005] 本发明的目的在于提供一种实时监控探针测试利用率的方法,以解决现有探针台监控效率低下等技术问题。 [0005] The object of the present invention is to provide a test probe to monitor real-time utilization method, in order to solve the conventional prober inefficient monitoring technical problems.

[0006] 为解决以上技术问题,本发明提供一种实时监控探针测试利用率的方法,用以监控多个探针台的工作状态,其包括:根据每个探针台的工作状态显示接口数量,为每个探针台配置一监控单元,该监控单元包括微处理器以及分别与该微处理器连接的多个比较器、 存储器、通讯接口,其中每个监控单元内的比较器的数量为每个探针台的工作状态显示接口数量;利用多个比较器分别接收其所连接的探针台的多种工作状态信号,并将所接收的信号转换为电平信号;利用存储器存储对应的探针台的信息;利用微处理器将所述电平信号与对应的探针台信息转换为通讯接口对应的通讯协议信号,以通过通讯接口将该通讯协议信号传输给服务端;利用服务端根据所接收的通讯协议信号获取探针台的工作状态。 [0006] In order to solve the above technical problem, the present invention provides a real-time monitoring method of the utilization of a probe test for monitoring the operating state of the plurality of probe station, comprising: a display interface according to the operating state of each probe station quantity, a configuration for each probe station monitoring unit, the monitoring unit comprises a microprocessor and a plurality of comparators are respectively connected to the microprocessor, memory, communication interface, wherein the number of comparators in each monitoring unit It shows the number of interfaces to the operating state of each probe station; using a plurality of comparators each receiving a plurality of operation status signal probe station which they are attached, and to convert the received signal level signal; using a memory storing the corresponding the probe station information; using a microprocessor and the level of the signal corresponding to the probe station communication interface information into signals corresponding to communication protocol, the communication protocol through the interface to transmit a signal to the communication server; used service end of the probe station acquiring the working state in accordance with the communication protocol of the received signal.

[0007] 进一步的,所述服务端包括集线器和工作机,且该方法还包括:利用集线器接收多每个监控单元所传输的通讯协议信号,并将其转换为工作机可以识别的信号;利用工作机从集线器转换的信号中获得对应的探针台信息及其工作状态。 [0007] Further, the server comprises a hub and a working machine, and the method further comprises: using a communication protocol signal transmitted by each hub receives multiple monitoring unit, and converted into a signal recognizable working machine; using working machine to obtain the probe station and operation state information corresponding to a signal from the hub converted.

[0008] 进一步的,所述服务端与所述监控单元之间的信息交换方式为主动询问方式,即: 服务端向监控单元发送询问信号,其中所述询问信号内包括一探针台的地址信息;对应于所述询问信号内的探针台的地址信息的监控单元将其获得的探针台工作状态信号转换为通讯协议信号传输给服务端。 Information exchange between [0008] Further, the server and the monitoring unit is active interrogation mode, that is: the service terminal sends an interrogation signal to the monitoring unit, wherein said interrogation signal within a probe station address comprises information; monitoring unit corresponding to the interrogation probe station address information in the operation status signal of the probe signal is obtained by converting its protocol signal transmitted to the server.

[0009] 进一步的,所述探针台的多种工作状态显示接口为状态指示灯接口。 [0009] Further, the operating state of the plurality of probe station interface status indicator display interface.

[0010] 进一步的,所述探针台的状态指示灯包括红灯、绿灯与黄灯。 [0010] Further, the probe station status indicator comprises red, green and yellow.

[0011] 进一步的,所述服务端包括显示装置与转换程序,所述转换程序运行将所接收到的探针台工作状态信号转换为对应的指示灯颜色,并根据对应的探针台信息,于显示装置上图形化显示各个探针台的工作状态。 [0011] Further, the server device comprises a display device and a conversion program, a conversion program running operation status of the probe signal converting the received lights into corresponding color, and according to information corresponding to a probe station, on a display device graphically displays the operating state of each probe station.

[0012] 可见,以上方法从探针台的工作状态显示接口引出探针台的各种工作状态信号, 并利用比较器将其转换为电平信号,交由微处理器处理,利用微处理器将电平信号与相应的探针台信息转为通讯协议信号传输给远端的服务端,以在远端统一对所有探针台进行监控,避免了人员不断到各个探针台去巡视所带来的效率低下等技术问题。 [0012] visible, from the operating state display method of the above probe station interface leads to various operating status signal probe station, and using a comparator to convert the signal level, referred processed by the microprocessor using the microprocessor the level of the signal corresponding to the probe station information into the communication protocol signal transmitted to the remote server, to unify all of the probes monitoring station at the far end, to avoid the staff have been brought each probe station to patrol to inefficiencies and other technical issues. 且可以根据不同探针台的工作状态显示接口的不同,设置所需数量的比较器,实现了对不同种类探针台的统一化管理,增加了探针台监控的实时性,进而可以提高探针台的利用率。 And can display different interfaces according to the operating state of the different probe sets, provided the required number of comparators, to achieve a unified management of different types of probe station, increasing the real-time monitoring of probe station, and further improving the probe utilization needle station.

附图说明 BRIEF DESCRIPTION

[0013] 图1为本发明一实施列所提供的探针测试实时监控系统的结构框图; [0013] FIG. 1 a block diagram of a probe test time monitoring system of columns to an embodiment of the present invention is provided;

[0014] 图2为本发明一实施列所提供的探针测试实时监控系统的服务端所显示的信息状态; [0014] FIG. 2 an embodiment of a probe test server state information of real-time monitoring system provided by the column of the present invention is shown;

[0015] 图3为本发明一实施列所提供实时监控探针测试利用率的方法的流程示意图。 [0015] Fig 3 a schematic flowchart of real-time monitoring column utilization test probe provided a method embodiment of the present invention. 具体实施方式 detailed description

[0016] 为让本发明的上述特征和优点能更明显易懂,下文特举示例性实施例,并配合附图,作详细说明如下。 [0016] In order to make the above features and advantages of the invention more comprehensible, several exemplary embodiments Hereinafter exemplary embodiments accompanied with figures are described in detail below.

[0017] 通常,在半导体测试领域,一个实验室或者企业需要配备多台或多个种类的探针台,以满足不同产品的测试需求。 [0017] In general, semiconductor testing, a laboratory or enterprise needs with multiple units or more types of probes to meet the testing requirements of different products. 然而,现有技术中却缺乏对这些探针台利用率的有效监控,无法及时了解哪些探针台处于使用状态,哪些探针台处于闲置状态,对于出现故障的探针台难以及时发现,使得整个实验室的探针台利用率无法达到最佳状态,进而使得测试效率下降。 However, the prior art is the lack of effective monitoring of the utilization of these probe sets, which can not keep abreast of the probe station is in use, the probe station which is idle for a probe station failure is difficult to detect, so that the entire lab probe station can not achieve optimal utilization of the state, thus making the drop test efficiency.

[0018] 本发明充分考虑到这一问题,对各种探针台做了研究,发现探针台为了方便操作者实时观测到它的工作状态,往往引出多路接口信号,以控制不同的状态显示。 [0018] The present invention is fully taken into account this problem, various studies done probe station, the probe was found to facilitate the operator station for real-time observation to its working state, it tends to lead multiple interface signals to control the different states display. 一种较为常见的方式就是控制状态指示灯的显示。 A more common way is to control state LED display. 例如,探针台P8、UF200、UF3000等都设置有状态指示灯,分别为红灯、绿灯和黄灯。 For example, the probe station P8, UF200, UF3000 so provided with status indicators for the red, green and yellow. 其中红灯闪烁表示机器故障,需要处理;绿灯表示机器正处于工作状态;黄灯表示机器暂停工作,需要人为干预操作。 Wherein blinking red for machine failures need to be addressed; green light indicates the machine is in a working state; yellow light indicates the machine is suspended, requires human intervention operation.

[0019] 本发明正是利用探针台引出的多路接口信号,将这些信号转换为一个远端的服务端(例如,为计算机)可以识别及处理的信号,并将该信号传送给服务端,以在服务端集中监控所有探针台的工作状态,从而提高探针台工作状态的监控效率。 [0019] The present invention is the use of multiple leads probe station interface signals, converts these signals to a remote server (e.g., a computer) can be identified, and the signal processing, and the signal is transmitted to the server to the server at all operating conditions centralized monitoring probe station, thereby improving the efficiency of monitoring the operation status of the probe.

[0020] 具体,请参考图1,其为本发明一实施列所提供的探针测试实时监控系统的结构框图。 [0020] Specifically, referring to FIG 1, which is a structural block diagram of a real-time monitoring system probing columns provided a embodiment of the invention. 如图宿松,该探针测试实时监控系统用以监控多个探针台10的工作状态,该系统包括服务端30以及多个监控单元20,其中每个监控单元20连接一个探针台10,且服务端30通过监控单元20获得探针台10的工作状态。 FIG Susong, the probe test time monitoring system for monitoring a plurality of operating state of the probe station 10, the system 30 includes a server 20 and a plurality of monitoring units, wherein each of the monitoring unit 20 is connected to a probe station 10 and the server unit 30 is obtained by monitoring the operating state of the probe 20 of the station 10. 具体监控单元20包括微处理器21,以及分别与该微处理器21连接的多个比较器22、存储器23和通讯接口24。 DETAILED monitoring unit 20 includes a microprocessor 21, and a plurality of comparators, each connected to the microprocessor 2122, a memory 23 and communication interface 24.

[0021] 其中比较器21连接对应的探针台10,即每个监控单元20内,每个比较器21连接一路探针台10的接口信号,例如在本实例中,探针台10具有三路接口信号分别代表机器故障、正常运行、暂停工作等工作状态,每个比较器21接收一种工作状态信号,并将所接收的信号转换为电平信号。 [0021] wherein the corresponding comparator 21 is connected to the probe station 10, i.e. 20, of each comparator 21 is connected along each of the probe sets interface signal monitoring unit 10 is, for example, in the present example, the probe station 10 having three line interface signals representing machine failure, normal operation, and so the work pause state, each comparator 21 receives the operating state signal, and to convert the received signal level signal. 这是因为,通常引出的接口信号的电压比较高,不利于后续处理,因此,利用比较器将其转换为统一的电平信号,以便于后续微处理器的处理。 This is because the voltage of interface signals are typically relatively high lead, is not conducive to the subsequent processing, thus using a comparator to convert it to a uniform level signal, so that the subsequent processing of the microprocessor. 举例而言,当引出的接口信号为指示灯驱动信号时,其工作电压往往为MV,故为比较器施加24V (或略低) 的基准电压,当指示灯闪烁时,比较器就有等于或高于基准电压的输入,进而输出高电平, 代表信号灯闪烁,产生相应的工作状态;当指示灯不闪烁或未亮时,比较器就有低于基准电压的输入,进而输出低电平,代表信号灯未亮,相应的工作状态未产生。 For example, when the interface signal lamp driving signal is drawn, which it is often the operating voltage is MV, so applying 24V (or lower) the reference voltage of the comparator, when the light is flashing, the comparator is equal to or there higher than the reference voltage at the input, and then outputs a high level, the representative indicator flashes to give the corresponding operating state; when the light is not blinking or light, there is the comparator input is below the reference voltage, and thus outputs a low level, the semaphore is not lit, the respective operating state is not generated.

[0022] 存储器23存储对应的探针台10的信息,这里所说的信息可以包括探针台的地址信息、配置信息等。 [0022] The information memory 23 storing the corresponding probe station 10, where said information may include address information of the probe station, the configuration information and the like. 这是因为,在对探针台的工作状态进行监控时,服务端30需要识别每个探针台10,以将所接收到的工作状态信号与探针台对应起来。 This is because, when the operation state monitoring probe station, the server station 30 is necessary to identify each probe 10 to the received signal and the operation state in association with the probe station. 其中,可以为每个探针台编号,利用序号来实现地址的记录。 Wherein each probe can be numbered stage, using the address number to effect recording. 当然,本发明在此不以此为限,本领域技术人员可以根据需要利用配置号或者其他信息来实现这种地址的记录。 Of course, the present disclosure is not limited thereto, those skilled in the art may need to use the configuration information to implement a number or other address of this recording.

[0023] 通讯接口M用以与服务端30建立连接,在此,本发明不限制其连接方式,可以为有线连接,也可以为无线连接。 [0023] M communication interface for establishing a connection with the server 30, in this case, the present invention does not limit its connection, a wired connection may be, may be a wireless connection. 较佳的,采用有线连接的传输方式,例如双绞线传输,这样可以有效的避免信号干扰给测试带来的不利。 Preferably, the transmission using a wired connection, such as twisted pair transmission, which can effectively avoid adverse interference signals brought to the test.

[0024] 微处理器21是监控单元20的核心,用以协调比较器22、存储器23和通讯接口M 之间的工作,具体其将比较器22所得到的电平信号与对应的存储器23内的探针台信息转换为通讯接口M对应的通讯协议信号,以通过该通讯接口M将该通讯协议信号传输给服务端30。 [0024] The microprocessor 21 is the heart of the monitoring unit 20, to coordinate the comparator 22, the work memory 23, and communication between the interfaces M, particularly the level of the signal which is obtained from the comparator 22 and the memory 23 corresponding to the probe station information into the communication interface corresponding to the communication protocol signals M, M through the communication interface in the communication protocol signal is transmitted to the server 30. 例如,当通讯接口M与服务端30之间通过双绞线连接时,就需要将比较器22所得到的电平信号与对应的存储器23内的探针台信息转换为RS485信号。 For example, when connected via a twisted pair communication interface between the M and the server 30, it is necessary to convert the information in the probe station signal level of the comparator 22 and the resulting memory 23 corresponding to the RS485 signals.

[0025] 可见,以上探针测试实时监控系统利用探针台引出的多路接口信号来于远端统一监控多个探针台的工作状态,具体,其将引出的信号转换为远端的服务端(例如,为计算机)可以识别及处理的信号,并将该信号传送给服务端,以在服务端集中监控所有探针台的工作状态,从而提高探针台工作状态的监控效率。 [0025] visible, or more probe test time monitoring system using a multi-channel signal probe station interfaces lead to unify a plurality of monitoring the operating state of the distal end of the probe station, specifically, the signal conversion which leads to the distal end of service end (e.g., a computer) can recognize and process a signal, and transmits the signal to the server, to the server at the centralized monitoring probe station all operating conditions, thereby improving the efficiency of monitoring the operation status of the probe.

[0026] 由于探针台的数量较多,相应的传输路径不止一个,而且不是每种传输过来的信号都可以被服务端的工作机所识别,故较佳的,如图所示,可以在服务端30设置集线器31, 以连接多个监控单元20,接收其所传输的通讯协议信号,并将其转换为工作机32可以识别的信号;而工作机32连接集线器31,以从集线器31转换的信号中获得对应的探针台信息及其工作状态。 [0026] Due to the number of probe station, more than a corresponding transmission path, and not over each transmission signal can be recognized by the server of the working machine, it is preferred, as shown, may service end 30 is provided a hub 31, connected to the plurality of monitoring unit 20, it receives the communication protocol signal transmitted and converts it into a signal of the working machine 32 can be identified; the working machine 32 is connected to the hub 31, the hub 31 is to convert from prober signal is obtained and operation state information corresponding to. 例如,当通讯接口M与服务端30之间通过双绞线连接,且集线器31与工作机之间通过USB连接时,集线器将接收到的RS485信号转换为USB信号,以便于工作机的后续处理。 For example, when the communication interface between M and the server 30 is connected via a twisted pair, and between the hub 31 and the working machine is connected via a USB, RS485 hub the received signal into USB signal, for subsequent processing to the work machine .

[0027] 需要说明的是,该系统可以设置固定时间,各个监控单元将其所获得的信息传送给服务端,也可以以服务端主动询问的方式来获得各个监控单元所获得的信息。 [0027] Incidentally, the system may set a fixed time, the respective monitoring unit transmits the information it obtained to the server, the server may also ask about the way to get information obtained by the respective monitoring unit. 由于半导体测试对于环境的要求比较高,故较佳的,服务端30与监控单元20之间的信息交换方式采用主动询问方式,这样可以避免所有传输路径共同传输所带来的信号干扰。 Since high requirements for semiconductor test environment, it is preferred, the information exchange between the server 20 and monitoring unit 30 uses active interrogation mode, to avoid the interference signal transmission of all transmission paths brought together. 具体,服务端30 向监控单元20发送询问信号,其中询问信号内包括一探针台10的地址信息;应服务端30的询问信号,对应其内地址的探针台的监控单元20将其获得的探针台工作状态信号转换为通讯协议信号传输给服务端30。 Specifically, the server 30 to the monitoring unit 20 sends an inquiry signal including the address information table 10 in a probe interrogation signal; should interrogation signal monitoring unit of the server 30, the corresponding address within the probe station 20 to obtain probe signal into an operation status of the communication protocol signal transmitted to the server 30.

[0028] 在前面已经提及,现有探针台的工作状态多是通过指示灯来显示给操作人员的, 故较佳的,所述探针台的多种工作状态信号是通过其状态指示灯接口引出,即每个监控单元20内的比较器22分别连接对应的探针台10的多个状态指示灯接口。 [0028] already mentioned earlier, the working state of the art multi-probe station is displayed to the operator by the indicator, it is preferred, a plurality of operation state signal of the probe station is indicated by its status light connector leads, i.e., each comparator in the monitoring unit 2022 are connected to a plurality of states corresponding to the probe station 10. the LED connector. 在本实施列中,包括三个指示灯,分别为红灯、绿灯与黄灯。 In this embodiment column, it includes three indicator lights, respectively, red, green and yellow. 然而,本发明不以此为限,可以根据具体探针台的工作状态指示情况而设计。 However, the present invention is not limited thereto, and may be designed according to the specific operating state of the probe station where indicated.

[0029] 指示灯的好处在于可以直观的显示每个探针台的工作状态,而在远端的服务端, 这种状态可以转换为数据或信息显示给监控人员,但这种信息不如指示灯那么直观,所以较佳的,可以在服务端设置显示装置与转换程序,利用转换程序运行将所接收到的探针台工作状态信号转换为对应的指示灯颜色,并根据对应的探针台信息,于显示装置上图形化显示各个探针台的工作状态。 [0029] The advantage is that the indicator can visually display the working status of each probe station, while the distal end of the service, such a state can be converted to display data or information to the monitoring personnel, but this information is not as good indicators so intuitive, it is preferred, the conversion program may display means provided in the server, using the conversion probe running operation status of the received signal is converted into corresponding color indicator, and information according to the corresponding probe station , the graphical display on the display device the operating state of each probe station. 如图2,其示出了一种显示装置33上所显示的信息状态。 2, which shows a state of the information displayed on the display device 33. 其中,每个小方框331代表一个探针台,其具有与实验室探针台地址相同或相应的地址,R代表红色,Y代表黄色,G代表绿色。 Wherein each of the small box 331 represents a probe station having the same address laboratory or corresponding probe station address, R for red, Y for yellow, G for green. 如此,监控人员便可以直观的从远端实时掌握各个探针台的工作状态,以提高探针台的利用率。 Thus, monitoring personnel can intuitively grasp in real time from a remote work status of each probe station, in order to improve the utilization of probe station.

[0030] 对应于以上探针测试实时监控系统,本发明还提供一种实时监控探针测试利用率的方法,用以监控多个探针台的工作状态。 [0030] Test probe corresponding to the above time monitoring system, the present invention also provides a real-time monitoring of the utilization of a probe test method, probes for monitoring a plurality of stations operating state. 结合参考图3,该方法包括如下步骤: In conjunction with reference to Figure 3, the method comprising the steps of:

[0031] S310 :根据每个探针台10的工作状态显示接口数量,为每个探针台配置一监控单元20.如图1所示,该监控单元20包括微处理器21以及分别与该微处理器21连接的多个比较器22、存储器23、通讯接口24,其中每个监控单元20内的比较器的数量为每个探针台10的工作状态显示接口数量。 [0031] S310: the interface displays the number of each probe according to the operating state of the table 10, the configuration shown in FIG. 1, the monitoring unit 20 includes a monitoring unit 20. The microprocessor 21, respectively, and for each of the probe sets a plurality of comparator 21 is connected to microprocessor 22, memory 23, communication interface 24, wherein the number of comparators in each unit 20 to monitor the operating state of each probe station 10 displays the number of interfaces.

[0032] 在本实施列中,探针台10的工作状态显示接口数量为三个,则相应需要配置三个比较器22。 [0032] In the present embodiment the column, the operating state of the probe station 10 is shown as the number of three interfaces, configure the corresponding three comparators 22. 较佳的,探针台的多种工作状态显示接口为其状态指示灯接口。 Preferably, a plurality of operation state of the probe station status indicator display interface for the interface. 因为,指示灯是探针台较为常见的像操作人员显示其工作状态的方式,这在前面已经提及,例如,分别为利用红灯表示机器故障、需要处理;绿灯表示机器正处于工作状态;黄灯表示机器暂停工作, 需要人为干预操作。 Because the light is more common as a probe station operator display its working state, which has been mentioned earlier, for example, for the use of machine failure indicate red, need to be addressed; green light indicates the machine is in a working state; A yellow light indicates the machine is halted work, you need human intervention to operate. 那么此时,比较器22分别连接红灯、绿灯和黄灯的接口,以引出其接口信号。 So this case, the comparator 22 are connected to the red, green and yellow interfaces, which leads to interface signals. 即,如步骤S320: That is, in step S320:

[0033] S320:利用多个比较器22分别接收其所连接的探针台的多种工作状态信号,并将所接收的信号转换为电平信号; [0033] S320: using a plurality of comparator 22 receives a plurality of operation status signal probe station which they are attached, and to convert the received signal level signal;

[0034] S330 :利用存储器23存储对应的探针台的信息; [0034] S330: corresponding to information stored in the memory 23 of the probe station;

[0035] S340 :利用微处理器21将所述电平信号与对应的探针台信息转换为通讯接口M 对应的通讯协议信号,以通过通讯接口M将该通讯协议信号传输给服务端30 ; [0035] S340: using the microprocessor 21 sets the level of the probe signal information is converted to the corresponding communication interface corresponding to the communication protocol signals M, M through the communication interface to the communication protocol signal transmitted to the server 30;

[0036] S350 :利用服务端30根据所接收的通讯协议信号获取探针台的工作状态。 [0036] S350: the service using terminal 30 acquires the operating state of the probe station in accordance with the communication protocol of the received signal.

[0037] 可见,以上方法从探针台的工作状态显示接口引出探针台的各种工作状态信号, 并利用比较器将其转换为电平信号,交由微处理器处理,利用微处理器将电平信号与相应的探针台信息转为通讯协议信号传输给远端的服务端,以在远端统一对所有探针台进行监控,避免了人员不断到各个探针台去巡视所带来的效率低下等技术问题。 [0037] visible, from the operating state display method of the above probe station interface leads to various operating status signal probe station, and using a comparator to convert the signal level, referred processed by the microprocessor using the microprocessor the level of the signal corresponding to the probe station information into the communication protocol signal transmitted to the remote server, to unify all of the probes monitoring station at the far end, to avoid the staff have been brought each probe station to patrol to inefficiencies and other technical issues. 且可以根据不同探针台的工作状态显示接口的不同,设置所需数量的比较器,实现了对不同种类探针台的统一化管理,增加了探针台监控的实时性,进而可以提高探针台的利用率。 And can display different interfaces according to the operating state of the different probe sets, provided the required number of comparators, to achieve a unified management of different types of probe station, increasing the real-time monitoring of probe station, and further improving the probe utilization needle station. [0038] 在使用中,由于探针台的数量较多,相应的传输路径不止一个,而且不是每种传输过来的信号都可以被服务端的工作机所识别,故较佳的,如图1所示,可以在服务端30设置集线器31,以连接多个监控单元20,接收其所传输的通讯协议信号,并将其转换为工作机32可以识别的信号。 [0038] In use, because the number of probe station, more than a corresponding transmission path, and not over each transmission signal can be recognized by the server of the working machine, it is preferred, as a shown, the hub 31 may be provided at the server 30, to connect the plurality of monitoring unit 20, it receives the transmitted protocol signal, and converts it into a signal of the working machine 32 can be identified. 则该方法还包括如下步骤:利用集线器接收多每个监控单元所传输的通讯协议信号,并将其转换为工作机可以识别的信号;利用工作机从集线器转换的信号中获得对应的探针台信息及其工作状态。 The method further comprising the step of: using a multi-protocol hub receives the transmitted signal of each monitoring unit, and converts it into a signal recognizable working machine; obtained using the working machine corresponding to the signal from the probe station hub converted information and its working condition. 例如,当通讯接口M与服务端30之间通过双绞线连接,且集线器31与工作机之间通过USB连接时,集线器将接收到的RS485信号转换为USB 信号,以便于工作机的后续处理。 For example, when the communication interface between M and the server 30 is connected via a twisted pair, and between the hub 31 and the working machine is connected via a USB, RS485 hub the received signal into USB signal, for subsequent processing to the work machine .

[0039] 需要说明的是,在本方法中,可以设置固定时间间隔让各个监控单元将其所获得的信息传送给服务端,也可以以服务端主动询问的方式来获得各个监控单元所获得的信息。 [0039] Incidentally, in the present process, can set a fixed time interval so that the respective monitoring unit transmits the information it obtained to the server, the server may also ask about ways to obtain respective monitoring unit obtained information. 由于半导体测试对于环境的要求比较高,故较佳的,服务端30与监控单元20之间的信息交换方式采用主动询问方式,这样可以避免所有传输路径共同传输所带来的信号干扰。 Since high requirements for semiconductor test environment, it is preferred, the information exchange between the server 20 and monitoring unit 30 uses active interrogation mode, to avoid the interference signal transmission of all transmission paths brought together. 具体,服务端30向监控单元20发送询问信号,其中询问信号内包括一探针台10的地址信息;应服务端30的询问信号,对应其内地址的探针台的监控单元20将其获得的探针台工作状态信号转换为通讯协议信号传输给服务端30。 Specifically, the server 30 to the monitoring unit 20 sends an inquiry signal including the address information table 10 in a probe interrogation signal; should interrogation signal monitoring unit of the server 30, the corresponding address within the probe station 20 to obtain probe signal into an operation status of the communication protocol signal transmitted to the server 30.

[0040] 在前面已经提及,指示灯是探针台较为常见的像操作人员显示其工作状态的方式,指示灯的好处在于可以直观的显示每个探针台的工作状态,而在远端的服务端,这种状态可以转换为数据或信息显示给监控人员,但这种信息不如指示灯那么直观,所以较佳的, 可以在服务端设置显示装置与转换程序,利用转换程序运行将所接收到的探针台工作状态信号转换为对应的指示灯颜色,并根据对应的探针台信息,于显示装置上图形化显示各个探针台的工作状态。 [0040] already mentioned earlier, the light is more common as a probe station operator display its operating state, the benefits that the indicator can visually display the working status of each probe station, and at the distal end the server, this state can be converted to display data or information to the monitoring personnel, but this information is not as intuitive indicators so, it is preferred, may be provided at the service end device display and conversion program, by using the conversion program is run to the operation status of the probe converts the received signal into a corresponding color indicator, and a probe station in accordance with the corresponding information on the display device graphically displays the operating state of each probe station.

[0041] 以上显示和描述了本发明的基本原理、主要特征和本发明的优点。 [0041] The above and described the principles of the invention, the main features and advantages of the present invention. 本领域的技术人员应该了解,本发明不受上述实施例的限制,上述实施例和说明书中描述的只是本发明的原理,在不脱离本发明精神和范围的前提下本发明还会有各种变化和改进,这些变化和改进都落入要求保护的本发明的范围内。 Those skilled in the art will appreciate that the present invention is not limited to the above embodiment, the above-described principles and embodiments described in the specification are only embodiments of the present invention, the present invention without departing from the spirit and scope of the invention will have a variety of changes and modifications, changes and modifications within the scope of the invention claimed fall. 本发明要求的保护范围由所附的权利要求书及其等同物界定。 Scope of the invention claimed by the appended claims and equivalents thereof defined.

Claims (6)

  1. 1. 一种实时监控探针测试利用率的方法,用以监控多个探针台的工作状态,其特征是, 包括:根据每个探针台的工作状态显示接口数量,为每个探针台配置一监控单元,该监控单元包括微处理器以及分别与该微处理器连接的多个比较器、存储器、通讯接口,其中每个监控单元内的比较器的数量为每个探针台的工作状态显示接口数量;利用多个比较器分别接收其所连接的探针台的多种工作状态信号,并将所接收的信号转换为统一类型的电平信号;利用存储器存储对应的探针台的信息;利用微处理器将所述统一的电平信号与对应的探针台信息转换为通讯接口对应的通讯协议信号,以通过通讯接口将该通讯协议信号传输给服务端;利用服务端根据所接收的通讯协议信号获取探针台的工作状态。 A real-time monitoring method of the utilization of a probe test, a plurality of probes for monitoring the operating state of the stations, characterized in that, comprising: a number of display interfaces according to the operating status of each station probe for each probe a monitoring unit arranged station, the monitoring unit comprises a microprocessor and a plurality of comparators are respectively connected to the microprocessor, memory, communication interface, wherein the number of comparators in each monitoring unit for each probe station the number of work status display interfaces; using a plurality of comparators each receiving a plurality of operation status signal probe station which they are attached, and converts the received signal into a unified type level signal; using a memory storing the corresponding prober information; probe station information using the microprocessor to a uniform level signal is converted to the corresponding communication interface corresponding to the communication protocol signals to the interface through the signal transmission communication protocol to the server; using the server according to communication protocol of the received signal acquisition probe station operating state.
  2. 2.根据权利要求1所述的实时监控探针测试利用率的方法,其特征是,所述服务端包括集线器和工作机,且该方法还包括:利用集线器接收多每个监控单元所传输的通讯协议信号,并将其转换为工作机可以识别的信号;利用工作机从集线器转换的信号中获得对应的探针台信息及其工作状态。 The real-time method for monitoring the utilization rate of the test probe as claimed in claim 1, wherein the service end includes a hub and a working machine, and the method further comprising: monitoring units each hub receives the transmitted multi- communication protocol signal, and converts it into a signal recognizable working machine; working machine is obtained using a probe station and operation state information corresponding to a signal from the hub converted.
  3. 3.根据权利要求1所述的实时监控探针测试利用率的方法,其特征是,所述服务端与所述监控单元之间的信息交换方式为主动询问方式,即:服务端向监控单元发送询问信号,其中所述询问信号内包括一探针台的地址信息;对应于所述询问信号内的探针台的地址信息的监控单元将其获得的探针台工作状态信号转换为通讯协议信号传输给服务端。 The real-time method for monitoring the utilization rate of the test probe as claimed in claim 1, characterized in that the information exchange between the server and the monitoring unit is active interrogation mode, namely: the server monitoring unit transmitting an interrogation signal, wherein the inquiry address information within a probe station comprising a signal; address information corresponding to the interrogation signal within the probe station monitoring unit operation status of the probe into a signal which is obtained protocol signal is transmitted to the server.
  4. 4.根据权利要求1所述的实时监控探针测试利用率的方法,其特征是,所述探针台的多种工作状态显示接口为状态指示灯接口。 The real-time method for monitoring the utilization rate of the test probe as claimed in claim 1, wherein said plurality of work station probe status display interface status indicator interface.
  5. 5.根据权利要求4所述的实时监控探针测试利用率的方法,其特征是,所述探针台的状态指示灯包括红灯、绿灯与黄灯。 The real-time method for monitoring the utilization of the test probe according to claim 4, characterized in that the probe station status indicator comprises red, green and yellow.
  6. 6.根据权利要求5所述的实时监控探针测试利用率的方法,其特征是,所述服务端包括显示装置与转换程序,所述转换程序运行将所接收到的探针台工作状态信号转换为对应的指示灯颜色,并根据对应的探针台信息,于显示装置上图形化显示各个探针台的工作状态。 The real-time method for monitoring the utilization of the test probe according to claim 5, wherein the service end includes a display device and a conversion program, the program is run to convert the received operation status signal probe station converted into a corresponding color indicator, and a probe station in accordance with the corresponding information on the display device graphically displays the operating state of each probe station.
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CN104251935B (en) * 2013-06-26 2018-03-06 中芯国际集成电路制造(上海)有限公司 Measuring apparatus and method of wafer resistivity
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