CN201527414U - Ultrasonic transmit-receive unit for ultrasonic scanning microscope - Google Patents

Ultrasonic transmit-receive unit for ultrasonic scanning microscope Download PDF

Info

Publication number
CN201527414U
CN201527414U CN2009202173404U CN200920217340U CN201527414U CN 201527414 U CN201527414 U CN 201527414U CN 2009202173404 U CN2009202173404 U CN 2009202173404U CN 200920217340 U CN200920217340 U CN 200920217340U CN 201527414 U CN201527414 U CN 201527414U
Authority
CN
China
Prior art keywords
ultrasonic
module
scanning microscope
input end
receiver
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2009202173404U
Other languages
Chinese (zh)
Inventor
邴守东
何桂萱
黄晓鹏
许博
杨志
孙彬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Semiconductor Equipment Institute
Original Assignee
Beijing Semiconductor Equipment Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing Semiconductor Equipment Institute filed Critical Beijing Semiconductor Equipment Institute
Priority to CN2009202173404U priority Critical patent/CN201527414U/en
Application granted granted Critical
Publication of CN201527414U publication Critical patent/CN201527414U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

The utility model relates to an ultrasonic transmit-receive unit for an ultrasonic scanning microscope, which comprises an ultrasonic transmit receiver and an ultrasonic transducer, wherein the ultrasonic transmit receiver consists of an ultrasonic transmitting module, an ultrasonic receiving module, a logic control module and a serial communication module; the output end of the ultrasonic transmitting module is connected with the input end of the ultrasonic transducer; the output end of the ultrasonic transducer is connected with the input end of the ultrasonic receiving module; the transmit-receive unit also comprises a linear scale; and the output end of the linear scale is connected with the input end of the logic control module. The utility model has the benefit that the resolution and imaging quality of built images are ensured since the problem of precise and synchronous scanning trigger problem of the ultrasonic scanning microscope is solved.

Description

Ultrasonic scanning microscope ultrasonic emitting receiving trap
Technical field
The utility model relates to a kind of ultrasonic scanning microscope ultrasonic emitting receiving trap, belongs to ultrasonic detection device.
Background technology
Along with the production scale of electronic product is increasing, kind is more and more, the integrated degree of circuit and production automation degree also improve accordingly, quality requirements to device is also more and more higher simultaneously, for guaranteeing the reliability of device, it is indispensable flow process that packaged device is carried out Non-Destructive Testing, detects defectives such as insensitive layering, cavity, crack and uses more and more widely and the ultrasonic scanning microscope can detect X ray.The ultrasonic scanning microscope is the line raster formula that the fits into motion by movement executing mechanism scan axis and stepping axle, in the scan axis motion, launch ultrasound wave and receive reflection echo, with the analog signal conversion of reflection echo is digital signal, and makes up different types of detected image by various transfer algorithms.Usually scan axis has step motor drive open loop control and two kinds of structures of driven by servomotor closed-loop control, when scan axis is carried out motion, software is counted position signalling, the control ultrasonic transmitter-receiver produces pumping signal when count value reaches the numerical value that pre-sets, because the real-time of software counting is relatively poor, the software counting can not accurately reflect the physical location of motion simultaneously, to such an extent as to the image that makes up is not very accurate.
The ultrasonic emitting receiving trap is the microscopical core of ultrasonic scanning, and it produces the excitation ultrasonic transducer and produces hyperacoustic high voltage narrow pulse signal, and can receive reflection echo, is the raw data of design of graphics picture with analog signal conversion by capture card.The ultrasonic emitting receiving trap of comparative maturity comprises ultrasonic transmitter-receiver and ultrasonic transducer two parts at present.Described ultrasonic transmitter-receiver is made up of ultrasonic emitting module, ultrasound wave receiver module, Logic control module, serial communication module; The input end of the output termination ultrasonic transducer of described ultrasonic emitting module, the input end of the described ultrasound wave receiver module of output termination of described ultrasonic transducer; The input end of described logic module is controlled by level.Ultrasonic transmitter-receiver produces the excitation ultrasonic transducer and produces hyperacoustic high voltage narrow pulse signal, and can receive reflection ultrasonic signal; Ultrasonic transducer generally adopts materials such as piezoelectric ceramics or lithium niobate to make, and produces ultrasound wave by the high pressure excitation, and can receive the ultrasonic signal of reflection, and mechanical wave is converted to electric signal.This conventional equipment adopts the mode of software trigger owing to lack grating chi sync bit feedback, has a triggered time to have error, the inaccurate defective in position.
Summary of the invention
Technical problem to be solved in the utility model provides a kind of ultrasonic scanning microscope precise synchronization that can solve and scans triggering, guarantees the resolution of design of graphics picture and the ultrasonic scanning microscope ultrasonic emitting receiving trap of image quality.
The utility model adopts following technical scheme:
The utility model includes ultrasonic transmitter-receiver and ultrasonic transducer; Described ultrasonic transmitter-receiver is made up of ultrasonic emitting module, ultrasound wave receiver module, Logic control module, serial communication module; The input end of the output termination ultrasonic transducer of described ultrasonic emitting module, the input end of the described ultrasound wave receiver module of output termination of described ultrasonic transducer; It is characterized in that it also includes the grating chi, the input end of the described Logic control module of output termination of described grating chi.
Be connected to prime amplifier between described ultrasound emission receiver and the ultrasonic transducer.
Principle of work of the present utility model is as follows:
Described ultrasonic emitting receiving trap is counted grating chi signal by Logic control module, sync bit triggers the high voltage narrow pulse signal that the ultrasonic emitting module produces the excitation ultrasonic transducer, and produces ultrasonic signal by prime amplifier amplification back excitation ultrasonic transducer.
Described ultrasonic emitting receiving trap is converted to electric signal by ultrasonic transducer with reflection echo signal, and by after prime amplifier amplification and the filtering, is sent to the ultrasound wave receiver module.
Described ultrasonic emitting receiving trap carries out control able to programme by serial communication module.
The beneficial effects of the utility model are to scan the problem that triggers owing to solved ultrasonic scanning microscope precise synchronization, thereby have guaranteed the resolution and the image quality of design of graphics picture.
Description of drawings
Fig. 1 is a theory diagram of the present utility model.
Embodiment
Embodiment 1 (see figure 1):
By embodiment shown in Figure 11 as can be known, it is made up of ultrasonic transmitter-receiver, prime amplifier, ultrasonic transducer, grating chi four parts; Described ultrasonic transmitter-receiver is made up of ultrasonic emitting module, ultrasound wave receiver module, Logic control module, serial communication module; The output terminal of described ultrasonic emitting module connects the input end of ultrasonic transducer through prime amplifier, and the output terminal of described ultrasonic transducer connects the input end of described ultrasound wave receiver module through prime amplifier; The input end of the described Logic control module of output termination of described grating chi.
In the present embodiment, the model of ultrasonic transmitter-receiver is DPR500, and the model of described prime amplifier is RP-H1.Described grating chi is the grating chi of 0.5 μ m resolution.The model of ultrasonic transducer is V3419.
In the present embodiment, the function of each several part is as follows:
The ultrasonic emitting module produces the high voltage narrow pulse pumping signal; The ultrasound wave receiver module receives the reflected signal of ultrasonic transducer; Logic control module is counted grating chi signal, and can produce trigger pip; Computing machine is by the able to programme control of serial communication module realization to ultrasonic transmitter-receiver.
Prime amplifier RP-H1 is installed near the ultrasonic transducer nearby, makes signal connecting line short as much as possible, and the RP-H1 indoor design has filtering circuit, makes signal have very high signal to noise ratio (S/N ratio).
By the counting of Logic control module to grating chi signal, when count value reached the value of setting, control ultrasonic emitting module produced excitation pulse signal, and this mode has guaranteed the real-time of triggering and the accuracy of position.
Embodiment 2 (referring to Fig. 1):
Embodiment 2 is that with the difference of embodiment 1 it does not have prime amplifier.

Claims (4)

1. ultrasonic scanning microscope ultrasonic emitting receiving trap, it includes ultrasonic transmitter-receiver and ultrasonic transducer; Described ultrasonic transmitter-receiver is made up of ultrasonic emitting module, ultrasound wave receiver module, Logic control module, serial communication module; The input end of the output termination ultrasonic transducer of described ultrasonic emitting module, the input end of the described ultrasound wave receiver module of output termination of described ultrasonic transducer; It is characterized in that it also includes the grating chi, the input end of the described Logic control module of output termination of described grating chi.
2. ultrasonic scanning microscope ultrasonic emitting receiving trap according to claim 1 is characterized in that being connected to prime amplifier between described ultrasound emission receiver and ultrasonic transducer.
3. ultrasonic scanning microscope ultrasonic emitting receiving trap according to claim 2, the model that it is characterized in that described prime amplifier is RP-H1.
4. ultrasonic scanning microscope ultrasonic emitting receiving trap according to claim 3 is characterized in that described grating chi is the grating chi of 0.5 μ m resolution.
CN2009202173404U 2009-09-29 2009-09-29 Ultrasonic transmit-receive unit for ultrasonic scanning microscope Expired - Fee Related CN201527414U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2009202173404U CN201527414U (en) 2009-09-29 2009-09-29 Ultrasonic transmit-receive unit for ultrasonic scanning microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2009202173404U CN201527414U (en) 2009-09-29 2009-09-29 Ultrasonic transmit-receive unit for ultrasonic scanning microscope

Publications (1)

Publication Number Publication Date
CN201527414U true CN201527414U (en) 2010-07-14

Family

ID=42518699

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2009202173404U Expired - Fee Related CN201527414U (en) 2009-09-29 2009-09-29 Ultrasonic transmit-receive unit for ultrasonic scanning microscope

Country Status (1)

Country Link
CN (1) CN201527414U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102072935A (en) * 2010-10-26 2011-05-25 浙江大学 Automatic focusing method of scanning ultrasonic microscope
CN102419439A (en) * 2011-08-18 2012-04-18 上海华碧检测技术有限公司 Method for distinguishing inclination of plastic packaged component chip

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102072935A (en) * 2010-10-26 2011-05-25 浙江大学 Automatic focusing method of scanning ultrasonic microscope
CN102419439A (en) * 2011-08-18 2012-04-18 上海华碧检测技术有限公司 Method for distinguishing inclination of plastic packaged component chip

Similar Documents

Publication Publication Date Title
CN103812477B (en) Ultrasonic wave transmitting circuit and time delay correction method thereof
CN101458332B (en) Ultrasonic ranging method and system thereof
CN106680814B (en) Rotation sweep 3-D imaging system
CN201527414U (en) Ultrasonic transmit-receive unit for ultrasonic scanning microscope
US5311124A (en) Emulated analog output magnetostrictive position transducer with set point selection
CN101692070A (en) Construction method of B scanning image of ultrasonic scanning microscope
CN1312487C (en) Ultrasonic detecting device and its detecting method
CN110017799B (en) Ultrasonic measurement device and measurement method
CN101458335A (en) Environmental-protecting type range radar by employing leadless sensing element
CN203037849U (en) Ultrasonic thickness gauge
CN201820152U (en) Liquid level measuring and controlling system for brick making machine
CN105832367A (en) Integrated and small ultrasonic scanning imaging probe system
CN112907513A (en) Image position stamp system in industrial visual detection and generation method thereof
KR102624116B1 (en) Apparatus for Generating Ultrasonic Scan Image Information and Method therefor
CN205607931U (en) Little A -mode ultrasonic scanning formation of image integration probe system
CN108254001B (en) Ultrasonic sensor and method for measuring precision thereof
CN214522026U (en) Automatic mechanism that adds of 3D printing apparatus resin
CN211291643U (en) Wireless depth measuring instrument
CN210166493U (en) Radar with high angle measurement resolution
CN112051566A (en) Moving part parameter measuring method based on SAW wireless passive sensing system
CN113376640A (en) Ultrasonic ranging obstacle avoidance method and obstacle avoidance device
CN108168653B (en) Ultrasonic level monitoring device with adaptive matching of impedance of transducer
CN204789478U (en) Anti -jamming ultrasonic transducer
CN201602791U (en) Self-adaptive dynamic filter
CN111487895B (en) Communication system of displacement sensor and controller

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20100714

Termination date: 20130929