CN102062665A - Mirror reflection type vacuum measurement device - Google Patents
Mirror reflection type vacuum measurement device Download PDFInfo
- Publication number
- CN102062665A CN102062665A CN2009102224595A CN200910222459A CN102062665A CN 102062665 A CN102062665 A CN 102062665A CN 2009102224595 A CN2009102224595 A CN 2009102224595A CN 200910222459 A CN200910222459 A CN 200910222459A CN 102062665 A CN102062665 A CN 102062665A
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- China
- Prior art keywords
- rigid seal
- graduated scale
- closed space
- fixed
- reflection type
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The invention relates to a mirror reflection type vacuum measurement device. In the device, a flexible mirror surface with an outward circular mirror surface and a circular rigid sealplate are fixed on a rigid seal ring to form closed space; a graduated scale is fixed on the rigid seal ring; and laser beams, reflection light rays and the graduated scale are on the same plane. When vacuum degree in a certain closed space is measured, the device is placed in the closed space, the flexible mirror surface of the device is deformed to change the direction of the reflection light rays under the action of air pressure difference, and the reflection light rays point to a different scale so as to read the vacuum degree of the measured closed space.
Description
Technical field
The present invention relates to a kind of direct reflection type vacuum degree measuring equipment, belong to the Technology of Precision Measurement field.
Background technology
In commercial measurement, often run into the occasion of carrying out vacuum measurement, but the vacuum degree measuring equipment volume is bigger at present, and is worth costliness, use complex steps, limited the application of general industry occasion.
Summary of the invention
At above-mentioned deficiency, the invention provides a kind of direct reflection type vacuum degree measuring equipment, there is fixedly air pressure this device inside, thereby changing flexible surface deformation with vacuum of space makes reflection ray point to different directions on same plane, receive light with the graduated scale of handling well, can directly read the vacuum of space value.
The present invention realizes by following technology:
It comprises that an outside flexible minute surface and the Circular Rigid seal pad of circular minute surface is fixed on confined space of formation on the rigid seal circle, and graduated scale is fixed on the rigid seal circle, and laser beam, reflection ray and graduated scale are at grade.
Direct reflection type vacuum degree measuring equipment of the present invention, mainly by the rigid seal circle, the rigid seal plate, flexible minute surface, graduated scale and stationary installation thereof are formed, it is characterized by: this device is fixed on by the outside flexible minute surface of circular minute surface and a Circular Rigid seal pad and constitutes a confined space on the rigid seal circle, graduated scale is fixed on the rigid seal circle, laser beam, reflection ray and graduated scale are at grade, laser beam is vertically pointed to the non-circle centre position of minute surface when inner and outer air pressure is identical, when the vacuum tightness in a certain confined space of measurement, to install and place wherein, under the effect of draught head, the flexible surface deformation of this device changes the direction of reflection ray, point to different scales, the vacuum tightness that can read tested confined space.
Advantage of the present invention is, device volume is little, and low price is easy to use, and handling safety is particularly suitable for using in the general industry occasion.
Description of drawings:
Fig. 1 is the longitudinal profile structural map of this device;
Fig. 2 is the fundamental diagram of this device;
Fig. 3 is the longitudinal profile planimetric map of this device.
Among the figure, 1, the rigid seal circle, 2, the rigid seal plate, 3, flexible minute surface, 4, laser beam, 5, graduated scale, 6, reflection ray.
Embodiment
Among Fig. 1, Fig. 2, Fig. 3, be the cut away view of this device.This device is fixed on a rigid seal circle 1 by a Circular Rigid seal pad 2 and the outside flexible minute surface 3 of circular minute surface and constitutes a confined space, graduated scale 5 is fixed on the rigid seal circle 1, and laser beam 4, reflection ray 6 and graduated scale 5 are at grade, the laser beam 4 vertical minute surface 3 non-circle centre positions that point to when inner and outer air pressure is identical, when measuring the vacuum tightness of a certain confined space, this will install places wherein, under the difference effect of air pressure, the direction of flexible minute surface 3 distortion change reflection ray 6 of this device, point to different scales, the vacuum tightness that can read tested confined space.
Claims (1)
1. direct reflection type vacuum degree measuring equipment, it is characterized in that, it comprises that an outside flexible minute surface and the Circular Rigid seal pad of circular minute surface is fixed on confined space of formation on the rigid seal circle, graduated scale is fixed on the rigid seal circle, and laser beam, reflection ray and graduated scale are at grade.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009102224595A CN102062665A (en) | 2009-11-17 | 2009-11-17 | Mirror reflection type vacuum measurement device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009102224595A CN102062665A (en) | 2009-11-17 | 2009-11-17 | Mirror reflection type vacuum measurement device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102062665A true CN102062665A (en) | 2011-05-18 |
Family
ID=43998039
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009102224595A Pending CN102062665A (en) | 2009-11-17 | 2009-11-17 | Mirror reflection type vacuum measurement device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102062665A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU932319A1 (en) * | 1980-06-30 | 1982-05-30 | Государственный проектно-конструкторский институт рыбопромыслового флота | Method of checking vacuum in fluid-tight vessel |
| RU2085878C1 (en) * | 1994-03-22 | 1997-07-27 | Юрий Степанович Данилов | Device for determining radial pressure of piston rings |
| EP1460400A1 (en) * | 2003-03-21 | 2004-09-22 | Robert Bosch Gmbh | Confocal, fiber optic pressure sensor for a combustion chamber |
| CN1680794A (en) * | 2004-03-30 | 2005-10-12 | Asml控股股份有限公司 | Pressure sensor |
-
2009
- 2009-11-17 CN CN2009102224595A patent/CN102062665A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU932319A1 (en) * | 1980-06-30 | 1982-05-30 | Государственный проектно-конструкторский институт рыбопромыслового флота | Method of checking vacuum in fluid-tight vessel |
| RU2085878C1 (en) * | 1994-03-22 | 1997-07-27 | Юрий Степанович Данилов | Device for determining radial pressure of piston rings |
| EP1460400A1 (en) * | 2003-03-21 | 2004-09-22 | Robert Bosch Gmbh | Confocal, fiber optic pressure sensor for a combustion chamber |
| CN1680794A (en) * | 2004-03-30 | 2005-10-12 | Asml控股股份有限公司 | Pressure sensor |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20110518 |