CN201555688U - Mirror surface reflecting type vacuum degree measuring device - Google Patents
Mirror surface reflecting type vacuum degree measuring device Download PDFInfo
- Publication number
- CN201555688U CN201555688U CN2009202589246U CN200920258924U CN201555688U CN 201555688 U CN201555688 U CN 201555688U CN 2009202589246 U CN2009202589246 U CN 2009202589246U CN 200920258924 U CN200920258924 U CN 200920258924U CN 201555688 U CN201555688 U CN 201555688U
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- CN
- China
- Prior art keywords
- rigid seal
- vacuum degree
- mirror surface
- graduated scale
- type vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model relates to a mirror surface reflecting type vacuum degree measuring device which comprises a flexible mirror surface with an outward round mirror surface and a round rigid seal plate, wherein the round rigid seal plate is fixed on a rigid seal ring to form an enclosed space, a graduated scale is fixed on the rigid seal ring, and a laser beam, reflecting light and the graduated scale are located on the same plane surface. When measuring the vacuum degree in an enclosed space, the device is positioned in the space, under the effect of air pressure difference, the flexible mirror surface of the device can change the direction of the reflecting light, and the reflecting light points to different graduations, thus the vacuum degree of the measured enclosed space can be read.
Description
Technical field
The utility model relates to a kind of direct reflection type vacuum degree measuring equipment, belongs to the Technology of Precision Measurement field.
Background technology
In commercial measurement, often run into the occasion of carrying out vacuum measurement, but the vacuum degree measuring equipment volume is bigger at present, and is worth costliness, use complex steps, limited the application of general industry occasion.
The utility model content
At above-mentioned deficiency, the utility model provides a kind of direct reflection type vacuum degree measuring equipment, there is fixedly air pressure this device inside, thereby changing flexible surface deformation with vacuum of space makes reflection ray point to different directions on same plane, receive light with the graduated scale of handling well, can directly read the vacuum of space value.
The utility model is realized by following technology:
A kind of direct reflection type vacuum degree measuring equipment, it comprises that an outside flexible minute surface and the Circular Rigid seal pad of circular minute surface is fixed on confined space of formation on the rigid seal circle, graduated scale is fixed on the rigid seal circle, and laser beam, reflection ray and graduated scale are at grade.
Direct reflection type vacuum degree measuring equipment of the present utility model, mainly by the rigid seal circle, the rigid seal plate, flexible minute surface, graduated scale and stationary installation thereof are formed, it is characterized by: this device is fixed on by the outside flexible minute surface of circular minute surface and a Circular Rigid seal pad and constitutes a confined space on the rigid seal circle, graduated scale is fixed on the rigid seal circle, laser beam, reflection ray and graduated scale are at grade, laser beam is vertically pointed to the non-circle centre position of minute surface when inner and outer air pressure is identical, when the vacuum tightness in a certain confined space of measurement, to install and place wherein, under the effect of draught head, the flexible surface deformation of this device changes the direction of reflection ray, point to different scales, the vacuum tightness that can read tested confined space.
The utility model has the advantages that device volume is little, low price, easy to use, handling safety is particularly suitable for using in the general industry occasion.
Description of drawings:
Fig. 1 is the longitudinal profile structural map of this device;
Fig. 2 is the fundamental diagram of this device;
Fig. 3 is the longitudinal profile planimetric map of this device.
Among the figure, 1, the rigid seal circle, 2, the rigid seal plate, 3, flexible minute surface, 4, laser beam, 5, graduated scale, 6, reflection ray.
Embodiment
Among Fig. 1, Fig. 2, Fig. 3, be the cut away view of this device.This device is fixed on a rigid seal circle 1 by a Circular Rigid seal pad 2 and the outside flexible minute surface 3 of circular minute surface and constitutes a confined space, graduated scale 5 is fixed on the rigid seal circle 1, and laser beam 4, reflection ray 6 and graduated scale 5 are at grade, the laser beam 4 vertical minute surface 3 non-circle centre positions that point to when inner and outer air pressure is identical, when measuring the vacuum tightness of a certain confined space, this will install places wherein, under the difference effect of air pressure, the direction of flexible minute surface 3 distortion change reflection ray 6 of this device, point to different scales, the vacuum tightness that can read tested confined space.
Claims (1)
1. direct reflection type vacuum degree measuring equipment, it is characterized in that, it comprises that an outside flexible minute surface and the Circular Rigid seal pad of circular minute surface is fixed on confined space of formation on the rigid seal circle, graduated scale is fixed on the rigid seal circle, and laser beam, reflection ray and graduated scale are at grade.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202589246U CN201555688U (en) | 2009-11-17 | 2009-11-17 | Mirror surface reflecting type vacuum degree measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202589246U CN201555688U (en) | 2009-11-17 | 2009-11-17 | Mirror surface reflecting type vacuum degree measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201555688U true CN201555688U (en) | 2010-08-18 |
Family
ID=42615375
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009202589246U Expired - Fee Related CN201555688U (en) | 2009-11-17 | 2009-11-17 | Mirror surface reflecting type vacuum degree measuring device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201555688U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105509959A (en) * | 2015-11-26 | 2016-04-20 | 国网山西省电力公司临汾供电公司 | Laser-method vacuum tube vacuum degree nondestructive test method |
| CN107328519A (en) * | 2017-07-06 | 2017-11-07 | 南开大学 | Based on online test method of the optical reflection law to vacuum glass vacuum |
-
2009
- 2009-11-17 CN CN2009202589246U patent/CN201555688U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105509959A (en) * | 2015-11-26 | 2016-04-20 | 国网山西省电力公司临汾供电公司 | Laser-method vacuum tube vacuum degree nondestructive test method |
| CN105509959B (en) * | 2015-11-26 | 2019-03-05 | 国网山西省电力公司临汾供电公司 | A kind of method of laser method non-destructive testing vacuum tube vacuum-degree |
| CN107328519A (en) * | 2017-07-06 | 2017-11-07 | 南开大学 | Based on online test method of the optical reflection law to vacuum glass vacuum |
| CN107328519B (en) * | 2017-07-06 | 2019-09-27 | 南开大学 | Based on optical reflection law to the online test method of vacuum glass vacuum degree |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100818 Termination date: 20101117 |