CN201402049Y - Quartz seal furnace door - Google Patents
Quartz seal furnace door Download PDFInfo
- Publication number
- CN201402049Y CN201402049Y CN2009201183127U CN200920118312U CN201402049Y CN 201402049 Y CN201402049 Y CN 201402049Y CN 2009201183127 U CN2009201183127 U CN 2009201183127U CN 200920118312 U CN200920118312 U CN 200920118312U CN 201402049 Y CN201402049 Y CN 201402049Y
- Authority
- CN
- China
- Prior art keywords
- quartz
- quartzy
- seal
- square hole
- furnace body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Furnace Housings, Linings, Walls, And Ceilings (AREA)
Abstract
The utility model relates to a quartz seal furnace door. Existing open type diffusion quartz furnace doors and quartz reaction cavities are easy to collide, which causes damage. The quartz seal furnace door of the utility model comprises a dome-shaped quartz furnace body, wherein dovetail grooves are opened along the circumference on the surface of one side of the quartz furnace body, fire-resistant silicofluoride seal rings are arranged in the dovetail grooves, the quartz furnace body is provided with a square hole, a cylindrical seal cylinder is vertically fixed on the surface of the other side of the quartz furnace body, and the end surfaces of the cylindrical seal cylinder correspond to the position of the square hole. The quartz seal furnace door has simple structure and reliable sealing, and avoids collision and damage.
Description
Technical field
The utility model belongs to field of photoelectric technology, is specifically related to the quartzy fire door of high leakproofness stopped pipe diffusion furnace in a kind of solar battery sheet doping production process.
Background technology
In solar battery sheet is produced, P type silicon substrate surface need be formed skim N type layer by the High temperature diffusion mode, thereby form the necessary PN junction of solar cell.Technology mode commonly used at present is the airtight N type impurity doping of high temperature (900 ℃) diffusion.Owing in high-temperature reaction process, produce more to human body and the harmful accessory substance of environment, for fear of accessory substance from the reative cell leakage contribution to health and environment, quartzy fire door need be set, and existing open type spreads quartzy fire door and quartz reaction chamber and bumps easily and cause damaging.
Summary of the invention
The purpose of this utility model is at the deficiencies in the prior art, and a kind of quartzy sealing door is provided.
The utility model comprises the quartzy oven door body of dome-shaped, has dovetail groove on the surface of quartzy oven door body one side along circumference, and high temperature resistant fluosilicic sealing ring is arranged in the dovetail groove; Quartzy oven door body has square hole, and the SiC oar is fixed on the square hole.The cylindrical seal tube is vertically fixed on the surface of quartzy oven door body opposite side, and the end face of cylindrical seal tube is corresponding with the square hole position.
The utility model is simple in structure, not only seals reliably but also avoided damaged in collision.
Description of drawings
Fig. 1 is a structural representation of the present utility model;
Fig. 2 is the planar structure schematic diagram of Fig. 1.
The specific embodiment
As illustrated in fig. 1 and 2, a kind of quartzy sealing door comprises the quartzy oven door body 1 of dome-shaped, has dovetail groove on the surface of quartzy oven door body 1 one sides along circumference, and high temperature resistant fluosilicic sealing ring 3 is arranged in the dovetail groove; Quartzy oven door body 1 has square hole 2, and the SiC oar is fixed on the square hole.4 of cylindrical seal are vertically fixed on the surface of quartzy oven door body 1 opposite side, and the end face of cylindrical seal tube is corresponding with the square hole position.
Claims (1)
1, a kind of quartzy sealing door comprises the quartzy oven door body of dome-shaped, and it is characterized in that: the surface in quartzy oven door body one side has dovetail groove along circumference, and high temperature resistant fluosilicic sealing ring is arranged in the dovetail groove; Quartzy oven door body has square hole, and the cylindrical seal tube is vertically fixed on the surface of quartzy oven door body opposite side, and the end face of cylindrical seal tube is corresponding with the square hole position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009201183127U CN201402049Y (en) | 2009-04-23 | 2009-04-23 | Quartz seal furnace door |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009201183127U CN201402049Y (en) | 2009-04-23 | 2009-04-23 | Quartz seal furnace door |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201402049Y true CN201402049Y (en) | 2010-02-10 |
Family
ID=41661844
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009201183127U Expired - Fee Related CN201402049Y (en) | 2009-04-23 | 2009-04-23 | Quartz seal furnace door |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201402049Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102261833A (en) * | 2011-06-24 | 2011-11-30 | 苏州凯西石英电子有限公司 | Furnace door of diffusion furnace for production of solar battery slice |
-
2009
- 2009-04-23 CN CN2009201183127U patent/CN201402049Y/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102261833A (en) * | 2011-06-24 | 2011-11-30 | 苏州凯西石英电子有限公司 | Furnace door of diffusion furnace for production of solar battery slice |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100210 Termination date: 20120423 |