CN101692070A - Construction method of B scanning image of ultrasonic scanning microscope - Google Patents
Construction method of B scanning image of ultrasonic scanning microscope Download PDFInfo
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- CN101692070A CN101692070A CN200910075711A CN200910075711A CN101692070A CN 101692070 A CN101692070 A CN 101692070A CN 200910075711 A CN200910075711 A CN 200910075711A CN 200910075711 A CN200910075711 A CN 200910075711A CN 101692070 A CN101692070 A CN 101692070A
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Abstract
The invention provides a construction method of a B scanning image of an ultrasonic scanning microscope, which relates to the technical field of ultrasonic scanning microscope equipment for processing the acquired data. The method comprises the following steps: a. determining a B scanning data gate; b. scanning and emitting ultrasonic waves; c. carrying out data processing on voltage of each point; and d. constructing the B scanning image. In the invention, a grating ruler is used for synchronous position triggering to generate the ultrasonic waves, thereby overcoming the defect that the software triggering position is inaccurate; the front surface following technique is used for overcoming the defect that the algorithm has higher requirements on the surface flatness and arrangement of a measured object; and a method which sets the sampling frequency of an acquisition card according to a B scanning longitudinally set pixel point value is used for reducing the acquired data quantity and overcoming the defects of large software processing data quantity, slow image construction speed, low efficiency and the like.
Description
Technical field
The present invention relates to the technical field of data processing of ultrasonic scanning microscope device, especially a kind of construction method of B scan image to collecting.
Background technology
Along with the production scale of electronic product is increasing, kind is more and more, the integrated degree of circuit and production automation degree also improve accordingly, quality requirements to device is also more and more higher simultaneously, for guaranteeing the reliability of device, it is indispensable flow process that packaged device is carried out Non-Destructive Testing.The ultrasonic scanning microscope detects defectives such as insensitive layering, cavity, crack and uses more and more widely and can detect X ray.The ultrasonic scanning microscope is the line raster formula that the fits into motion by movement executing mechanism scan axis and stepping axle, in the scan axis motion, launch ultrasound wave and receive reflection echo, with the analog signal conversion of reflection echo is digital signal, and makes up different types of detected image by various transfer algorithms.The microscopical conventional sense mode of ultrasonic scanning comprises A sweep waveform, B scan image, C scanning peak image, C scanning sound path image, C scanning phase reversal image, demixing scan image etc.
The B scan image is the main a kind of detection mode of ultrasonic scanning microscope, and its acquisition is the tangent plane picture of detected goal-setting position, can reflect features such as detected target internal inclination, the degree of depth.Existing B scan image construction method is: 1, the B scan data gate is set on the A sweep waveform, the depth range and the signal threshold value of scanning just is set; 2, standardized horizontal linear determined scanning position on the C scan image; 3, the mode by software trigger triggers hyperacoustic emission when numerical value is set when position counting reaches in the scanning process; 4, all sampling numbers certificates in the B scan data gate are read back, and extract numerical value, then the numerical value that extracts is converted to the grey scale pixel value drawing image of design of graphics picture according to vertical picture traverse is set.This existing B scan image structure algorithm requires detected target surface flatness higher, and places enough levels, otherwise because device surface out-of-flatness or placement are tilted, the position that will cause data gate to be provided with is inaccurate; While triggers owing to ultrasound wave and software processes is all adopted in data acquisition, and trigger position is not accurate enough, and because the software data processing amount is big, causes picture construction speed slow.
Summary of the invention
The construction method that the purpose of this invention is to provide a kind of B scanning image of ultrasonic scanning microscope, solved the inaccurate shortcoming in software trigger position in the prior art, the B scan image that makes up, can judge the feature such as number of interfaces, interface depth, depth of defect of device, have advantages such as the design of graphics image position is accurate, precision is high, clear picture.As the time of writing down measured target front surface reflection echo negative peak, also can solve in the prior art the shortcoming of having relatively high expectations to measured target surface planarity and placement; As reduce the image data amount, also can solve shortcomings such as the software data processing amount is big in the prior art, picture construction is slow, efficient is low; Thereby the precision and the speed of picture construction have been guaranteed.
This present invention's main technical schemes is: a kind of construction method of B scanning image of ultrasonic scanning microscope is characterized in that having following steps:
A, determine the B scan data gate: promptly on the C scan image, select B scanning imagery position, the B scan depths is set;
B, scanning and emitting ultrasonic waves: in the scanning process each above-mentioned location point is launched ultrasound wave, adopt grating chi position synchronous triggering for generating ultrasound wave: promptly adopt the grating chi as feedback assembly, automatic hardware trigger produces ultrasound wave when grating chi counting reaches the value of pre-seting, need not software intervention, and the reception reflection echo, extract the magnitude of voltage of each set point return signal in the B scanning area;
C, the voltage of each point is done data processing: at first this signal is done Filtering Processing, filter noise signal; Again filtered voltage signal is converted to corresponding grey scale pixel value;
D, structure B scan image: be about to the corresponding grey scale pixel value of each point and make up gray level image on the screen, form the B scan image by being listed as vertically to output to.
In the described a step, also can adopt front surface to follow technology, the front surface data gate is set, obtain front surface reflection echo negative peak time coordinate, the time coordinate that data gate is set is the relative coordinate of front surface reflection echoed signal negative peak time coordinate.
In the described b step, also can write down the time of measured target front surface reflection echo negative peak, and should the time as reference time of data gate, the zero-time of B scan data gate is the relative value of this time, solves because measured target surface irregularity or placement tilt to cause data gate that inaccurate problem is set.
The described method that filtered voltage signal is converted to corresponding grey scale pixel value is: the absolute value of getting signal voltage value after the filtering, this is worth between 0V between the 0.5V, if final return signal magnitude of voltage called after M asks the corresponding gradation of image value G of M value, calculate according to following formula:
In the described a step, B is set scans vertical pixel numerical value, reduce the image data amount to determine the capture card sample frequency.
Good effect of the present invention is: contrast with prior art, the grating chi sync bit triggering for generating ultrasound wave that the present invention adopts has solved the inaccurate shortcoming in software trigger position, the B scan image that makes up is clear, can judge the feature such as number of interfaces, interface depth, depth of defect of device, have advantages such as the design of graphics image position is accurate, precision is high, clear picture.As adopt front surface to follow technology, the time of record measured target front surface reflection echo negative peak, can solve in the prior art shortcoming that measured target surface planarity and placement are had relatively high expectations; Shortcomings such as the present invention adopts according to B and scans the method that pixel numerical value is provided with the capture card sample frequency that vertically is provided with, and reduces the image data amount, and it is big also can to solve the software data processing amount, and picture construction is slow, efficient is low.
Description of drawings
Fig. 1 is the synoptic diagram that the front surface door is set on the A sweep waveform.
Fig. 2 is the synoptic diagram that the B scan data gate is set on the A sweep waveform.
Fig. 3 is the B scan image of C scan image diverse location.
Embodiment
Below in conjunction with accompanying drawing (referring to Fig. 1, Fig. 2, Fig. 3) and a preferred embodiment the present invention is described in further detail, but not as a limitation of the invention.
Among Fig. 2, the B scan data gate represents that with a line segment length of line segment is determined the depth range and the signal threshold value of B scanning.
At first, be noted that and carry out to have carried out C scanning before the B scanning, obtain the C scan image;
The performing step of algorithm is as follows:
1, the front surface data gate is set on the A sweep waveform, determines surveyed area and signal threshold value.
2, on the C scan image that obtains, draw a horizontal linear and choose interested B scanning position.
3, B is set and scans vertical drawing image pixel number, and sample frequency is set according to this numerical value.
4, as shown in Figure 2, in detection reflection echo zone, target location the B scan data gate is set, the B scan data gate adopts line segment to represent, the length of line segment is determined the depth range of scanning, begin to scan from reference position, the ultrasonic emitting receiving trap is counted grating chi signal in the scanning process, produces ultrasound wave when counting reaches the value of pre-seting.
5, the time of record measured target front surface reflection echo negative peak, and should the time as reference time of data gate, the zero-time of B scan data gate is the relative value of this time, solves because measured target surface irregularity or placement tilt to cause data gate that inaccurate problem is set.
6, extract the magnitude of voltage of the return signal of each set point in the B scanning area.The magnitude of voltage of each point is done following processing: at first this signal is done Filtering Processing, filter noise signal.Again filtered voltage signal is converted to corresponding grey scale pixel value: get the absolute value of signal voltage value after the filtering, this value between 0V between the 0.5V, for convenient follow-up explanation, for the time being this final return signal magnitude of voltage called after M.
7, ask the corresponding gradation of image value G of M value, calculate according to following formula:
For example: if the M value that previous step is tried to achieve is 0.2V.So,
Then the gray-scale value of the gray level image that this point is corresponding is 102.
Grey scale pixel value that each point is corresponding vertically outputs to by row and makes up gray level image on the screen, realizes the structure of B scan image, example, as shown in Figure 3, two width of cloth B scan images that the C scan image obtains on two diverse locations exactly.
Claims (5)
1. the construction method of a B scanning image of ultrasonic scanning microscope is characterized in that having following steps:
A, determine the B scan data gate: promptly on the C scan image, select B scanning imagery position, the B scan depths is set;
B, scanning and emitting ultrasonic waves: in the scanning process each above-mentioned location point is launched ultrasound wave, adopt grating chi position synchronous triggering for generating ultrasound wave: promptly adopt the grating chi as feedback assembly, automatic hardware trigger produces ultrasound wave when grating chi counting reaches the value of pre-seting, and the reception reflection echo, extract the magnitude of voltage of each set point return signal in the B scanning area;
C, the voltage of each point is done data processing: at first this signal is done Filtering Processing, filter noise signal; Again filtered voltage signal is converted to corresponding grey scale pixel value;
D, structure B scan image: be about to the corresponding grey scale pixel value of each point and make up gray level image on the screen, form the B scan image by being listed as vertically to output to.
2. the construction method of B scanning image of ultrasonic scanning microscope according to claim 1, it is characterized in that in the described a step, adopt front surface to follow technology, the front surface data gate is set, obtain front surface reflection echo negative peak time coordinate, the time coordinate that data gate is set is the relative coordinate of front surface reflection echoed signal negative peak time coordinate.
3. the construction method of B scanning image of ultrasonic scanning microscope according to claim 1, it is characterized in that in the described b step, the time of record measured target front surface reflection echo negative peak, and should the time as reference time of data gate, the zero-time of B scan data gate is the relative value of this time, solves because measured target surface irregularity or placement tilt to cause data gate that inaccurate problem is set.
4. the construction method of B scanning image of ultrasonic scanning microscope according to claim 1, it is characterized in that the described method that filtered voltage signal is converted to corresponding grey scale pixel value is: the absolute value of getting signal voltage value after the filtering, this is worth between 0V between the 0.5V, if final return signal magnitude of voltage called after M, ask the corresponding gradation of image value G of M value, calculate according to following formula:
5. according to the construction method of claim 1,2,3 or 4 described B scanning image of ultrasonic scanning microscope, it is characterized in that in the described a step, B is set scans vertical pixel numerical value, reduce the image data amount to determine the capture card sample frequency.
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102072935A (en) * | 2010-10-26 | 2011-05-25 | 浙江大学 | Automatic focusing method of scanning ultrasonic microscope |
| CN103018330A (en) * | 2011-09-22 | 2013-04-03 | 北京理工大学 | Full time domain waveform acquisition and analysis technique applied to ultrasonic microscope |
| CN103018331A (en) * | 2011-09-22 | 2013-04-03 | 北京理工大学 | Frequency domain imaging method of ultrasonic scanning microscope |
| CN103048388A (en) * | 2012-12-05 | 2013-04-17 | 中国电子科技集团公司第四十五研究所 | Construction method of layer-by-layer C scanning peak image of ultrasonic scanning microscope |
| CN105452859A (en) * | 2013-10-25 | 2016-03-30 | 株式会社日立电力解决方案 | Ultrasonic inspection device |
| CN107091881A (en) * | 2017-06-09 | 2017-08-25 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Accelerated processing method of high-resolution ultrasonic scanning microscope |
| CN108414623A (en) * | 2018-02-09 | 2018-08-17 | 中车青岛四方机车车辆股份有限公司 | A kind of resistance spot welding quality evaluation method based on ultrasonic scanning imaging |
| CN109212033A (en) * | 2018-08-20 | 2019-01-15 | 汕头大学 | A kind of ultrasound image detection method of high-speed track inside hurt |
| CN110930465A (en) * | 2019-11-29 | 2020-03-27 | 京东方科技集团股份有限公司 | Ultrasonic imaging method and equipment |
-
2009
- 2009-10-16 CN CN200910075711A patent/CN101692070A/en active Pending
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102072935A (en) * | 2010-10-26 | 2011-05-25 | 浙江大学 | Automatic focusing method of scanning ultrasonic microscope |
| CN103018330A (en) * | 2011-09-22 | 2013-04-03 | 北京理工大学 | Full time domain waveform acquisition and analysis technique applied to ultrasonic microscope |
| CN103018331A (en) * | 2011-09-22 | 2013-04-03 | 北京理工大学 | Frequency domain imaging method of ultrasonic scanning microscope |
| CN103048388A (en) * | 2012-12-05 | 2013-04-17 | 中国电子科技集团公司第四十五研究所 | Construction method of layer-by-layer C scanning peak image of ultrasonic scanning microscope |
| CN105452859A (en) * | 2013-10-25 | 2016-03-30 | 株式会社日立电力解决方案 | Ultrasonic inspection device |
| CN105452859B (en) * | 2013-10-25 | 2018-01-02 | 株式会社日立电力解决方案 | Apparatus for ultrasonic examination |
| CN107091881A (en) * | 2017-06-09 | 2017-08-25 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Accelerated processing method of high-resolution ultrasonic scanning microscope |
| CN108414623A (en) * | 2018-02-09 | 2018-08-17 | 中车青岛四方机车车辆股份有限公司 | A kind of resistance spot welding quality evaluation method based on ultrasonic scanning imaging |
| CN108414623B (en) * | 2018-02-09 | 2021-02-09 | 中车青岛四方机车车辆股份有限公司 | Resistance spot welding quality evaluation method based on ultrasonic scanning imaging |
| CN109212033A (en) * | 2018-08-20 | 2019-01-15 | 汕头大学 | A kind of ultrasound image detection method of high-speed track inside hurt |
| CN109212033B (en) * | 2018-08-20 | 2021-02-02 | 汕头大学 | Ultrasonic image detection method for internal damage of high-speed rail |
| CN110930465A (en) * | 2019-11-29 | 2020-03-27 | 京东方科技集团股份有限公司 | Ultrasonic imaging method and equipment |
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Application publication date: 20100407 |