CN201372207Y - Novel trichlorosilane synthesis reactor - Google Patents
Novel trichlorosilane synthesis reactor Download PDFInfo
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- CN201372207Y CN201372207Y CN200920300925U CN200920300925U CN201372207Y CN 201372207 Y CN201372207 Y CN 201372207Y CN 200920300925 U CN200920300925 U CN 200920300925U CN 200920300925 U CN200920300925 U CN 200920300925U CN 201372207 Y CN201372207 Y CN 201372207Y
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Abstract
The utility model relates to a novel trichlorosilane synthesis reactor which comprises a fluidized bed reactor and a medium-high frequency induction heating system, wherein the fluidized bed reactor mainly consists of a reactor settling section 7 at the upper part, a fluidized bed reaction section 3 at the middle part, as well as a gas distributor 5 and a raw material intake pipe which are arranged at the lower part; and the medium-high frequency induction heating system mainly consists of a medium-high frequency electric control cabinet 1 and an induction heater 2. The synthesis reactor is mainly used for synthesizing trichlorosilane by silicon tetrachloride, and has the advantages of high heating temperature, high speed, stable control, sufficient chemical reaction and high conversion rate.
Description
Technical field
The utility model belongs to a kind of chemical industry equipment, specifically belongs to the reactor of silicon tetrachloride synthesizing trichlorosilane.
Background technology
The hydrogen reduction of trichlorosilane is that company of Siemens (Siemens) invented in 1954, claims Siemens Method again, is the high-purity polycrystalline silicon technology of preparing that extensively adopts.
Chemical equation: 2SiHCl3+H2 → Si+2HCl+SiCl4+H2
Reduction reaction takes place in the logistics and the high-purity hydrogen that contain the high purity trichlorosilane on the high-purity polycrystalline silicon core of heating, by chemical vapour deposition, the new high-purity polycrystalline silicon of generation is deposited on the silicon core.Or the high-purity polycrystalline silicon powder placed heated fluidized bed, and feed high purity trichlorosilane and high-purity hydrogen, allow the new polysilicon deposition that generates on silica flour, form the particulate state high-purity polycrystalline silicon.
This reaction also generates by product such as silicon tetrachloride and hydrogenchloride etc. except generating high-purity polycrystalline silicon.Therefore, will there be a large amount of tail gas to discharge in the whole polysilicon production process.For example, produce 1 ton of polysilicon will have an appointment 10-20 ton silicon tetrachloride and the generation of about 1-5 ton hydrogenchloride.Therefore, the disposal to by product is a bottleneck of producing polysilicon at present.
At present, some improvement of Siemens Method are related generally to the comprehensive utilization of silicon tetrachloride.CN2547719 discloses the method that a kind of hydrogenation of silicon tetrachloride is produced trichlorosilane, and wherein silicon tetrachloride, hydrogen and metalluragical silicon carry out gas solid catalytic reaction in the ebullated bed reactor of inner bag inductance heating element.Thereby solved processing, for the scale production of implementing polysilicon contributes to the silicon tetrachloride as by-product of Siemens process.But this technology is not also considered the processing of other by product and is existed inner bag inductance heating element easily to be worn, to heat slow, temperature shortcoming rambunctious.
Summary of the invention
For this reason, the contriver furthers investigate the trichlorosilane synthesis reactor, has obtained the utility model.
Novel trichlorosilane synthesis reactor of the present utility model is made up of fluidized-bed reactor and medium-high frequency inductance heating system.Wherein fluidized-bed reactor mainly is made up of superposed reactor settling section, the gas distributor, the raw material inlet pipe that are positioned at the fluidized-bed reaction section at middle part and are positioned at the bottom.Medium-high frequency inductance heating system mainly is made up of medium-high frequency control electricity cabinet, inductive heater and water cooler.Inductive heater is inner places the fluidized-bed reaction section, and it is heated.
The utlity model has following advantage: 1, the inner fluidized-bed reaction section of placing synthesis reactor of inductive heater, inductive heater power can be regulated, temperature control is steady more, rate of heating is faster; 2, increase the height of reactor settling section, made unreacted silica flour, the abundant sedimentation of catalyzer, improved raw material availability; 3, the gas distributor that is positioned at the bottom can make the raw material air inlet be evenly distributed sufficient reacting; 4, increased recovery silica flour inlet, the silica flour that rotoclone collector is reclaimed returns conversion zone again, continues to participate in reaction.
Description of drawings and embodiment
Accompanying drawing is the structure diagram of trichlorosilane synthesis reactor of the present utility model, but does not therefore limit protection claim of the present invention.
Description of drawings:
1. medium-high frequency control electricity cabinet, 2. inductive heater, 3. fluidized-bed reaction section, 4. raw material inlet pipe, 5. 6. gas distributor reclaims the silica flour inlet, 7. reactor settling section, 8. synthetics air outlet, 9. raw material silica flour inlet.
Embodiment:
Novel trichlorosilane synthesis reactor is made up of fluidized-bed reactor and medium-high frequency inductance heating system.Wherein fluidized-bed reactor mainly by superposed diameter be 600mm highly be 1200mm reactor settling section 7., the diameter that is positioned at the middle part be 300mm highly be 800mm fluidized-bed reaction section 3. and the gas distributor that is positioned at the bottom 5., 4. the raw material inlet pipe form.Medium-high frequency inductance heating system mainly by power be 150KW intermediate frequency control electricity cabinet 1., 2. inductive heater form with water cooler.3. 2. inner installation of inductive heater place the fluidized-bed reaction section, and it is heated.Reclaim the silica flour inlet and 6. 9. be positioned at 7. bottom of reactor settling section with raw material silica flour inlet, the silica flour that 6. recovery silica flour inlet makes rotoclone collector reclaim returns conversion zone again, continues to participate in reacting.9. raw material silica flour inlet is in order to replenish and interpolation raw material silica flour.8. the synthetics air outlet is connected with the inlet of rotoclone collector.
Claims (1)
1. novel trichlorosilane synthesis reactor is characterized in that: the trichlorosilane synthesis reactor is made up of fluidized-bed reactor and medium-high frequency inductance heating system.Wherein fluidized-bed reactor mainly is made up of superposed reactor settling section, the gas distributor, the raw material inlet pipe that are positioned at the fluidized-bed reaction section at middle part and are positioned at the bottom.Medium-high frequency inductance heating system mainly is made up of medium-high frequency control electricity cabinet, inductive heater and water cooler.Inductive heater is inner places the fluidized-bed reaction section, and it is heated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200920300925U CN201372207Y (en) | 2009-02-27 | 2009-02-27 | Novel trichlorosilane synthesis reactor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200920300925U CN201372207Y (en) | 2009-02-27 | 2009-02-27 | Novel trichlorosilane synthesis reactor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201372207Y true CN201372207Y (en) | 2009-12-30 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200920300925U Expired - Fee Related CN201372207Y (en) | 2009-02-27 | 2009-02-27 | Novel trichlorosilane synthesis reactor |
Country Status (1)
| Country | Link |
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| CN (1) | CN201372207Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102009980A (en) * | 2010-12-23 | 2011-04-13 | 江西嘉柏新材料有限公司 | Trichlorosilane synthesizer |
| CN102463077A (en) * | 2010-11-05 | 2012-05-23 | 中国石油化工股份有限公司 | Three-phase boiling bed reactor |
| CN109879289A (en) * | 2019-04-12 | 2019-06-14 | 四川永祥多晶硅有限公司 | A kind of low value silicon powder recycling system |
-
2009
- 2009-02-27 CN CN200920300925U patent/CN201372207Y/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102463077A (en) * | 2010-11-05 | 2012-05-23 | 中国石油化工股份有限公司 | Three-phase boiling bed reactor |
| CN102009980A (en) * | 2010-12-23 | 2011-04-13 | 江西嘉柏新材料有限公司 | Trichlorosilane synthesizer |
| CN102009980B (en) * | 2010-12-23 | 2011-09-14 | 江西嘉柏新材料有限公司 | Trichlorosilane synthesizer |
| CN109879289A (en) * | 2019-04-12 | 2019-06-14 | 四川永祥多晶硅有限公司 | A kind of low value silicon powder recycling system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20091230 Termination date: 20100227 |