Position detecting device and signal processing apparatus thereof
Technical field
The utility model relates to a kind of position detecting device and signal processing apparatus thereof, relates to a kind of position detecting device and signal processing apparatus thereof that is used for the Accurate Position Control of air line distance particularly.
Background technology
When the position was accurately controlled, the position magnetic induction part that uses generally was divided into rotary and orthoscopic.The rotary magnetic sensing element is generally the scrambler of using in the Motor Control Field, described scrambler is a kind of physical quantitys such as motor spin angular position, angular velocity to be converted to the position magnetic induction part of electric signal, and the manufacturing of scrambler and signal Processing level directly have influence on automatization level.
The orthoscopic magnetic induction part is commonly referred to as the straight-line displacement magnetic induction part.Continuous development along with the linear electric motors manufacturing technology progressively replaces screw mandrel at many industrial control fields.The high precision closed loop control of linear electric motors is directly depended on the output resolution of its used orthoscopic position probing magnetic induction part.The manufacture level of orthoscopic magnetic induction part directly has influence on the control accuracy and the control effect of system.
The straight-line displacement magnetic induction part of using on linear electric motors and the lathe mainly is the grating chi at present, grating mainly is to utilize optical transmission and reflex, on glass surface, make printing opacity and lighttight striped at regular intervals and constitute transmission grating, grating is usually used in displacement measurement, very high resolving power is arranged, can be better than 0.1 μ m.The pulse reading speed of metrological grating can reach every millisecond of hundreds of height that takes second place in addition, very be applicable to kinetic measurement.
The basis of pattern displacement magnetic induction part is a Moire fringe, two blocks of gratings (key light grid, indication grating) is superimposed together, and makes θ in a very small angle between their groove.Because light-shading effect, the groove intersection of two blocks of gratings forms bright band, and the intersection, slit forms blanking bar, in the direction vertical with grating line, will light and dark striped occur.Because the existence of Moire fringe when the sign grating moves with respect to indication grating, just forms the light and dark Moire fringe that distributes by sinusoidal rule.These stripeds move with the speed of related movement of grating, and shine directly on the photovalve, obtain a string electric pulse at their output terminal, produce digital signal output by amplification, shaping, sensing and number system, directly show tested displacement.
Pattern displacement magnetic induction part technology is quite ripe, and wide in variety, function is complete.But the pattern displacement magnetic induction part also has many shortcomings: in use, the fragility of glass material makes its impact resistance limited, have at some easily broken than the occasion of strong vibration, and oil rub resistance, dust is indifferent; Because ruling span has ultimate value (10 μ m~20 μ m) to be difficult to accomplish miniaturization; Aspect production, the groove precision prescribed of glass code-disc is very high, and is also very high to the accuracy requirement of mechanical part, so for the product of high resolution, be difficult to reduce cost, precision is high more, and cost performance is low more comparatively speaking; Guarantee to measure accurately, very high assembly precision must be arranged, will have influence on the raising of production efficiency like this.
Compare with grating, the anti-vibration and the impact capacity of magnetic grid are strong, can adapt to bad working environment, but its resolving power is lower and cost is higher, restricted it and used, traditional magnetic grid displacement magnetic induction part is to utilize the mutual magnetic action of magnetic head and magnetic grid and the device that carries out displacement measurement.Mainly be made up of several parts such as control circuit, magnetic head, magnetic scales, magnetic scale is to do the chi base with non-magnetic metal, perhaps adopts and plate one deck diamagnetic material on steel surface, does the chi base as the thick copper of 0.15-0.20mm.Apply the thin magnetic film that a layer thickness is 0.10-0.20mm equably at the chi primary surface, commonly used is the Ni-Co-P alloy, and the magnetic signal (the little magnetic pole of equidistant arrangement) of certain wavelength is gone up in record then.Magnetic field intensity on the magnetic scale is to change in the cycle.
Magnetic head have dynamic magnetic head and static-magnetic first two.The grid magnetic head is made of unshakable in one's determination and coil, and the manufacturing process complexity is generally increment type and exports, have dynamic magnetic head and static-magnetic first two.Not output was not suitable for linear measure longimetry when static head was static.Dynamically magnetic head in addition certain excitation signal realized static measurement, but excitation signal is difficult to control, is easy to generate error, makes measuring accuracy not high.
For example, application number is that the patented claim of 200520023253.7 (CN 2828752Y) proposes a kind of magnetic railings ruler length-measuring appliance that contains the GMR that can return to zero, its GMR thin magnetic film is photo-etched into 0.5~50 micron, magneto-resistor bar at interval, and its GMR thin magnetic film free layer constitutes for some special materials, and the silicon lining that will be deposited on oxidation hangs down, thickness is 10~100 nanometers, its complex manufacturing technology must cause the cost height, and can only realize increment type output.
For example, application number is that the patented claim of 200410009165.1 (CN 1584504A) has proposed a kind of magnetic railings ruler displacement magnetic induction part that uses the metal film magnetoresistance probe, and its metallic film is Ni, Co, Fe elemental metals layer, or NiFe, NiCo, CoFe, NiCu, AuCo and with Ni, Co, Fe is the metal alloy layer of base, or contain the 5%-40% oxygen atom iron atom fe magnetic metallic layers such as iron and contain the NiFe metal alloy ferromagnetic layer etc. of 5%-40% oxygen atom.Its complex manufacturing technology, and adopt this mode can only realize that increment type detects.
Application number is that the patented claim of 200710091809.X (CN 101042956A) has complex manufacturing technology equally, is unfavorable for shortcomings such as industrialization.
The utility model content
The technical problems to be solved in the utility model is, at the deficiencies in the prior art, has proposed a kind of position detecting device and signal processing apparatus thereof, simplifies production technology, improves accuracy of detection, reduces cost of products, improves cost performance.
For solving the problems of the technologies described above, the utility model provides a kind of position detecting device, comprises magnetic head and magnetic grid matrix, and described magnetic grid matrix and described magnetic head can produce relative motion;
Wherein, be distributed with first magnetic track and second magnetic track at described magnetic grid matrix, described first magnetic track is evenly geomagnetic into N[N<=2
n(n=0,1,2 ... n)] to magnetic pole, the polarity of two neighboring pole is opposite; The magnetic pole of described second magnetic track adds up to N, and according to specific series arrangement;
On described magnetic head, corresponding to being provided with the individual evenly distributed magnetic induction part of m (m is 2 or 3 integral multiple) directly over first magnetic track;
On described magnetic head, corresponding to being provided with n (n=0,1,2 directly over second magnetic track ... n) individual evenly distributed magnetic induction part;
Described magnetic induction part changes the magnetic signal that senses into voltage signal, and this voltage signal is exported to signal processing apparatus.
Further, the length of each magnetic pole is λ in described second magnetic track; The pitch of two neighboring pole is smaller or equal to λ on described first magnetic track.
Further, be λ corresponding to the distance between every adjacent two magnetic induction parts of second magnetic track; Corresponding to the distance between every adjacent two magnetic induction parts of first magnetic track is λ/m.
Further, described magnetic induction part is the hall sensing element.
The utility model also provides a kind of signal processing apparatus based on above-mentioned position detecting device, comprising:
The A/D modular converter, the voltage signal that position detecting device is sent carries out the A/D conversion, is digital signal with analog signal conversion;
Relative displacement x
1Computing module is used for the relative displacement x of first voltage signal in the signal period of living in that the calculating location pick-up unit sends corresponding to the magnetic induction part of first magnetic track
1
Absolute offset values x
2Computing module according to second voltage signal that sends corresponding to the magnetic induction part of second magnetic track in the position detecting device, is determined the absolute offset values x that put the residing signal period first place of first voltage signal by calculating
2
Synthetic and the output module of displacement is used for above-mentioned relative displacement x
1With absolute offset values x
2Addition, the displacement x in this moment of the synthetic described first voltage signal representative;
Memory module is used to store data.
Further, said signal processing device also comprises and is used for before the A/D modular converter carries out A/D conversion the voltage signal that comes from position detecting device being carried out the amplifying signal amplification module.
Further, the described relative displacement x in the said signal processing device
1Computing module comprises first synthesis unit and the first displacement acquiring unit, and described first synthesis unit is handled a plurality of voltage signals through the A/D conversion that position detecting device sends, and obtains reference signal D; The described first displacement acquiring unit selects the displacement relative with it as offset displacement x in the first standard offset table according to this reference signal D
1
Further, described relative displacement x
1Computing module also comprises the temperature compensation unit of the influence that is used to eliminate the voltage signal that temperature sends position detecting device.
In addition, the output of described first synthesis unit also comprises the second reference signal R, at this moment, described temperature compensation unit comprises coefficient rectifier and multiplier, and described coefficient rectifier is to the second reference signal R of the output of described synthesis module with to the signal R under should the standard state of signal
0Compare and obtain output signal K; Described multiplier is a plurality of, and the voltage signal that each described multiplier will send from position detecting device, that process A/D changes and the output signal K of described coefficient rectification module multiply each other, and the result after will multiplying each other exports to first synthesis unit.
Further, the described absolute offset values x in the described signal processing apparatus
2Computing module comprises second synthesis unit and the second displacement acquiring unit, and described second synthesis unit is used for second voltage signal that the position detecting device corresponding to second magnetic track sends is synthesized, and obtains signal E; The absolute offset values x that the described second displacement acquiring unit selects the displacement relative with it to put as the residing signal period first place of first voltage signal according to this signal E in the second standard offset table
2
Position detecting device that the utility model provides and signal processing circuit thereof have the following advantages:
1. shock resistance, vibration ability is strong, is not subject to greasy dirt, dust, the influence of rugged surroundings such as dewfall.
2. operating temperature range is wide, can be applicable to that high precision position detects under the extreme environment.
3. manufacturing processing technic is very simple.The magnetic grid read head adopts magnetic induction part and printed circuit board (PCB) to form, and need not additionally to add excitation signal, and circuit and physical construction are simple.
4. cost is low, the cost performance height, and production run is simple.
5. magnetic grid matrix adopting permanent magnet magnetizes and forms, and need not special material, and is cheap, and processing is simple.
6. dynamic and static measurement can be realized simultaneously, and the absolute type position probing can be realized.
7. signal Processing is simple, and system response time is fast.
Description of drawings
Fig. 1 is a track structure synoptic diagram of the present utility model;
Fig. 2 is first magnetic track of the utility model embodiment one and the distribution schematic diagram of Magnetic Induction element;
Fig. 3 is second magnetic track of the utility model embodiment one and the distribution schematic diagram of Magnetic Induction element;
Fig. 4 is the block diagram of the signal processing apparatus of the utility model embodiment one position detecting device;
The algorithm flow chart of the magnetic order that magnetizes of Fig. 5 second magnetic track;
Fig. 6 is first magnetic track of the utility model embodiment two and the distribution schematic diagram of Magnetic Induction element;
Fig. 7 is second magnetic track of the utility model embodiment two and the distribution schematic diagram of Magnetic Induction element;
Fig. 8 is the block diagram of the signal processing apparatus of the utility model embodiment two position detecting devices;
Fig. 9 is first magnetic track of the utility model embodiment three and the distribution schematic diagram of Magnetic Induction element;
Figure 10 is second magnetic track of the utility model embodiment three and the distribution schematic diagram of Magnetic Induction element;
Figure 11 is the block diagram of the signal processing apparatus of the utility model embodiment three position detecting devices;
Figure 12 is first magnetic track of the utility model embodiment four and the distribution schematic diagram of Magnetic Induction element;
Figure 13 is second magnetic track of the utility model embodiment four and the distribution schematic diagram of Magnetic Induction element;
Figure 14 is the block diagram of the signal processing apparatus of the utility model embodiment four position detecting devices.
Embodiment
The utility model provides a kind of position detecting device, comprises magnetic head and magnetic grid matrix, and described magnetic grid matrix and described magnetic head can produce relative motion, fix as the magnetic grid matrix, and magnetic head is fixed on the device, along with device moves.The magnetic grid that has two row to magnetize on the magnetic grid matrix, as shown in Figure 1, this two row magnetic grid forms first magnetic track 1 respectively and second magnetic track, 2, the first magnetic tracks 1 are evenly geomagnetic into N (N<=2
n(n=0,1,2 ... n)) to magnetic pole, and the polarity of two neighboring pole is opposite, and the pitch of two neighboring pole is less than or equal to λ; The magnetic pole of second magnetic track adds up to N, and its magnetic order determines that according to the magnetic order algorithm this algorithm illustrates that in the following description the length of each magnetic pole is λ in described second magnetic track.On the magnetic head (not shown in figure 1), corresponding to being provided with the individual evenly distributed magnetic induction part of m (m is 2 or 3 integral multiple) directly over first magnetic track, the distance between every adjacent two magnetic induction parts is less than or equal to λ/m; Corresponding to being provided with n (n=0,1,2 directly over second magnetic track ... n) on the individual evenly distributed magnetic induction part, the distance between every adjacent two magnetic induction parts is λ.Described magnetic induction part directly is fixed on the printed circuit board (PCB) of magnetic head.
The utility model also provides a kind of signal processing apparatus of above-mentioned position detecting device, and it comprises A/D modular converter, relative displacement x
1Computing module, absolute offset values x
2Computing module, displacement synthetic and output module and memory module, wherein, the voltage signal that described A/D modular converter sends position detecting device carries out the A/D conversion, and is digital signal with analog signal conversion; Described relative displacement x
1Computing module is used for the relative displacement x of first voltage signal in the signal period of living in that the calculating location pick-up unit sends corresponding to the magnetic induction part of first magnetic track
1Described absolute offset values x
2Computing module is determined the absolute offset values x that put the residing signal period first place of first voltage signal according to second voltage signal that sends corresponding to the magnetic induction part of second magnetic track in the position detecting device by calculating
2The synthetic output module that reaches of described displacement is used for above-mentioned relative displacement x
1With absolute offset values x
2Addition, the displacement x in this moment of the synthetic described first voltage signal representative; Described memory module is used for storing displacement and the COEFFICIENT K rectification data that calibration process obtains.
Embodiment one
Referring to Fig. 2-5, Fig. 2 is first magnetic track of the utility model embodiment one and the distribution schematic diagram of Magnetic Induction element, and Fig. 3 is second magnetic track of the utility model embodiment one and the distribution schematic diagram of Magnetic Induction element.
First magnetic track 1 is geomagnetic into 8 pairs of magnetic poles, and the polarity of two neighboring pole is opposite, directly over first magnetic track 1, places 2 magnetic induction parts, and the spacing between the magnetic induction part is λ/4, as shown in Figure 2.First magnetic track 2 is geomagnetic into 8 magnetic poles, put on just at second magnetic track 2, place 3 magnetic induction parts (concrete number gets 3 by measuring the range decision during 8 cycles), distance between the magnetic induction part is λ, as shown in Figure 3 (among the figure be that example analyze with 8 cycles).All magnetic induction parts are arranged on the printed circuit board (PCB) on the magnetic head, and magnetic head can relatively move along magnetic track.
The magnetic pole magnetic order of second magnetic track is determined by algorithm shown in Figure 5.As shown in Figure 5, at first carry out initialization a[0]=" 0 ... 0 "; Then present encoding is gone into coded set, " 0 ... 0 " is promptly arranged in the coded set; Then check the set element of coded set whether to reach 2
n, if EOP (end of program) then, otherwise present encoding is moved to left one, the back mends 0; Check present encoding whether to go into coded set then, if do not go into coded set then present encoding is gone into coded set proceed above-mentioned steps, if gone into coded set then go 0 to mend 1 position, current sign indicating number end; Then check present encoding whether to go into coded set, if do not go into coded set then present encoding gone into coded set proceed above-mentioned steps, if gone into coded set then checked whether current sign indicating number is " 0 ... 0 ", be then to finish, otherwise with present encoding directly before go to position, sign indicating number end to go 0 to mend 1; Then check present encoding whether to go into coded set,,, proceed following procedure then if gone into coded set then check whether current sign indicating number is " 0 ... 0 " if do not go into coded set then present encoding is gone into coded set proceed above-mentioned steps.Wherein 0 be magnetized to " N/S ", 1 is magnetized to " S/N ".Obtained the magnetic order that magnetizes of second magnetic track 2 shown in Figure 3 like this.
Detection principle of the present utility model is:
Adjacent a pair of " N-S " is a signal period in the definition magnetic track 1, and therefore, the shift length that arbitrary " N-S " is corresponding is λ, supposes that magnetic head is positioned at n constantly at t
ThIn signal period, then this constantly displacement x can think and constitute by two parts: 1. at n
ThRelative displacement in signal period, " N-S " side-play amount x in the signal period at this is determined in the magnetic field of sensor sensing magnetic track 1
1(value greater than 0) less than λ; 2. n
ThThe absolute offset values x that put the signal period first place
2, determine with the magnetic field of sensor sensing magnetic track 2 this moment, magnetic head was to be in which " N-S " to obtain x actually
2
With the structure among Fig. 2,3 is example, and signal Processing is described, and wherein, the block diagram of corresponding signal processing apparatus as shown in Figure 4.The output signal of sensor 1_1a and 1_2a meets amplifying circuit 2_1a, 2_2a amplifies, meet A/D converter 3_1a then, 3_2a, after analog to digital conversion, obtain output signal and meet multiplier 4a, 5a, coefficient rectifier 10a output signal meets multiplier 4a, the input end of 5a, multiplier 4a, the output signal A of 5a, B connect the input end of the first compositor 6a, the output signal D of the first compositor 6a, R stores into respectively among storer 8a and the storer 9a, and coefficient rectifier 10a finds signal R0 corresponding to signal R from storer 9a, obtains signal K according to signal R with from the R0 of storer 9a, this signal K is as meeting multiplier 4a, the input signal of 5a.From storer 8, inquire about the first standard offset table according to signal D, thereby obtain relative displacement x
1, and as the input end of totalizer 13a.
Sensor 1_3a, 1_4a, the output signal of 1_5a meets amplifier 2_3a respectively, 2_4a, 2_5a amplifies, and meets A/D converter 3_3a then, 3_4a, 3_5a carries out exporting to after the analog to digital conversion the second compositor 7a and carries out computing and obtain signal E, inquires about the second standard offset table according to this signal E in storer 11a gets then and obtains x
2, and as the input end of totalizer 13a, x
1And x
2The absolute straight-line displacement x that obtains measuring by totalizer 13a exports.
Wherein, in the Signal Processing process, the output of the first compositor 6a is carried out in the following manner:
Agreement:
When data X was signed number, the 0th of data X (a scale-of-two left side is played the 1st) be sign bit, and X_0=1 represents data X for bearing, and X_0=0 represents that data X is for just.
X_D represents the value bit (absolute values of data) of data X, promptly removes sign bit data left position.
The size of the numerical value of two signals relatively, the signal D that is used to export that numerical value is little, the structure of signal D for first signal meet the position, second signal meet the position, than the value bit of the signal of fractional value }.Specific as follows:
If A_D>=B_D
D={A_0;B_0;B_D}
Otherwise:
D={A_0;B_0;A_D}
The output of the second compositor 7a is carried out in the following manner:
E={C3_0;C4_0;...Cn_0}
Signal K generally is by with signal R
0Carrying out division arithmetic with R obtains.
About first and second standard offset table, in storer, stored two tables, each table is corresponding to a series of sign indicating number, and each sign indicating number is corresponding to a displacement.This table obtains by demarcation, scaling method is, utilize a pick-up unit and a high precision position magnetic induction part of originally executing example, carry out correspondence one by one with originally executing the signal of the magnetic induction part output in the example and the displacement of this high precision position magnetic induction part output, set up out the signal of magnetic induction part output and the relation table between the displacement with this.Just, stored one first standard offset table corresponding to signal D, each signal D represents a relative displacement x
1Corresponding to signal E, stored one second standard offset table, each signal E represents an absolute offset values x
2
Embodiment two
Referring to Fig. 6-8, Fig. 6 is first magnetic track of the utility model embodiment two and the distribution schematic diagram of Magnetic Induction element, and Fig. 7 is second magnetic track of the utility model embodiment two and the distribution schematic diagram of Magnetic Induction element.
Magnetic track among the embodiment two of the present utility model and identical with embodiment one corresponding to the magnetic induction part of second magnetic track, difference be, is 3 corresponding to the number of the magnetic induction part of first magnetic track, and the spacing between per two is λ/3.
Fig. 8 is the block diagram of the signal processing apparatus of the utility model embodiment two position detecting devices; As embodiment one different be, because the number corresponding to the magnetic induction part of first magnetic track is 3, so finally sending to the signal of the first compositor 7b is three, so the first compositor 7b is slightly different with embodiment one according to the process that three input signals obtain the first reference signal D and the second reference signal R.Now be described as follows:
Judge the position that meets of three signals earlier, and relatively meet the size of the numerical value of the identical signal in position, the signal D that is used to export that numerical value is little, the structure of signal D for first signal meet the position, second signal meet the position, the 3rd signal meet the position, than the value bit of the signal of fractional value }.With the present embodiment is example:
Agreement:
When data X was signed number, the 0th of data X (a scale-of-two left side is played the 1st) be sign bit, and X_0=1 represents data X for bearing, and X_0=0 represents that data X is for just.
X_D represents the value bit (absolute values of data) of data X, promptly removes sign bit data left position.
If { A_0; B_0; C_0}=010 and A_D>=C_D
D={A_0;B_0;C_0;C_D}
If { A_0; B_0; C_0}=010 and A_D<C_D
D={A_0;B_0;C_0;A_D};
If { A_0; B_0; C_0}=101 and A_D>=C_D
D={A_0;B_0;C_0;C_D};
If { A_0; B_0; C_0}=101 and A_D<C_D
D={A_0;B_0;C_0;A_D};
If { A_0; B_0; C_0}=011 and B_D>=C_D
D={A_0;B_0;C_0;C_D};
If { A_0; B_0; C_0}=011 and B_D<C_D
D={A_0;B_0;C_0;B_D};
If { A_0; B_0; C_0}=100 and B_D>=C_D
D={A_0;B_0;C_0;C_D};
If { A_0; B_0; C_0}=100 and B_D<C_D
D={A_0;B_0;C_0;B_D};
If { A_0; B_0; C_0}=001 and B_D>=A_D
D={A_0;B_0;C_0;A_D};
If { A_0; B_0; C_0}=001 and B_D<A_D
D={A_0;B_0;C_0;B_D};
If { A_0; B_0; C_0}=110 and B_D>=A_D
D={A_0;B_0;C_0;A_D};
If { A_0; B_0; C_0}=110 and B_D<A_D
D={A_0;B_0;C_0;B_D};
The algorithm of signal E and K is identical with embodiment one, in this no longer repeat specification.
Embodiment three
Referring to Fig. 9-11, Fig. 9 is first magnetic track of the utility model embodiment two and the distribution schematic diagram of Magnetic Induction element, and Figure 10 is second magnetic track of the utility model embodiment two and the distribution schematic diagram of Magnetic Induction element.
Being with embodiment one difference, is 4 corresponding to the number of the magnetic induction part of first magnetic track, and the spacing between per two is λ/4.
Its signal processing apparatus and embodiment one are basic identical, and difference is that the amplifier that present embodiment is used is a differential amplifier, have carried out differential amplification when carrying out the A/D conversion earlier.Other are identical with embodiment one, do not repeat them here.
Embodiment four
Referring to Figure 12-14, Figure 12 is first magnetic track of the utility model embodiment two and the distribution schematic diagram of Magnetic Induction element, and Figure 13 is second magnetic track of the utility model embodiment two and the distribution schematic diagram of Magnetic Induction element.
Being with embodiment one difference, is 6 corresponding to the number of the magnetic induction part of first magnetic track, and the spacing between per two is λ/6.
Its signal processing apparatus and embodiment two are basic identical, and difference is that the amplifier that present embodiment is used is a differential amplifier, have carried out differential amplification when carrying out the A/D conversion earlier.Other are identical with embodiment two, do not repeat them here.
All be that number with the magnetic induction part of corresponding second magnetic track is 3 o'clock embodiment in the foregoing description, and the utility model is not limited to the number of magnetic induction part is 3, its number is determined by range, the magnetic pole logarithm of first magnetic track and the magnetic pole number of second magnetic track also are not limited to 8 couple in the utility model and 8, as long as the magnetic pole logarithm N of formula first magnetic track is smaller or equal to 2
n(n is the number of the magnetic induction part of corresponding second magnetic track, n=0 wherein, 1,2 ... n) magnetic pole of second magnetic track adds up to N and gets final product.
Abovely describe each embodiment of the present utility model in detail, yet the utility model is not limited to described embodiment, but under the situation of the scope that does not break away from claims, can makes various changes and modifications with reference to accompanying drawing.