CN201397807Y - Pollution-free rotary work bench - Google Patents
Pollution-free rotary work bench Download PDFInfo
- Publication number
- CN201397807Y CN201397807Y CN2009201081922U CN200920108192U CN201397807Y CN 201397807 Y CN201397807 Y CN 201397807Y CN 2009201081922 U CN2009201081922 U CN 2009201081922U CN 200920108192 U CN200920108192 U CN 200920108192U CN 201397807 Y CN201397807 Y CN 201397807Y
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- CN
- China
- Prior art keywords
- water
- sealed
- rotating mechanism
- pollution
- work bench
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
A pollution-free rotary work bench relates to a micro-electronic processing device, and consists of a rotating mechanism of a sealed outer casing (1) and a rotating mechanism of a water-cooling rotarysealed work bench (7). The rotating mechanism of the water-cooling rotary sealed work bench (7) is sealed inside the sealed outer casing (1), the water-cooling rotary sealed work bench (7) is drivento rotate by a torque motor (2) via a gear (3), the rotating mechanism of the sealed outer casing (1) consists of a stepping motor (14), a worm gear (12), a worm (13), a bearing (10) and a framework type rubber sealing ring (11), a sealed wiring tube (8) is rotatably supported on a large sealing flange via the baring (10) and the framework type rubber sealing ring (11), and a control circuit and awater tube are led out via the sealed wiring tube (8) connected with the sealed outer casing (1). The pollution-free rotary work bench resolves the problem that cooling water tubes and circuits pollute vacuum chambers.
Description
Technical field
The utility model relates to a kind of microelectronics processing unit (plant), the pollution-free rotary table that particularly a kind of ion beam etching machine uses.
Background technology
In the technical process of ion beam etching, need print when rotation is done at self normal center, also need print can adjust the incidence angle of ion beam, this just needs print also to want to wind with the print central point in rotation is the center of circle and perpendicular to 0 ~ 90 ° of angle of print normal direction (being the ion beam incident direction) rotation.Because whole etching process all will carry out in vacuum chamber, and can produce a large amount of heat in the process of etching, adopting water cooling is method preferably.In the equipment of prior art, owing to can't resolve the difficult problem of the turnover vacuum chamber of pipelines such as power line, control line and water pipe, let alone to be exposed in the vacuum chamber, bring pollution to vacuum chamber.
The utility model content
In order to solve the technological deficiency that prior art exists, the purpose of this utility model is to provide a kind of pollution-free rotary table, and it all seals all pipelines of workbench, reduces the pollution of vacuum chamber.
To achieve these goals, the technical solution of the utility model is:
A kind of pollution-free rotary table, form by the rotating mechanism of can and the rotating mechanism of water-cooled rotary seal workbench, wherein: the rotating mechanism of water-cooled rotary seal workbench is sealed in the can, the travelling gear engagement of the gear of torque motor and water-cooled rotary seal workbench, the rotating shaft of water-cooled rotary seal workbench is supported by bearing, rotary seal cover and matrix type rubber seal, rotation water-cooled joint is arranged in the can, and all control circuits and water pipe all pass through the sealing that links to each other with can and walk spool and draw.
The rotating mechanism of can is made of stepping motor, turbine, worm screw, bearing and matrix type rubber seal, and sealing is walked spool and is supported on rotationally on the big flange of sealing by bearing and matrix type rubber seal.
Turbine is fixed to sealing and walks on the spool.
Because after adopting such scheme, the utility model in use, its transmission mechanism motor, gear, support, water-cooled mechanism, sealing device, lead-in wire and water pipe etc. can all be sealed in can 1 to the device that vacuum system pollutes and sealing is walked among the shell of spool 8, thereby has formed a thorough free of contamination environment.The rotary seal workbench can be realized when print self normal is done rotation, can also wind with the print central point is the center of circle and perpendicular to 0 ~ 90 ° of angle of print normal direction (being the ion beam incident direction) rotation, has realized polluting little, good sealing effect, effect simple in structure.
Description of drawings
Fig. 1 is the side-looking generalized section of pollution-free rotary table;
Fig. 2 is the upward view of Fig. 1,90 ° of states of the rotation of pollution-free rotary table;
Fig. 3 be among Fig. 1 A to view.
Label in the accompanying drawing:
1. can, 2 torque motors., 3. gear, 4. bearing, 5. rotary seal cover, 6. matrix type rubber seal, 7 water-cooled rotary seal workbench., spool is walked in 8 sealings., 9. seal big flange, 10. bearing, 11. matrix type rubber seal, 12. turbines, 13. worm screw, 14. stepping motor, 15 rotation water-cooled joints, 16. travelling gears.
Embodiment
Below in conjunction with Figure of description embodiment of the present utility model is further described.
Whole can 1 and the water-cooled seal operation platform 7 that carries all are in the vacuum chamber, but spool 8 and outside atmosphere UNICOM are really walked by sealing in the inside of can 1.
A kind of as shown in fig. 1 pollution-free rotary table, form by the rotating mechanism of can 1 and the rotating mechanism of water-cooled rotary seal workbench 7, wherein: the rotating mechanism of water-cooled rotary seal workbench 7 is sealed in the can 1, the gear 3 of torque motor 2 and 16 engagements of the travelling gear of water-cooled rotary seal workbench 7,7 rotating shafts of water-cooled rotary seal workbench are by bearing 4, rotary seal cover 5 and matrix type rubber seal 6 support, rotation water-cooled joint 15 is arranged in the can 1, and all control circuits and water pipe all pass through the sealing that links to each other with can 1 and walk spool 8 and draw.
As Fig. 1 and Fig. 3, the rotating mechanism of can 1 is the incidence angle governor motion of workbench, be made of stepping motor 14, turbine 12, worm screw 13, bearing 10 and matrix type rubber seal 11, sealing is walked spool 8 and is supported on rotationally on the big flange 9 of sealing by bearing 10 and matrix type rubber seal 11.Turbine 12 is fixed to sealing and walks on the spool 8.Sealing big flange 9 is fixed on the outer wall of vacuum chamber by sealing ring.
Figure 2 shows that pollution-free rotary table rotates the signal of 90 ° of states.
In use, in the can 1, the gear 3 of torque motor 2 and 16 engagements of the travelling gear of water-cooled rotary seal workbench 7, driving water-cooled rotary seal workbench 7 rotates, 7 rotating shafts of water-cooled rotary seal workbench are supported by bearing 4, rotary seal cover 5 and matrix type rubber seal 6, guarantee that also the sealing between can 1 inside and the vacuum chamber is isolated.Rotation water-cooled joint 15 is arranged in the can 1, provides water-cooled rotary seal workbench 7 cooling waters.In order to make can necessary circuit of 1 interior arrangement work and cooling water pipe can directly not pass through vacuum chamber, be provided with sealing walk spool 8 with can 1 inner with extraneous UNICOM, all control circuits and water pipe are all passed through the sealing that links to each other with can 1 walk spool 8 and draw.
In order to regulate the incidence angle of ion beam, need can 1 can in vacuum chamber, do the spinning movement of regulation, therefore, the incidence angle governor motion of the rotating mechanism of can 1 as workbench is set, the rotating mechanism device of can 1 is on the big flange 9 of sealing, seal big flange 9 and be fixed to by sealing ring on the outer wall of vacuum chamber, making sealing walk spool 8 can either rotate flexibly, can guarantee the sealing of its outer rim again.
Because above-mentioned design is that rotary middle point and the axis vertical with the center line of can 1 rotate in 0 ~ 90 ° scope with having guaranteed that can 1 can wind with the print center, makes again and has formed a thorough free of contamination environment in the vacuum chamber.
Claims (3)
1, a kind of pollution-free rotary table is made up of the rotating mechanism of can (1) and the rotating mechanism of water-cooled rotary seal workbench (7), it is characterized in that:
The rotating mechanism of water-cooled rotary seal workbench (7) is sealed in the can (1), the gear (3) of torque motor (2) and the engagement of the travelling gear (16) of water-cooled rotary seal workbench (7), water-cooled rotary seal workbench (7) rotating shaft is supported by bearing (4), rotary seal cover (5) and matrix type rubber seal (6), rotation water-cooled joint (15) is arranged in the can (1), and all control circuits and water pipe all pass through the sealing that links to each other with can (1) and walk spool (8) and draw.
2, pollution-free rotary table according to claim 1, it is characterized in that: the rotating mechanism of can (1) is made of stepping motor (14), turbine (12), worm screw (13), bearing (10) and matrix type rubber seal (11), and sealing is walked spool (8) and is supported on rotationally on the big flange of sealing (9) by bearing (10) and matrix type rubber seal (11).
3, pollution-free rotary table according to claim 2 is characterized in that: turbine (12) is fixed to sealing and walks on the spool (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009201081922U CN201397807Y (en) | 2009-05-20 | 2009-05-20 | Pollution-free rotary work bench |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009201081922U CN201397807Y (en) | 2009-05-20 | 2009-05-20 | Pollution-free rotary work bench |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201397807Y true CN201397807Y (en) | 2010-02-03 |
Family
ID=41620334
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009201081922U Expired - Fee Related CN201397807Y (en) | 2009-05-20 | 2009-05-20 | Pollution-free rotary work bench |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201397807Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101954594A (en) * | 2010-10-11 | 2011-01-26 | 烟台环球机床附件集团有限公司 | Oil-immersed numerical control rotary workbench |
| CN104596808A (en) * | 2015-01-26 | 2015-05-06 | 中国科学院大气物理研究所 | Rotary gas diffusion and continuous capture device |
| CN110173557A (en) * | 2019-06-11 | 2019-08-27 | 费勉仪器科技(南京)有限公司 | A kind of ultrahigh vacuum rotatory feedthru |
-
2009
- 2009-05-20 CN CN2009201081922U patent/CN201397807Y/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101954594A (en) * | 2010-10-11 | 2011-01-26 | 烟台环球机床附件集团有限公司 | Oil-immersed numerical control rotary workbench |
| CN104596808A (en) * | 2015-01-26 | 2015-05-06 | 中国科学院大气物理研究所 | Rotary gas diffusion and continuous capture device |
| CN110173557A (en) * | 2019-06-11 | 2019-08-27 | 费勉仪器科技(南京)有限公司 | A kind of ultrahigh vacuum rotatory feedthru |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100203 Termination date: 20180520 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |