CN203242608U - Silicon wafer grabbing manipulator - Google Patents
Silicon wafer grabbing manipulator Download PDFInfo
- Publication number
- CN203242608U CN203242608U CN2013203066995U CN201320306699U CN203242608U CN 203242608 U CN203242608 U CN 203242608U CN 2013203066995 U CN2013203066995 U CN 2013203066995U CN 201320306699 U CN201320306699 U CN 201320306699U CN 203242608 U CN203242608 U CN 203242608U
- Authority
- CN
- China
- Prior art keywords
- straight tube
- straight pipe
- mechanical seal
- silicon chip
- transmission shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Manipulator (AREA)
Abstract
The utility model provides a silicon wafer grabbing manipulator comprising a straight pipe, a mechanical seal and vacuum chucks, wherein one end of the straight pipe is sealed, the sealed end of the straight pipe sealing is provided with a transmission shaft, the end part of the transmission shaft is provided with an external spline, the end face of the other end of the straight pipe is provided with an air outlet, the mechanical seal is installed on the air outlet, the side wall of the straight pipe is provided with air inlet holes, the air inlet holes are circumferentially and uniformly distributed and are axially and equidistantly arranged in the side wall of the straight pipe, and the vacuum chucks are installed on the air inlet holes. The silicon wafer grabbing manipulator provided by the utility model has the advantages of simple structure, stable driving, high grabbing efficiency, good grabbing effect and higher production efficiency.
Description
Technical field
The utility model relates to a kind of manipulator, particularly a kind of silicon chip catching robot.
Background technology
In the manufacturing process of photovoltaic industry crystal silicon cell, usually need silicon chip is sent to another station from a station, traditional mode is to adopt manual type, wastes time and energy, and damages silicon chip easily.
The utility model content
The technical problem that (one) will solve
The technical problems to be solved in the utility model provides a kind of silicon chip catching robot of energy automatic capturing silicon chip.
(2) technical scheme
For solving the problems of the technologies described above, the utility model provides a kind of silicon chip catching robot, comprise straight tube 4, mechanical seal 8 and vacuum cup 6, the one end sealing of described straight tube 4, one end of described straight tube 4 sealings is provided with power transmission shaft 2, the end of described power transmission shaft 2 is provided with external splines 1, the other end end face of described straight tube 4 offers the gas outlet, described mechanical seal 8 is installed on the described gas outlet, the sidewall of described straight tube 4 is provided with air admission hole 5, described air admission hole 5 is the uniform and axial sidewall that equidistantly is arranged in described straight tube 4 circumferentially, and described vacuum cup 6 is installed on the described air admission hole 5.
Further, described mechanical seal 8 is integrated mechanical sealing.
Further, the two ends of described straight tube 4 are equipped with annular protrusion 7.
(3) beneficial effect
The utility model silicon chip catching robot is finished crawl to silicon chip by the sucker of straight tube sidewall; Be provided with mechanical seal in the gas outlet, can in the straight tube rotation process, guarantee sealing; Power transmission shaft is provided with external splines, driving straight tube rotation that can be stable; The utility model silicon chip catching robot, simple in structure, drive and stablize, crawl efficient is high and effective, has improved production efficiency.
Description of drawings
Fig. 1 is the structural representation of the utility model silicon chip catching robot.
Embodiment
Consult Fig. 1, the utility model provides a kind of silicon chip catching robot, comprise straight tube 4, mechanical seal 8 and vacuum cup 6, straight tube is hollow tube, the one end sealing of this straight tube 4, end in sealing is provided with power transmission shaft 2, be provided with external splines 1 in the end of power transmission shaft 2, other end end face at straight tube 4 offers the gas outlet, mechanical seal 8 is installed on this gas outlet, sidewall at straight tube 4 is provided with air admission hole 5, and air admission hole 5 is the uniform and axial sidewall that equidistantly is arranged in straight tube 4 circumferentially, and namely the sidewall of straight tube 4 circumferentially is evenly equipped with some row air admission holes, in the present embodiment, be evenly equipped with five row, every row air admission hole is comprised of some vertically equidistant air admission holes of arranging, and vacuum cup 6 is installed on this air admission hole 5; Install for convenient, the mechanical seal 8 in the present embodiment is integrated mechanical sealing; In order to prevent when rotated axial slip, be equipped with annular protrusion 7 at the two ends of straight tube 4, play the effect of backstop.
The utility model silicon chip catching robot is finished crawl to silicon chip by the sucker of straight tube sidewall; Be provided with mechanical seal in the gas outlet, can in the straight tube rotation process, guarantee sealing; Power transmission shaft is provided with external splines, driving straight tube rotation that can be stable; The utility model silicon chip catching robot, simple in structure, drive and stablize, crawl efficient is high and effective, has improved production efficiency.
The above only is preferred implementation of the present utility model; should be understood that; for those skilled in the art; under the prerequisite that does not break away from the utility model know-why; can also make some improvements and modifications, these improvements and modifications also should be considered as protection range of the present utility model.
Claims (3)
1. silicon chip catching robot, it is characterized in that: comprise straight tube (4), mechanical seal (8) and vacuum cup (6), the one end sealing of described straight tube (4), one end of described straight tube (4) sealing is provided with power transmission shaft (2), the end of described power transmission shaft (2) is provided with external splines (1), the other end end face of described straight tube (4) offers the gas outlet, described mechanical seal (8) is installed on the described gas outlet, the sidewall of described straight tube (4) is provided with air admission hole (5), described air admission hole (5) is circumferentially uniform and axially equidistantly be arranged in the sidewall of described straight tube (4), and described vacuum cup (6) is installed on the described air admission hole (5).
2. silicon chip catching robot as claimed in claim 1 is characterized in that: described mechanical seal (8) is integrated mechanical sealing.
3. silicon chip catching robot as claimed in claim 1, it is characterized in that: the two ends of described straight tube (4) are equipped with annular protrusion (7).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2013203066995U CN203242608U (en) | 2013-05-30 | 2013-05-30 | Silicon wafer grabbing manipulator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2013203066995U CN203242608U (en) | 2013-05-30 | 2013-05-30 | Silicon wafer grabbing manipulator |
Publications (1)
Publication Number | Publication Date |
---|---|
CN203242608U true CN203242608U (en) | 2013-10-16 |
Family
ID=49319873
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2013203066995U Expired - Fee Related CN203242608U (en) | 2013-05-30 | 2013-05-30 | Silicon wafer grabbing manipulator |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN203242608U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104078408A (en) * | 2014-07-24 | 2014-10-01 | 赵士立 | Control handle device for diffusion of solar battery pieces |
-
2013
- 2013-05-30 CN CN2013203066995U patent/CN203242608U/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104078408A (en) * | 2014-07-24 | 2014-10-01 | 赵士立 | Control handle device for diffusion of solar battery pieces |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131016 Termination date: 20170530 |