CN201540453U

CN201540453U - Mask cassette

Info

Publication number: CN201540453U
Application number: CN2009200731410U
Authority: CN
Inventors: 左仲; 王明珠; 许俊; 赵庆国
Original assignee: Semiconductor Manufacturing International Shanghai Corp
Current assignee: Semiconductor Manufacturing International Beijing Corp
Priority date: 2009-05-31
Filing date: 2009-05-31
Publication date: 2010-08-04
Anticipated expiration: 2019-05-31

Abstract

The utility model provides a mask cassette, which is used for storing masks used in a photolithographic process. The mask cassette structurally comprises a cassette body, a cover and supporting devices disposed in the cassette body and at edges of the inner side of the cover, and each supporting device is provided with an outwards convex curved supporting surface and made of materials processed via elastification. The mask cassette can prevent masks from being damaged.

Description

Mask cassette

Technical field

The utility model relates to a kind of mask cassette of depositing used mask in the photoetching technique.

Background technology

In integrated circuit fabrication process, photoetching technique is widely used.The mask that photoetching is used is the crucial article that influence lithography performance, if mask goes wrong, for example its impaired situation will directly have influence on many processing procedures that relate to photoetching, and production run can not normally be carried out.

Be carved with predetermined pattern on the mask, can in photoetching process, it be copied to the circuit structure of formation semiconductor devices on the silicon chip.Mask generally is to form described pattern with special material on the quartz glass base material, and a kind of in the embedded phase-shifting mask for example at present commonly used promptly adopts the film of molybdenum silicide (MoSiOx) class material to form described pattern on base material.This film itself is softer, is subjected to physical hazard easily, and the micron order normally of the pattern on the mask, perhaps deep-submicron, and a bit small damage can have influence on the structure of pattern.These factors are all determining that objectively the mask that adopts in the lithographic process is the article that need careful protection, should avoid sustaining damage in use or storage, transportation as far as possible.

The mask normal conditions are deposited in the mask cassette that specific and its size adapt, and there is significant disadvantages in industry mask cassette commonly used at present.See also mask cassette structural representation shown in Figure 1, as shown in the figure, being shaped as of mask cassette 1 is square, and its size and mask size adapt.Whole mask cassette is divided into box body 11 and lid 12, and box body 11 and lid 12 are connected through the hinge, and can close up mutually or separate, to form closing or opening of mask cassette 1.All be useful on the fixedly stationary installation 13 of mask on inboard separately four angles of box body 11 and lid 12, its effect is the fixing mask of wherein placing when being placed with mask in mask cassette 1, and making it can not be mobile in box in storage or transportation.The shortcoming of this mask cassette is that above-mentioned fixed sturcture 13 is sharp-pointed structures of rigidity, needs for fixing, and during the mask laying state, fixed sturcture 13 is inevitable very near mask.As previously mentioned; the material that constitutes mask generally comprises the special material film that forms pattern on quartz glass base material and the base material; no matter which kind of material; especially with the material that constitutes the pattern rete for very; their physical strength all is very fragile; in the process of placing mask or taking out mask to mask cassette 1, the mask wedge angle that structure 13 had that is very easy to be fixed scratches.In case this kind situation takes place, the mask that is scratched is promptly accused and is scrapped, and therefore, uses mask cassette commonly used at present to have quite high risk when picking and placeing mask.

The utility model content

For when using mask cassette to deposit mask, avoid occurring that mask is damaged and the situation of scrapping proposes the utility model.

The purpose of this utility model is, a kind of mask cassette is provided, and special design is all passed through in the supportive device of its box body inside and the position of supportive device, can reduce the phenomenon that mask box causes the mask damage to a great extent.

Mask cassette of the present utility model has rectangular box body and lid, and described box body and lid can be closed and open, so that pick and place and store mask.Inner side edge edge at described box body and lid is furnished with a plurality of supportive devices, is used for supporting to be positioned over the mask of mask box;

Wherein, the lobed arc seating surface of described supportive device, an end of this arc seating surface connects the sidewall of described box body or lid, and the other end connects the end face of lid or the bottom surface of box body, constitutes the arc seating surface to box inner space projection.

Preferably, the junction surface of described arc seating surface and box body bottom surface or lid end face has step-like projective structure, this projective structure is used to prevent that mask from sliding and touch box body bottom surface along cambered surface, mask slided and touches the lid end face along cambered surface when perhaps mask box was inverted, cause and damage or abrade that this kind structure can also make mask be fixed in horizontal direction in addition.

Above-mentioned supportive device with arc seating surface has the elastically-deformable elastic construction of permission, it adopts elasticized material to make, as polymethylmethacrylate, preferably, the material of box body and lid also can adopt same material, and they and described supportive device are one-body molded.The inner side edge of described box body and lid is along having a plurality of supportive devices respectively.The quantity of supportive device can be adjusted as required flexibly, and for the consideration that balance is supported, supportive device is at the box body, and perhaps the inner side edge of lid generally all is no less than 3 along the number that distributes.

Usually pick and place and protect mask for convenience, the position of supportive device in box body or lid need be through special design.The example that is designed to box body part, side has the situation of 4 supportive devices within it, these supportive devices generally are not located at the interior angle apex portion of described rectangular box body, 4 supportive devices can be distributed on the edge of described box body inboard in twos symmetrically, support the mask of placing in the mask box with balance.For example can adopt following set-up mode, two described supportive devices equidistantly are distributed on two sides of an interior angle of box body, two supportive devices then are distributed on two sides at diagonal angle accordingly in addition, under this setup, described 4 supportive devices distribute in twos symmetrically near one group of diagonal angle in the box body interior angle, and further from another group diagonal angle.The supportive device on lid inner side edge edge also can be done same setting.Above-mentioned design not only can obtain the stable prerequisite of supporting at mask and be issued to and pick and place convenient effect, also is not easy because of picking and placeing the improper scuffing that produces.

In addition, based on above consideration, those skilled in the art are the arrangement of otherwise designed supportive device as required.

Advantage of the present utility model is:

1, owing to adopts the supportive device of lobed arc seating surface, when mask is positioned in the box, the contact area of itself and supportive device greatly reduces, and can obtain maximum mask and the space between supportive device and other parts of mask box like this, helps avoiding mask to be supported device and damages;

2, supportive device is set at the box body, and perhaps lid inner side edge edge no longer is on the angle, through this change, be more prone to when picking and placeing mask in mask cassette, thereby the impaired risk of mask can reduce, the supportive device that changes simultaneously after being provided with can reach the stable effect of supporting mask equally;

3, adopt the material handled through elastification as supportive device, help discharging the stress that mask is subjected to, this can the minimizing mask box damages the risk of mask in transportation; On the other hand, the fixation that is subjected in mask cassette of mask is also better.

For be more readily understood the purpose of this utility model, feature with and advantage, below conjunction with figs. and embodiment are described in detail the utility model.

Description of drawings

The accompanying drawing that comprises among the application is a component part of instructions, and accompanying drawing and instructions and claims one are used from explanation flesh and blood of the present utility model, are used for understanding better the utility model.

Fig. 1 is a mask cassette structural representation used in the prior art;

The mask cassette structural representation that Fig. 2 provides for the utility model;

Fig. 3 is the independent enlarged diagram of supportive device 23;

Fig. 4 is the overall schematic that mask cassette 2 loads mask;

Description of reference numerals:

1	Mask cassette used in the prior art
1	Mask cassette used in the prior art	2	Mask cassette of the present utility model
3	Mask	2	Mask cassette of the present utility model
3	Mask	11，21	The box body
12，22	Lid	11，21	The box body
12，22	Lid	13	The mask fixed sturcture
23	Supportive device with outer convex globoidal	13	The mask fixed sturcture
23	Supportive device with outer convex globoidal	231	Projection

Embodiment

In order to understand the 26S Proteasome Structure and Function of the mask cassette that the utility model provides better, be described further below in conjunction with specific embodiment of the utility model, but it does not limit the utility model.

The structure of mask cassette and user mode

The specific design scheme of the utility model mask cassette is provided in this embodiment, and as shown in Figure 2, this mask cassette 2 has square box body 21 and lid 22, and described box body 21 and lid 22 can be closed and open, so that pick and place and store mask.Inner side edge edge at described box body 21 and lid 22 is furnished with a plurality of supportive devices 23, is used for supporting to be positioned over the mask of mask box;

Wherein, described supportive device 23 lobed arc seating surfaces, as shown in Figure 2, an end of this arc seating surface connects the sidewall of described box body or lid, the other end connects the end face of lid or the bottom surface of box body, constitutes the arc seating surface to box inner space projection.

Preferably, the junction surface of described arc seating surface and box body bottom surface or lid end face has step-like projective structure 231, sees also the independent enlarged diagram of supportive device 23 shown in Figure 3.This projective structure 231 is used to prevent that mask from touching the bottom surface of box body 21 along the cambered surface slip, mask touched the end face of lid 22 when perhaps mask box was inverted along the cambered surface slip, cause and damage or abrade that this kind structure can also make mask be fixed in horizontal direction in addition.Load the effect that the overall schematic of mask can clearer understanding supportive device 23 with reference to mask cassette shown in Figure 4, after mask 3 put into mask cassette, the cambered surface landing of the supportive device 23 that mask 3 will have along box body 21 because of action of gravity, block until projection 231 (not shown) that are supported device 23, become normal laying state, this moment, mask 3 did not contact the bottom surface of box body 21, and because the support of projection 231 is fixed in horizontal direction.

Above-mentioned supportive device 23 with arc seating surface adopts the resilient material polymethylmethacrylate to make.

In the present embodiment, box body 21 and lid 22 all have four supportive devices 23.Certainly, the quantity of supportive device can be adjusted as required flexibly, and for the consideration that balance is supported, supportive device is at the box body, and perhaps the number that distributes in the lid generally is no less than 3.

Pick and place and protect mask for convenience, the position of supportive device 23 in box body 21 or lid 22 is through special design.With box body 21 is example, side has the situation of 4 supportive devices within it, these supportive devices are not located at the interior angle apex portion of described rectangular box body 21, on two sides of wherein two interior angles that equidistantly are distributed in box body 21 of 4 supportive devices, two supportive devices then are distributed on two sides at diagonal angle accordingly in addition, under this setup, described 4 supportive devices distribute in twos symmetrically near one group of diagonal angle in the interior angle of box body, and further from another group diagonal angle.Being provided with of supportive device setting in the lid 22 and box body 21 is corresponding.This design not only can obtain the stable prerequisite of supporting at mask and be issued to and pick and place convenient effect, also is not easy because of picking and placeing the improper scuffing that produces.

In the present embodiment, 4 supportive devices 23 have place, nearly angle on two two limits of interior angle that are positioned at 21 1 jiaos of box bodies, and two supportive devices places, nearly angles on two limits at diagonal angle in addition are with the center of box body 21 symmetry in twos.This design can make mask obtain picking and placeing under the stable prerequisite of supporting convenient in box, is not easy because of picking and placeing the improper scuffing that produces.When being placed with the mask cassette opening of mask 3, can at an easy rate mask be taken out from box, for example be clipped in these regional gripping masks by a mask from zone further from supportive device.In addition, based on above consideration, the arrangement of otherwise designed supportive device 23 as required.

Because above-mentioned supportive device 23 has the arc seating surface of evagination, with mask approaching be its cambered surface, and the material therefor of supportive device own is handled through elastification, so no matter be in fetching process or store status, can not produce the risk of damage mask.

Claims

1. mask cassette, it has rectangular box body and lid, described box body and lid can be closed and open, so that pick and place and store mask, inner side edge edge at described box body and lid is furnished with a plurality of supportive devices, be used for supporting to be positioned over the mask of mask box, it is characterized in that, the lobed arc seating surface of described supportive device, one end of this arc seating surface connects the sidewall of described box body or lid, the other end connects the end face of lid or the bottom surface of box body, constitutes the arc seating surface to box inner space projection.

2. mask cassette according to claim 1 is characterized in that the junction surface of described arc seating surface and box body bottom surface or lid end face has step-like projective structure.

3. mask cassette according to claim 1 and 2, the supportive device that it is characterized in that described lobed arc seating surface are to allow elastically-deformable elastic construction.

4. mask box according to claim 3 is characterized in that, described elastic construction and box body or lid are one-body molded.

5. mask cassette according to claim 1 is characterized in that, described box body or lid have at least 3 described supportive devices.

6. mask box according to claim 1 is characterized in that, described box body or lid have 4 described supportive devices.

7. mask cassette as claimed in claim 6, it is characterized in that, described 4 supportive devices are distributed on the edge of described box body inboard in twos symmetrically, wherein 2 supportive devices equidistantly are distributed on two sides of an interior angle of box body, and 2 supportive devices are distributed on two sides of the interior angle relative with described interior angle accordingly in addition.