CN201557257U - Silicon microphone assembly line - Google Patents
Silicon microphone assembly line Download PDFInfo
- Publication number
- CN201557257U CN201557257U CN2009202989959U CN200920298995U CN201557257U CN 201557257 U CN201557257 U CN 201557257U CN 2009202989959 U CN2009202989959 U CN 2009202989959U CN 200920298995 U CN200920298995 U CN 200920298995U CN 201557257 U CN201557257 U CN 201557257U
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- frock
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- Expired - Lifetime
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 17
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 17
- 239000010703 silicon Substances 0.000 title claims abstract description 17
- 238000007493 shaping process Methods 0.000 claims abstract description 38
- 238000001514 detection method Methods 0.000 claims abstract description 27
- 238000000034 method Methods 0.000 claims abstract description 10
- 230000008569 process Effects 0.000 claims abstract description 7
- 238000012545 processing Methods 0.000 claims abstract description 4
- 230000010355 oscillation Effects 0.000 claims description 24
- 230000000007 visual effect Effects 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 11
- 238000012856 packing Methods 0.000 claims description 11
- 238000012360 testing method Methods 0.000 claims description 10
- 230000007246 mechanism Effects 0.000 claims description 9
- 238000002788 crimping Methods 0.000 claims description 6
- 230000008859 change Effects 0.000 claims description 3
- 230000000694 effects Effects 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 17
- 239000012528 membrane Substances 0.000 abstract 2
- 238000000926 separation method Methods 0.000 abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 12
- 230000009471 action Effects 0.000 description 6
- 239000000377 silicon dioxide Substances 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000010923 batch production Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 244000309464 bull Species 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 210000005069 ears Anatomy 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 230000001915 proofreading effect Effects 0.000 description 1
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- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Abstract
The utility model discloses a silicon microphone assembly line, which is used for achieving the assembly, folded edge shaping and performance detection of the silicon microphone. The assembly line comprises a loading and assembling unit, a transfer unit, a folded edge shaping unit and a detection and separation unit which are arranged in the order of processing steps, wherein the loading and assembling unit is used for loading a membrane and a gasket into a casing in sequence and transfering the membrane and the gasket to the next unit; the transfer unit is used for placing an electrode component and a circuit board in the casing to form a workpiece in the transfer process and transfering the assembled workpiece to the next unit; the folded edge shaping unit is used for inwardly folding the upper periphery of the casing of the assembled workpiece transferred by the transfer unit, shaping the folded surface and transfering the workpiece to the next unit; and the detection and separation unit is used for loading the folded and shaped workpiece into a tooling, detecting the performance, and classifying and storing the tooling according to the detection result. The assembly line can achieve the automatic assembly, detection and production of silicon-based MEMS (Micro-electromechanical Systems) microphones, improves the production efficiency and product quality, and reduces the influences of manufacturing cost and anthropic factors on the product quality.
Description
Technical field
The utility model relates to the mini microphone production technical field, especially a kind of silica-based MEMS mini microphone assembly line.
Background technology
Silica-based MEMS microphone is miniature silica-based microphone again, it includes two chips---MEMS chip and application-specific integrated circuit (ASIC) (ASIC) chip, two pieces of Chip Packaging are in a surface mount device package body, be adopt silica-based MEMS explained hereafter half big or small novel product of common microphone only arranged, it has identical acoustics of common microphone and electric property, but more durable, heat resistance is stronger, and power consumption is lower.
At present large-scale in the world silica-based MEMS microphone manufacturer mainly is that Knowles Acoustics holds the plate on which lie the ears of sacrificial bull, be thereafter the Sonion MEMS department of Akustica, Pulse Engineering and Britain fly insult science and technology, and the domestic large-scale manufacturer of silicon MEMS microphone we can say it also is blank so far.Though a lot of MEMS microphone manufacturer is arranged on the overseas market, also comprise some domestic up-and-coming youngsters, wherein most of enterprises all can't realize a large amount of productions of MEMS microphone veritably.Realize a large amount of productions, supplier not only will enhance production capacities fast, the product that also want to provide low cost, high reliability, has good acoustics and electrical characteristic, and the expansion of production capacity depends on whether the high-efficiency automatic production equipment is arranged to satisfy the demand.There is part enterprise that the assembly line of MEMS microphone has been arranged abroad, but in view of technical know-how, the domestic MEMS microphone assembly line that does not have independent development so far, also influenced the fast development of domestic MEMS microphone manufacturer, the assembling of present domestic MEMS silicon microphone industry microphone and detect and to take semi-automatic or manual type more has caused inefficiency, labor strength is big, quality is unstable, cost is high.
The utility model content
The technical problems to be solved in the utility model is: overcome the deficiency in the prior art, a kind of silicon microphone assembly line is provided, with the automated production that realizes that silica-based MEMS mini microphone assembling detects, improve production efficiency and product quality, reduce production costs and human factor to the influence of product quality.
The technical scheme that its technical problem that solves the utility model adopts is: a kind of silicon microphone assembly line, be used for the diaphragm that silicon microphone is required, pad, electrode assemblie and the wiring board microphone case of packing into and form workpiece, and the frock of packing on request of the workpiece after will having assembled, carry out Performance Detection and store classifiedly, described assembling line comprises according to processing step and connects arrangement in turn:
The material loading assembly unit, be used for diaphragm and the pad shell of packing into successively, and send into next unit, comprise diaphragm assembling device in the shell of diaphragm can being packed into, pad can be stamped into the pad assembling device in the shell, be provided with the track Handling device that can carry shell between diaphragm assembling device and the pad assembling device, the tail end of track Handling device is connected with blanking device;
Supply unit, comprise and join, accept the conveyer belt that blanking device send the shell that diaphragm and pad are housed with blanking device, in the course of conveying of conveyer belt, electrode assemblie and wiring board packed into and form workpiece in the shell, and the workpiece that assembles is sent into next unit;
The fold shaping unit, the workpiece that has assembled inside flanging of shell upper periphery and the conduplication side face wherein that supply unit is sent here carries out shaping, and sends into next unit; But comprise clamping and drive device for clamping and rotating and the drawing mechanism that workpiece rotates, the device for clamping and rotating both sides are respectively equipped with crimping unit and apparatus for shaping, device for clamping and rotating top is provided with the vacuum cups device that workpiece can be positioned on the device for clamping and rotating, and the vacuum cups device can the workpiece that fold shaping is good be positioned over drawing mechanism and sends into next procedure simultaneously;
Detect the letter sorting unit, with fold shaping is good workpiece by the orientation requirement frock of packing into, carry out Performance Detection and store classifiedly by testing result, comprise frock workpiece location conveying device, be located at the device for visual identification that frock workpiece conveying and positioning device leading section top is used to discern the workpiece orientation, be located at first vacuum chuck device of the frock of workpiece can being packed on the frock workpiece conveying and positioning device middle part, be provided with checkout gear and sorting equipment successively behind the frock workpiece conveying and positioning device, be provided with second vacuum chuck device that the frock that has been equipped with workpiece on the workpiece tool positioning conveying device can be picked checkout gear between workpiece tool positioning conveying device and the checkout gear, sorting equipment comprises and can will detect the 3rd vacuum chuck device that the frock that contains workpiece that finishes stores classifiedly.
Furtherly, automatically provide automatic transport with shell for what realize diaphragm, described material loading assembly unit also comprises and is positioned at the shell vibrating disc that the wheel that diaphragm can be provided on the diaphragm assembling device changes vertical doffer, is used to proofread and correct the shell positive and negative, is provided with the first straight-line oscillation device that can transmit shell between shell vibrating disc and the diaphragm assembling device.
Similarly, for automatic transport upper track workpiece that the unit send, realize automatic feed, described fold shaping unit also comprises the second straight-line oscillation device that can transmit workpiece that supply unit send, and is provided with the flanging feeding device between the second straight-line oscillation device and the device for clamping and rotating.
Because in the shell diaphragm, pad and relevant components and parts have been housed, for preventing to drop out shell in transport process, described fold shaping unit further comprises the pre-flanging device that is arranged between flanging feeding device and the supply unit.
For ease of mutual alignment and testing result of observing between workpiece and the frock directly perceived, described device for visual identification circuit is connected with the visual displays of reflection recognition effect, the checkout gear circuit is connected with the detection display of reflection testing process, but checkout gear also comprises the Sound Attenuator of place work piece and is positioned at the detection head above the workpiece on the Sound Attenuator.
Be to realize the automatic transmission of workpiece and frock, described detection letter sorting unit further comprise can accept fold shaping workpiece that the unit send and with workpiece deliver to the workpiece tool positioning conveying device the 3rd straight-line oscillation device, can provide recoverable frock positive and negative also the frock vibrating disc, be located at the 4th straight-line oscillation device that can carry frock between frock vibrating disc and the workpiece tool positioning conveying device.
The beneficial effects of the utility model are: the utility model is by the combination of mini microphone production equipment, realized the automated production of the assembling of microphone material loading, fold shaping and detection letter sorting, producers have been reduced, help enhancing productivity, prevent the influence that human factor causes, reduce labour intensity and production cost product quality.
Description of drawings
Below in conjunction with drawings and embodiments the utility model is further specified.
Fig. 1 is a structural representation of the present utility model.
Fig. 2 is the structural representation of material loading assembly unit of the present invention.
Fig. 3 is the vertical view of Fig. 2.
Fig. 4 is the structural representation of fold shaping of the present invention unit.
Fig. 5 is the vertical view of Fig. 4.
Fig. 6 is the structural representation of detection letter sorting of the present invention unit.
Fig. 7 is the vertical view of Fig. 6.
1. material loading assembly units, 10. diaphragm assembling devices, 11. pad assembling devices, 12. rail carry devices, 13. blanking devices 14. are taken turns and are turned vertical doffer 15. shell vibrating discs 16. first straight-line oscillation devices 2. supply units 20. conveyer belts 3. fold shaping unit 30. device for clamping and rotating, 31. drawing mechanisms, 32. crimping units, 33. apparatus for shaping, 34. vacuum cups devices, 35. second straight-line oscillation devices, 36. flanging feeding devices, 37. pre-flanging devices 4. detection sorting units 40. frock workpiece positioning transporting devices 41. device for visual identification 42. first vacuum chuck devices 43. checkout gears 431. Sound Attenuators 432. detection heads 44. sorting equipments 441. the 3rd vacuum chuck device 45. second vacuum chuck devices 46. visual displays 47. detection display devices 48. the 3rd straight-line oscillation device 49. frock vibrating discs 491. the 4th straight-line oscillation device 5. frames 6. controllers among the figure
Embodiment.
In conjunction with the accompanying drawings the utility model is further described now.These accompanying drawings are the schematic diagram of simplification, and basic structure of the present utility model only is described, so it only shows the formation relevant with the utility model.
A kind of mini microphone assembly line as shown in Figure 1 has frame 5, is provided with controller 6 and is connected arrangement according to processing step in turn on frame 5: material loading assembly unit 1 is used for diaphragm and the pad shell of packing into successively, and sends into next unit; Supply unit 2 joins carrying shell with material loading assembly unit 1, forms workpiece in the shell of in the course of conveying electrode assemblie and wiring board being packed into, and the workpiece that assembles is sent into next unit; Fold shaping unit 3, the workpiece that has assembled inside flanging of shell upper periphery and the conduplication side face wherein that supply unit 2 is sent here carries out shaping, and sends into next unit; Detect letter sorting unit 4, fold shaping is good workpiece by the orientation requirement frock of packing into, is carried out Performance Detection and stores classifiedly by testing result.
Specifically, as Fig. 2, material loading assembly unit 1 shown in Figure 3 comprises the diaphragm assembling device 10 in the shell of diaphragm can being packed into, pad can be stamped into the pad assembling device 11 in the shell, be provided with the track Handling device 12 that to carry shell between diaphragm assembling device 10 and the pad assembling device 11, the tail end of track Handling device 12 is connected with blanking device 13, for providing automatically and automatic transport of diaphragm is provided, material loading assembly unit 1 also includes the shell vibrating disc 15 that is used to proofread and correct the shell positive and negative, be provided with the first straight-line oscillation device 16 that can transmit shell between shell vibrating disc 15 and the diaphragm assembling device 10, on diaphragm assembling device 10, can provide the wheel of diaphragm to change vertical doffer 14.After microphone case has been proofreaied and correct positive and negative by shell vibrating disc 15 during work, be sent on the diaphragm assembling device 10 through the first straight-line oscillation device 16 again, wheel changes vertical doffer 14 and adopts the multistation structure to provide diaphragm to diaphragm assembling device 10, by diaphragm assembling device 10 action diaphragm is packed in the shell, and rear film assembling device 10 pushes to track Handling device 12 to the shell that diaphragm is housed, this track Handling device 12 also is to adopt multistation to carry synchronously to raise the efficiency, when track Handling device 12 is transported to desired location to the shell that diaphragm is housed, 11 actions of pad assembling device strike out ring-type with the pad volume and fall in the shell automatically, the shell that 12 continuation of track Handling device will be equipped with diaphragm and pad is transported to blanking device 13, enters supply unit.
Supply unit 2 comprises the conveyer belt 20 that joins, accepts blanking device 13 shell that diaphragm and pad are housed that send with blanking device 13, in the course of conveying of conveyer belt 20, manually electrode assemblie and wiring board are packed into and form workpiece in the shell, and the workpiece that assembles is sent into fold shaping unit 3.
Fold shaping unit 3 is as Fig. 4, shown in Figure 5, but comprise clamping and drive device for clamping and rotating 30 and the drawing mechanism 31 that workpiece rotates, device for clamping and rotating 30 both sides are respectively equipped with crimping unit 32 and apparatus for shaping 33, device for clamping and rotating 30 tops are provided with the vacuum cups device 34 that workpiece can be positioned on the device for clamping and rotating 30, this vacuum cups device 34 is the twin structure, when workpiece being positioned on the device for clamping and rotating 30, can the workpiece that fold shaping is good be positioned over drawing mechanism 31 and send into next procedure, equally for automatic transport upper track workpiece that the unit send, realize automatic feed, fold shaping unit 3 also comprises the second straight-line oscillation device 35 that can transmit supply unit 2 workpiece that send, between the second straight-line oscillation device 35 and device for clamping and rotating 30, be provided with flanging feeding device 36, owing in the shell diaphragm has been housed, pad and relevant components and parts, for preventing to drop out shell in transport process, described fold shaping unit 3 further comprises the pre-flanging device 37 that is arranged between flanging feeding device 36 and the supply unit 2.The workpiece that supply unit 2 transmits during work at first carries out preliminary flanging through pre-flanging device 37, approximately with the shell circumferential edges to 30 ° of invaginations, to prevent that the enclosure element from dropping out at the volley, the pre-good workpiece of flanging is transported to flanging feeding device 36 by the second straight-line oscillation device 35 again, the in-position of workpiece is controlled by sensor, workpiece arrives 34 actions of assigned address final vacuum suction head apparatus, workpiece picked up be placed on the device for clamping and rotating 30, device for clamping and rotating 30 clamping work pieces also drive workpiece when rotation, crimping unit 32 and apparatus for shaping 33 begin action, crimping unit 32 mainly is that the workpiece circumference behind the pre-flanging is folded to 90 °, apparatus for shaping 33 is responsible smooth the flanging face rounding of workpiece, after shaping finished, the vacuum cups device 34 of twin picked up workpiece to be placed into to send on the drawing mechanism 31 and detects letter sorting unit 4.
Detect letter sorting unit 4 as Fig. 6, shown in Figure 7, comprise frock workpiece location conveying device 40, be located at the device for visual identification 41 that frock workpiece conveying and positioning device 40 leading sections top is used to discern the workpiece orientation, be located at first vacuum chuck device 42 of the frock of workpiece can being packed on frock workpiece conveying and positioning device 40 middle parts, be provided with checkout gear 43 and sorting equipment 44 behind the frock workpiece conveying and positioning device 40 successively, be provided with second vacuum chuck device 45 that the frock that has been equipped with workpiece on the workpiece tool positioning conveying device 40 can be picked checkout gear 43 between workpiece tool positioning conveying device 40 and the checkout gear 43, sorting equipment 44 comprises and can will detect the 3rd vacuum chuck device 441 that the frock that contains workpiece that finishes stores classifiedly, for ease of mutual alignment and testing result of observing between workpiece and the frock directly perceived, described device for visual identification 41 circuits are connected with the visual displays 46 of reflection recognition effect, can intuitively show the position of workpiece with respect to frock, checkout gear 43 circuits are connected with the detection display 47 of reflection testing process, but checkout gear 43 also comprises the Sound Attenuator 431 of place work piece and is positioned at the detection head 432 of workpiece top on the Sound Attenuator 431, for realizing the automatic transmission of workpiece and frock, described detection letter sorting unit 4 further comprises the 3rd straight-line oscillation device 48 that can accept fold shaping unit 3 workpiece that send and workpiece be delivered to workpiece tool positioning conveying device 40, the also frock vibrating disc 49 of recoverable frock positive and negative can be provided, be located at the 4th straight-line oscillation device 491 that to carry frock between frock vibrating disc 49 and the workpiece tool positioning conveying device 40.During work, the drawing mechanism 31 of fold shaping unit 3 is sent to workpiece on the 3rd straight-line oscillation device 48, by the 3rd straight-line oscillation device 48 workpiece is transported to workpiece tool positioning conveying device 40, frock is transported to workpiece tool positioning conveying device 40 by the 4th straight-line oscillation device 491 after proofreading and correct positive and negative by frock vibrating disc 49, work as workpiece, after frock puts in place, being furnished with the device for visual identification 41 of industrial computer and related software samples, distinguish whether workpiece is accurate with respect to the orientation of frock, first vacuum chuck device 42 instruction of sending then according to device for visual identification 41, with workpiece by the accurate orientation frock of packing into, then, the frock that contains workpiece that second vacuum chuck device 45 is brought workpiece tool positioning conveying device 40 is picked on the Sound Attenuator 431 of checkout gear 43, the workpiece that 432 pairs of detection heads being furnished with the checkout gear 43 of industrial computer and related software equally have been set with frock carries out Performance Detection, testing process can intuitively show by detecting display 47, the frock workpiece that detection finishes is stored classifiedly by testing result by the 3rd vacuum chuck device 441 on the sorting equipment 44 again, above-mentioned described workpiece tool positioning conveying device 40 adopts the multistation action of going forward side by side, when first vacuum chuck device 42 is packed workpiece into frock by accurate orientation, can move a certain distance assembling the workpiece tool of finishing simultaneously, the frock that will be contained workpiece by second vacuum chuck device 45 is picked on the Sound Attenuator 431 of checkout gear 43, Sound Attenuator 431 also adopts relative two covers to be provided with, thereby has improved production efficiency.
The above each production unit all is located on the frame 5, and the action of each parts is carried out control by the controller 6 that is located on the frame 5.
Mini microphone assembly line described in the utility model can be realized the batch production requirements of industrial automation fully, assembling rationally, steadily reliably, the location is accurately quick, adjust simple and conveniently and directly perceived, outward appearance is succinct and attractive in appearance, assembling overall work stable precision, the whole system running is reliable, the efficient height is a desirable mini microphone assembling line equipment, has also filled up the blank in domestic this field.
With above-mentioned foundation execution mode of the present utility model is enlightenment, and by above-mentioned description, the related work personnel can carry out various change and modification fully in the scope that does not depart from the utility model technological thought.Technical scope of the present utility model is not limited to the content on the specification, must determine its technical scope according to the claim scope.
Claims (6)
1. silicon microphone assembly line, be used for the diaphragm that silicon microphone is required, pad, electrode assemblie and the wiring board microphone case of packing into and form workpiece, and the frock of packing on request of the workpiece after will having assembled, carry out Performance Detection and store classifiedly, it is characterized in that: comprise according to processing step connecting arrangement in turn:
Material loading assembly unit (1), be used for diaphragm and the pad shell of packing into successively, and send into next unit, comprise diaphragm assembling device (10) in the shell of diaphragm can being packed into, pad can be stamped into the pad assembling device (11) in the shell, be provided with the track Handling device (12) that can carry shell between diaphragm assembling device (10) and the pad assembling device (11), the tail end of track Handling device (12) is connected with blanking device (13);
Supply unit (2), comprise the conveyer belt (20) that joins, accepts blanking device (13) shell that diaphragm and pad are housed that send with blanking device (13), in the course of conveying of conveyer belt (20), electrode assemblie and wiring board packed into and form workpiece in the shell, and the workpiece that assembles is sent into next unit;
Fold shaping unit (3), the workpiece that has assembled inside flanging of shell upper periphery and the conduplication side face wherein that supply unit (2) is sent here carries out shaping, and sends into next unit; But comprise clamping and drive device for clamping and rotating (30) and the drawing mechanism (31) that workpiece rotates, device for clamping and rotating (30) both sides are respectively equipped with crimping unit (32) and apparatus for shaping (33), device for clamping and rotating (30) top is provided with the vacuum cups device (34) that workpiece can be positioned on the device for clamping and rotating (30), and vacuum cups device (34) can the workpiece that fold shaping is good be positioned over drawing mechanism (31) and sends into next procedure simultaneously;
Detect letter sorting unit (4), with fold shaping is good workpiece by the orientation requirement frock of packing into, carry out Performance Detection and store classifiedly by testing result, comprise frock workpiece location conveying device (40), be located at the device for visual identification (41) that frock workpiece conveying and positioning device (40) leading section top is used to discern the workpiece orientation, be located at first vacuum chuck device (42) of the frock of workpiece can being packed on frock workpiece conveying and positioning device (40) middle part, be provided with checkout gear (43) and sorting equipment (44) behind the frock workpiece conveying and positioning device (40) successively, be provided with second vacuum chuck device (45) that the frock that has been equipped with workpiece on the workpiece tool positioning conveying device (40) can be picked checkout gear (43) between workpiece tool positioning conveying device (40) and the checkout gear (43), sorting equipment (44) comprises and can will detect the 3rd vacuum chuck device (441) that the frock that contains workpiece that finishes stores classifiedly.
2. silicon microphone assembly line according to claim 1 is characterized in that: described material loading assembly unit (1) also comprises being positioned at can provide the wheel of diaphragm to change vertical doffer on the diaphragm assembling device (10)
(14), be used to proofread and correct the shell vibrating disc (15) of shell positive and negative, be provided with the first straight-line oscillation device (16) that can transmit shell between shell vibrating disc (15) and the diaphragm assembling device (10).
3. silicon microphone assembly line according to claim 1, it is characterized in that: described fold shaping unit (2) also comprises the second straight-line oscillation device (35) that can transmit workpiece that supply unit send, and is provided with flanging feeding device (36) between the second straight-line oscillation device (35) and the device for clamping and rotating (30).
4. silicon microphone assembly line according to claim 3 is characterized in that: described fold shaping unit (3) further comprises the pre-flanging device (37) that is arranged between flanging feeding device (36) and the supply unit (2).
5. silicon microphone assembly line according to claim 1, it is characterized in that: described device for visual identification (41) circuit is connected with the visual displays (46) of reflection recognition effect, checkout gear (43) circuit is connected with the detection display (47) of reflection testing process, checkout gear (43) but also comprise the Sound Attenuator (431) of place work piece and be positioned at Sound Attenuator (431) and go up detection head (432) above the workpiece.
6. silicon microphone assembly line according to claim 1 is characterized in that: described detection letter sorting unit (4) further comprise can accept fold shaping unit (3) institute's workpiece that send and with workpiece deliver to workpiece tool positioning conveying device (40) the 3rd straight-line oscillation device (48), can provide recoverable frock positive and negative also frock vibrating disc (49), be located at the 4th straight-line oscillation device (491) that can carry frock between frock vibrating disc (49) and the workpiece tool positioning conveying device (40).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202989959U CN201557257U (en) | 2009-12-19 | 2009-12-19 | Silicon microphone assembly line |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202989959U CN201557257U (en) | 2009-12-19 | 2009-12-19 | Silicon microphone assembly line |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201557257U true CN201557257U (en) | 2010-08-18 |
Family
ID=42616947
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009202989959U Expired - Lifetime CN201557257U (en) | 2009-12-19 | 2009-12-19 | Silicon microphone assembly line |
Country Status (1)
| Country | Link |
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| CN (1) | CN201557257U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103787269A (en) * | 2014-01-10 | 2014-05-14 | 北京理工大学 | Automatic micro-assembling device with reconfigurable modularization characteristic |
| CN106303895A (en) * | 2016-10-12 | 2017-01-04 | 中国计量大学 | A kind of two pointer type simple sorting equipment of miaow head |
| CN111294721A (en) * | 2020-02-16 | 2020-06-16 | 深圳鼎晶科技有限公司 | Packaging equipment for silicon microphone chip |
-
2009
- 2009-12-19 CN CN2009202989959U patent/CN201557257U/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103787269A (en) * | 2014-01-10 | 2014-05-14 | 北京理工大学 | Automatic micro-assembling device with reconfigurable modularization characteristic |
| CN103787269B (en) * | 2014-01-10 | 2016-01-20 | 北京理工大学 | There is the automatic micro assemby device of reconfigurable ACS module feature |
| CN106303895A (en) * | 2016-10-12 | 2017-01-04 | 中国计量大学 | A kind of two pointer type simple sorting equipment of miaow head |
| CN106303895B (en) * | 2016-10-12 | 2019-02-19 | 中国计量大学 | A kind of simple sorting equipment of two pointer type microphone |
| CN111294721A (en) * | 2020-02-16 | 2020-06-16 | 深圳鼎晶科技有限公司 | Packaging equipment for silicon microphone chip |
| CN111294721B (en) * | 2020-02-16 | 2021-05-28 | 深圳鼎晶科技有限公司 | Packaging equipment for silicon microphone chip |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: CHANGZHOU MINGSEAL ROBOT TECHNOLOGY CO., LTD. Free format text: FORMER NAME: CHANGZHOU MINGSEAL ROBOTIC TECHNOLOGY CO., LTD. |
|
| CP03 | Change of name, title or address |
Address after: 213164 science and technology building, Harbin Science and Technology City, Changzhou, 18 middle Wu Road, Jiangsu, Changzhou Patentee after: Changzhou Science and Technology Co., Ltd. of Ming Sai robot Address before: 213164, North building, building 2, Changzhou science and Education City, 801 Chang Wu Road, Wujin District, Jiangsu, Changzhou, China Patentee before: Changzhou Mingseal Robotic Technology Co., Ltd. |
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| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20100818 |