CN201549467U - Interface device utilizing glow-discharge ion source mass spectrometry - Google Patents
Interface device utilizing glow-discharge ion source mass spectrometry Download PDFInfo
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- CN201549467U CN201549467U CN200920246955XU CN200920246955U CN201549467U CN 201549467 U CN201549467 U CN 201549467U CN 200920246955X U CN200920246955X U CN 200920246955XU CN 200920246955 U CN200920246955 U CN 200920246955U CN 201549467 U CN201549467 U CN 201549467U
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Abstract
The utility model discloses an interface device utilizing glow-discharge ion source mass spectrometry. The interface device includes an interception cone and an ion exit cone which are arranged between a glow-discharge ion source and a mass spectrometer ion-optic system, wherein the interception cone is arranged on one side next to the mass spectrometer ion-optic system, and the cone hole is aligned and inserted at the axis of the mass spectrometer ion-optic system; the ion exit cone is arranged on one side next to the glow-discharge ion source and at a distance with the interception cone, the cone hole of the ion exit cone is also aligned and inserted at the axis of the mass spectrometer ion-optic system; and the cone hole of the ion exit cone is not only concentric with a cone-hole spindle of the interception cone, but also perpendicular with the axis of the glow-discharge ion source and the mass spectrometer ion-optic system. The interface device can replace the original inlet interface device and has the advantages of simple installation, durability and better using effect, thereby greatly reducing the running cost of the glow-discharge ion source mass spectrometer and creating conditions for socialized services of large-scale scientific instruments.
Description
Technical field
The utility model relates to the functional development to a kind of import large-scale precision analytical and testing instrument, refers to a kind of glow discharge ion source massspectrum interface arrangement especially.
Background technology
Glow discharge ion source massspectrum (GDMS) technology, because sensitivity for analysis height, detectability are low, accuracy of analysis is good, the wide dynamic range of measuring, can do rapid multi-element analysis, to the response of various elements than homogeneous, adopt the relative sensitivity factor (RSF) to proofread and correct, can realize few standard specimen or do not have advantage such as standard specimen analysis, be known as at present one of the most effective analytical technology that solid conductive material is carried out that trace and ultratrace element analyze by industry.In the direct solid analysis of ultrapure semi-conducting material, target pole material, high pure metal and alloy in occupation of important position.Sample is entered region of discharge by cathodic sputtering process atomization in the glow discharge ion source, delamination sampling equably.The high stability of cathodic sputtering and the non-selectivity when acting on sample make glow discharge ion source massspectrum analytical technology also bring into play important effect in the high accuracy analysis of the top layer of material bed-by-bed analysis, material.In national economy all departments, universities and colleges, R﹠D institution have obtained using widely.Along with the expansion of range of application, can develop into a kind of analysis and testing technology of routine gradually.
And glow discharge ion source massspectrum interface is the critical component of glow discharge ion source massspectrum technology (GDMS), make the required condition of work of glow discharge ion source and these two physical spaces of mass spectrometer obtain coupling by this interface, solve the problem of ion transfer therebetween.The interface arrangement of former import large-scale precision analytical and testing instrument is only applicable to inductively coupled plasma (ICP) source, thereby the glow discharge ion source massspectrum interface of development ideal structure is that everybody is desired.
Summary of the invention
The purpose of this utility model provides a kind of glow discharge ion source massspectrum interface arrangement, and it can solve the ion transfer problem in low pressure, glow discharge plasma and high vacuum, such two the widely different environment of normal temperature mass spectrometer.
For achieving the above object, the utility model is taked following design:
A kind of glow discharge ion source massspectrum interface arrangement, it is bored by intercepting awl and ion outlet and constitutes, both and place the glow discharge ion source and the mass spectrometer ion-optic system between; Wherein, the intercepting awl is positioned at nearly mass spectrometer ion-optic system one side, and its taper hole collimation inserts on the axle center of mass spectrometer ion-optic system; The ion outlet awl is positioned at nearly glow discharge ion source one side, and apart from intercepting awl certain distance, ion outlet awl taper hole also collimates and inserts on the axle center of mass spectrometer ion-optic system; Ion outlet awl taper hole and intercepting awl taper-bored spindle be to concentric, and collimate with the axle center of glow discharge ion source, mass spectrometer ion-optic system simultaneously.
Described intercepting awl taper hole end surface thickness is that 0.2mm, taper hole aperture are 0.9mm; Ion outlet awl taper hole aperture is 0.3mm～6.0mm; Distance between ion outlet awl taper hole end face and intercepting awl taper hole end face is 6.0mm～1.0mm.
Described ion outlet awl and intercepting awl are made by pure nickel material or stainless steel material.
The utility model is the glow discharge ion source massspectrum interface of applicant's independent development, is made of one group of ion outlet awl and intercepting awl, and it can replace former import interface arrangement, for condition has been created in the socialized service system of large scientific instrument.
The utility model has the advantages that: adopt this structure technology design glow discharge ion source massspectrum interface, can be so that the efficiency of transmission height of ion can not bring the bad reaction that makes the actual signal distortion in the ion transfer process; The independent development interface arrangement can replace former import interface arrangement, installs simple and easyly, durable, and result of use is good, has significantly reduced the operating cost of glow discharge ion source massspectrum instrument, for condition has been created in the socialized service system of large scientific instrument.
Description of drawings
Fig. 1 is the utility model glow discharge ion source massspectrum interface arrangement structural representation
Fig. 2 is a glow discharge ion source massspectrum interface arrangement application state schematic diagram
Embodiment
As shown in Figure 1 and Figure 2, the utility model glow discharge ion source massspectrum interface arrangement is constituted by intercepting awl 1 and ion outlet awl 2, both and place the glow discharge ion source and the mass spectrometer ion-optic system between, this glow discharge ion source massspectrum interface arrangement is by interface block 5 and insulating disc 6 and mass spectrometer, the winding of glow discharge ion source; Wherein, intercepting awl 1 is positioned at a side of nearly mass spectrometer ion-optic system 3, and its taper hole collimation inserts on the axle center of mass spectrometer ion-optic system; Ion outlet awl 2 is positioned at nearly glow discharge ion source 4 one sides, and apart from intercepting awl certain distance, ion outlet awl taper hole also collimates and inserts on the axle center of mass spectrometer ion-optic system.
Described intercepting awl is for having the beaker flask of opening (being taper hole), and end face (11 places among Fig. 1) thickness of intercepting awl taper hole is 0.2mm; Intercepting awl taper hole aperture is 0.9mm.
Described ion outlet awl is the matrix of an end band conical socket, and taper hole is offered at the center of conical socket, and ion outlet awl taper hole aperture can change between 0.3mm～6.0mm on demand, with effective adjusting instrumental sensitivity.Offer annular groove 22 on the other end of ion outlet awl, be used to insert the sealing ring that is connected sealing with the glow discharge ion source device.The matrix middle part, straight channel 21 is directly offered in the rear end of taper hole, forms the passage of ion transfer.
The utility model is with ion outlet taper hole aperture quantification, utilize ion outlet to bore the throttling action in different taper holes aperture, form the new differential pressure district of one-level, can realize the coupling between argon pressure that required argon pressure of glow discharge ion source and mass spectrometer can bear.
Distance between ion outlet awl taper hole end face and intercepting awl taper hole end face can change between 6.0mm～1.0mm, with the auxiliary adjustment instrumental sensitivity.
Described ion outlet awl is made by anti-corrosion, resistant to elevated temperatures metal material (as stainless steel, pure nickel etc.) with the intercepting awl.
Because ion outlet awl and the geometry of intercepting awl two awls, sensitivity and the long-time stability (signal drift) that the mutual alignment can directly influence the whole system device, and influence the productive rate of background count and all kinds of ions, the degree that influence spectrum is simultaneously disturbed and non-spectrum is disturbed, so ion outlet awl and intercepting taper hole directly reach mutual position, manufacturing materials adopts above-mentioned design, can guarantee to reach every preferably performance index, and with low cost.
Shown in Figure 2 is the Application Example schematic diagram, and this interface arrangement is the coffret of glow discharge ion source 4 and mass spectrometer ion-optic system 3.The axle center collimation of glow discharge ion source axle center, ion outlet awl and the intercepting axis of cone heart and mass spectrometer ion-optic system, their fineness, dimensional tolerance are strict with, and distance, concentricity, perpendicularity, the depth of parallelism of two awls are also answered strict guarantee.
The various embodiments described above can not break away under the scope of the present utility model in addition some variations, thus above explanation comprises and accompanying drawing shown in structure should be considered as exemplary, but not in order to limit claim of the present utility model.
Claims (5)
1. glow discharge ion source massspectrum interface arrangement is characterized in that: it is bored by intercepting awl and ion outlet and constitutes, both and place the glow discharge ion source and the mass spectrometer ion-optic system between; Wherein, the intercepting awl is positioned at nearly mass spectrometer ion-optic system one side, and its taper hole collimation inserts on the axle center of mass spectrometer ion-optic system; The ion outlet awl is positioned at nearly glow discharge ion source one side, and apart from intercepting awl certain distance, ion outlet awl taper hole also collimates and inserts on the axle center of mass spectrometer ion-optic system; Ion outlet awl taper hole and intercepting awl taper-bored spindle be to concentric, and collimate with the axle center of glow discharge ion source, mass spectrometer ion-optic system simultaneously.
2. glow discharge ion source massspectrum interface arrangement according to claim 1 is characterized in that: described intercepting awl taper hole end surface thickness is 0.2mm; The taper hole aperture is 0.9mm.
3. glow discharge ion source massspectrum interface arrangement according to claim 1 is characterized in that: described ion outlet awl taper hole aperture is 0.3mm～6.0mm.
4. glow discharge ion source massspectrum interface arrangement according to claim 1 is characterized in that: the distance between described ion outlet awl taper hole end face and intercepting awl taper hole end face is 6.0mm～1.0mm.
5. glow discharge ion source massspectrum interface arrangement according to claim 1 is characterized in that: described ion outlet awl and intercepting awl are made by pure nickel material or stainless steel material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200920246955XU CN201549467U (en) | 2009-11-10 | 2009-11-10 | Interface device utilizing glow-discharge ion source mass spectrometry |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200920246955XU CN201549467U (en) | 2009-11-10 | 2009-11-10 | Interface device utilizing glow-discharge ion source mass spectrometry |
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| Publication Number | Publication Date |
|---|---|
| CN201549467U true CN201549467U (en) | 2010-08-11 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN200920246955XU Expired - Lifetime CN201549467U (en) | 2009-11-10 | 2009-11-10 | Interface device utilizing glow-discharge ion source mass spectrometry |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102539517A (en) * | 2010-12-24 | 2012-07-04 | 北京有色金属研究总院 | Layer-by-layer analysis method for surface layer of copper alloy material |
| CN104637773A (en) * | 2015-02-16 | 2015-05-20 | 江苏天瑞仪器股份有限公司 | Mass spectrometer primary vacuum structure |
| CN112683983A (en) * | 2020-12-03 | 2021-04-20 | 中国核电工程有限公司 | Sealed mass spectrometer |
-
2009
- 2009-11-10 CN CN200920246955XU patent/CN201549467U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102539517A (en) * | 2010-12-24 | 2012-07-04 | 北京有色金属研究总院 | Layer-by-layer analysis method for surface layer of copper alloy material |
| CN102539517B (en) * | 2010-12-24 | 2013-12-11 | 北京有色金属研究总院 | Layer-by-layer analysis method for surface layer of copper alloy material |
| CN104637773A (en) * | 2015-02-16 | 2015-05-20 | 江苏天瑞仪器股份有限公司 | Mass spectrometer primary vacuum structure |
| CN112683983A (en) * | 2020-12-03 | 2021-04-20 | 中国核电工程有限公司 | Sealed mass spectrometer |
| CN112683983B (en) * | 2020-12-03 | 2023-06-30 | 中国核电工程有限公司 | Sealed mass spectrometer |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20160530 Address after: Yang Yanlu 101407 Beijing city Huairou District Yanqi Economic Development Zone No. 88 Patentee after: National standard (Beijing) inspection & Certification Co., Ltd. Address before: 100088, 2, Xinjie street, Beijing Patentee before: General Research Institute for Nonferrous Metals |
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| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20100811 |