CN201398156Y - Screw-thread linear ultrasonic motor driven by piezoelectric composite bending beam and having clamped end or middle part - Google Patents

Screw-thread linear ultrasonic motor driven by piezoelectric composite bending beam and having clamped end or middle part Download PDF

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Publication number
CN201398156Y
CN201398156Y CN2009201062813U CN200920106281U CN201398156Y CN 201398156 Y CN201398156 Y CN 201398156Y CN 2009201062813 U CN2009201062813 U CN 2009201062813U CN 200920106281 U CN200920106281 U CN 200920106281U CN 201398156 Y CN201398156 Y CN 201398156Y
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China
Prior art keywords
piezoelectric actuator
screw
screwed pipe
ultrasonic motor
linear ultrasonic
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Expired - Lifetime
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CN2009201062813U
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Chinese (zh)
Inventor
周铁英
束逸
陈宇
傅德永
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Tsinghua University
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Tsinghua University
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Abstract

The utility model relates to a screw-thread linear ultrasonic motor driven by a piezoelectric composite bending beam and having a clamped end, and is characterized in that the linear ultrasonic motorincludes a piezoelectric driver generating bending vibration and a stator of the ultrasonic motor, wherein the stator comprises solenoids fixedly attached onto the upper end surface of the piezoelectric driver; the linear ultrasonic motor further includes a screw or a solenoid rotor inserted into the solenoid to be matched with the inner threads of the solenoid, and a pre-pressure mechanism arranged between the lower end surface of the screw or the solenoid rotor and the upper end surface of the piezoelectric driver; and the lower end surface of the piezoelectric driver is clamped. The utilitymodel can reduce the bending resonance frequency, and the fixing manner is simple, thereby saving the space for array arrangement. Moreover, the method for manufacturing the screw-thread linear motorhaving one clamped end or simple support adopts the piezoelectric pillar, piezoelectric tube or metallic piezoelectric sheet composite driver, and is simple; the motor works reliably; and the cost can be lowered, so that the application field is wide.

Description

The screw thread linear ultrasonic motor that the piezoelectricity complex bend beam that prop up admittedly at one end or middle part drives
Technical field
The utility model belongs to ultrasonic wave electrical micro-machine design field, particularly the screw linear motor structural design that drives of the piezoelectricity complex bend beam that props up admittedly of an end.
Background technology
(application number is 6 to a United States Patent (USP) " the screw thread motor of ultrasonic guidance " of in September, 2005 application, 147, a kind of linear electric motors are disclosed 435), this motor is by the circular hole metal square column a11 with internal thread and is bonded at 4 piezoelectric patches a11 (b11) of outer surface as stator (nut), with the screw rod a13 (b13) that is meshed with stator internal thread a12 (b12) as armature spindle--the linear electric motors that screw configuration becomes, shown in Fig. 1 a, Fig. 1 b.This motor is to adopt two ends single order mode of flexural vibration freely, sees Fig. 1 c.Mode resonance frequency is more than 20000 hertz.
And extend the screw linear motor that piezo tube drives.These invention stator two ends are free boundaries, and this motor is to adopt two ends single order mode of flexural vibration freely, sees Fig. 1 c.Mode resonance frequency is more than 20000 hertz.
This motor resonance frequency height, the assembly technology complexity.
The applicant has obtained the Chinese patent of multinomial flexural vibrating ultrasound ripple electrical micro-machine, and these patent names and the patent No. are as follows:
Flexural vibrating ultrasound ripple electrical micro-machine (ZL 01109049.9) based on piezo column, the ultrasound micro-motor (ZL02100687.3) of the piezo column of band conductive shaft, metal square column and piezoelectric ceramic wafer composite ultrasound micromotor (ZL200410091132.6), piezoelectric square column flexural vibrating ultrasound machine (ZL200410091130.7) hollow metal square column and piezoelectric ceramic wafer composite ultrasound micromotor (ZL200410101575.9), composite ultrasonic micromotor with slotted metal square column piezoelectric sheet (ZL20051006330.x).
More than these patents do not have thread mechanism.Can not form rectilinear motion.
Summary of the invention
The purpose of this utility model is to overcoming the weak point of prior art, propose the screw linear motor that piezoelectricity complex bend beam that an a kind of end props up admittedly drives, this structure is used single order or second order mode of flexural vibration, and its resonance frequency reduces, and fixed form is simple, can save space of array arrangement.And manufacture method is simple, reliable operation, and can reduce cost.
The screw thread linear ultrasonic motor that the piezoelectricity complex bend beam that an a kind of end that the utility model proposes props up admittedly drives, it is characterized in that, this linear ultrasonic motor comprises by the piezoelectric actuator that produces flexural vibrations and is attached to the stator of the ultrasound electric machine that the screwed pipe of this piezoelectric actuator upper surface forms, this stator generation single order or second order flexural vibration mode; Insert in this screwed pipe and the screw rod or the screwed pipe rotor of screwed pipe screw-internal thread fit, be arranged on the pre-pressure mechanism between this screw rod or screwed pipe rotor lower surface and the piezoelectric actuator upper surface, prop up admittedly described piezoelectric actuator lower surface.
The screw thread linear ultrasonic motor that the piezoelectricity complex bend beam that another kind one end that the utility model proposes props up admittedly drives, it is characterized in that, this linear ultrasonic motor comprises by the piezoelectric actuator that produces flexural vibrations and is attached to the stator of the ultrasound electric machine that the screw rod of this piezoelectric actuator upper surface forms, this stator generation single order or second order flexural vibration mode; Be inserted in the screwed pipe rotor that combines with the screw rod external screw thread on this screw rod, this screwed pipe rotor upper surface is provided with cover plate; Be arranged in the cover plate of this screwed pipe rotor and the pre-pressure mechanism between the screw rod upper surface, prop up admittedly described piezoelectric actuator lower surface.
The screw thread linear ultrasonic motor that the piezoelectricity complex bend beam that the utility model also proposes to prop up admittedly at a kind of middle part drives, it is characterized in that, this linear ultrasonic motor comprises that two piezoelectric actuators that linked to each other by the piezoelectric actuator that produces flexural vibrations or two end faces and two screwed pipes that are attached to these piezoelectric actuator two ends or two piezoelectric actuator two ends respectively form the stator of ultrasound electric machine, this stator generation second order flexural vibration mode; Insert in two screwed pipes respectively and two screw rotors of screwed pipe screw-internal thread fit, be arranged on the pre-pressure mechanism between this each screw rotor lower surface and the piezoelectric actuator upper surface, prop up admittedly at the middle part of a described piezoelectric actuator, or prop up admittedly at the joint face of two piezoelectric actuators.
The screw thread linear ultrasonic motor that the piezoelectricity complex bend beam that the another kind of middle part that the utility model proposes is solid drives, it is characterized in that, this linear ultrasonic motor comprises that two piezoelectric actuators that linked to each other by the piezoelectric actuator that produces flexural vibrations or two end faces and two screw rods that are attached to these piezoelectric actuator two ends or two piezoelectric actuator two ends respectively form the stator of ultrasound electric machine, this stator generation second order flexural vibration mode; Be inserted in two screwed pipe rotors on described two screw rods respectively, the screwed pipe internal thread of this screwed pipe rotor cooperates with the screw rod external screw thread; Be arranged on the pre-pressure mechanism between each screwed pipe rotor cover plate inner face and the screw rod free end face, prop up admittedly at the middle part of a described piezoelectric actuator, or prop up admittedly at the joint face of two piezoelectric actuators.
Described piezoelectric actuator cross section can be circle, square or polygon-shaped.
Described pre-pressure mechanism can be flexible member or magnetic element.
Characteristics of the present utility model and effect:
The utility model can prop up an end boundaries of existing micromotor stator or freely-supported admittedly, the other end adds one section screwed pipe (or screw rod), be configured to compound stator, rotor and stator pass through screw-threaded engagement, under stator drives, rotor pivots, and becomes rotatablely move into axial linear movement by screw thread.Precompression is applied between the rotor with microsprings or magnetic piece.This structure is used single order or second order mode of flexural vibration, and its flexural resonance frequency reduces, and fixed form is simple, can save space of array arrangement.And an end that adopts piezo column, piezo tube or the compound driver of metal piezoelectric patches props up admittedly or the manufacture method of the screw linear motor of freely-supported is simple, reliable operation, and can reduce cost.
The utility model can use existing several mode of flexural vibration ultrasound micro-motor patent structures to be assembled.
This device is at micromechanics, Aero-Space, and microelectronics, medicine equipment, there is application prospect extensively in fields such as some word machine.
Description of drawings
Fig. 1 is existing a kind of linear electric motors schematic diagram;
Wherein, Fig. 1 a is the screw thread electric machine structure of ultrasonic guidance, and Fig. 1 b is a piezo tube screw thread electric machine structure.Fig. 1 c is these motor stator two ends first-order bending vibration mode freely.
Screwed pipe linear electric motors embodiment 1 schematic diagram that the piezoelectricity complex bend beam that Fig. 2 props up admittedly for an end of the present utility model drives; Wherein, Fig. 2 a is embodiment 1 structural representation.Fig. 2 b is the first-order bending vibration mode that this motor stator one end props up admittedly.Fig. 2 c is the second order flexural vibration mode that this motor stator one end props up admittedly.
Screw rod linear electric motors embodiment 2 schematic diagrames that the piezoelectricity complex bend beam that Fig. 3 props up admittedly for an end of the present utility model drives;
Wherein, Fig. 3 a is embodiment 2 structural representations.Fig. 3 b is the first-order bending vibration mode that this motor stator one end props up admittedly.Fig. 3 c is the second order flexural vibration mode that this motor stator one end props up admittedly.
Fig. 4 is screwed pipe linear electric motors embodiment 3 schematic diagrames that the piezoelectricity complex bend beam at solid of middle part of the present utility model (AB) drives;
Wherein, Fig. 4 a is present embodiment 3 structural representations.These motor stator two ends of Fig. 4 b are the second order flexural vibration mode freely.
Fig. 5 is screw rod linear electric motors embodiment 4 schematic diagrames that the piezoelectricity complex bend beam at solid of middle part of the present utility model (AB) drives;
Wherein, Fig. 5 a is present embodiment 4 structural representations.These motor stator two ends of Fig. 5 b are the second order flexural vibration mode freely.
Embodiment
Screw thread linear ultrasonic motor structure embodiment and accompanying drawing that the piezoelectricity complex bend beam that an a kind of end that the utility model proposes props up admittedly drives are described in detail as follows:
Embodiment 1
Present embodiment is the Piezoelectric Driving screwed pipe linear ultrasonic motor that prop up admittedly the bottom, its structure is shown in Fig. 2 a, and this linear ultrasonic motor comprises by the piezoelectric actuator 21 that produces flexural vibrations (can by piezo column, piezo tube or the metal piezoelectric patches is compound form) and is attached to the stator of the ultrasound electric machine that the screwed pipe 22 of 21 upper surfaces forms; Insert the screw rotor 23 that combines with the screwed pipe internal thread in the screwed pipe 22, be arranged on the pre-pressure mechanism 24 between these screw rotor 23 lower surfaces and piezoelectric actuator 21 upper surfaces, prop up admittedly described piezoelectric actuator 21 lower surfaces.
Single order or second order flexural vibration mode that present embodiment utilizes ultrasound electric machine stator bottom to prop up admittedly make the screw rotor 23 that is engaged on the screwed pipe be rotated driving, and by screw thread screw rotor 23 rectilinear motion vertically.24 pairs of screw rotors 23 of flexible member or magnetic element apply precompression.
Fig. 2 b illustrates the first-order bending vibration mode that this motor stator one end props up admittedly.Fig. 2 c illustrates the second order flexural vibration mode that this motor stator one end props up admittedly.
The screw rotor 23 of present embodiment also can be that the screwed pipe of hollow is with weight reduction.
Piezoelectric actuator 21 cross sections of present embodiment can be circular, square or other are polygon-shaped.
The pre-pressure mechanism of present embodiment can be flexible member or magnetic element.For example adopt two magnetic rings to be bonded to screwed pipe and screw rod end respectively, perhaps magnetic rings, another is that the ferromagnetism ring is bonded to screwed pipe and screw rod end respectively.
The direction of motion of present embodiment is by the drive signal and the thread rotary orientation decision of piezo column, piezo tube or the compound driver of metal piezoelectric patches.Present embodiment is specially adapted to a word machine.
Embodiment 2
Present embodiment is the Piezoelectric Driving screw rod linear ultrasonic motor that prop up admittedly the bottom, and its structure is shown in Fig. 3 `;
This linear ultrasonic motor comprises by the piezoelectric actuator 31 that produces flexural vibrations (can by piezo column, piezo tube or the metal piezoelectric patches is compound form) and is attached to the stator of the ultrasound electric machine that the screw rod 32 of 31 upper surfaces forms; Be inserted in the screwed pipe rotor 33 that combines with the screw rod external screw thread on the screw rod 32, these screwed pipe rotor 33 upper surfaces are provided with cover plate 35; Be arranged in the cover plate 35 of this screwed pipe rotor and flexible member or magnetic element 34 between screw rod 32 upper surfaces, prop up admittedly described piezoelectric actuator 31 lower surfaces.
Single order or second order flexural vibration mode that present embodiment utilizes ultrasound electric machine stator one end to prop up admittedly make the screwed pipe rotor 33 that is engaged on the screw rod be rotated driving, and guide screwed pipe rotor 33 rectilinear motion vertically by screw thread.
Present embodiment cover plate 35 can be processed into one with screwed pipe.34 pairs of screwed pipe rotors of flexible member or magnetic element apply precompression.
Fig. 3 b illustrates the first-order bending vibration mode that this motor stator one end props up admittedly.Fig. 3 c illustrates the second order flexural vibration mode that this motor stator one end props up admittedly.
Embodiment 3
Present embodiment is the Piezoelectric Driving screwed pipe linear ultrasonic motor at solid of middle part (AB), and its structure is shown in Fig. 4 a; This linear ultrasonic motor comprises that two piezoelectric actuators 41 that linked to each other by the piezoelectric actuator that produces flexural vibrations or two end faces and two screwed pipes 42 that are attached to piezoelectric actuator 41 two ends or two piezoelectric actuator two ends respectively form the stator of ultrasound electric machine, insert two screw rotors 43 that combine with the screwed pipe internal thread in two screwed pipes 42 respectively, be separately positioned on two flexible members or magnetic element 24 between these two screw rotor 43 lower surfaces and two piezoelectric actuator 41 upper surfaces, described if adopt a piezoelectric actuator 41, then prop up admittedly in the middle, if adopt two piezoelectric actuators 41, then solid of the joint face (AB) of two piezoelectric actuators.
Utilize the second order flexural vibration mode at solid of ultrasound electric machine stator middle part, make two screw rotors 43 that are engaged on the screwed pipe be rotated driving, and guide two screw rotors 43 rectilinear motion vertically by screw thread.Two flexible members or 44 pairs of screw rods of magnetic element apply precompression.Screw rotor 43 also can be that the screwed pipe of hollow is with weight reduction.The direction of motion is by the drive signal and the thread rotary orientation decision of piezo column, piezo tube or the compound driver of metal piezoelectric patches.
Fig. 4 b illustrates these motor stator two ends second order flexural vibration mode freely.
Embodiment 4
Present embodiment is the Piezoelectric Driving screw rod linear ultrasonic motor at solid of middle part (AB), and its structure is shown in Fig. 5 a; This linear ultrasonic motor comprises that two piezoelectric actuators 51 that linked to each other by the piezoelectric actuator that produces flexural vibrations or two end faces and two screw rods 52 that are attached to piezoelectric actuator 51 two ends or two piezoelectric actuator two ends respectively form the stator of ultrasound electric machine.Two screwed pipe rotors 53 that have end casing 55 are enclosed within on the screw rod respectively, and cooperate with the screw rod external screw thread, and two flexible members or magnetic element 54 are separately positioned between these two screwed pipe rotors, 53 end casing inner faces and two screw rod 52 free end faces.Described if piezoelectric actuator 51 of employing then props up in the middle admittedly, if adopt two piezoelectric actuators 51, then solid of the joint face (AB) of two piezoelectric actuators.
Utilize the second order flexural vibration mode at solid of ultrasound electric machine stator middle part, make two screwed pipe rotors 53 that are engaged on the screw rod be rotated driving, and guide two screwed pipe rotors 53 rectilinear motion vertically by screw thread.Two flexible members or 54 pairs of screwed pipes of magnetic element apply precompression.
The screwed pipe direction of motion is by the drive signal and the thread rotary orientation decision of piezo column, piezo tube or the compound driver of metal piezoelectric patches.
These motor stator two ends of Fig. 5 b are the second order flexural vibration mode freely.

Claims (8)

1, the screw thread linear ultrasonic motor that drives of the piezoelectricity complex bend beam that props up admittedly of an a kind of end, it is characterized in that, this linear ultrasonic motor comprises by the piezoelectric actuator that produces flexural vibrations and is attached to the stator of the ultrasound electric machine that the screwed pipe of this piezoelectric actuator upper surface forms, this stator generation single order or second order flexural vibration mode; Insert in this screwed pipe and the screw rod or the screwed pipe rotor of screwed pipe screw-internal thread fit, be arranged on the pre-pressure mechanism between this screw rod or screwed pipe rotor lower surface and the piezoelectric actuator upper surface, prop up admittedly described piezoelectric actuator lower surface.
2, linear ultrasonic motor as claimed in claim 1 is characterized in that, described piezoelectric actuator cross section is circular, square or polygon-shaped.
3, linear ultrasonic motor as claimed in claim 1 is characterized in that, described pre-pressure mechanism is flexible member or magnetic element.
4, the screw thread linear ultrasonic motor that drives of the piezoelectricity complex bend beam that props up admittedly of an a kind of end, it is characterized in that, this linear ultrasonic motor comprises by the piezoelectric actuator that produces flexural vibrations and is attached to the stator of the ultrasound electric machine that the screw rod of this piezoelectric actuator upper surface forms, this stator generation single order or second order flexural vibration mode; Be inserted in the screwed pipe rotor that combines with the screw rod external screw thread on this screw rod, this screwed pipe rotor upper surface is provided with cover plate; Be arranged in the cover plate of this screwed pipe rotor and the pre-pressure mechanism between the screw rod upper surface, prop up admittedly described piezoelectric actuator lower surface.
5, linear ultrasonic motor as claimed in claim 3 is characterized in that, described piezoelectric actuator cross section is circular, square or polygon-shaped.
6, linear ultrasonic motor as claimed in claim 3 is characterized in that, described cover plate and screwed pipe one process.
7, the screw thread linear ultrasonic motor that drives of the piezoelectricity complex bend beam that props up admittedly of a kind of middle part, it is characterized in that, this linear ultrasonic motor comprises that two piezoelectric actuators that linked to each other by the piezoelectric actuator that produces flexural vibrations or two end faces and two screwed pipes that are attached to these piezoelectric actuator two ends or two piezoelectric actuator two ends respectively form the stator of ultrasound electric machine, this stator generation second order flexural vibration mode; Insert in two screwed pipes respectively and two screw rotors of screwed pipe screw-internal thread fit, be arranged on the pre-pressure mechanism between this each screw rotor lower surface and the piezoelectric actuator upper surface, prop up admittedly at the middle part of a described piezoelectric actuator, or prop up admittedly at the joint face of two piezoelectric actuators.
8, the screw thread linear ultrasonic motor that drives of the piezoelectricity complex bend beam that props up admittedly of a kind of middle part, it is characterized in that, this linear ultrasonic motor comprises that two piezoelectric actuators that linked to each other by the piezoelectric actuator that produces flexural vibrations or two end faces and two screw rods that are attached to these piezoelectric actuator two ends or two piezoelectric actuator two ends respectively form the stator of ultrasound electric machine, this stator generation second order flexural vibration mode; Be inserted in two screwed pipe rotors on described two screw rods respectively, the screwed pipe internal thread of this screwed pipe rotor cooperates with the screw rod external screw thread; Be arranged on the pre-pressure mechanism between each screwed pipe rotor cover plate inner face and the screw rod free end face, prop up admittedly at the middle part of a described piezoelectric actuator, or prop up admittedly at the joint face of two piezoelectric actuators.
CN2009201062813U 2009-03-20 2009-03-20 Screw-thread linear ultrasonic motor driven by piezoelectric composite bending beam and having clamped end or middle part Expired - Lifetime CN201398156Y (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103115056A (en) * 2013-03-12 2013-05-22 哈尔滨工业大学 Sandwich type nut which can be unlocked for changing operating mode of free beam longitudinal-torsional mode

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103115056A (en) * 2013-03-12 2013-05-22 哈尔滨工业大学 Sandwich type nut which can be unlocked for changing operating mode of free beam longitudinal-torsional mode
CN103115056B (en) * 2013-03-12 2015-03-18 哈尔滨工业大学 Sandwich type nut which can be unlocked for changing operating mode of free beam longitudinal-torsional mode

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Granted publication date: 20100203

Effective date of abandoning: 20090320