CN212425854U - Mold rotating main shaft for crucible melting furnace - Google Patents
Mold rotating main shaft for crucible melting furnace Download PDFInfo
- Publication number
- CN212425854U CN212425854U CN202020556267.XU CN202020556267U CN212425854U CN 212425854 U CN212425854 U CN 212425854U CN 202020556267 U CN202020556267 U CN 202020556267U CN 212425854 U CN212425854 U CN 212425854U
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- main shaft
- bolt
- bearing cover
- spindle
- shaft body
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Abstract
The utility model provides a mould rotating main shaft for a crucible melting furnace, which comprises a main shaft body, wherein the main shaft body is arranged at the lower end of a second connecting plate, the upper end of the second connecting plate is connected with a first connecting plate through a bolt, the main shaft body comprises a main shaft shell, and two ends of the main shaft shell are respectively fixed with a bearing cover through bolts; a water inlet water guide pipe is inserted into the center of the main shaft body, a rotary three-way pipe joint is sleeved on the water inlet water guide pipe and connected with the main shaft body through a bolt, and the rotary three-way pipe joint is connected with a vacuum joint through a bolt; one side of the main shaft shell is provided with a speed reducer which is connected with a servo motor through a bolt, the main shaft body is respectively connected with a driven belt wheel and a speed measuring gear through a flat key, and a synchronous belt is arranged on the driven belt wheel. The utility model discloses an adopt inclosed pipeline installation mode, the gas circuit, the water route, the problem of evacuation when all being connected the water-cooling who has solved the crucible mould through main shaft and mould and crucible preparation.
Description
Technical Field
The utility model relates to a semiconductor equipment makes technical field, concretely relates to rotatory main shaft of mould for crucible melting furnace.
Background
When the crucible is manufactured, the mold is required to rotate at a set speed, quartz sand is uniformly added into the mold, and the quartz sand is attached to the inner wall of the mold to form the shape of the crucible under the action of centrifugal force. At the melting heating die in-process, the mould needs vacuum environment, and the operational environment of high temperature need cool off the mould simultaneously, and this rotating spindle provides the evacuation just for the mould, and the water-cooling provides the device of required rotational speed.
SUMMERY OF THE UTILITY MODEL
To the problems existing in the prior art, the utility model provides a mould rotating main shaft for a crucible melting furnace, which aims to solve at least one technical problem.
The technical scheme of the utility model is that: a mould rotating main shaft for a crucible melting furnace comprises a main shaft body, wherein the main shaft body is arranged at the lower end of a second connecting plate, the upper end of the second connecting plate is connected with a first connecting plate through a bolt, the main shaft body comprises a main shaft shell, and bearing covers are respectively fixed at two ends of the main shaft shell through bolts;
a water inlet water guide pipe is inserted into the center of the main shaft body, a rotary three-way pipe joint is sleeved on the water inlet water guide pipe and connected with the main shaft body through a bolt, and the rotary three-way pipe joint is connected with a vacuum joint through a bolt;
one side of the main shaft shell is provided with a speed reducer, the speed reducer is connected with a servo motor through a bolt, the main shaft body is respectively connected with a driven belt wheel and a speed measuring gear through a flat key, and a synchronous belt is installed on the driven belt wheel.
The utility model discloses an adopt inclosed pipeline installation mode, the gas circuit, the water route, the problem of evacuation when all being connected the water-cooling who has solved the crucible mould through main shaft and mould and crucible preparation. The driving mode of the servo motor driving belt wheel is adopted to provide uniform-speed rotation power for the mold during crucible forming, the servo motor drives the mold to rotate stably, and speed regulation and control are accurate. The closed pipeline design optimizes the installation layout of the pipeline, and is simple and attractive and convenient to install.
The bearing cover comprises a first bearing cover and a second bearing cover, the first bearing cover and the second bearing cover are fixed to the upper end and the lower end of the main shaft shell respectively through bolts, a first framework oil seal is arranged in the first bearing cover, and a second framework oil seal is arranged in the second bearing cover.
The utility model discloses a skeleton oil blanket can improve holistic leakproofness.
And a proximity switch is fixed on the second bearing cover through a bolt, and the detection direction of the proximity switch faces the main shaft body.
The main shaft is respectively connected with the first round nut and the second round nut. The first round nut is used for fastening two bearings, and the second round nut is used for fastening the belt wheel.
One side of the spindle shell is connected with a motor support through a bolt, the motor support is connected with a motor support plate, and the speed reducer is fixed on the motor support plate.
The utility model discloses an extension board and support play the support effect to the speed reducer.
And the main shaft is provided with an angular contact ball bearing and a cylindrical roller bearing. The two bearings are used for driving the main shaft body to rotate in the main shaft shell.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention.
In the figure: 1. a first connecting plate; 2. a second connecting plate; 4. a first framework oil seal; 5. a first bearing cover; 6. a spindle housing; 7. a cylindrical roller bearing; 8. a water inlet aqueduct; 9. a main shaft body; 10. angular contact ball bearings; 11. a second bearing cover; 12. A second framework oil seal; 13. a first round nut; 14. a driven pulley; 15. a speed measuring gear; 16. a second round nut; 17. rotating the tee pipe joint; 18. a vacuum joint; 19. a proximity switch; 20. a synchronous belt; 21. a motor support; 22. a motor support plate; 23. A speed reducer; 24 servo motor.
Detailed Description
The present invention will be further described with reference to the accompanying drawings.
Referring to fig. 1, a mold rotating main shaft for a crucible melting furnace comprises a main shaft body 9, the main shaft body is installed at the lower end of a second connecting plate 2, the upper end of the second connecting plate is connected with a first connecting plate 1 through a bolt, the main shaft body comprises a main shaft shell 6, and two ends of the main shaft shell are respectively fixed with a bearing cover through bolts; a water inlet water guide pipe 8 is inserted into the center of the main shaft body, a rotary three-way pipe joint 17 is sleeved on the water inlet water guide pipe and is connected with the main shaft body through a bolt, and the rotary three-way pipe joint is connected with a vacuum joint 18 through a bolt; one side of main shaft casing is equipped with speed reducer 23, and the speed reducer passes through bolted connection servo motor 24, and the main shaft body passes through the parallel key and connects driven pulley 14 and speed measuring gear 15 respectively, installs hold-in range 20 on the driven pulley. The utility model discloses an adopt inclosed pipeline installation mode, the gas circuit, the water route, the problem of evacuation when all being connected the water-cooling who has solved the crucible mould through main shaft and mould and crucible preparation. The driving mode of the servo motor driving belt wheel is adopted to provide uniform-speed rotation power for the mold during crucible forming, the servo motor drives the mold to rotate stably, and speed regulation and control are accurate. The closed pipeline design optimizes the installation layout of the pipeline, and is simple and attractive and convenient to install.
Preferably, the bearing cover comprises a first bearing cover and a second bearing cover 11, the first bearing cover and the second bearing cover are respectively fixed with the upper end and the lower end of the main shaft shell through bolts, a first framework oil seal 4 is arranged in the first bearing cover 5, and a second framework oil seal 12 is arranged in the second bearing cover. The utility model discloses a skeleton oil blanket can improve holistic leakproofness.
More preferably, a proximity switch 19 is fixed to the second bearing cover by a bolt, and a detection direction of the proximity switch faces the main shaft body.
More preferably, the main shaft is connected to the first round nut 13 and the second round nut 16, respectively. The first round nut is used for fastening two bearings, and the second round nut is used for fastening the belt wheel.
More preferably, one side of the spindle housing is connected with a motor support 21 through a bolt, the motor support is connected with a motor support plate 22, and the speed reducer is fixed on the motor support plate. The utility model discloses an extension board and support play the support effect to the speed reducer.
More preferably, the main shaft is provided with an angular ball bearing 10 and a cylindrical roller bearing 7. The two bearings are used for driving the main shaft body to rotate in the main shaft shell.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the principle of the present invention, and these improvements and decorations should also be regarded as the protection scope of the present invention.
Claims (6)
1. A mould rotary main shaft for a crucible melting furnace is characterized in that: the spindle comprises a spindle body, wherein the spindle body is arranged at the lower end of a second connecting plate, the upper end of the second connecting plate is connected with a first connecting plate through a bolt, the spindle body comprises a spindle shell, and bearing covers are fixed at two ends of the spindle shell through bolts respectively;
a water inlet water guide pipe is inserted into the center of the main shaft body, a rotary three-way pipe joint is sleeved on the water inlet water guide pipe and connected with the main shaft body through a bolt, and the rotary three-way pipe joint is connected with a vacuum joint through a bolt;
one side of the main shaft shell is provided with a speed reducer, the speed reducer is connected with a servo motor through a bolt, the main shaft body is respectively connected with a driven belt wheel and a speed measuring gear through a flat key, and a synchronous belt is installed on the driven belt wheel.
2. A mold rotating spindle for a crucible melting furnace as claimed in claim 1, wherein: the bearing cover comprises a first bearing cover and a second bearing cover, the first bearing cover and the second bearing cover are fixed to the upper end and the lower end of the main shaft shell respectively through bolts, a first framework oil seal is arranged in the first bearing cover, and a second framework oil seal is arranged in the second bearing cover.
3. A mold rotating spindle for a crucible melting furnace as set forth in claim 2, wherein: and a proximity switch is fixed on the second bearing cover through a bolt, and the detection direction of the proximity switch faces the main shaft body.
4. A mold rotating spindle for a crucible melting furnace as claimed in claim 1, wherein: the main shaft is respectively connected with the first round nut and the second round nut.
5. A mold rotating spindle for a crucible melting furnace as claimed in claim 1, wherein: one side of the spindle shell is connected with a motor support through a bolt, the motor support is connected with a motor support plate, and the speed reducer is fixed on the motor support plate.
6. A mold rotating spindle for a crucible melting furnace as claimed in claim 1, wherein: and the main shaft is provided with an angular contact ball bearing and a cylindrical roller bearing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020556267.XU CN212425854U (en) | 2020-04-15 | 2020-04-15 | Mold rotating main shaft for crucible melting furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020556267.XU CN212425854U (en) | 2020-04-15 | 2020-04-15 | Mold rotating main shaft for crucible melting furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212425854U true CN212425854U (en) | 2021-01-29 |
Family
ID=74298029
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020556267.XU Active CN212425854U (en) | 2020-04-15 | 2020-04-15 | Mold rotating main shaft for crucible melting furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212425854U (en) |
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2020
- 2020-04-15 CN CN202020556267.XU patent/CN212425854U/en active Active
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