CN201537606U - Quartz square box - Google Patents
Quartz square box Download PDFInfo
- Publication number
- CN201537606U CN201537606U CN200920223140XU CN200920223140U CN201537606U CN 201537606 U CN201537606 U CN 201537606U CN 200920223140X U CN200920223140X U CN 200920223140XU CN 200920223140 U CN200920223140 U CN 200920223140U CN 201537606 U CN201537606 U CN 201537606U
- Authority
- CN
- China
- Prior art keywords
- rinse bath
- bath
- square chest
- cleaning
- quartz
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Cleaning By Liquid Or Steam (AREA)
Abstract
The utility model relates to a quartz square box, in particular to a quartz product of an integrated-circuit chip manufacturing industry, belonging to the microelectronics industry. The quartz product comprises an internal cleaning tank and an external liquids collecting tank, and is characterized in that an overflow groove opening is formed on the top edge of the internal cleaning tank, and the liquid collecting tank is fixed on the periphery at the upper part of the cleaning tank. In the quartz square box, the overflow groove opening is designed in the cleaning tank, therefore, the overflowed cleaning liquids can smoothly flows to the liquid collecting tank, the positioning structural design is simple, and the coordination with the product line is good; and the design for the quartz square box is reasonable, and can excellently coordinate with the product line to carry out high-intensity workload cleaning.
Description
Technical field
The utility model relates to quartz ware, particularly relates to a kind of quartzy square chest.
Background technology
Quartz glass product is widely used in microelectronic industry IC chip manufacturing industry with its good physicochemical characteristics.Quartzy square chest is used for the semiconductor chip matting more, its purity height, corrosion-resistant, directly heat indeformable characteristics and make it to become necessary tool in the matting.Existing quartzy square chest is generally inside and outside two-layer, internal layer is a rinse bath, after dosing the cleaning fluid of uniform temperature, adding semiconductor chip cleans automatically, skin connects liquid bath for the overflow cleaning fluid, above-mentioned quartzy square chest brings a lot of inconvenience in cleaning process: 1, the internal layer rinse bath is easy to produce the water surface and ripples when overflow, sometimes produce significantly swing, make wash liquid stream to the outside that connects liquid bath, 2, connect no drain valve in liquid bath and the rinse bath, connecing the liquid bath cleaning liquid inside need stop work when fluid temperature need heat inadequately when full or in the rinse bath and topple over reuse, 3, quartzy square chest does not have location structure, quartzy square chest easily moves in the cleaning process, and quartz ware is frangible, and small size agitated liquid when making automatic cleaning causes efficient too low.
The utility model content
At the defective in the above-mentioned field, the utility model provides a kind of quartzy square chest, can be very reliable be fixed on the production line, the cleaning fluid of overflow can flow into very smoothly and connect in the liquid bath in its rinse bath, simultaneously cleaning fluid can be extracted recycling very easily out.
Quartzy square chest, comprise that internal layer rinse bath and skin connect liquid bath, is characterized in that: internal layer rinse bath top margin has overflow notch, describedly connects the periphery that liquid bath is fixed in rinse bath top.
Be fixed with positioner on the described rinse bath, described positioner be positioned at connect liquid bath below.
Described positioner is the boss that is fixed on the rinse bath periphery, and described boss has the projection that is connected with the production line buckle-type towards the one side of bottom of rinse bath.
Described bottom of rinse bath has leakage fluid dram.
Leakage fluid dram is arranged at the described liquid bath bottom that connects.
Described connecing also is provided with thermometer boss in the liquid bath.
Because square chest is inside and outside two-layer, cleaning is to finish in the rinse bath of internal layer, the rinse bath top has overflow notch, the overflow cleaning fluid flows into the liquid bath that connects that is arranged in the rinse bath upper periphery very smoothly by overflow notch, because the amount of overflowing liquid is not very big after all, only be positioned at the top of rinse bath and be not arranged to the degree of depth identical so connect liquid bath, saved material with rinse bath.
The utility model rinse bath is provided with positioner, make square chest be unlikely mobile in the course of the work, owing to connect the periphery that liquid bath is positioned at rinse bath, therefore positioner being arranged at connect liquid bath following neither influences work, also can not increase floor space for no reason.Ramp structure can also be arranged in the top, one side of the periphery of rinse bath, matches with equipment.
Positioner is arranged to and the mutual boss of buckle of production line, and boss can be shelved on the production line square chest, its projection can with the production line snap fit.Boss can segmented also can also fuse.
Bottom of rinse bath with connect liquid bath bottom leakage fluid dram arranged, the liquid in two grooves is discharged smoothly, and the leakage fluid dram that is positioned at the bottom does not influence the operation of whole cleaning.
The utility model also is provided with a thermometer boss in connecing liquid bath, the thermometer measure of can pegging graft connects the temperature of liquid bath cleaning liquid inside, so that understand the temperature of cleaning fluid.
The cleaning fluid that rinse bath design in the quartzy square chest of the utility model has overflow notch to make and overflows can connect in the liquid bath in inflow swimmingly, and the location structure simplicity of design, works good with production line.The quartzy square chest of the utility model is reasonable in design, can well cooperate production line to carry out the cleaning of intensive work amount.
Description of drawings
Fig. 1 the utility model vertical view,
Fig. 2 the utility model master cutaway view,
Fig. 3 the utility model right view,
Each label lists as follows among the figure:
The 1-rinse bath, 2-connects liquid bath, 3-overflow notch, 4-boss, 5-projection, 6-leakage fluid dram, 7-thermometer boss.
The specific embodiment
As shown in the figure, quartzy square chest of the present utility model comprises that internal layer rinse bath 1 and skin connect liquid bath 2, and internal layer rinse bath 1 top margin has overflow notch 3, describedly connects the periphery that liquid bath 2 is fixed in rinse bath 1 top.Because square chest is inside and outside two-layer, cleaning is to finish in the rinse bath 1 of internal layer, the overflow cleaning fluid by overflow notch 3 flow into very smoothly be arranged in rinse bath 1 upper periphery connect liquid bath 2, because the amount of overflowing liquid is not very big after all, be positioned at the top of rinse bath 1 and be not arranged to the degree of depth identical so connect 2 of liquid baths, saved material with rinse bath 1.
Be fixed with positioner on the described rinse bath 1, described positioner be positioned at connect liquid bath 2 below.Described positioner is the boss 4 that is fixed on rinse bath 1 periphery, and described boss 4 has the projection 5 that can be connected with the production line buckle-type towards the one side of rinse bath 1 bottom.Boss 4 can be shelved on the production line square chest, the projection 5 that is provided with on it can with the production line snap fit.Boss 4 can segmented also can also fuse.
Described rinse bath 1 and connect liquid bath 2 bottoms leakage fluid dram 6 is arranged can make the liquid in two grooves discharge smoothly, and the leakage fluid dram that is positioned at the bottom does not influence the operation of whole cleaning.
Described connecing also is provided with thermometer boss 7 in the liquid bath 1, the thermometer measure of can pegging graft connects the temperature of liquid bath cleaning liquid inside, so that understand the temperature of cleaning fluid.
The cleaning fluid that rinse bath design in the quartzy square chest of the utility model has overflow notch to make and overflows can connect in the liquid bath in inflow swimmingly, and the location structure simplicity of design, works good with production line.The quartzy square chest of the utility model is reasonable in design, can well cooperate production line to carry out the cleaning of intensive work amount.
Claims (6)
1. quartzy square chest, comprise that internal layer rinse bath and skin connect liquid bath, is characterized in that: internal layer rinse bath top margin has overflow notch, describedly connects the periphery that liquid bath is fixed in rinse bath top.
2. quartzy square chest according to claim 1 is characterized in that: be fixed with positioner on the described rinse bath, described positioner be positioned at connect liquid bath below.
3. quartzy square chest according to claim 2 is characterized in that: described positioner is the boss that is fixed on the rinse bath periphery, and described boss has the projection that is connected with the production line buckle-type towards the one side of bottom of rinse bath.
4. quartzy square chest according to claim 1 is characterized in that: described bottom of rinse bath has leakage fluid dram.
5. quartzy square chest according to claim 1 is characterized in that: leakage fluid dram is arranged at the described liquid bath bottom that connects.
6. quartzy square chest according to claim 1 is characterized in that: described connecing also is provided with thermometer boss in the liquid bath.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200920223140XU CN201537606U (en) | 2009-09-28 | 2009-09-28 | Quartz square box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200920223140XU CN201537606U (en) | 2009-09-28 | 2009-09-28 | Quartz square box |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201537606U true CN201537606U (en) | 2010-08-04 |
Family
ID=42589060
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200920223140XU Expired - Lifetime CN201537606U (en) | 2009-09-28 | 2009-09-28 | Quartz square box |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201537606U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102254793A (en) * | 2011-07-15 | 2011-11-23 | 苏州凯西石英电子有限公司 | Double-layer quartz groove for cleaning silicon wafer |
| CN104310763A (en) * | 2014-09-23 | 2015-01-28 | 锦州凌河石英设备科技有限公司 | Manufacturing method for quartz heating washing tank liner |
| CN104690030A (en) * | 2013-12-05 | 2015-06-10 | 天津中环领先材料技术有限公司 | Tank body for improved silicon chip cleaning machine |
| CN105170548A (en) * | 2015-08-28 | 2015-12-23 | 东莞市普华精密机械有限公司 | Cleaning equipment and cleaning method for test probe |
| CN108655096A (en) * | 2018-04-25 | 2018-10-16 | 连云港亿博材料开发有限公司 | A kind of square quartz cylinder |
-
2009
- 2009-09-28 CN CN200920223140XU patent/CN201537606U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102254793A (en) * | 2011-07-15 | 2011-11-23 | 苏州凯西石英电子有限公司 | Double-layer quartz groove for cleaning silicon wafer |
| CN104690030A (en) * | 2013-12-05 | 2015-06-10 | 天津中环领先材料技术有限公司 | Tank body for improved silicon chip cleaning machine |
| CN104310763A (en) * | 2014-09-23 | 2015-01-28 | 锦州凌河石英设备科技有限公司 | Manufacturing method for quartz heating washing tank liner |
| CN105170548A (en) * | 2015-08-28 | 2015-12-23 | 东莞市普华精密机械有限公司 | Cleaning equipment and cleaning method for test probe |
| CN108655096A (en) * | 2018-04-25 | 2018-10-16 | 连云港亿博材料开发有限公司 | A kind of square quartz cylinder |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20100804 |