CN201559102U - 一种数控单晶硅、多晶硅专用平面磨床 - Google Patents
一种数控单晶硅、多晶硅专用平面磨床 Download PDFInfo
- Publication number
- CN201559102U CN201559102U CN2009202835058U CN200920283505U CN201559102U CN 201559102 U CN201559102 U CN 201559102U CN 2009202835058 U CN2009202835058 U CN 2009202835058U CN 200920283505 U CN200920283505 U CN 200920283505U CN 201559102 U CN201559102 U CN 201559102U
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- emery wheel
- grinding
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- polysilicon
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- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 19
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N silicon Chemical compound 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- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 16
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Abstract
本实用新型为一种数控单晶硅、多晶硅专用平面磨床。其加工省时省力、效率高，设备成本低，且单晶硅、多晶硅的成品率高。其包括床身、工作台、底座，所述床身中心位置安装有工作台及其进给机构，所述床身的两侧分别对称安装有砂轮支承座，其特征在于：成对的粗精磨混合砂轮分别对称安装于两个所述砂轮支承座前部，成对的抛光砂轮分别对称安装于两个所述砂轮支承座后部。
Description
一种数控单晶硅、多晶硅专用平面磨床
(-)技术领域
[0001] 本实用新型涉及数控机床自动化领域，具体为一种数控单晶硅、多晶硅专用平面 磨床。 (二）背景技术
[0002] 光伏行业是一个新兴的行业，随着光伏行业在这几年的快速发展，对单晶硅、多晶 硅的需求量日趋增大，且对单晶硅、多晶硅的加工精度及粗糙度要求也相当高。现有的单晶 硅、多晶硅磨削需通过多台普通平面磨床经过粗磨、精磨、抛光后，才能获得其平面符合要 求的单晶硅、多晶硅，其加工费时费力、效率低，多台磨床的设备成本高，且工件在不同磨床 之间的搬运、夹持，易导致工件的损坏，最后导致单晶硅、多晶硅的成品率低。
(三）发明内容
[0003] 针对上述问题，本实用新型提供了一种数控单晶硅、多晶硅专用平面磨床，其加工 省时省力、效率高，设备成本低，且单晶硅、多晶硅的成品率高。
[0004] 一种数控单晶硅、多晶硅专用平面磨床，其技术方案是这样的：其包括床身、工作 台、底座，所述床身中心位置安装有工作台及其进给机构，所述床身的两侧分别对称安装有 砂轮支承座，其特征在于：成对的粗精磨混合砂轮分别对称安装于两个所述砂轮支承座前 部，成对的抛光砂轮分别对称安装于两个所述砂轮支承座后部。
[0005] 其进一步特征在于：所述工作台安装有自动对中装置、自动压紧装置，所述床身的 前部靠近所述砂轮支承座的位置处安装有测量装置；
[0006] 粗精磨混合砂轮、抛光砂轮均通过砂轮主轴连接砂轮电机，所述砂轮电机支承于 所述砂轮架，所述砂轮架支承于砂轮拖板，所述砂轮拖板通过直线导轨安装于所述砂轮支 承座，横向伺服电机连接横向滚珠丝杠，所述横向滚珠丝杠连接所述砂轮拖板底部的螺 母；
[0007] 所述进给机构具体包括纵向伺服电机、纵向滚珠丝杆，所述纵向伺服电机连接所 述纵向滚珠丝杆，所述纵向滚珠丝杆连接所述工作台底部的螺母，所述工作台通过纵向导 轨支承于所述床身。
[0008] 本实用新型的上述结构中，成对的粗精磨混合砂轮分别对称安装于两个所述砂 轮支承座前部，成对的抛光砂轮分别对称安装于两个所述砂轮支承座后部，工件可以经过 一台磨床直接完成粗磨、精磨、抛光，获得其平面符合要求的单晶硅、多晶硅，其加工省时省 力、效率高，设备成本低；且工件在无需在不同的磨床之间的搬运、夹持，从而单晶硅、多晶 硅的成品率高。
(四）附图说明
[0009] 图1为本实用新型的俯视图结构示意图；
[0010] 图2为本实用新型的右视图结构示意图。(五）具体实施方式：
[0011] 见图1、图2，其包括床身1、工作台2，床身1中心位置安装有工作台2及其进给机 构，床身1的两侧分别对称安装有砂轮支承座4，成对的粗精磨混合砂轮5分别对称安装于 两个砂轮支承座4前部，成对的抛光砂轮6分别对称安装于两个砂轮支承座4后部。
[0012] 工作台2安装有自动对中装置7、自动压紧装置8，床身1的前部靠近砂轮支承座 4的位置处安装有测量装置9 ；
[0013] 粗精磨混合砂轮5、抛光砂轮均6通过砂轮主轴10连接砂轮电机11，砂轮电机11 支承于砂轮架12，砂轮架12支承于砂轮拖板13，砂轮拖板13通过直线导轨14安装于砂轮 支承座4，横向伺服电机15连接横向滚珠丝杠16，横向滚珠丝杠16连接砂轮拖板13底部 的螺母17 ；
[0014] 进给机构具体包括纵向伺服电机18、纵向滚珠丝杆19，纵向伺服电机18连接纵向 滚珠丝杆19，纵向滚珠丝杆19连接工作台2底部的螺母3，工作台2通过纵向导轨20支承 于床身1。图中21为工件。
[0015] 其工作原理如下：工件21通过自动对中装置7完成对中后，由自动压紧装置8压 紧，纵向伺服电机18驱动纵向滚珠丝杆19，使得工作台2做纵向进给运动，当工件21运动 至测量装置9处，测量装置9测量后，经过电脑分析确定相对应的进给量，控制其磨削量，工 件21依次经过粗精磨混合砂轮5、抛光砂轮6的磨削后成为成品。
Claims (4)
- 一种数控单晶硅、多晶硅专用平面磨床，其包括床身、工作台、底座，所述床身中心位置安装有工作台及其进给机构，所述床身的两侧分别对称安装有砂轮支承座，其特征在于：成对的粗精磨混合砂轮分别对称安装于两个所述砂轮支承座前部，成对的抛光砂轮分别对称安装于两个所述砂轮支承座后部。
- 2.根据权利要求1所述的一种数控单晶硅、多晶硅专用平面磨床，其特征在于：所述工 作台安装有自动对中装置、自动压紧装置，所述床身的前部靠近所述砂轮支承座的位置处 安装有测量装置。
- 3.根据权利要求2所述的一种数控单晶硅、多晶硅专用平面磨床，其特征在于：粗精磨 混合砂轮、抛光砂轮均通过砂轮主轴连接砂轮电机，所述砂轮电机支承于所述砂轮架，所述 砂轮架支承于砂轮拖板，所述砂轮拖板通过直线导轨安装于所述砂轮支承座，横向伺服电 机连接横向滚珠丝杠，所述横向滚珠丝杠连接所述砂轮拖板底部的螺母。
- 4.根据权利要求3所述的一种数控单晶硅、多晶硅专用平面磨床，其特征在于：所述进 给机构具体包括纵向伺服电机、纵向滚珠丝杆，所述纵向伺服电机连接所述纵向滚珠丝杆， 所述纵向滚珠丝杆连接所述工作台底部的螺母，所述工作台通过纵向导轨支承于所述床 身。
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