CN201527588U - System for feeding liquid - Google Patents
System for feeding liquid Download PDFInfo
- Publication number
- CN201527588U CN201527588U CN2009202466000U CN200920246600U CN201527588U CN 201527588 U CN201527588 U CN 201527588U CN 2009202466000 U CN2009202466000 U CN 2009202466000U CN 200920246600 U CN200920246600 U CN 200920246600U CN 201527588 U CN201527588 U CN 201527588U
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- liquid
- signal
- programmable logic
- logic controller
- fluidsupply reservoir
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Abstract
The utility model relates to the automation field, in particular to a system for feeding liquid, which is used for reducing the possibility that the liquid is not injected timely, and further reducing the quantity of defect products. The system comprises a liquid supply tank, a programmable controller, a pressure control valve and a liquid pump, wherein the liquid supply tank sends out a liquid injection signal when the liquid level is lower than a first set height, and sends out a liquid injection stop signal when the liquid level is higher than a second set height; the programmable controller sends out a pressurization stop signal and a work signal after receiving the liquid injection signal, and sends out a pressurization start signal and a work stop signal after receiving the liquid injection stop signal; the pressure control valve stops pressurizing the liquid supply tank after receiving the pressurization stop signal and reduces pressure in a liquid storage tank, and starts to pressurize the liquid supply tank after receiving the pressurization start signal so as to inject the liquid in the liquid supply tank into external equipment; and the liquid pump injects the liquid in the liquid storage tank into the liquid supply tank after receiving the work signal, and stops injecting the liquid after receiving the liquid injection stop signal.
Description
Technical field
The utility model relates to automatic field, particularly a kind of system that carries out feed flow.
Background technology
In the automatic field,, all be the liquid of annotating manually at present if the product that needs feed flow to produce is arranged.
In semicon industry, the production line below 6 cun and 6 cun, the liquid filling in the flow container if the liquid in the flow container has not had, need manually stop production line in glue-spreading development equipment, the liquid of manually annotating in liquid is irritated then.
The mode of this liquid of annotating has manually been brought very big potential safety hazard to product safety, often takes place owing to not timely liquid feeding causes the product bad phenomenon.The initial production poor prognostic cause of producing more than 90% all since the liquid of in time not annotating cause.
In sum, the mode of the liquid of annotating manually at present is easy to the situation of liquid of in time annotating occur not having, thereby has increased the quantity of bad product, and the product of producing is made a big impact.
Summary of the invention
The utility model embodiment provides a kind of system that carries out feed flow, does not have the generation of liquid situation of in time annotating in order to reduce, thereby reduces the quantity of bad product.
The utility model provides a kind of system that carries out feed flow, this system comprises: at least one fluidsupply reservoir (1), at least one storage flow container (2) and Programmable Logic Controller PLC (6), wherein, a liquid level sensor (4) is arranged in each fluidsupply reservoir (1), each fluidsupply reservoir (1) links to each other with a pressure control valve (5) with a liquid pump (3), and a liquid pump (3) only links to each other with a fluidsupply reservoir (1) with a pressure control valve (5);
Described liquid level sensor (4) in the described fluidsupply reservoir (1), be used for monitoring the liquid level of described fluidsupply reservoir (1) liquid, in liquid level during less than first setting height, send the fluid injection signal to described Programmable Logic Controller (6), in liquid level during greater than second setting height, stop the fluid injection signal to described Programmable Logic Controller (6) transmission, described first setting height is less than described second setting height;
Described Programmable Logic Controller (6), be used for after receiving described fluid injection signal, to described pressure control valve (5) transmission the stopping pressurization signal that links to each other with described fluidsupply reservoir (1), and to described liquid pump (3) the transmission working signal that links to each other with described fluidsupply reservoir (1), receive described stop the fluid injection signal after, send the beginning pressurization signal to the described pressure control valve (5) that links to each other with described fluidsupply reservoir (1), and send silence signal to the described liquid pump (3) that links to each other with described fluidsupply reservoir (1);
The described pressure control valve (5) that links to each other with described fluidsupply reservoir (1), be used for receive described stop pressurization signal after, stop described fluidsupply reservoir (1) is pressurizeed, and reduce pressure in the described storage flow container (2), after receiving described beginning pressurization signal, begin described fluidsupply reservoir (2) pressurization is injected external unit with the liquid in the described fluidsupply reservoir (1);
The described liquid pump (3) that links to each other with described fluidsupply reservoir (1) is used for after receiving described working signal, the liquid in the described storage flow container (2) is injected in the described fluidsupply reservoir (1), receive described stop the fluid injection signal after, stop to inject liquid.
The liquid-supplying system of the utility model embodiment can be automatically for to need the equipment of feed flow to carry out feed flow, thereby reduce the situation of the liquid that do not have in time to annotate, and reduced the quantity of bad product; A large amount of manpowers have further been saved.
Description of drawings
Fig. 1 is first kind of system architecture synoptic diagram that carries out feed flow of the utility model embodiment;
Fig. 2 is second kind of system architecture synoptic diagram that carries out feed flow of the utility model embodiment;
The third carries out the system architecture synoptic diagram of feed flow to Fig. 3 for the utility model embodiment.
Embodiment
Below in conjunction with Figure of description the utility model embodiment is described in further detail.
As shown in Figure 1, first kind of system that carries out feed flow of the utility model embodiment comprises:
At least one fluidsupply reservoir (1), at least one storage flow container (2) and Programmable Logic Controller (PLC) (6), wherein, a liquid level sensor (4) is arranged in each fluidsupply reservoir (1), each fluidsupply reservoir (1) links to each other with a pressure control valve (5) with a liquid pump (3), and a liquid pump (3) only links to each other with a fluidsupply reservoir (1) with a pressure control valve (5);
Wherein, liquid level sensor (4) in the fluidsupply reservoir (1), be used for monitoring the liquid level of fluidsupply reservoir (1) liquid, in liquid level during less than first setting height, send the fluid injection signal to Programmable Logic Controller (6), in liquid level during greater than second setting height, send to Programmable Logic Controller (6) and to stop the fluid injection signal, first setting height is less than second setting height;
Programmable Logic Controller (6), be used for after receiving the fluid injection signal, to pressure control valve (5) transmission the stopping pressurization signal that links to each other with fluidsupply reservoir (1), and to liquid pump (3) the transmission working signal that links to each other with fluidsupply reservoir (1), receive stop the fluid injection signal after, send the beginning pressurization signal to the pressure control valve (5) that links to each other with fluidsupply reservoir (1), and send silence signal to the liquid pump (3) that links to each other with fluidsupply reservoir (1);
The pressure control valve (5) that links to each other with fluidsupply reservoir (1), be used for receive stop pressurization signal after, stop fluidsupply reservoir (1) is pressurizeed, and reduce to store pressure in the flow container (2), after receiving the beginning pressurization signal, begin fluidsupply reservoir (2) pressurization is injected external unit with the liquid in the fluidsupply reservoir (1);
The liquid pump (3) that links to each other with fluidsupply reservoir (1) is used for after receiving working signal, and the liquid that will store in the flow container (2) is injected in the fluidsupply reservoir (1), receive stop the fluid injection signal after, stop to inject liquid.
In specific implementation process, first setting height and second setting height can be set as required.
Pressure control valve (5) can be realized fluidsupply reservoir (1) is pressurizeed by injecting gas (such as nitrogen) in fluidsupply reservoir (1); Gas bleeding realizes fluidsupply reservoir (1) is reduced pressure.
Each storage flow container (2) can only be a fluidsupply reservoir (a 1) feed flow, also can be part or all of fluidsupply reservoir (1) feed flow.
Owing to when the utility model embodiment does not have liquid in fluidsupply reservoir (1), the liquid in the storage flow container (2) can be injected fluidsupply reservoir (1) automatically, thereby not need manually to inject liquid.
If a plurality of fluidsupply reservoirs (1) are arranged in the system, for the feed flow in each fluidsupply reservoir of reasonable distribution (1), the system of the utility model embodiment also comprises: the liquid control valve (7) that is connected with Programmable Logic Controller (6) with each fluidsupply reservoir (1);
Programmable Logic Controller (6), be used for after receiving the fluid injection signal, liquid control valve (7) cuts out the fluidsupply reservoir (1) at liquid level sensor (4) place that sends the fluid injection signal and the path between the external unit, and liquid control valve (7) is opened the path between another fluidsupply reservoir (1) and the external unit;
Liquid control valve (7) is used for the control according to Programmable Logic Controller (6), opens or close the path between fluidsupply reservoir (1) and the external unit.
Such as two fluidsupply reservoir A and B are arranged, all be full before the work, liquid control valve (7) is opened the path between fluidsupply reservoir A and the external unit, close the path between fluidsupply reservoir B and the external unit, when fluidsupply reservoir A does not have liquid by the time, close the path between fluidsupply reservoir A and the external unit, path between fluidsupply reservoir B and the external unit then, when fluidsupply reservoir B does not have liquid, liquid among the fluidsupply reservoir A is full, at the path of opening between fluidsupply reservoir A and the external unit, close the path between fluidsupply reservoir B and the external unit then, according to this circulation.
If there is not liquid to need the artificial liquid that injects in storage flow container (2), preferable, the system of the utility model embodiment also comprises the alarm (8) that links to each other with Programmable Logic Controller (6);
In storage flow container (2) liquid level sensor (9) is arranged, be used for the liquid level of monitoring storage flow container (2) liquid, in liquid level during less than the 3rd setting height, to Programmable Logic Controller (6) transmission liquid level warning signal;
Programmable Logic Controller (6) is used for after receiving the liquid level warning signal, and control alarm (8) is reported to the police.
The 3rd setting height can be set as required.
In order to improve security, can also carry out the leakage detection to fluidsupply reservoir (1) and storage flow container (2), as shown in Figure 2, the system of the utility model embodiment also comprises leakage detector (10), each fluidsupply reservoir (1) links to each other with leakage detector (10), and each storage flow container (2) links to each other with leakage detector (10);
Leakage detector (10) is used for fluidsupply reservoir (1) and storage flow container (2) are detected, and when fluidsupply reservoir (1) or the leakage of storage flow container (2), sends the leakage alerting signal to Programmable Logic Controller (6);
Programmable Logic Controller (6) is used for after receiving the leakage alerting signal, and control alarm (8) is reported to the police.
In specific implementation process, a plurality of leakage detectors (10) can be arranged, a leakage detector (10) can only connect each fluidsupply reservoir (1) or a storage flow container (2).
Leakage detector (10) can adopt sensitive detector, promptly pastes reflective sheeting at each fluidsupply reservoir (1) and storage flow container (2), and sensitive detector is launched light to reflective sheeting, receives the light that returns through reflective sheeting.If the leakage situation, reflective sheeting can wet, and sensitive detector does not just receive the light that reflective sheeting returns, and takes place from defining the leakage situation.
Can also detect for temperature, as shown in Figure 2, the system of the utility model embodiment also comprises temperature sensor (11) and the flame snuffer (12) that is connected with Programmable Logic Controller (6);
Temperature sensor (11), the temperature that is used for detection system place environment, in temperature during greater than first design temperature, send the high temperature alarm signal to Programmable Logic Controller (6), when being reduced to greater than first design temperature, send the alarm release signal in temperature to Programmable Logic Controller (6) less than second design temperature;
Programmable Logic Controller (6) is used for after receiving the high temperature alarm signal, and control alarm (8) is reported to the police, and starts flame snuffer (12), and after receiving the alarm release signal, control alarm (8) stops to report to the police, and closes flame snuffer (12).
If emergency condition in order to reduce the loss, can also promptly stop, as shown in Figure 2, the system of the utility model embodiment also comprises: the emergency stop switch (13) that links to each other with Programmable Logic Controller (6);
Emergency stop switch (13) is used for sending washout to Programmable Logic Controller (6) when opening;
Programmable Logic Controller (6) is used for after receiving washout, closes all liquid pumps (3), all pressure control valves (5) and liquid control valve (7).
Such as there being emergency condition to take place, the staff can open emergency stop switch (13), thereby stops total system work.
External unit among the utility model embodiment is to need the liquid additional equipment.Different application scenarioss, the external unit among the utility model embodiment is also inequality, is coating developing machine such as semicon industry external unit in the production line below 6 cun and 6 cun.
As shown in Figure 3, the third carries out the utility model embodiment in the system of feed flow, comprises two fluidsupply reservoirs (1), two storage flow containers (2), two liquid pumps (3), four liquid level sensors (4), two pressure control valves (5), a Programmable Logic Controller (6), a liquid control valve (7).
Wherein: two storage flow containers (2), each 200 raise-position is in the chemicals storehouse, each 20 raise-position of two fluidsupply reservoirs (1) are in the workshop, be used for to all coating developing machine feed flows, when switching to another fluidsupply reservoir (1), a fluidsupply reservoir (1) space-time system continues to give the coating developing machine feed flow, empty fluidsupply reservoir (1) is awaited orders after filling it up with by liquid pump (3) liquid feeding from storage flow container (2).Each storage flow container (2) can use about 2 days for all devices, and storage flow container (2) space-time system can automatically switch to another storage flow container (2) and alert notice is changed empty storage flow container (2).
From the foregoing description as can be seen: a kind of system that carries out feed flow of the utility model embodiment, comprise: at least one fluidsupply reservoir (1), at least one storage flow container (2) and Programmable Logic Controller PLC (6), wherein, a liquid level sensor (4) is arranged in each fluidsupply reservoir (1), each fluidsupply reservoir (1) links to each other with a pressure control valve (5) with a liquid pump (3), and a liquid pump (3) only links to each other with a fluidsupply reservoir (1) with a pressure control valve (5);
Liquid level sensor (4) in the fluidsupply reservoir (1), be used for monitoring the liquid level of fluidsupply reservoir (1) liquid, in liquid level during less than first setting height, send the fluid injection signal to Programmable Logic Controller (6), in liquid level during greater than second setting height, stop the fluid injection signal to Programmable Logic Controller (6) transmission, first setting height is less than second setting height;
Programmable Logic Controller (6), be used for after receiving the fluid injection signal, to pressure control valve (5) transmission the stopping pressurization signal that links to each other with fluidsupply reservoir (1), and to liquid pump (3) the transmission working signal that links to each other with fluidsupply reservoir (1), receive stop the fluid injection signal after, send the beginning pressurization signal to the pressure control valve (5) that links to each other with fluidsupply reservoir (1), and send silence signal to the liquid pump (3) that links to each other with fluidsupply reservoir (1);
The pressure control valve (5) that links to each other with fluidsupply reservoir (1), be used for receive stop pressurization signal after, stop fluidsupply reservoir (1) is pressurizeed, and reduce to store pressure in the flow container (2), after receiving the beginning pressurization signal, begin fluidsupply reservoir (2) pressurization is injected external unit with the liquid in the fluidsupply reservoir (1);
The liquid pump (3) that links to each other with fluidsupply reservoir (1) is used for after receiving working signal, and the liquid that will store in the flow container (2) is injected in the fluidsupply reservoir (1), receive stop the fluid injection signal after, stop to inject liquid.
The liquid-supplying system of the utility model embodiment can be automatically for to need the equipment of feed flow to carry out feed flow, thereby reduce the situation of the liquid that do not have in time to annotate, and reduced the quantity of bad product; A large amount of manpowers have further been saved.
Obviously, those skilled in the art can carry out various changes and modification to the utility model and not break away from spirit and scope of the present utility model.Like this, if of the present utility model these are revised and modification belongs within the scope of the utility model claim and equivalent technologies thereof, then the utility model also is intended to comprise these changes and modification interior.
Claims (6)
1. system that carries out feed flow, it is characterized in that, this system comprises: at least one fluidsupply reservoir (1), at least one storage flow container (2) and Programmable Logic Controller PLC (6), wherein, a liquid level sensor (4) is arranged in each fluidsupply reservoir (1), and each fluidsupply reservoir (1) links to each other with a pressure control valve (5) with a liquid pump (3), and a liquid pump (3) only links to each other with a fluidsupply reservoir (1) with a pressure control valve (5);
Described liquid level sensor (4) in the described fluidsupply reservoir (1), be used for monitoring the liquid level of described fluidsupply reservoir (1) liquid, in liquid level during less than first setting height, send the fluid injection signal to described Programmable Logic Controller (6), in liquid level during greater than second setting height, stop the fluid injection signal to described Programmable Logic Controller (6) transmission, described first setting height is less than described second setting height;
Described Programmable Logic Controller (6), be used for after receiving described fluid injection signal, to described pressure control valve (5) transmission the stopping pressurization signal that links to each other with described fluidsupply reservoir (1), and to described liquid pump (3) the transmission working signal that links to each other with described fluidsupply reservoir (1), receive described stop the fluid injection signal after, send the beginning pressurization signal to the described pressure control valve (5) that links to each other with described fluidsupply reservoir (1), and send silence signal to the described liquid pump (3) that links to each other with described fluidsupply reservoir (1);
The described pressure control valve (5) that links to each other with described fluidsupply reservoir (1), be used for receive described stop pressurization signal after, stop described fluidsupply reservoir (1) is pressurizeed, and reduce pressure in the described storage flow container (2), after receiving described beginning pressurization signal, begin described fluidsupply reservoir (2) pressurization is injected external unit with the liquid in the described fluidsupply reservoir (1);
The described liquid pump (3) that links to each other with described fluidsupply reservoir (1) is used for after receiving described working signal, the liquid in the described storage flow container (2) is injected in the described fluidsupply reservoir (1), receive described stop the fluid injection signal after, stop to inject liquid.
2. the system as claimed in claim 1 is characterized in that, if a plurality of fluidsupply reservoirs (1) are arranged, described system also comprises: the liquid control valve (7) that is connected with described Programmable Logic Controller (6) with each described fluidsupply reservoir (1);
Described Programmable Logic Controller (6), be used for after receiving described fluid injection signal, control described liquid control valve (7) and close the described fluidsupply reservoir (1) at described liquid level sensor (4) place that sends described fluid injection signal and the path between the described external unit, and control described liquid control valve (7) and open path between another fluidsupply reservoir (1) and the described external unit;
Described liquid control valve (7) is used for the control according to described Programmable Logic Controller (6), opens or close the path between fluidsupply reservoir (1) and the described external unit.
3. the system as claimed in claim 1 is characterized in that, described system also comprises the alarm (8) that links to each other with described Programmable Logic Controller (6);
A liquid level sensor (9) is arranged in the described storage flow container (2), be used for monitoring the liquid level of described storage flow container (2) liquid, during less than the 3rd setting height, send the liquid level warning signal to described Programmable Logic Controller (6) in liquid level;
Described Programmable Logic Controller (6) is used for after receiving described liquid level warning signal, controls described alarm (8) and reports to the police.
4. system as claimed in claim 3 is characterized in that, described system also comprises leakage detector (10), and each fluidsupply reservoir (1) links to each other with described leakage detector (10), and each storage flow container (2) links to each other with described leakage detector (10);
Described leakage detector (10) is used for described fluidsupply reservoir (1) and described storage flow container (2) are detected, and when described fluidsupply reservoir (1) or described storage flow container (2) leakage, sends the leakage alerting signal to described Programmable Logic Controller (6);
Described Programmable Logic Controller (6) is used for after receiving described leakage alerting signal, controls described alarm (8) and reports to the police.
5. system as claimed in claim 3 is characterized in that, described system also comprises temperature sensor (11) and the flame snuffer (12) that is connected with described Programmable Logic Controller (6);
Described temperature sensor (11), be used for detecting the temperature of described system place environment, in temperature during greater than first design temperature, send the high temperature alarm signal to described Programmable Logic Controller (6), when being reduced to greater than first design temperature, send the alarm release signal in temperature to described Programmable Logic Controller (6) less than second design temperature;
Described Programmable Logic Controller (6) is used for after receiving described high temperature alarm signal, controls described alarm (8) and reports to the police, and start flame snuffer (12), after receiving described alarm release signal, control described alarm (8) and stop to report to the police, and close flame snuffer (12).
6. system as claimed in claim 2 is characterized in that, described system also comprises: the emergency stop switch (13) that links to each other with described Programmable Logic Controller (6);
Described emergency stop switch (13) is used for sending washout to described Programmable Logic Controller (6) when opening;
Described Programmable Logic Controller (6) is used for after receiving described washout, closes all described liquid pumps (3), all pressure control valves (5) and liquid control valve (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202466000U CN201527588U (en) | 2009-11-05 | 2009-11-05 | System for feeding liquid |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202466000U CN201527588U (en) | 2009-11-05 | 2009-11-05 | System for feeding liquid |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201527588U true CN201527588U (en) | 2010-07-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009202466000U Expired - Lifetime CN201527588U (en) | 2009-11-05 | 2009-11-05 | System for feeding liquid |
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| CN (1) | CN201527588U (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102004502A (en) * | 2010-11-19 | 2011-04-06 | 江南大学 | Liquid level control system and control method of Intermediate tank in glutinous rice wine production |
| CN102183971A (en) * | 2011-01-20 | 2011-09-14 | 淄博义丰机械工程有限公司 | Automatic water-replenishing device for gas producer |
| CN102220966A (en) * | 2011-07-09 | 2011-10-19 | 江苏迪沃特仪器设备科技有限公司 | Liquid pump control system |
| CN103129153A (en) * | 2011-12-05 | 2013-06-05 | 北大方正集团有限公司 | Circulation ink providing device and printing equipment |
| CN103376804A (en) * | 2012-04-20 | 2013-10-30 | 北大方正集团有限公司 | Device used for controlling addition of liquid raw materials |
| CN103941598A (en) * | 2013-01-21 | 2014-07-23 | 北大方正集团有限公司 | Gas control system and gas control method |
| CN104121975A (en) * | 2014-07-30 | 2014-10-29 | 四川飞阳科技有限公司 | System and method for monitoring liquid level of liquid storage tank |
| CN106951001A (en) * | 2017-05-12 | 2017-07-14 | 成都市惠家胶粘制品有限公司 | One kind manufacture diaphragm stability of flow system |
| CN113187741A (en) * | 2021-04-29 | 2021-07-30 | 长鑫存储技术有限公司 | Liquid back suction system and back suction method |
| CN114200919A (en) * | 2020-08-31 | 2022-03-18 | 北京极智嘉科技股份有限公司 | Liquid injection system and method for spray disinfection robot, disinfection robot and liquid injection box |
| CN115073535A (en) * | 2022-06-22 | 2022-09-20 | 北京擎科生物科技有限公司 | Control method and control system of ammonolysis instrument |
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2009
- 2009-11-05 CN CN2009202466000U patent/CN201527588U/en not_active Expired - Lifetime
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102004502B (en) * | 2010-11-19 | 2012-10-24 | 江南大学 | Liquid level control system and control method of Intermediate tank in glutinous rice wine production |
| CN102004502A (en) * | 2010-11-19 | 2011-04-06 | 江南大学 | Liquid level control system and control method of Intermediate tank in glutinous rice wine production |
| CN102183971A (en) * | 2011-01-20 | 2011-09-14 | 淄博义丰机械工程有限公司 | Automatic water-replenishing device for gas producer |
| CN102220966A (en) * | 2011-07-09 | 2011-10-19 | 江苏迪沃特仪器设备科技有限公司 | Liquid pump control system |
| CN103129153B (en) * | 2011-12-05 | 2015-03-11 | 北大方正集团有限公司 | Circulation ink providing device and printing equipment |
| CN103129153A (en) * | 2011-12-05 | 2013-06-05 | 北大方正集团有限公司 | Circulation ink providing device and printing equipment |
| CN103376804B (en) * | 2012-04-20 | 2015-11-04 | 北大方正集团有限公司 | A kind of device controlling fluid supply material and add |
| CN103376804A (en) * | 2012-04-20 | 2013-10-30 | 北大方正集团有限公司 | Device used for controlling addition of liquid raw materials |
| CN103941598A (en) * | 2013-01-21 | 2014-07-23 | 北大方正集团有限公司 | Gas control system and gas control method |
| CN104121975A (en) * | 2014-07-30 | 2014-10-29 | 四川飞阳科技有限公司 | System and method for monitoring liquid level of liquid storage tank |
| CN106951001A (en) * | 2017-05-12 | 2017-07-14 | 成都市惠家胶粘制品有限公司 | One kind manufacture diaphragm stability of flow system |
| CN114200919A (en) * | 2020-08-31 | 2022-03-18 | 北京极智嘉科技股份有限公司 | Liquid injection system and method for spray disinfection robot, disinfection robot and liquid injection box |
| CN113187741A (en) * | 2021-04-29 | 2021-07-30 | 长鑫存储技术有限公司 | Liquid back suction system and back suction method |
| CN113187741B (en) * | 2021-04-29 | 2022-12-02 | 长鑫存储技术有限公司 | Liquid back suction system and back suction method |
| CN115073535A (en) * | 2022-06-22 | 2022-09-20 | 北京擎科生物科技有限公司 | Control method and control system of ammonolysis instrument |
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Granted publication date: 20100714 |
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| CX01 | Expiry of patent term |