CN201598346U - Rectangular boat for horizontal single crystal growth - Google Patents
Rectangular boat for horizontal single crystal growth Download PDFInfo
- Publication number
- CN201598346U CN201598346U CN2009203506109U CN200920350610U CN201598346U CN 201598346 U CN201598346 U CN 201598346U CN 2009203506109 U CN2009203506109 U CN 2009203506109U CN 200920350610 U CN200920350610 U CN 200920350610U CN 201598346 U CN201598346 U CN 201598346U
- Authority
- CN
- China
- Prior art keywords
- boat
- single crystal
- rectangular
- horizontal
- crystal growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
A rectangular boat for horizontal single crystal growth belongs to the field of equipment for single crystal growth and comprises a main body, a boat head and a boat tail, wherein the main body is arranged in the middle of the boat, the boat head and the boat tail are respectively arranged on two sides of the boat, the cross section of the main body of the boat is rectangular rather than semicircular or irregular. Horizontal single crystals grown by the rectangular boat are square chips, thereby removing a circle cutting procedure which is required on single crystal chips grown by the original semi-circular boat and irregular boat, and effectively reducing loss when scribing devices.
Description
Technical field
The utility model relates to a kind of horizontal single crystal growing rectangle boat, belongs to the growing single-crystal apparatus field.
Background technology
The horizontal Bridgman method of growing single-crystal is called for short the HB method; Use quite extensive.Aspect the growth of compound semiconductor single crystal, especially true.The HB method is that the raw material with growing single-crystal is placed in a kind of vessel, and vessel are put into pipe, vacuumize the rear enclosed mouth of pipe; With directional solidification method or directed zone melting method growing single-crystal.This vessel generally are referred to as " boat ", and outer tube is referred to as growth tube.
At present, divide from purposes, boat is used for synthesised polycrystalline, is referred to as: synthetic boat; And be used for growing single-crystal, be referred to as: the crystal pulling boat.Single crystal growing is constructed as follows with boat: foremost cry the seed crystal chamber, the part between main body and seed crystal chamber is in shouldering portion, effect is the main body that smoothly connects seed crystal chamber and boat.The centre is the main part of single crystal growing boat.Be the boat tail at last.
The boat that the HB method is used is from that day of appearance, and main body section just adopts semicircle.Up to the present, comprising the well-known manufacturer of using HB method growing single-crystal in the world, is semicircular boat except we also adopt main body section.
That the seed crystal chamber then has is square, rectangle, semicircle etc. are multiple.
Semicircle boat has been used decades, and its maximum characteristics are handling eases.Round tube one broken two halves are added the boat head and the boat tail gets final product.
Horizontal monocrystalline main application is to make discrete device-LED (photodiode).Wafer is delayed outside and need be carried out scribing.Be cut into very little little side's sheet.Semicircle boat and different in nature boat all will carry out cyclotomy after the section after the single crystal growing success, will cut to such an extent that monocrystalline D matrix is slit into disk, carry out picture after the disk extension, can not use substantially in the outer 5mm of disk, also will lose along the scribing direction.The monocrystalline square plate then can save the cyclotomy operation, reduces the loss when the device scribing.
Summary of the invention
The utility model is at the shortcoming of semicircle boat and special-shaped boat, a kind of horizontal single crystal growing rectangle boat is provided, by the following technical solutions: described rectangle boat includes boat intermediary main body, both sides are divided into boat head, boat tail, wherein, the cross section of the main part of boat is rectangle, replaced in the past semicircle and special-shaped.
The interior height of the main part of described boat is 30
+ 0.5Mm, horizontal clearance are 53
+ 0.5Mm, wall thickness are 3.5
+ 0.5Mm.
The beneficial effects of the utility model are: the horizontal monocrystalline that adopts rectangle boat described in the utility model to grow is a square plate, can save the necessary cyclotomy operation of single-chip that grows by former semicircle boat and special-shaped boat, when the device scribing, effectively reduce loss.
Description of drawings
Fig. 1 is a diagrammatic cross-section of the present utility model;
Fig. 2 is a vertical view of the present utility model;
Fig. 3 is the sectional view of A-A face (boat main part).
Number in the figure:
The 1-main part; 2-boat head; 3-boat tail; 4-seed crystal chamber; The 5-back up pad; 6-shouldering portion.
Embodiment
The utility model provides a kind of horizontal single crystal growing rectangle boat, below by description of drawings and embodiment the utility model is described further.
Fig. 1 is a diagrammatic cross-section of the present utility model; Fig. 2 is a vertical view of the present utility model.Described rectangle boat includes boat intermediary main part 1, and both sides are divided into boat head 2, boat tail 3, and wherein, the cross section of the main part 1 of boat is a rectangle.Boat head 3 places are provided with seed crystal chamber 4, and 4 bottoms, seed crystal chamber are provided with back up pad 5, and the bottom of back up pad 5 is equal with the outer bottom of boat main part 1.
Fig. 3 is the sectional view of A-A face (boat main part).High by 30 in the main part 1
+ 0.5Mm, horizontal clearance 53
+ 0.5Mm, wall thickness 3.5
+ 0.5Mm.The total length scope of boat is 300～1500mm.
Horizontal single crystal growing described in the utility model is mainly made of quartzy of the rectangle boat, also can make of other materials.What the utility model covered mainly is the growing single-crystal boat.
Claims (2)
1. horizontal single crystal growing rectangle boat includes boat intermediary main part, and both sides are divided into boat head, boat tail, it is characterized in that, the cross section of the main part of described boat is a rectangle.
2. horizontal single crystal growing rectangle boat according to claim 1 is characterized in that the interior height of described main part is 30+0.5mm, and horizontal clearance is 53+0.5mm, and wall thickness is 3.5+0.5mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009203506109U CN201598346U (en) | 2009-12-24 | 2009-12-24 | Rectangular boat for horizontal single crystal growth |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009203506109U CN201598346U (en) | 2009-12-24 | 2009-12-24 | Rectangular boat for horizontal single crystal growth |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201598346U true CN201598346U (en) | 2010-10-06 |
Family
ID=42809397
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009203506109U Expired - Fee Related CN201598346U (en) | 2009-12-24 | 2009-12-24 | Rectangular boat for horizontal single crystal growth |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201598346U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108531975A (en) * | 2018-06-29 | 2018-09-14 | 汉能新材料科技有限公司 | A kind of semiconductor synthesizer and synthetic method |
-
2009
- 2009-12-24 CN CN2009203506109U patent/CN201598346U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108531975A (en) * | 2018-06-29 | 2018-09-14 | 汉能新材料科技有限公司 | A kind of semiconductor synthesizer and synthetic method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN203485502U (en) | Quartz crucible coating for producing high-performance polycrystalline silicon ingot | |
| WO2004061896A3 (en) | Method and apparatus for producing monocrystalline ain | |
| CN103088417A (en) | High-efficiency crucible for polycrystal ingot casting and preparation method thereof | |
| CN203105197U (en) | Air root cutting seedling growing device | |
| CN201598346U (en) | Rectangular boat for horizontal single crystal growth | |
| CN103875527B (en) | The artificial seed preparation method of a kind of submerged plant eel grass | |
| CN203754848U (en) | Seed crystal cavity for horizontal gallium arsenide single crystal growth and quartz boat including seed crystal cavity | |
| CN209120759U (en) | A kind of seedlings nursing plate facilitating transplanting muskmelon seedling | |
| CN201426287Y (en) | Seedling-growing mold | |
| CN202185988U (en) | Material cutting device for monocrystalline silicon | |
| CN210959642U (en) | Forestry seedling field planting ware of growing seedlings | |
| CN203289967U (en) | Sapling and seedling matrix box | |
| CN107371744A (en) | A kind of propagation method of Snakegourd Fruit overhead layering | |
| CN202819193U (en) | Substrate sponge for growing seedlings | |
| CA2314732A1 (en) | Crystal growth vessel and crystal growth method | |
| WO2005094563A8 (en) | Immature unialgal culture strain | |
| CN205082284U (en) | Three -dimensional cultivation groove of fungus class | |
| CN205179987U (en) | Novel ben shi cigarette paper disc of growing seedlings | |
| CN206692775U (en) | A kind of crucible external member for thermograde technique growing sapphire | |
| CN212678007U (en) | Combined type soilless culture planting and planting device | |
| CN220823774U (en) | Bracket is planted to fungus class | |
| CN201504439U (en) | Fungus bag triangular opening knife | |
| CN216314839U (en) | Oyster adhering to ware of growing seedlings | |
| CN2835268Y (en) | Profile matrix for single crystal growth | |
| CN219248660U (en) | Plant cultivation bag |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 100088, 2, Xinjie street, Beijing Co-patentee after: Youyan Photoelectric New Material Co.,Ltd. Patentee after: General Research Institute for Nonferrous Metals Address before: 100088, 2, Xinjie street, Beijing Co-patentee before: Guorui Electronic Material Co., Ltd. Patentee before: General Research Institute for Nonferrous Metals |
|
| ASS | Succession or assignment of patent right |
Free format text: FORMER OWNER: YOUYAN OPTOELECTRONIC NEW MATERIAL CO., LTD. Effective date: 20130820 Owner name: YOUYAN OPTOELECTRONIC NEW MATERIAL CO., LTD. Free format text: FORMER OWNER: BEIJING CENTRAL INST.OF THE NONFERROUS METAL Effective date: 20130820 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 100088 HAIDIAN, BEIJING TO: 065001 LANGFANG, HEBEI PROVINCE |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20130820 Address after: 065001 Lily Road, Langfang Development Zone, Hebei, 4 Patentee after: Youyan Photoelectric New Material Co.,Ltd. Address before: 100088, 2, Xinjie street, Beijing Patentee before: General Research Institute for Nonferrous Metals Patentee before: Youyan Photoelectric New Material Co.,Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101006 Termination date: 20151224 |
|
| EXPY | Termination of patent right or utility model |