CN201434669Y - Flexible follow-up high-precision measuring frame system - Google Patents

Flexible follow-up high-precision measuring frame system Download PDF

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Publication number
CN201434669Y
CN201434669Y CN2009201254156U CN200920125415U CN201434669Y CN 201434669 Y CN201434669 Y CN 201434669Y CN 2009201254156 U CN2009201254156 U CN 2009201254156U CN 200920125415 U CN200920125415 U CN 200920125415U CN 201434669 Y CN201434669 Y CN 201434669Y
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CN
China
Prior art keywords
measuring
head
measuring head
follow
flexible
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Expired - Fee Related
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CN2009201254156U
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Chinese (zh)
Inventor
胡列科
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Guiyang Xintian OETECH Co Ltd
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Guiyang Xintian OETECH Co Ltd
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Priority to CN2009201254156U priority Critical patent/CN201434669Y/en
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Abstract

A flexible follow-up high-precision measuring frame system belongs to a precision measuring frame mechanism for length measurement, and is composed of a set of double-elastic follow-up measuring headsystem and a set of flexible secondary follow-up impact damper system, a measuring head (1) is mounted on the measuring frame through the double-elastic follow-up measuring head system, the measuringhead (1) has gapless radial movement and is guaranteed by a set of gap removal high precision guide rail, a raster head (4), a laser reflector mirror (5) and the measuring head (1) are connected together through a measuring head base body (7), and form a set of double-elastic follow-up measuring head system with a parallel elastic sheet (6); the raster head (4), the guide rail (9), the measuring head (1) and the measuring head base body (7) form a set of flexible secondary follow-up impact damper system through elastic sheets (8), in the horizontal plane, the chattering error can be greatly eliminated along radial and axial directions, in the vertical plane, the chattering error is greatly eliminated, the error data is processed simply, the manufacturing process is simple, the machining cost is low and the flexible follow-up high-precision measuring frame system can be widely applicable to measuring frame mechanisms of various lead screw measurement instruments.

Description

Flexible servo-actuated high-acruracy survey frame system
Technical field:
The utility model relates to a kind of precision measurement frame mechanism that belongs to length metering, particularly a kind of flexible servo-actuated high-acruracy survey frame system.
Background technology:
At present in leading screw detects industry, in actual measurement, find: owing to the dither of the inevitable generation of meeting axis systems such as the high speed rotating of drive motor in the headstock and the structural factor of deceleration system and because the manufacturing deficiency of leading screw raceway, problem during the linearity problem of leading screw itself, leading screw are processed in earlier stage, the reasons such as robust motion problem of worktable balladeur train can cause measuring head trace chatter inevitably and produce additive error in the leading screw error measure.Its Error Absolute Value size has badly influenced the leading screw measuring accuracy, and very complicated, difficult to such data processing with computer software technology.Especially even more serious when working speed is higher.In the leading screw of high level of precision detected, this had become a bottleneck obstacle of leading screw detection technique.
Owing to the structural design defective, generally all there is the problem that is difficult to reduce or eliminate significantly the chatter error in measurement bay system in the finding background technology at present.Or its complex structural designs, difficulty of processing is big, and the error concealment effect is undesirable and cause its software processing technology to be tending towards complicated.
Summary of the invention:
At the above-mentioned shortcoming that exists in the prior art, the utility model aims to provide ingenious, cheap for manufacturing cost, the easy to operate simple flexible servo-actuated high-acruracy survey frame system of a kind of structure.From structural principle, just reduce the generation of chatter error greatly or fundamentally just blocked the chatter error transfer, therefore solved this technical barrier well, greatly improved measuring accuracy, have high using value.
Formation of the present utility model: comprise two elasticity servo-actuated gauge head systems of a cover and the flexible secondary servo-actuated weakening of cover system, measuring head is installed on the measurement bay by two elasticity servo-actuated gauge head system, moving radially of measuring head is gapless, overlapping the gap high precision guide rail that disappears by one guarantees, grating head, laser mirror and measuring head link together by the measuring head pedestal, constitute the two elasticity servo-actuated gauge head systems of a cover together with parallel spring leaf; Form the flexible secondary servo-actuated weakening of cover system by shell fragment between grating head, guide rail and measuring head, the measuring head pedestal.Compared with the prior art, the utlity model has following advantage:
1. two elasticity gauge head body functions: in surface level, radially eliminate the chatter error with the axial poles the earth.2. secondary weakening servomechanism function: in perpendicular, greatly eliminate the chatter error or from structural principle, just blocked the chatter error transfer.3. the utility model has greatly been eliminated the chatter error of traditional measurement frame.From structural principle, just reduce the generation of chatter error greatly or block the chatter error transfer, therefore solved this technical barrier well, greatly improved measuring accuracy.Has high using value.4. it is simple to make error information handle: because this mechanism can significantly reduce the additive error composition in the measuring error, make the error component greatly simplify, therefore making computer data handle can simplify greatly.5. this measurement bay mechanism structure is ingenious but manufacturing process is simple, low processing cost.6. the user is simple to operation.7. widely applicable, can be widely used in various leading screws and survey in the measurement bay mechanism of instrument.This technology also can be amplified and is used for other Technologies of Precision Measurement that needs are eliminated the gauge head chatter.8. in addition, it is the system of length standard that the utility model both can be used for laser, and also can be used for the grating is the system of length standard.
Description of drawings:
Fig. 1 is the utility model structural representation, and Fig. 2 is the vertical view of Fig. 1.
1. measuring heads among the figure 2. drive head, 3. spring, 4. grating head, 5. laser mirror, 6. parallel spring sheet, 7. measuring head pedestal, 8. shell fragment, 9. guide rail.
Embodiment:
The utility model is described in further detail below in conjunction with accompanying drawing:
As shown in the figure, measuring head 1 is installed on the measuring head pedestal 7 that has spring 3, and measuring head pedestal 7 is installed on the parallelogram elastic construction of being made up of both sides parallel spring sheet 6, and this structure provides elasticity measurement power.Laser mirror 5 also is installed on this structure.Drive 2 therewith structure be the relation of being rigidly connected.Promote to drive 2 during the rotation of tested leading screw and move, and then promote measurement bay and move.
Guide rail 9 is used to limit grating head 4, and it can only be moved to carrying out gapless precision along lead screw shaft.The flexible weakening servomechanism that shell fragment 8, measuring head pedestal 7, guide rail 9, grating head 4 constitute in this measurement bay, we are referred to as secondary servo-actuated weakening system.The measuring head 1 of front, spring 3, measuring head pedestal 7, parallel spring sheet 6 then constitute another the flexible weakening servomechanism in this measurement bay, and we are referred to as two elasticity gauge head servo-actuated weakening systems.
In addition, laser mirror 5 is that to be used for laser be the length metering system that surveys long benchmark, just removes grating head 4 and corresponding construction at this moment.When being the length metering system,, just remove laser mirror 5 and corresponding construction even during with grating head 4 with metrological grating.That is to say that the utility model both can be used for laser system, also can be used for optical-mechanical system, have multiple applicability.

Claims (1)

1. flexible servo-actuated high-acruracy survey frame system, comprise two elasticity servo-actuated gauge head systems of a cover and the flexible secondary servo-actuated weakening of cover system, it is characterized in that: measuring head (1) is installed on the measurement bay by two elasticity servo-actuated gauge head system, moving radially of measuring head (1) is gapless, overlapping the gap high precision guide rail that disappears by one guarantees, grating head (4), laser mirror (5) and measuring head (1) link together by measuring head pedestal (7), constitute the two elasticity servo-actuated gauge head systems of a cover together with parallel spring leaf (6); Form the flexible secondary servo-actuated weakening of cover system by shell fragment (8) between grating head (4), guide rail (9) and measuring head (1), the measuring head pedestal (7).
CN2009201254156U 2009-05-25 2009-05-25 Flexible follow-up high-precision measuring frame system Expired - Fee Related CN201434669Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2009201254156U CN201434669Y (en) 2009-05-25 2009-05-25 Flexible follow-up high-precision measuring frame system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2009201254156U CN201434669Y (en) 2009-05-25 2009-05-25 Flexible follow-up high-precision measuring frame system

Publications (1)

Publication Number Publication Date
CN201434669Y true CN201434669Y (en) 2010-03-31

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CN2009201254156U Expired - Fee Related CN201434669Y (en) 2009-05-25 2009-05-25 Flexible follow-up high-precision measuring frame system

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104154862A (en) * 2014-08-22 2014-11-19 西北工业大学 Self-adaptive follow-up device for open type grating reading head
CN105547161A (en) * 2016-01-12 2016-05-04 苏州天准科技股份有限公司 High precision flexible measuring device and method for length measuring
CN105716553A (en) * 2016-02-02 2016-06-29 三明市前创微控科技有限公司 Variable length standard device
CN108709622A (en) * 2018-08-14 2018-10-26 河南华索科技有限公司 Shockproof small-range bunker scale based on milling granularity on-line automatic detection device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104154862A (en) * 2014-08-22 2014-11-19 西北工业大学 Self-adaptive follow-up device for open type grating reading head
CN104154862B (en) * 2014-08-22 2017-05-17 西北工业大学 Self-adaptive follow-up device for open type grating reading head
CN105547161A (en) * 2016-01-12 2016-05-04 苏州天准科技股份有限公司 High precision flexible measuring device and method for length measuring
CN105547161B (en) * 2016-01-12 2018-06-29 苏州天准科技股份有限公司 A kind of high-precision flexible measuring device and method for linear measure longimetry
CN105716553A (en) * 2016-02-02 2016-06-29 三明市前创微控科技有限公司 Variable length standard device
CN108709622A (en) * 2018-08-14 2018-10-26 河南华索科技有限公司 Shockproof small-range bunker scale based on milling granularity on-line automatic detection device

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Granted publication date: 20100331

Termination date: 20120525