CN103941598A - Gas control system and gas control method - Google Patents

Gas control system and gas control method Download PDF

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Publication number
CN103941598A
CN103941598A CN201310021589.9A CN201310021589A CN103941598A CN 103941598 A CN103941598 A CN 103941598A CN 201310021589 A CN201310021589 A CN 201310021589A CN 103941598 A CN103941598 A CN 103941598A
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liquid
control signal
gas
control
delivery system
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CN201310021589.9A
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CN103941598B (en
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李成
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Shenzhen Founder Microelectronics Co Ltd
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Peking University Founder Group Co Ltd
Shenzhen Founder Microelectronics Co Ltd
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Abstract

The invention discloses a gas control system and a gas control method. The gas control system comprises a machine device, a controller and a liquid supplying system, wherein the machine device is used for producing a first control signal when liquid is required and producing a second control signal when liquid is not required; the controller is connected with the machine device and used for receiving the first control signal and the second control signal; and the liquid supply system is connected with a liquid inlet pipeline of the machine device and the controller and also connected with a gas source device and a liquid source device. When the liquid supplying system receives the first control signal, the first control signal is carried out and gas from the gas source device is obtained, so that liquid pressure of the liquid supplying system is maintained to accord with a preset value, meanwhile liquid from the liquid source device is supplied to the machine device through the liquid inlet pipeline; and when the liquid supplying system receives the second control signal, the second control signal is carried out, so that gas cannot enter the liquid supplying system and supplying liquid to the machine device is stopped.

Description

A kind of gas control system and method thereof
Technical field
The present invention relates to automation field, particularly a kind of gas control system and method thereof.
Background technology
The liquid such as liquid pulse impact damper is applicable to need in a kind of technological process that is applied in the industries such as semiconductor, microelectronics, sun power intermittently, safe, stable supplying chemical product are to using in the chemicals supply system of board.
And liquid pulse impact damper of the prior art itself is to rely on the gas of sustainable supply steady pressure stablize the pressure of the liquid that passes through impact damper.Chemicals supply system needs repeatedly the supplying chemical product of short period to production equipment 24 hours every days, and therefore, all equipment all must be in open state.
Present inventor is realizing in the process of the embodiment of the present application technical scheme, at least finds to exist in prior art following technical matters:
Because all equipment all must be in open state, so, the air intake opening that exists liquid pulse impact damper can be always in opening, the small vibration of the fluid in impact damper all the windbag that causes impact damper is shaken back and forth make air intake opening needs ceaselessly air feed to impact damper, and this part gas is discharged from the gas outlet of impact damper, cause the technical matters of waste greatly;
Owing to there being above-mentioned technical matters, the windbag of impact damper can shake for a long time, also can cause windbag distortion and damage impact damper.
Summary of the invention
The embodiment of the present application provides a kind of gas control system, the air intake opening that can solve the liquid pulse impact damper of chemicals supply system in prior art can be always in opening, the small vibration of the fluid in impact damper all the windbag that causes impact damper is shaken back and forth make air intake opening needs ceaselessly air feed to impact damper, and this part gas is discharged from the gas outlet of impact damper, cause the technical matters of the technical matters of waste greatly.
In order to address the above problem, the embodiment of the present application provides a kind of gas control system, and this gas control system comprises:
Board equipment, for when the needs liquid, generates the first control signal, and in the time not needing described liquid, generates the second control signal;
Controller, with described board equipment connection, for receiving described the first control signal and described the second control signal;
Liquid delivery system, is connected with input duct and the described controller of described board equipment respectively, and described liquid delivery system is also connected with a gas source device and a fluid supply device respectively, wherein:
When described liquid delivery system receives after described the first control signal, carry out described the first control signal, obtain the gas from described gas source device, one pre-conditioned to keep fluid pressure in described liquid delivery system to meet, the described liquid from described fluid supply device is supplied with to described board equipment by described input duct simultaneously;
When described liquid delivery system receives after described the second control signal, carry out described the second control signal, so that described gas can not enter described liquid delivery system, and stop providing described liquid to described board equipment.
Preferably, described gas control system also comprises:
One valve control box, with described controller, described liquid delivery system and described board equipment connection, described valve control box has the valve corresponding with described board equipment respectively;
Wherein, in the time that described valve control box receives described the first control signal, carry out described the first control signal, so that described valve is in opening, in the time that described valve control box receives described the second control signal, carry out described the second control signal, so that described valve is in closed condition.
Preferably, described controller is specifically FPGA (Field Programmable Gate Array) input and output control panel.
Preferably, described liquid delivery system specifically comprises:
Liquid pulse impact damper, has an air intake opening, inlet, liquid outlet;
Intaker controller, is connected with described gas source device, described air intake opening respectively;
Feed liquor control device, is connected with described fluid supply device, described inlet respectively;
Device for output of liquid, respectively with described liquid outlet, described board equipment connection;
Wherein, when described feed liquor control device receives after described the first control signal, by carrying out described the first control signal, liquid in described fluid supply device is transported to described liquid pulse impact damper by described inlet, be transported to described device for output of liquid by described liquid outlet again, described device for output of liquid is transported to described liquid described board equipment again, simultaneously, described Intaker controller can be controlled described air inlet open, so that the gas in described gas source device is transported in described liquid pulse impact damper, to keep the fluid pressure in described liquid pulse impact damper to meet described pre-conditioned,
When described feed liquor control device receives after described the second control signal, by carrying out described the second control signal, described feed liquor control device stops described liquid to be transported to described liquid pulse impact damper by described inlet, simultaneously, described Intaker controller can be controlled described inlet close, so that described gas can not enter in described liquid pulse impact damper.
Preferably, described Intaker controller is specially a solenoid valve, and opening and closing of air intake opening on described liquid pulse impact damper controlled in the energising by described solenoid valve and power-off.
Preferably, described Intaker controller also comprises:
Whether whether one flow-monitoring device, is connected between described Intaker controller and described air intake opening, normal and monitor described Intaker controller and damage for monitoring air inlet.
Correspondingly, the embodiment of the present application also provides a kind of gas control method, be applied in a gas control system, described gas control system comprises: board equipment, controller with described board equipment connection, with the liquid delivery system that input duct and the described controller of described board equipment are connected respectively, described liquid delivery system is also connected with a gas source device and a fluid supply device respectively, and described gas control method comprises:
During at needs liquid, generate the first control signal at described board equipment, and in the time not needing described liquid, generate the second control signal;
Described controller receives described the first control signal and described the second control signal;
In the time that described liquid delivery system receives described the first control signal, carry out described the first control signal, obtain the gas from described gas source device, one pre-conditioned to keep fluid pressure in described liquid delivery system to meet, the described liquid from described fluid supply device is supplied with to described board equipment by described input duct simultaneously;
In the time that described liquid delivery system receives described the second control signal, carry out described the second control signal, so that described gas can not enter described liquid delivery system, and stop providing described liquid to described board equipment.
Preferably, after described controller receives described the first control signal and described the second control signal, described method also comprises: by one respectively with described controller, the valve control box of described liquid delivery system and described board equipment connection is controlled the open and close of valve corresponding with described board equipment on described valve control box, be specially in the time that described valve control box receives described the first control signal, carry out described the first control signal, so that described valve is in opening, in the time that described valve control box receives described the second control signal, carry out described the second control signal, so that described valve is in closed condition.
Preferably, described controller receives described the first control signal and described the second control signal is specially:
The input and output control panel of programmable logic device (PLD) control receives described the first control signal and described the second control signal.
Preferably, it is described in the time that described liquid delivery system receives described the first control signal, carry out described the first control signal, obtain the gas from described gas source device, one pre-conditioned to keep fluid pressure in described liquid delivery system to meet, the described liquid from described fluid supply device is supplied with to described board equipment by described input duct simultaneously and be specially:
The feed liquor control device of described liquid delivery system receives after described the first control signal, by carrying out described the first control signal, liquid in described fluid supply device is transported to described liquid pulse impact damper by the inlet on the liquid pulse impact damper of described liquid delivery system, be transported to again the device for output of liquid of described liquid delivery system by the liquid outlet on described liquid pulse impact damper, described device for output of liquid is transported to described liquid described board equipment again, simultaneously, air inlet open described in the Intaker controller control of described liquid delivery system on liquid pulse impact damper, so that the gas in described gas source device is transported in described liquid pulse impact damper, to keep the fluid pressure in described liquid pulse impact damper to meet described pre-conditioned.
Preferably, described in the time that described liquid delivery system receives described the second control signal, carry out described the second control signal, so that described gas can not enter described liquid delivery system, and stop providing described liquid to be specially to described board equipment:
The feed liquor control device of described liquid delivery system receives after described the second control signal, by carrying out described the second control signal, described feed liquor control device stops described liquid to be transported to described liquid pulse impact damper by the inlet on described liquid pulse impact damper, simultaneously, the Intaker controller of described liquid delivery system can be controlled the inlet close on described liquid pulse impact damper, so that described gas can not enter in described liquid pulse impact damper.
Preferably, air inlet open and control described inlet close described in described Intaker controller control, is specially: opening and closing of described air intake opening controlled in energising and power-off by a solenoid valve.
Preferably, receive after described the first control signal when described liquid delivery system described, carry out described the first control signal, after obtaining the gas from described gas source device, described method also comprises:
Be connected to flow-monitoring device between described Intaker controller and described air intake opening monitoring air inlet by one whether normal and monitor described Intaker controller and whether damage.
The one or more technical schemes that provide in the embodiment of the present application, at least have following technique effect or advantage:
1, owing to having adopted according to the actual demand of board equipment, when liquid in impact damper is not carried, the technological means that the air intake opening of impact damper is closed automatically, solve the air intake opening of the liquid pulse impact damper of chemicals supply system in prior art always in the time of opening, the small vibration of the fluid in impact damper all the windbag that causes impact damper is shaken back and forth make air intake opening needs ceaselessly air feed to impact damper, and this part gas is discharged from the gas outlet of impact damper, cause the technical matters of waste greatly, therefore, the air intake opening with impact damper is not subject to internal liquid concussion and causes air intake opening to continue the gas that air inlet causes wasting, can also in the time needing impact damper liquid to carry, can normally play the technique effect of the effect of buffering liquid pressure simultaneously.
2, owing to having adopted above-mentioned technological means, thereby can avoid causing because of the concussion of liquid in the pipeline of in impact damper and rear portion the waste of the gas of supplying with impact damper, and reduce to reach because liquid concussion causes the long-time concussion back and forth of the inner windbag of impact damper the danger that mechanical fatigue causes windbag to damage, thereby improve the serviceable life of impact damper.
Brief description of the drawings
Fig. 1 is the structural representation of a kind of gas control system in the embodiment of the present application;
Fig. 2 is the structural representation of liquid delivery system in the embodiment of the present application;
Fig. 3 is in the embodiment of the present application when board device fabrication the first control signal, shown in the particular flow sheet of gas control method;
Fig. 4 is in the embodiment of the present application when board device fabrication the second control signal, shown in the particular flow sheet of gas control method.
Embodiment
The embodiment of the present application is by providing a kind of gas control system, solve the air intake opening of liquid pulse impact damper of chemicals supply system always in the time of opening, the small vibration of the fluid in impact damper all the windbag that causes impact damper is shaken back and forth make air intake opening needs ceaselessly air feed to impact damper, and this part gas is discharged from the gas outlet of impact damper, cause the technical matters of waste greatly.
The technical scheme of the embodiment of the present application is for solving the problems of the technologies described above, and general thought is as follows:
On the air intake opening of the liquid pulse impact damper in existing gas control system, connect an Intaker controller, the signal that sends " needing liquid " when the board equipment in gas control system is after controller, controller can send to liquid delivery system by receiving " needing liquid " signal, liquid delivery system receives after " needing liquid " signal, feed liquor control device in this liquid delivery system can start operation, liquid in one fluid supply device is transported in liquid pulse impact damper by the inlet on liquid pulse impact damper, simultaneously, Intaker controller in this liquid delivery system can be controlled the air inlet open on liquid pulse impact damper, and the gas in a gas source device is transported in this liquid pulse impact damper.Based on same principle, the signal that sends " not needing liquid " when the board equipment in gas control system is after controller, controller can send to liquid delivery system by receiving " not needing liquid " signal, liquid delivery system receives after " not needing liquid " signal, feed liquor control device in this liquid delivery system can be out of service, stop liquid in conveying liquid body source device in liquid pulse impact damper, simultaneously, described Intaker controller can be controlled the inlet close on liquid pulse impact damper, stop gas in conveying gas body source device in liquid pulse impact damper.
By adopting the technical scheme in the embodiment of the present application, air inlet open in the time of the feed liquor control device operation of impact damper front end on controller buffer is to give gas, inlet close in the time that the feed liquor control device of impact damper front end is out of service on controller buffer to be to stop to gas, thereby just can realize the whether control of air inlet of the air intake opening on liquid pulse impact damper.So just avoid air bag that air intake opening causes impact damper to conductance for a long time to cause windbag to shorten serviceable life in concussion state for a long time, and unnecessary energy dissipation.
In order better to understand technique scheme, below in conjunction with Figure of description and concrete embodiment, technique scheme is described in detail.
The structure of a kind of gas control system that the embodiment of the present application provides as shown in Figure 1, specifically comprises:
Board equipment 101, for when the needs liquid, generates the first control signal, and in the time not needing described liquid, generates the second control signal;
Controller 102, is connected with described board equipment 101, for receiving described the first control signal and described the second control signal;
Liquid delivery system 103, is connected with input duct and the described controller 102 of described board equipment 101 respectively, and described liquid delivery system 103 is also connected with a gas source device 105 and a fluid supply device 106 respectively, wherein:
When described liquid delivery system 103 receives after described the first control signal, carry out described the first control signal, obtain the gas from described gas source device 105, one pre-conditioned to keep fluid pressure in described liquid delivery system 103 to meet, the described liquid from described fluid supply device 106 is supplied with to described board equipment 101 by described input duct simultaneously;
When described liquid delivery system 103 receives after described the second control signal, carry out described the second control signal, so that described gas can not enter described liquid delivery system 103, and stop providing described liquid to described board equipment 101.
In concrete implementation process, described gas control system also comprises valve control box 104, respectively with described controller 102, described liquid delivery system 103 and described board equipment 101 connect, described valve control box 104 has the valve corresponding with described board equipment 101, wherein, in the time that described valve control box 104 receives described the first control signal, carry out described the first control signal, so that described valve is in opening, in the time that described valve control box 104 receives described the second control signal, carry out described the second control signal, so that described valve is in closed condition.
In implementation process particularly, board equipment 101 is generally the equipment being applied in the industries such as semiconductor, microelectronics, sun power, can send the signal that whether needs liquid accordingly according to the actual demand of self, therefore, the first control signal is herein " needing liquid " signal of board equipment 101, and the second control signal is board equipment 101 signal that " do not need liquid ".
In implementation process particularly, described controller 102 is specially FPGA (Field Programmable Gate Array) input and output control panel.By programmable logic controller (PLC) automatically settling signal reception and the signal receiving is sent to corresponding other relevant devices.
In specific implementation process, described liquid delivery system 103 as shown in Figure 2, specifically comprises:
Liquid pulse impact damper 1031, has an air intake opening 10311, inlet 10312, liquid outlet 10313;
Intaker controller 1032, is connected with described gas source device 105, described air intake opening 10311 respectively;
Feed liquor control device 1033, is connected with described fluid supply device 106, described inlet 10312 respectively;
Device for output of liquid 1034, is connected with described liquid outlet 10313, described board equipment 101 respectively;
Wherein, when described feed liquor control device 1033 receives after described the first control signal, by carrying out described the first control signal, liquid in described fluid supply device 106 is transported in described liquid pulse impact damper 1031 by described inlet 10312, be transported to described device for output of liquid 1034 by described liquid outlet 10313 again, described device for output of liquid 1034 is transported to described liquid described board equipment 101 again, simultaneously, described Intaker controller 1032 can be controlled described air intake opening 10311 and open, so that the gas in described gas source device 105 is transported in described liquid pulse impact damper 1031, to keep the fluid pressure in described liquid pulse impact damper 1031 to meet described pre-conditioned,
When described feed liquor control device 1033 receives after described the second control signal, by carrying out described the second control signal, described feed liquor control device 1033 stops described liquid to be transported in described liquid pulse impact damper 1031 by described inlet 10312, simultaneously, described Intaker controller 1032 can be controlled described air intake opening 10311 and close, so that described gas can not enter in described liquid pulse impact damper 1031.
In specific implementation process, described Intaker controller 1032 can be a solenoid valve, this solenoid valve is specially a single automatically controlled normally closed solenoid valve, and opening and closing of air intake opening 10311 on described liquid pulse impact damper 1031 controlled in the energising by the automatically controlled normally closed solenoid valve of described list and power-off; Intaker controller 1032 can also be a programmable logic device (PLD), realizes the control of opening with closing to air intake opening 10311 by this logical device.For the scope that is not limited to for example described Intaker controller 1032 of Intaker controller in the embodiment of the present application 1032, every can realization opened with the device of the control of closing and all should be included in the claimed scope of the application described air intake opening 10311 above.
And in concrete implementation process, described feed liquor control device 1033 is specifically as follows volumetric pump, by this volumetric pump, the liquid in fluid supply device 106 is transported in liquid pulse impact damper 1031, feed liquor control device 1033 can also be vane pump, pump up same purpose with volume, for the liquid of fluid supply device 106 is transported in liquid pulse impact damper 1031, above for the scope that is not limited to for example described feed liquor control device 1033 of feed liquor control device 1033 in the embodiment of the present application, the every device that can realize the liquid in fluid supply device 106 being transported in liquid pulse impact damper 1031 all should be included in the claimed scope of the application.
In specific implementation process, described liquid delivery system 103 also comprises:
Whether whether one flow-monitoring device, is connected between described Intaker controller 1032 and described air intake opening 10311, normal and monitor described Intaker controller 1032 and damage for monitoring air inlet.More specifically, this flow-monitoring device is a gas flow meter, can monitor and in the unit interval, flow to the airshed in liquid pulse impact damper 1031, when the value of this airshed illustrates that the air-flow flowing in liquid pulse impact damper 1031 is normal in the time that a fixed value slightly changes up and down, and because air intake opening can be closed in the time that feed liquor control device 1033 is out of service, therefore, the airshed that gas flow meter monitors can be in feed liquor control device 1033 vanishing out of service, in the time that feed liquor control device 1033 moves, recover normal, so whether the air flow value monitoring also can be damaged for detection of the Intaker controller of leading portion 1032.Such as in the time that the air flow value monitoring is 100ml/min, if follow-up air flow value is 95ml/min, when 102ml/min, illustrate that air inlet is normal, and when the air flow value detecting promising during close to zero situation, illustrate that Intaker controller 1032 is normal, otherwise, illustrate that Intaker controller 1032 has damaged.The embodiment of the present application does not limit the concrete scope of described flow monitoring device, as long as whether can realize monitoring air inlet normal and monitor the monitoring device whether described Intaker controller 1032 damage and all should be included in the claimed scope of the application.
Correspondingly, the embodiment of the present application also provides the gas control method corresponding with described gas control system, described gas control system comprises: board equipment 101, controller 102 with described board equipment connection, the liquid delivery system 103 being connected respectively with input duct and the described controller 102 of described board equipment 101, described liquid delivery system 103 is also connected with a gas source device 105 and a fluid supply device 106 respectively, described method comprises two kinds of situations, for the ease of understanding, to be explained respectively below, the first situation is that board equipment 101 is in the time of described liquid delivery system 103 feed fluid of needs, its concrete steps as described in Figure 3, comprise:
Step 301: described board equipment 101, in the time of needs liquid, generates the first control signal, this first control signal is actual is " needing liquid " signal;
Need described liquid delivery system 103 feed fluids at described board equipment 101, and then generate after first control signal of " needing liquid ", described method enters step 302: described controller 102 receives described the first control signal, in concrete implementation process, described gas control system also comprises a valve control box 104, respectively with described controller 102, described liquid delivery system 103 and described board equipment 101 connect, described valve control box 104 has the valve corresponding with described board equipment 101, therefore, when described controller 102 receives after the first control signal, described the first control signal can be sent to described valve control box 104 and liquid delivery system 103, this valve control box 104 receives after described the first control signal, can carry out this first control signal, control the valve corresponding with the board equipment 101 that sends " needing liquid " signal in opening, like this, liquid just can be transported to by the valve of opening in the board equipment 101 that sends " needing liquid " signal.
Receive described the first control signal and this signal is sent to described valve control box 104 at controller 102, and after liquid delivery system 103, described method enters step 303: in the time that described liquid delivery system 103 receives described the first control signal, carry out described the first control signal, obtain the gas from described gas source device 105, one pre-conditioned to keep fluid pressure in described liquid delivery system 103 to meet, the described liquid from described fluid supply device 106 is supplied with to described board equipment 101 by described input duct simultaneously;
In specific implementation process, the concrete structure of described liquid delivery system 103 as shown in Figure 2, because the embodiment of the present application elaborates to this, does not therefore repeat them here.
And in concrete implementation process, the detailed process of step 303 is: when the described feed liquor control device 1033 in liquid delivery system 103 receives after described the first control signal, by carrying out described the first control signal, liquid in described fluid supply device 106 is transported in described liquid pulse impact damper 1031 by described inlet 10312, be transported to described device for output of liquid 1034 by described liquid outlet 10313 again, described device for output of liquid 1034 is transported to described liquid in described board equipment 101 by valve corresponding with the board equipment 101 that sends the first control signal in valve control box 104 again, simultaneously, described Intaker controller 1032 can be controlled described air intake opening 10311 and open, so that the gas in described gas source device 105 is transported in described liquid pulse impact damper 1031, to keep the fluid pressure in described liquid pulse impact damper 1031 to meet described pre-conditioned.
In specific implementation process, receive after described the first control signal when described liquid delivery system 103 described, carry out described the first control signal, after obtaining the gas from described gas source device 105, described gas control method also comprises:
Be connected to flow-monitoring device between described Intaker controller 1032 and described air intake opening 10311 monitoring air inlet by one whether normal and monitor described Intaker controller 1032 and whether damage.
In specific implementation process, described flow-monitoring device is a gas flow meter, can monitor and in the unit interval, flow to the airshed in liquid pulse impact damper 1031, when the value of this airshed illustrates that the air-flow flowing in liquid pulse impact damper 1031 is normal in the time that a fixed value slightly changes up and down, and because air intake opening can be closed in the time that feed liquor control device 1033 is out of service, therefore, the airshed that gas flow meter monitors can be in feed liquor control device 1033 vanishing out of service, in the time that feed liquor control device 1033 moves, recover normal, so whether the air flow value monitoring also can be damaged for detection of the Intaker controller of leading portion 1032.Such as in the time that the air flow value monitoring is 100ml/min, if follow-up air flow value is 95ml/min, when 102ml/min, illustrate that air inlet is normal, and in the time that the air flow value detecting has close to zero situation, illustrate that Intaker controller 1032 is normal, otherwise, illustrate that Intaker controller 1032 has damaged.Certainly, described flow-monitoring device is not limited in gas flow meter, it can also be a gas warning system, in the time that the fluctuation of airshed is in a default scope, illustrate that the air-flow flowing in liquid pulse impact damper 1031 is normal, otherwise send chimes of doom, illustrate that air inlet is undesired, if and when the undulating quantity of airshed can not be detected, illustrate that Intaker controller 1032 has damaged.Such as, airshed is 100ml/min, 95ml/min, when 102ml/min, and suppose that default fluctuation range is ± 5ml/min, illustrate that the air-flow flowing in liquid pulse impact damper 1031 is normal, in the time that the fluctuation range of the airshed detecting is zero always, illustrate that Intaker controller 1032 has damaged.The embodiment of the present application does not limit the concrete scope of described flow monitoring device, as long as whether can realize monitoring air inlet normal and monitor the monitoring device whether described Intaker controller 1032 damage and all should be included in the claimed scope of the application.
And another kind of situation is board equipment while not needing liquid, the concrete steps of the method as described in Figure 4, comprising:
Step 401: described board equipment 101, in the time not needing liquid, generates the second control signal, this first control signal is actual is " not needing liquid " signal;
Do not need described liquid delivery system 103 feed fluids at described board equipment 101, and then generate after second control signal of " not needing liquid ", described method enters step 402: described controller 102 receives described the second control signal, in concrete implementation process, described gas control system also comprises a valve control box 104, respectively with described controller 102, described liquid delivery system 103 and described board equipment 101 connect, described valve control box 104 has the valve corresponding with described board equipment 101, therefore, when described controller 102 receives after the second control signal, described the second control signal can be sent to described valve control box 104 and liquid delivery system 103, this valve control box 104 receives after described the second control signal, can carry out this second control signal, control the valve corresponding with the board equipment 101 that sends " not needing liquid " signal in closed condition, like this, liquid delivery system 103 just can not have been supplied with corresponding board equipment 101 liquid.
Receive described the first control signal and this signal is sent to described valve control box 104 at controller 102, and after liquid delivery system 103, described method enters step 403: in the time that described liquid delivery system 103 receives described the second control signal, carry out described the second control signal, so that described gas can not enter described liquid delivery system 103, and stop providing described liquid to described board equipment 101;
In specific implementation process, the concrete structure of described liquid delivery system 103 as shown in Figure 2, because the embodiment of the present application elaborates to this, does not therefore repeat them here.
And in concrete implementation process, the detailed process of step 403 is: when described feed liquor control device 1033 receives after described the second control signal, by carrying out described the second control signal, described feed liquor control device 1033 stops described liquid to be transported in described liquid pulse impact damper 1031 by described inlet 10312, simultaneously, described Intaker controller 1032 can be controlled described air intake opening 10311 and close, so that described gas can not enter in described liquid pulse impact damper 1031.
By the method shown in Fig. 3 and Fig. 4, just can realize in the time that the feed liquor control device 1033 of impact damper front end moves the air intake opening 10311 on controller buffer opens with to gas, air intake opening 10311 in the time that the feed liquor control device 1033 of impact damper front end is out of service on controller buffer closes to stop to gas, thereby just can realize the whether control of air inlet of the air intake opening 10311 on liquid pulse impact damper 1031.
In specific implementation process, device 102 processed described in the method shown in Fig. 3 and Fig. 4 receives described the first control signal and described the second control signal is specially: receive described the first control signal and described the second control signal by the input and output control panel of programmable logic device (PLD) control.
And in specific implementation process, the described Intaker controller 1032 in the method shown in Fig. 3 and Fig. 4 is controlled described air intake opening 10311 and is opened and control described air intake opening 10311 and close and control opening and closing of described air intake opening for the energising by a solenoid valve and power-off.This solenoid valve is specially a single automatically controlled normally closed solenoid valve, and opening and closing of air intake opening 10311 on described liquid pulse impact damper 1031 controlled in the energising by the automatically controlled normally closed solenoid valve of described list and power-off; Or realize the control of opening with closing to air intake opening 10311 by a programmable logic device (PLD).For the scope that is not limited to for example described Intaker controller 1032 of Intaker controller in the embodiment of the present application 1032, every can realization opened with the device of the control of closing and all should be included in the claimed scope of the application described air intake opening 10311 above.
And in concrete implementation process, the described feed liquor control device 1033 in the method shown in Fig. 3 and Fig. 4 is specifically as follows volumetric pump, by this volumetric pump, the liquid in fluid supply device 106 is transported in liquid pulse impact damper 1031; Or can be vane pump; pump up same purpose with volume; for the liquid of fluid supply device 106 is transported in liquid pulse impact damper 1031; for the scope that is not limited to for example described feed liquor control device 1033 of feed liquor control device 1033 in the embodiment of the present application, the every device that can realize the liquid in fluid supply device 106 being transported in liquid pulse impact damper 1031 all should be included in the claimed scope of the application above.
By the one or more technical schemes in the embodiment of the present application, can be achieved as follows technique effect:
1, owing to having adopted according to the actual demand of board equipment, when liquid in impact damper is not carried, the technological means that the air intake opening of impact damper is closed automatically, solve the air intake opening of the liquid pulse impact damper of chemicals supply system in prior art always in the time of opening, the small vibration of the fluid in impact damper all the windbag that causes impact damper is shaken back and forth make air intake opening needs ceaselessly air feed to impact damper, and this part gas is discharged from the gas outlet of impact damper, cause the technical matters of waste greatly, therefore, the air intake opening with impact damper is not subject to internal liquid concussion and causes air intake opening to continue the gas that air inlet causes wasting, can also in the time needing impact damper liquid to carry, can normally play the technique effect of the effect of buffering liquid pressure simultaneously.
2, owing to having adopted above-mentioned technological means, thereby can avoid causing because of the concussion of liquid in the pipeline of in impact damper and rear portion the waste of the gas of supplying with impact damper, and reduce to reach because liquid concussion causes the long-time concussion back and forth of the inner windbag of impact damper the danger that mechanical fatigue causes windbag to damage, thereby improve the serviceable life of impact damper.
In this instructions, the present invention is described with reference to its specific embodiment, and still, those skilled in the art can carry out various changes and modification and not depart from the spirit and scope of the present invention the present invention.Like this, if these amendments of the present invention and within modification belongs to the scope of the claims in the present invention and equivalent technologies thereof, the present invention is also intended to comprise these changes and modification interior.

Claims (13)

1. a gas control system, is characterized in that, described gas control system comprises:
Board equipment, for when the needs liquid, generates the first control signal, and in the time not needing described liquid, generates the second control signal;
Controller, with described board equipment connection, for receiving described the first control signal and described the second control signal;
Liquid delivery system, is connected with input duct and the described controller of described board equipment respectively, and described liquid delivery system is also connected with a gas source device and a fluid supply device respectively, wherein:
When described liquid delivery system receives after described the first control signal, carry out described the first control signal, obtain the gas from described gas source device, one pre-conditioned to keep fluid pressure in described liquid delivery system to meet, the described liquid from described fluid supply device is supplied with to described board equipment by described input duct simultaneously;
When described liquid delivery system receives after described the second control signal, carry out described the second control signal, so that described gas can not enter described liquid delivery system, and stop providing described liquid to described board equipment.
2. gas control system as claimed in claim 1, is characterized in that, described gas control system also comprises:
One valve control box, with described controller, described liquid delivery system and described board equipment connection, described valve control box has the valve corresponding with described board equipment respectively;
Wherein, in the time that described valve control box receives described the first control signal, carry out described the first control signal, so that described valve is in opening, in the time that described valve control box receives described the second control signal, carry out described the second control signal, so that described valve is in closed condition.
3. gas control system as claimed in claim 1, is characterized in that, described controller is specifically FPGA (Field Programmable Gate Array) input and output control panel.
4. gas control system as claimed in claim 1, is characterized in that, described liquid delivery system specifically comprises
Liquid pulse impact damper, has an air intake opening, inlet, liquid outlet;
Intaker controller, is connected with described gas source device, described air intake opening respectively;
Feed liquor control device, is connected with described fluid supply device, described inlet respectively;
Device for output of liquid, respectively with described liquid outlet, described board equipment connection;
Wherein, when described feed liquor control device receives after described the first control signal, by carrying out described the first control signal, liquid in described fluid supply device is transported to described liquid pulse impact damper by described inlet, be transported to described device for output of liquid by described liquid outlet again, described device for output of liquid is transported to described liquid described board equipment again, simultaneously, described Intaker controller can be controlled described air inlet open, so that the gas in described gas source device is transported in described liquid pulse impact damper, to keep the fluid pressure in described liquid pulse impact damper to meet described pre-conditioned,
When described feed liquor control device receives after described the second control signal, by carrying out described the second control signal, described feed liquor control device stops described liquid to be transported to described liquid pulse impact damper by described inlet, simultaneously, described Intaker controller can be controlled described inlet close, so that described gas can not enter in described liquid pulse impact damper.
5. gas control system as claimed in claim 4, is characterized in that, described Intaker controller is specially a solenoid valve, and opening and closing of air intake opening on described liquid pulse impact damper controlled in the energising by described solenoid valve and power-off.
6. gas control system as claimed in claim 4, is characterized in that, described Intaker controller also comprises:
Whether whether one flow-monitoring device, is connected between described Intaker controller and described air intake opening, normal and monitor described Intaker controller and damage for monitoring air inlet.
7. a gas control method, be applied to a gas control system, it is characterized in that, described gas control system comprises: board equipment, controller with described board equipment connection, with the liquid delivery system that input duct and the described controller of described board equipment are connected respectively, described liquid delivery system is also connected with a gas source device and a fluid supply device respectively, and described method comprises:
Described board equipment, in the time of needs liquid, generates the first control signal, and in the time not needing described liquid, generates the second control signal;
Described controller receives described the first control signal and described the second control signal;
In the time that described liquid delivery system receives described the first control signal, carry out described the first control signal, obtain the gas from described gas source device, one pre-conditioned to keep fluid pressure in described liquid delivery system to meet, the described liquid from described fluid supply device is supplied with to described board equipment by described input duct simultaneously;
In the time that described liquid delivery system receives described the second control signal, carry out described the second control signal, so that described gas can not enter described liquid delivery system, and stop providing described liquid to described board equipment.
8. gas control method as claimed in claim 7, is characterized in that, after described controller receives described the first control signal and described the second control signal, described method also comprises:
Control the open and close of corresponding valve with described board equipment on described valve control box with the valve control box of described controller, described liquid delivery system and described board equipment connection respectively by one, be specially in the time that described valve control box receives described the first control signal, carry out described the first control signal, so that described valve is in opening, in the time that described valve control box receives described the second control signal, carry out described the second control signal, so that described valve is in closed condition.
9. gas control method as claimed in claim 7, is characterized in that, described controller receives described the first control signal and described the second control signal is specially:
The input and output control panel of programmable logic device (PLD) control receives described the first control signal and described the second control signal.
10. gas control method as claimed in claim 7, it is characterized in that, it is described in the time that described liquid delivery system receives described the first control signal, carry out described the first control signal, obtain the gas from described gas source device, one pre-conditioned to keep fluid pressure in described liquid delivery system to meet, the described liquid from described fluid supply device is supplied with to described board equipment by described input duct simultaneously, be specially:
The feed liquor control device of described liquid delivery system receives after described the first control signal, by carrying out described the first control signal, liquid in described fluid supply device is transported to described liquid pulse impact damper by the inlet on the liquid pulse impact damper of described liquid delivery system, be transported to again the device for output of liquid of described liquid delivery system by the liquid outlet on described liquid pulse impact damper, described device for output of liquid is transported to described liquid described board equipment again, simultaneously, air inlet open described in the Intaker controller control of described liquid delivery system on liquid pulse impact damper, so that the gas in described gas source device is transported in described liquid pulse impact damper, to keep the fluid pressure in described liquid pulse impact damper to meet described pre-conditioned.
11. gas control methods as claimed in claim 7, it is characterized in that, it is described in the time that described liquid delivery system receives described the second control signal, carry out described the second control signal, so that described gas can not enter described liquid delivery system, and stop providing described liquid to described board equipment, be specially:
The feed liquor control device of described liquid delivery system receives after described the second control signal, by carrying out described the second control signal, described feed liquor control device stops described liquid to be transported to described liquid pulse impact damper by the inlet on described liquid pulse impact damper, simultaneously, the Intaker controller of described liquid delivery system can be controlled the inlet close on described liquid pulse impact damper, so that described gas can not enter in described liquid pulse impact damper.
12. gas control methods as described in claim 10 or 11, it is characterized in that, air inlet open and control described inlet close described in described Intaker controller control, is specially: opening and closing of described air intake opening controlled in energising and power-off by a solenoid valve.
13. gas control methods as claimed in claim 10, it is characterized in that, receive after described the first control signal when described liquid delivery system described, carry out described the first control signal, after obtaining the gas from described gas source device, described method also comprises:
Be connected to flow-monitoring device between described Intaker controller and described air intake opening monitoring air inlet by one whether normal and monitor described Intaker controller and whether damage.
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