CN201485502U - 保护滚轮的外罩装置 - Google Patents
保护滚轮的外罩装置 Download PDFInfo
- Publication number
- CN201485502U CN201485502U CN 200920153532 CN200920153532U CN201485502U CN 201485502 U CN201485502 U CN 201485502U CN 200920153532 CN200920153532 CN 200920153532 CN 200920153532 U CN200920153532 U CN 200920153532U CN 201485502 U CN201485502 U CN 201485502U
- Authority
- CN
- China
- Prior art keywords
- roller
- outer cover
- cover component
- base material
- depositing system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000463 material Substances 0.000 claims abstract description 86
- 238000000151 deposition Methods 0.000 claims description 47
- 230000033001 locomotion Effects 0.000 claims description 21
- 239000002243 precursor Substances 0.000 claims description 13
- 238000004140 cleaning Methods 0.000 claims description 12
- 238000011084 recovery Methods 0.000 claims description 9
- 239000007795 chemical reaction product Substances 0.000 claims description 5
- 230000008021 deposition Effects 0.000 abstract description 12
- 230000002035 prolonged effect Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 25
- 239000000758 substrate Substances 0.000 description 13
- 230000008569 process Effects 0.000 description 12
- 239000011248 coating agent Substances 0.000 description 11
- 238000000576 coating method Methods 0.000 description 11
- 230000000694 effects Effects 0.000 description 11
- 230000005622 photoelectricity Effects 0.000 description 9
- 239000007789 gas Substances 0.000 description 8
- 238000012545 processing Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 6
- 239000010408 film Substances 0.000 description 5
- 238000012423 maintenance Methods 0.000 description 5
- 238000013519 translation Methods 0.000 description 5
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 3
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 239000000376 reactant Substances 0.000 description 3
- 229910052725 zinc Inorganic materials 0.000 description 3
- 239000011701 zinc Substances 0.000 description 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- ZOCHARZZJNPSEU-UHFFFAOYSA-N diboron Chemical compound B#B ZOCHARZZJNPSEU-UHFFFAOYSA-N 0.000 description 2
- HQWPLXHWEZZGKY-UHFFFAOYSA-N diethylzinc Chemical group CC[Zn]CC HQWPLXHWEZZGKY-UHFFFAOYSA-N 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000002241 glass-ceramic Substances 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 2
- LGRLWUINFJPLSH-UHFFFAOYSA-N methanide Chemical compound [CH3-] LGRLWUINFJPLSH-UHFFFAOYSA-N 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 125000002524 organometallic group Chemical group 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000000386 athletic effect Effects 0.000 description 1
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000005571 horizontal transmission Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000002688 persistence Effects 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007761 roller coating Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Electromagnetism (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Vapour Deposition (AREA)
- Operating, Guiding And Securing Of Roll- Type Closing Members (AREA)
Abstract
Description
Claims (12)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US8147208P | 2008-07-17 | 2008-07-17 | |
US61/081,472 | 2008-07-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN201485502U true CN201485502U (zh) | 2010-05-26 |
Family
ID=41427501
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN 200920153532 Expired - Fee Related CN201485502U (zh) | 2008-07-17 | 2009-07-17 | 保护滚轮的外罩装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8826851B2 (zh) |
CN (1) | CN201485502U (zh) |
DE (1) | DE102009033265A1 (zh) |
TW (1) | TWI473193B (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101974737A (zh) * | 2010-07-28 | 2011-02-16 | 常州亿晶光电科技有限公司 | 石墨舟防卡传输装置 |
CN102605348A (zh) * | 2011-12-19 | 2012-07-25 | 汉能科技有限公司 | 一种传动加热系统及方法 |
CN103031535A (zh) * | 2011-09-28 | 2013-04-10 | 核心能源实业有限公司 | 薄膜工艺设备及其制作方法 |
CN104789944A (zh) * | 2015-04-28 | 2015-07-22 | 北京精诚铂阳光电设备有限公司 | 化学气相沉积装置 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI447252B (zh) * | 2010-06-25 | 2014-08-01 | Hon Hai Prec Ind Co Ltd | 一種於滾輪表面形成氮化鈦薄膜的方法 |
TW201239131A (en) * | 2011-03-22 | 2012-10-01 | Ind Tech Res Inst | Transmission mechanism and the deposition apparatus using the same |
DE102011113292A1 (de) * | 2011-09-05 | 2013-03-07 | Schmid Vacuum Technology Gmbh | Vakuumdurchführung und Vakuumbeschichtungsvorrichtung mit Vakuumdurchführungen |
US20140000512A1 (en) * | 2012-06-28 | 2014-01-02 | Oerlikon Solar Ag, Trubbach | Roller cover |
US11706712B2 (en) | 2019-07-30 | 2023-07-18 | International Business Machines Corporation | Elastic resource control in a container orchestration environment |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2129019A (en) * | 1934-08-02 | 1938-09-06 | Hannibal Car Wheel And Foundry | Wheel cleaning and dust allaying device |
US2468925A (en) * | 1944-10-09 | 1949-05-03 | Boer Herman O De | Floor roller construction |
US2620913A (en) * | 1949-08-20 | 1952-12-09 | Frederick W Waring | Antifriction load-supporting device |
US2702620A (en) * | 1950-12-15 | 1955-02-22 | Sr Millard J Laugle | Disappearing roller |
US3243029A (en) * | 1964-10-13 | 1966-03-29 | Emerson T Oliver | Retractable conveyor rollers |
US3402802A (en) * | 1967-04-07 | 1968-09-24 | Robert S. Lint | Retractable roller guide assembly |
US3744080A (en) * | 1971-08-04 | 1973-07-10 | J Smith | Caster brush assembly |
US4555023A (en) * | 1985-05-14 | 1985-11-26 | Marpac Industries, Inc. | Drum containers |
NL8702130A (nl) * | 1987-09-08 | 1989-04-03 | Talson Transport Engineering | Rollenbaan. |
US4930612A (en) * | 1988-11-22 | 1990-06-05 | Atlantis Transportation Services Inc. | Roller track assembly incorporating a mechanical elevator mechanism |
US4967894A (en) * | 1989-03-07 | 1990-11-06 | Ancra International Corporation | Retractable roller system with removable carrier |
US5226632A (en) * | 1990-04-20 | 1993-07-13 | Applied Materials, Inc. | Slit valve apparatus and method |
US5088585A (en) * | 1990-07-17 | 1992-02-18 | Lambert William S | Retractable roller ball cargo floor surface |
JPH07157080A (ja) * | 1993-12-06 | 1995-06-20 | Sonitsuku Fueroo Kk | 板ガラス搬送装置 |
US6193043B1 (en) * | 1999-05-17 | 2001-02-27 | Ancra International Llc | Retractable roller system for handling cargo |
DE10053852A1 (de) | 2000-10-30 | 2002-05-16 | Grenzebach Maschb Gmbh | Transportweiche für Plattenmaterial-Förderstrecke, insbesondere Flachglas-Förderstrecke |
US6764265B2 (en) * | 2002-01-07 | 2004-07-20 | Applied Materials Inc. | Erosion resistant slit valve |
DE102006011517B4 (de) | 2005-04-08 | 2009-07-16 | Von Ardenne Anlagentechnik Gmbh | Transporteinrichtung, insbesondere zum Transport flächiger Substrate durch eine Beschichtungsanlage |
US8333277B2 (en) * | 2006-06-21 | 2012-12-18 | Mowe William B | Paint roller sleeve storage container |
GB2443480B (en) * | 2006-11-01 | 2008-11-26 | Mark Darren Shaw | Roller cleaning brush |
TW201239131A (en) * | 2011-03-22 | 2012-10-01 | Ind Tech Res Inst | Transmission mechanism and the deposition apparatus using the same |
US20140000512A1 (en) * | 2012-06-28 | 2014-01-02 | Oerlikon Solar Ag, Trubbach | Roller cover |
-
2009
- 2009-07-14 DE DE200910033265 patent/DE102009033265A1/de not_active Withdrawn
- 2009-07-14 US US12/502,615 patent/US8826851B2/en not_active Expired - Fee Related
- 2009-07-15 TW TW98123995A patent/TWI473193B/zh not_active IP Right Cessation
- 2009-07-17 CN CN 200920153532 patent/CN201485502U/zh not_active Expired - Fee Related
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101974737A (zh) * | 2010-07-28 | 2011-02-16 | 常州亿晶光电科技有限公司 | 石墨舟防卡传输装置 |
CN101974737B (zh) * | 2010-07-28 | 2014-04-16 | 常州亿晶光电科技有限公司 | 石墨舟防卡传输装置 |
CN103031535A (zh) * | 2011-09-28 | 2013-04-10 | 核心能源实业有限公司 | 薄膜工艺设备及其制作方法 |
CN102605348A (zh) * | 2011-12-19 | 2012-07-25 | 汉能科技有限公司 | 一种传动加热系统及方法 |
CN104789944A (zh) * | 2015-04-28 | 2015-07-22 | 北京精诚铂阳光电设备有限公司 | 化学气相沉积装置 |
CN104789944B (zh) * | 2015-04-28 | 2017-06-20 | 北京精诚铂阳光电设备有限公司 | 化学气相沉积装置 |
Also Published As
Publication number | Publication date |
---|---|
US8826851B2 (en) | 2014-09-09 |
US20100016136A1 (en) | 2010-01-21 |
TWI473193B (zh) | 2015-02-11 |
DE102009033265A1 (de) | 2010-01-21 |
TW201017803A (en) | 2010-05-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: OERLIKON SOLAR TRUBBACH LTD. Free format text: FORMER OWNER: OERLIKON SOLAR INTELLECTUAL PROPERTY TRUBBACH AG Effective date: 20111025 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20111025 Address after: The Swiss city of Telubahe Patentee after: Oerlikon Solar AG, Truebbach Address before: The Swiss city of Telubahe Patentee before: Oerlikon Solar Intellectual Property Terlubach AG |
|
C56 | Change in the name or address of the patentee | ||
CP03 | Change of name, title or address |
Address after: Swiss Teru Bach Patentee after: Oerlikon Solar AG, Truebbach Address before: The Swiss city of Telubahe Patentee before: Oerlikon Solar AG, Truebbach |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100526 Termination date: 20160717 |