CN201459229U - Compensation baffle mechanism - Google Patents
Compensation baffle mechanism Download PDFInfo
- Publication number
- CN201459229U CN201459229U CN2009201101729U CN200920110172U CN201459229U CN 201459229 U CN201459229 U CN 201459229U CN 2009201101729 U CN2009201101729 U CN 2009201101729U CN 200920110172 U CN200920110172 U CN 200920110172U CN 201459229 U CN201459229 U CN 201459229U
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- CN
- China
- Prior art keywords
- compensation
- compensation baffle
- type
- positioning body
- seat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model relates to a compensation baffle mechanism comprising a compensation baffle, a connecting frame, a positioning body and a fixing body, wherein, one end of the compensation baffle is fixed at one end of the connecting frame, the other end of the connecting frame is connected with the positioning body, the positioning body is connected with the fixing body, and the positioning body can be made up of a T-shaped adjusting base and an L-shaped adjusting base. The utility model has the following advantages: the arrangement of the connecting frame, the positioning body and the fixing body ensures that the compensation baffle can be repositioned freely in the three-dimensional space; when not in use for compensation, the positioning body and the compensation baffle can be altogether dismantled in a convenient manner. The compensation baffle can be completely or partially arranged on the connecting frame to increase the supporting area of the connecting frame with respect to the compensation baffle, thereby making the compensation baffle less vulnerable to deformation if exposed to heat, with improved reusability of the compensation plate, improved compensating effect and increased uniformity in the metallic-membrane plating.
Description
Technical field
The utility model relates to the optics producing apparatus, relates in particular to the compensation baffle mechanism in a kind of optical coating equipment.
Background technology
Optical coating equipment comprises that workpiece plate is provided with through hole, is used to install workpiece to be plated as the workpiece plate of the carrier of workpiece to be plated (as optical sheet etc.), the evaporation source that the workpiece plate bottom is provided with etc.In optical coating equipment, because evaporation source far and near different apart from each position on the optical sheet, and same optical sheet usually can be with different coating materials by evaporation repeatedly, so the coating materials of evaporation source evaporation is difficult for equably evaporation on the surface of workpiece to be plated.For this reason, often adopt the compensation baffle plate to block too much evaporating materials at present, to avoid the inhomogeneous of plated film.The structural representation of existing compensation baffle mechanism as shown in Figure 1, compensation baffle plate 11 is fixed in shaft-like positioning body 12 1 ends, the other end of shaft-like positioning body 12 has outside screw, be used for be fixed in the vacuum chamber base plate on bar be connected, this bar upper end is provided with internal thread, and the change in location of compensation baffle plate 11 can be regulated by being threaded between shaft-like positioning body 12 and this bar.
Above-mentioned compensation baffle mechanism has the following disadvantages: the compensation baffle plate is once installation, except being undertaken the trim locations by above-mentioned screw thread, basically be fixed in a position, the position is adjusted at the position that makes the compensation baffle plate not compensate as required easily, so compensation effect is poor; The contact area that compensates baffle plate and shaft-like positioning body in addition is very little, therefore shaft-like positioning body is very little to the Area of bearing of compensation baffle plate, easy deformation after the compensation baffle plate is heated, this distortion makes that also the plated film of compensation effect variation, workpiece to be plated is inhomogeneous, and yielding compensation baffle plate reusability is poor.
The utility model content
The purpose of this utility model is at the prior art weak point, and a kind of compensation baffle position that is easy to regulate is provided, and is easy to the fixed compensation baffle plate, and the good compensation baffle mechanism of compensation baffle plate reusability.
The utility model is achieved through the following technical solutions: a kind of compensation baffle mechanism, it comprises compensation baffle plate, link span, positioning body and fixed body, one end of compensation baffle plate is fixed in an end of link span, the other end of link span is connected with positioning body, and positioning body is connected with fixed body.
Wherein, positioning body can comprise T type adjustment seat, and the end that the T type is adjusted seat can be connected with the other end of link span.
Wherein, positioning body can also comprise that the L type adjusts seat, and the end that the L type is adjusted seat can be connected with the other end that the T type is adjusted seat, and the other end of L type adjustment seat can be connected with fixed body.
Wherein, can be provided with the elongated slot pilot hole with the described the other end that T type adjustment seat is connected at link span, the end that T type adjustment seat is connected with link span can be provided with link span on the threaded hole of elongated slot pilot hole coupling.
Wherein, the elongated slot pilot hole can be provided with the described the other end that L type adjustment seat is connected, the threaded hole of adjusting the elongated slot pilot hole coupling on the seat with the T type can be provided with at the end that L type adjustment seat is connected with T type adjustment seat at T type adjustment seat.
Wherein, the described the other end that is connected with fixed body at L type adjustment seat can be provided with the elongated slot pilot hole, can be provided with the threaded hole of adjusting the elongated slot pilot hole coupling on the seat with the L type in the position that fixed body is connected with L type adjustment seat.
Wherein, the compensation baffle mechanism can also comprise the boss that is installed on the fixed body bottom.
Wherein, can be provided with pilot hole on boss, the position that is connected with boss in the fixed body bottom can be provided with the threaded hole with the pilot hole coupling.
Wherein, boss can be welded on the vacuum-chamber wall.
The beneficial effects of the utility model are: by link span, T type adjustment seat, L type adjustment seat are set, and fixed body, make the compensation baffle plate about, all there is very big scope of activity all around, can freely adjust the position in vacuum chamber according to the needs of coating process; When not needing to compensate, positioning body and compensation baffle plate integral demounting can be got off convenient disassembly; And the compensation baffle plate can all or part ofly be arranged on the link span, strengthened the Area of bearing of link span to the compensation baffle plate, make that the compensation baffle plate is not yielding when being heated, improved the reusability of compensation baffle plate, thereby improved the homogeneity of compensation effect and plated film.
Description of drawings
Fig. 1 is the structural representation of the compensation baffle mechanism of prior art;
Fig. 2 is the structural representation of the utility model embodiment;
Fig. 3 is that the A of Fig. 2 is to view.
Embodiment
The utility model will be further described below in conjunction with embodiment:
Fig. 2 is the structural representation of the utility model embodiment, and Fig. 3 is that the A of Fig. 2 is to view.As shown in Figures 2 and 3, the compensation baffle mechanism according to present embodiment comprises compensation baffle plate 1, link span 2, positioning body 3 and fixed body 4.One end of compensation baffle plate 1 is fixed in an end of link span 2 directly or indirectly, and the fixed mode can be for for example passing through screw retention; The part area of compensation baffle plate 1 contacts with link span 2.The other end of link span 2 is connected with positioning body 3; Positioning body 3 is connected with fixed body 4.
In the present embodiment, positioning body 3 can comprise T type adjustment seat 5, the end that the T type is adjusted seat 5 can be connected with the other end of link span 2, ways of connecting can for: for example the other end at link span is provided with the elongated slot pilot hole, this hole and T type are adjusted the threaded hole coupling that seat one end is provided with, and both connect by screw retention.This mode of connection of T type adjustment seat and link span is convenient to compensate location and the adjustment of baffle plate at above-below direction.
In the present embodiment, positioning body 3 can also comprise L type adjustment seat 6, the end that the L type is adjusted seat 6 can be connected with the other end of T type adjustment seat 5, ways of connecting can for: for example two elongated slot pilot holes are set at two of the other end of T type adjustment seat, the screw thread of this hole and the one end setting of L type adjustment seat is complementary, both connect by screw retention, and this mode of connection of T type adjustment seat and L type adjustment seat is convenient to compensate location and the adjustment of baffle plate in fore-and-aft direction (promptly with the perpendicular direction of the paper direction of Fig. 2).
In the present embodiment, the other end that the L type is adjusted seat 6 can be connected directly or indirectly with fixed body 4, its mode of connection can for: for example the other end at L type adjustment seat is provided with the elongated slot pilot hole, the threaded hole that is provided with on this hole and the fixed body is complementary, both connect by screw retention, and this mode of connection of L type adjustment seat and fixed body is convenient to compensate location and the adjustment of baffle plate at left and right directions.
Above-mentioned three kinds of mode of connection make the compensation baffle plate can freely adjust the position in the three-dimensional space of vacuum chamber.Certainly, it will be understood by those skilled in the art that the position adjustment on each dimension is not limited to above-mentioned example, but the elongated slot direction on each parts can be set according to actual needs, thus the adjustment direction of setting compensation baffle plate.
Fixed body 4 is connected in the locular wall of plated film vacuum chamber directly or indirectly.Its indirect connects for example utilizes the boss 7 that is installed on fixed body 4 bottoms, boss 7 is protruding with the vertical direction of vacuum-chamber wall, fixed body 4 can connect by screw retention for being complementary at the screw thread that is provided with on the boss on pilot hole and the fixed body with the ways of connecting of boss 7.Boss can be welded on the vacuum-chamber wall.So just avoided having taken the space of other parts in the coating chamber, the configuration of coating equipment is reduced, also just reduced the function of coating equipment because fixed body is arranged at the vacuum chamber base plate.
Embodiment of the present utility model adjusts seat by link span, T type are set, the L type is adjusted seat, and fixed body, makes the compensation baffle plate can freely adjust the position in three-dimensional space, the compensation effect of acquisition the best, thus improved coating quality and stability.When not needing to compensate, positioning body and compensation baffle plate integral demounting can be got off convenient disassembly; And the compensation baffle plate can all or part ofly be arranged on the link span, has strengthened the Area of bearing of link span to the compensation baffle plate, makes that the compensation baffle plate is not yielding when being heated, bends, and has improved the reusability of compensation baffle plate, has reduced production cost.
The above only is a preferred implementation of the present utility model; should be understood that; for those skilled in the art; under the prerequisite that does not break away from the utility model know-why; can also make some improvement and modification, these improve and modification also should be considered as protection domain of the present utility model.
Claims (9)
1. one kind compensates baffle mechanism, it comprises compensation baffle plate, link span, positioning body and fixed body, the other end that one end of described compensation baffle plate is fixed in an end of described link span, described link span is connected with described positioning body, and described positioning body is connected with described fixed body.
2. compensation baffle mechanism as claimed in claim 1 is characterized in that, described positioning body comprises T type adjustment seat, and the end that described T type is adjusted seat is connected with the described the other end of described link span.
3. compensation baffle mechanism as claimed in claim 2 is characterized in that, described positioning body comprises that also the L type adjusts seat, and the end that described L type is adjusted seat is connected with the other end that described T type is adjusted seat, and the other end of described L type adjustment is connected with described fixed body.
4. compensation baffle mechanism as claimed in claim 2, it is characterized in that, be provided with the elongated slot pilot hole at described link span with the described the other end that described T type adjustment seat is connected, described T type adjustment seat be provided with described link span on the threaded hole of elongated slot pilot hole coupling.
5. compensation baffle mechanism as claimed in claim 3, it is characterized in that, be provided with the elongated slot pilot hole at described T type adjustment seat with the described the other end that described L type adjustment seat is connected, described L type adjustment seat is provided with the threaded hole of adjusting the elongated slot pilot hole coupling on the seat with described T type.
6. as compensation baffle mechanism as described in the claim 3, it is characterized in that, the described the other end that is connected with described fixed body at described L type adjustment seat is provided with the elongated slot pilot hole, is provided with the threaded hole of adjusting the elongated slot pilot hole coupling on the seat with described L type in the position that described fixed body is connected with described L type adjustment seat.
7. as each described compensation baffle mechanism of claim 1 to 6, it is characterized in that described compensation baffle mechanism also comprises the boss that is installed on described fixed body bottom.
8. compensation baffle mechanism as claimed in claim 7 is characterized in that described boss is provided with pilot hole, and the position that is connected with described boss in described fixed body bottom is provided with the threaded hole with described pilot hole coupling.
9. compensation baffle mechanism as claimed in claim 7 is characterized in that described boss is welded on the vacuum-chamber wall.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009201101729U CN201459229U (en) | 2009-07-23 | 2009-07-23 | Compensation baffle mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009201101729U CN201459229U (en) | 2009-07-23 | 2009-07-23 | Compensation baffle mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201459229U true CN201459229U (en) | 2010-05-12 |
Family
ID=42386583
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009201101729U Expired - Fee Related CN201459229U (en) | 2009-07-23 | 2009-07-23 | Compensation baffle mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201459229U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112725735A (en) * | 2020-12-21 | 2021-04-30 | 宜宾市恒美科技有限公司 | Multicolor gradient coating film and coating method thereof |
-
2009
- 2009-07-23 CN CN2009201101729U patent/CN201459229U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112725735A (en) * | 2020-12-21 | 2021-04-30 | 宜宾市恒美科技有限公司 | Multicolor gradient coating film and coating method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100512 Termination date: 20180723 |