CN204057974U - A kind of system utilizing trichlorosilane to prepare granular polycrystalline silicon - Google Patents
A kind of system utilizing trichlorosilane to prepare granular polycrystalline silicon Download PDFInfo
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Abstract
The utility model discloses a kind of system utilizing trichlorosilane to prepare granular polycrystalline silicon, it is characterized in that, described system comprises: trichlorosilane disproportionation tower, and two step disproportionation reactions occur the trichlorosilane utilizing catalyzer to make to pass into, and generates dichlorosilane, silane; By rectification and purification, described dichlorosilane, described silane are separated with described silicon tetrachloride again; Silane separator, is connected with described trichlorosilane disproportionation tower, receives described dichlorosilane and described silane, and described dichlorosilane be separated with described silane by rectifying separation; Silane flow fluidized bed reactor, is connected with described silane separator, receives described silane, for described silane and the extraneous hydrogen passed into provide reaction compartment to react, to obtain described granular polycrystalline silicon.The purity of granular polycrystalline silicon product prepared by the utility model can as solar-grade polysilicon, and the product purity of preparation is high, and preparation technology is simple, and energy consumption is low.
Description
Technical field
The application relates to chemical field, particularly relates to a kind of system utilizing trichlorosilane to prepare granular polycrystalline silicon.
Background technology
Polysilicon is the starting material preparing solar cell, is the basis of whole world photovoltaic industry.The mainstream technology of the world today producing high-purity polycrystalline silicon is the Siemens Method of improvement.Improved Siemens mainly utilizes trichlorosilane generation electroless plating reaction to prepare rod-like polycrystal silicon, and its advantage is technology maturation, stable and reliable product quality, and shortcoming is that technical process is long, and production cost is higher.In recent years, along with development and the maturation of pulling of silicon single crystal stepless control technology, granular polycrystalline silicon preparation technology becomes a kind of up-and-coming new technology, will be rapidly developed, and likely becomes the technical matters that Some substitute improved Siemens prepares polysilicon.
Utility model content
For overcoming above-mentioned deficiency, the utility model provides a kind of system utilizing trichlorosilane to prepare granular polycrystalline silicon, object be by utilize trichlorosilane disproportionation prepare silane gas and and then utilize fluidized-bed to prepare granular polycrystalline silicon, thus providing that a kind of energy consumption is low, reaction end gas does not need a large amount of separation, the continuous production method that can circulate is to prepare high purity granular polycrystalline silicon.
Specifically, the utility model provides a kind of system utilizing trichlorosilane to prepare granular polycrystalline silicon, described system comprises: trichlorosilane disproportionation tower, and two step disproportionation reactions occur the trichlorosilane utilizing catalyzer to make to pass into, and generates dichlorosilane, silicon tetrachloride, silane; By rectification and purification, described dichlorosilane, described silane are separated with described silicon tetrachloride again; Silane separator, is connected with described trichlorosilane disproportionation tower, receives described dichlorosilane and described silane, and be separated with described dichlorosilane by described silane by rectifying separation; Silane flow fluidized bed reactor, is connected with described silane separator, receives described silane, for described silane and the extraneous hydrogen passed into provide reaction compartment to react, to obtain described granular polycrystalline silicon.
Preferably, the top of described trichlorosilane disproportionation tower is the first rectifying section, middle part is double-layer catalyst layer, bottom is the first stripping section; Described double-layer catalyst layer is filled with described catalyzer; Described trichlorosilane disproportionation tower utilizes described double-layer catalyst layer to make described trichlorosilane that two step disproportionation reactions occur, generate described dichlorosilane, described silane and described silicon tetrachloride, then by rectification and purification function, make described dichlorosilane, described silane from the top extraction of described trichlorosilane disproportionation tower, make described silicon tetrachloride from the bottom extraction of described trichlorosilane disproportionation tower.
Preferably, described system also comprises: trichlorosilane surge tank, for storing trichlorosilane; Trichlorosilane transferpump, is connected between described trichlorosilane surge tank and described trichlorosilane disproportionation tower; Described trichlorosilane is transported to from described trichlorosilane surge tank described trichlorosilane disproportionation tower to react.
Preferably, described system also comprises: trichlorosilane disproportionation tower condenser, is connected to described trichlorosilane disproportionation top of tower; Trichlorosilane disproportionation tower return tank, is connected between described trichlorosilane disproportionation tower condenser and trichlorosilane disproportionation tower reflux pump; Described trichlorosilane disproportionation tower reflux pump, is connected to described trichlorosilane disproportionation top of tower; Wherein, cool from the top dichlorosilane out of described trichlorosilane disproportionation tower, silane through described trichlorosilane disproportionation tower condenser, the dichlorosilane be condensed and silane flow in described trichlorosilane disproportionation tower return tank, and are delivered to described trichlorosilane disproportionation top of tower by described trichlorosilane disproportionation tower reflux pump; Trichlorosilane disproportionation tower reboiler, is connected to described trichlorosilane disproportionation tower bottom and provides thermal source.
Preferably, the top of described silane knockout tower is the second rectifying section, bottom is the second stripping section; Described silane knockout tower utilizes rectifying separation function, makes described silane from the top extraction of described silane knockout tower, makes described dichlorosilane from the bottom extraction of described silane knockout tower.
Preferably, described system also comprises: silane knockout tower reboiler, is connected to bottom described silane knockout tower and provides thermal source; Silane is separated overhead condenser; Silane is separated return tank of top of the tower, connects described silane and is separated overhead condenser; Silane is separated tower top reflux pump, connect described silane and be separated return tank of top of the tower, wherein, be separated overhead condenser from the top silane out of described silane knockout tower through described silane to cool, then flow into described silane and be separated return tank of top of the tower, and be separated by described silane the top that tower top reflux pump is delivered to described silane knockout tower.
Preferably, described system also comprises: silane preheater, is connected with described silane separator, for the silane of described silane separator extraction is carried out preheating; Silane gas surge tank, is connected with described silane preheater, for the silane gas of preheating is carried out buffer memory; Silane hydrogen mixing tank, is connected between described silane gas surge tank and described silane flow fluidized bed reactor, mixes, be then delivered to described silane flow fluidized bed reactor for the hydrogen passed in the external world with the silane gas after preheating.
Preferably, described system also comprises: silane fluidized-bed external heat device, for described silane flow fluidized bed reactor provides thermal source; Crystal silicon kind feed pot, for described silane flow fluidized bed reactor provides crystal seed, reacts crystallize out silicon to make described silane and described hydrogen at described seed surface.
Preferably, tail gas first-stage condenser connects described silane fluidized-bed external heat device, and tail gas secondary condenser connects described tail gas first-stage condenser, and the reacted tail gas of described silane flow fluidized bed reactor is carried out condensation cooling; Before compressor, surge tank is connected between described tail gas secondary condenser and hydrogen recycle compressor, surge tank after described hydrogen recycle compressor connection compressor; Air preheater after compression, connects surge tank after described compressor, and the reaction end gas after pressurization is carried out preheating, and is again delivered to the reaction of described silane flow fluidized bed reactor.
By one or more technical scheme of the present utility model, the utility model has following beneficial effect or advantage:
The utility model provides a kind of system utilizing trichlorosilane to prepare granular polycrystalline silicon, and this system mainly comprises trichlorosilane disproportionation tower, silane separator, silane flow fluidized bed reactor.Trichlorosilane is passed in trichlorosilane disproportionation tower, make trichlorosilane under the effect of catalyzer, there are two step disproportionation reactions and obtain dichlorosilane, silane, then dichlorosilane and silane are passed into silane separator to carry out rectifying separation further and obtain highly purified silane gas, then carried out the thermolysis of silane by silane flow fluidized bed reactor, obtain granular polycrystalline silicon product.The purity of granular polycrystalline silicon product prepared by the utility model can as solar-grade polysilicon, and the product purity of preparation is high, and preparation technology is simple, and energy consumption is low.
Accompanying drawing explanation
Fig. 1 utilizes trichlorosilane to prepare the system architecture diagram of granular polycrystalline silicon in the utility model embodiment.
Description of reference numerals: trichlorosilane surge tank 1, trichlorosilane transferpump 2, trichlorosilane disproportionation tower 3, trichlorosilane disproportionation tower condenser 4, trichlorosilane disproportionation tower return tank 5, trichlorosilane disproportionation tower reflux pump 6, trichlorosilane disproportionation tower reboiler 7, silane knockout tower 8, silane knockout tower reboiler 9, silane is separated overhead condenser 10, silane is separated return tank of top of the tower 11, silane is separated tower top reflux pump 12, silane preheater 13, silane gas surge tank 14, silane hydrogen mixing tank 15, silane flow fluidized bed reactor 16, silane fluidized-bed external heat device 17, silicon seed feed pot 18, tail gas first-stage condenser 19, tail gas secondary condenser 20, surge tank 21 before compressor, hydrogen recycle compressor 22, surge tank 23 after compressor, air preheater 24 after compression.
Embodiment
In order to make the application the technical staff in the technical field more clearly understand the application, below in conjunction with accompanying drawing, by specific embodiment, technical scheme is described in detail.
Embodiment one:
In the utility model embodiment, describe a kind of system utilizing trichlorosilane to prepare granular polycrystalline silicon.
See Fig. 1, the system that the utility model relates to mainly comprises trichlorosilane disproportionation tower 3, silane knockout tower 8, silane flow fluidized bed reactor 16 3 parts.
Below these three parts are introduced respectively.
Trichlorosilane disproportionation tower 3.
The Main Function of trichlorosilane disproportionation tower 3 is: two step disproportionation reactions occur the trichlorosilane utilizing catalyzer to make to pass into, and generates dichlorosilane, silane and silicon tetrachloride; By rectification and purification, dichlorosilane, silane are separated with silicon tetrachloride again.
Specifically, the top of trichlorosilane disproportionation tower 3 is the first rectifying section, middle part is double-layer catalyst layer, bottom is the first stripping section; Double-layer catalyst layer is filled with catalyzer; Catalyzer includes but not limited to: macroporosity quaternary amine resin catalyst.Under such configuration, trichlorosilane material is from the charging of double-layer catalyst layer lower position, trichlorosilane disproportionation tower 3 utilizes double-layer catalyst layer to make trichlorosilane that two step disproportionation reactions occur, generate dichlorosilane, silane and silicon tetrachloride, then by rectification and purification function, make dichlorosilane, silane from the top extraction of trichlorosilane disproportionation tower 3, make silicon tetrachloride from the bottom extraction of trichlorosilane disproportionation tower 3.
More specifically, the working pressure of trichlorosilane disproportionation tower 3 controls at 0.1MPa (G) ~ 0.5MPa (G), preferred 0.4MPa (G).
Silane knockout tower 8.
Silane knockout tower 8 is connected with trichlorosilane disproportionation tower 3.
Silane knockout tower 8 Main Function is: receive dichlorosilane and silane, then be separated with dichlorosilane by silane by rectification and purification.
Specifically, the top of silane knockout tower 8 is the second rectifying section, bottom is the second stripping section; Under such configuration, dichlorosilane, silane are from charging in the middle part of silane knockout tower 8, silane knockout tower 8 utilizes rectifying separation function, make silane from the top extraction of silane knockout tower 8, make dichlorosilane from the bottom extraction of silane knockout tower 8, in addition, the dichlorosilane of bottom extraction in the middle part of the double-layer catalyst layer returning trichlorosilane disproportionation tower 3, can carry out second stage employ.
Silane flow fluidized bed reactor 16.
Silane flow fluidized bed reactor 16 is connected with silane knockout tower 8.In addition, the middle and upper part of silane flow fluidized bed reactor 16 is provided with silicon seed and adds entrance, is connected with silicon seed feed pot 18.Silane flow fluidized bed reactor 16 be provided with offgas outlet, be connected with tail gas first-stage condenser 19.Silane flow fluidized bed reactor 16 bottom is provided with silane hydrogen mixed gas entrance, is connected with silane hydrogen mixing tank 15.The bottom of silane flow fluidized bed reactor 16 is also provided with polycrysalline silcon product conveying end.
The Main Function of silane flow fluidized bed reactor 16 is: receive silane, for silane and the extraneous hydrogen passed into provide reaction compartment to react, to obtain granular polycrystalline silicon.Specifically, the top of silane flow fluidized bed reactor 16 is expanding reach, and middle part is reaction heating zone, and bottom is reaction zone.In silane flow fluidized bed reactor 16, silane and hydrogen heat temperature raising in silicon seed surface reaction, then crystallize out silicon, when silicon grain reaches certain particle size, through the effect of gravity, can slowly fall into the bottom of silane flow fluidized bed reactor 16, after cooling, extraction granule crystal silicon, and unreacted hydrogen and a small amount of silane gas can be discharged through the top of silane flow fluidized bed reactor 16.
In general, the particle of silicon seed is 0.3mm ~ 0.35mm, preferred 0.3mm.
More specifically, the working pressure of silane flow fluidized bed reactor 16 controls at 0.1 MPa (G) ~ 0.3MPa (G), preferred 0.25MPa (G).In addition, reaction zone temperature controls at 580 DEG C ~ 870 DEG C, preferably 690 DEG C.
Be more than the essential structure of native system, utilize trichlorosilane under the effect of catalyzer, two step disproportionation reactions occur and obtains high purity silane gas, carry out the thermolysis of silane further by silane flow fluidized bed reactor 16, obtain granular polycrystalline silicon product.
And in order to reach better reaction effect, accessory can be set in various piece, be specifically introduced below.
Preferably, for the ease of carrying trichlorosilane to trichlorosilane disproportionation tower 3, this system also comprises trichlorosilane surge tank 1 and trichlorosilane transferpump 2.Wherein, trichlorosilane surge tank 1 stores trichlorosilane.Specifically, the trichlorosilane of storage is liquid.Certainly, the concrete storage shape of trichlorosilane is determined according to practical situation.Trichlorosilane transferpump 2 is connected between trichlorosilane surge tank 1 and trichlorosilane disproportionation tower 3, reacts so that trichlorosilane to be transported to from trichlorosilane surge tank 1 trichlorosilane disproportionation tower 3.
Preferably, trichlorosilane disproportionation tower 3 is also provided with multiple accessory, specifically: trichlorosilane disproportionation tower condenser 4, trichlorosilane disproportionation tower return tank 5, trichlorosilane disproportionation tower reflux pump 6, trichlorosilane disproportionation tower reboiler 7.Wherein, trichlorosilane disproportionation tower condenser 4 is connected to trichlorosilane disproportionation tower 3 top, the top dichlorosilane out of trichlorosilane disproportionation tower 3, silane can be cooled.Specifically, dichlorosilane, silane can be condensed into liquid from gas shape by trichlorosilane disproportionation tower condenser 4, a part flows in trichlorosilane disproportionation tower return tank 5, and the dichlorosilane that another part is uncooled to get off and silane flow in silane knockout tower 8 and carries out rectifying separation.Trichlorosilane disproportionation tower return tank 5 is connected between trichlorosilane disproportionation tower condenser 4 and trichlorosilane disproportionation tower reflux pump 6, and the dichlorosilane condensation of trichlorosilane disproportionation tower condenser 4 can got off, silane store.Trichlorosilane disproportionation tower reflux pump 6 is connected to trichlorosilane disproportionation tower 3 top, the dichlorosilane in trichlorosilane disproportionation tower return tank 5 can be delivered to trichlorosilane disproportionation tower 3 top.In concrete implementation process, cool from the top dichlorosilane out of described trichlorosilane disproportionation tower 3, silane through described trichlorosilane disproportionation tower condenser 4, the dichlorosilane be condensed and silane flow in described trichlorosilane disproportionation tower return tank 5, and are delivered to described trichlorosilane disproportionation tower 3 top by described trichlorosilane disproportionation tower reflux pump 6.Trichlorosilane disproportionation tower reboiler 7 is connected to bottom trichlorosilane disproportionation tower 3, and the bottom that can be trichlorosilane disproportionation tower 3 provides thermal source.
Preferably, silane knockout tower 8 is also provided with multiple accessory, comprises: silane knockout tower reboiler 9, silane is separated overhead condenser 10, and silane is separated return tank of top of the tower 11, and silane is separated tower top reflux pump 12.Silane knockout tower reboiler 9 is connected to bottom silane knockout tower 8, can be silane knockout tower 8 and provides thermal source.Silane is separated overhead condenser 10, can cool to the top of silane knockout tower 8 silane out.Silane is separated return tank of top of the tower 11 and connects silane and be separated overhead condenser 10, silane can be separated the silane that overhead condenser 10 condensation gets off and store.Silane is separated tower top reflux pump 12 and connects silane separation return tank of top of the tower 11, silane can be delivered to the top of silane knockout tower 8 by the silane be separated in return tank of top of the tower 11, wherein, be separated overhead condenser 10 from the top silane out of described silane knockout tower 8 through described silane to cool, then flow into described silane and be separated return tank of top of the tower 11, and be separated by described silane the top that tower top reflux pump 12 is delivered to described silane knockout tower.
Preferably, in order to allow silane react better in silane flow fluidized bed reactor 16, can be heated by silane in advance, now, system is also provided with silane preheater 13 and silane gas surge tank 14.Silane preheater 13 is connected with silane knockout tower 8, and the silane of silane knockout tower 8 extraction is carried out preheating; Silane gas surge tank 14, is connected with silane preheater 13, and the silane gas of preheating is carried out buffer memory.In addition, also can in advance silane gas and hydrogen be mixed, now this system also comprises silane hydrogen mixing tank 15, be connected between silane gas surge tank 14 and silane flow fluidized bed reactor 16, the hydrogen passed in the external world mixes with the silane gas after preheating, is then delivered to silane flow fluidized bed reactor 16.
Preferably, in order to be that silane and hydrogen react better in silane flow fluidized bed reactor 16, this system also comprises: silane fluidized-bed external heat device 17, for silane flow fluidized bed reactor 16 provides thermal source; Silicon seed feed pot 18, for silane flow fluidized bed reactor 16 provides silicon seed, to make silane and hydrogen at silicon seed surface reaction crystallize out silicon.
Preferably, in order to process reacted in silane flow fluidized bed reactor 16 after tail gas, this system also comprises: tail gas first-stage condenser 19, tail gas secondary condenser 20, tail gas first-stage condenser 19 connects described silane fluidized-bed external heat 17, tail gas secondary condenser 20 connects described tail gas first-stage condenser 19, for being lowered the temperature by reacted for silane flow fluidized bed reactor 16 tail gas condensing; Surge tank 21 before compressor, is connected between described tail gas secondary condenser 20 and hydrogen recycle compressor 21, stores from tail gas secondary condenser 20 tail gas out.Hydrogen recycle compressor 22, for carrying out pressure treatment by the reaction end gas after the cooling in surge tank 21 before compressor.Surge tank 23 after compressor, the tail gas after storing pressurized.Air preheater 24 after compression, is connected with surge tank after compressor 23, the reaction end gas after pressurization is carried out preheating, and is again delivered to silane flow fluidized bed reactor 16 and reacts.
In system of the present utility model, generally all use pipeline to be connected with valve between each parts, and the number of valve and particular location are determined according to practical situation, the utility model does not limit.
Lower mask body introduces the processing step that trichlorosilane prepares granular polycrystalline silicon.
1) trichlorosilane of more than 6N purity enters into trichlorosilane surge tank 1, then the bottom of the double-layer catalyst layer in trichlorosilane disproportionation tower 3 is sent to by trichlorosilane transferpump 2, under the effect of catalyzer, trichlorosilane is decomposed into dichlorosilane, silane and silicon tetrachloride, tower top is dichlorosilane, silane, is silicon tetrachloride at the bottom of tower.The dichlorosilane of tower top, silane enter into silane knockout tower 8 purification & isolation further due to draught head, the tower top of silane knockout tower 8 obtains the silane product that purity is more than 6N, liquid silane enters silane preheater 13 preheating further, obtains gas phase silane product.
2) silane gas of more than purity 6N mixes according to 1:2 ~ 1:3.5 mol ratio with the circulating hydrogen that systemic circulation compressor returns, and be preheating to 90 DEG C, be sent to silane flow fluidized bed reactor 16 and carry out pyrolysis, fluidized-bed interior reaction temperature is 580 DEG C ~ 870 DEG C, working pressure is 0.1MPa (G) ~ 0.3MPa (G), and the Siliciumatom of high purity silane thermolysis is deposited on silicon seed surface and obtains granulated polycrystalline silicon.Wherein, the purity >=4N of high-purity hydrogen.Silicon seed particle diameter is 0.03mm ~ 3mm.
3) high purity granular polysilicon is got rid of in the bottom of silane flow fluidized bed reactor 16.
4) enter into tail gas first-stage condenser 19 after the tail gas filtering of the top discharge of silane flow fluidized bed reactor 16, tail gas secondary condenser 20 enters into hydrogen recycle compressor 22 after cooling and pressurizes, the hydrogen containing micro-silane after pressurization turns back to the entrance recycle of the silane hydrogen mixing tank 15 before fluidized-bed reactor.
Be described below by concrete example.
The trichlorosilane of 2100kg/h enters into trichlorosilane surge tank 1, being pumped into diameter is react in the trichlorosilane disproportionation tower 3 of DN800, overhead product enters into further separation of silane knockout tower 8 and obtains the silane product that 125kg/h purity is 6N, the high-purity H2 of recovery of the 34.8kg/h of circulation and stress is added in gas mixture, be preheating to 90 DEG C, silane flow fluidized bed reactor 16 is entered into from silane flow fluidized bed reactor 16 bottom, silicon seed joins fluidized-bed top from silicon seed feed pot 18, add-on is 150Kg/h per hour, silicon seed is added once for every 2 ~ 4 hours, reactor lower curtate discharges granular polycrystalline silicon product, discharge in every 1 ~ 2 hour once.Silane flow fluidized bed reactor 16 pressure setting is 0.25Kp (G) ~ 0.3Kp (G).Fluidized-bed temperature is 680 DEG C ~ 690 DEG C, and electric heater capacity is 300KW.Experimental result shows: the polycrysalline silcon that deposited the sun power secondary quality of 98kg/h.The comprehensive power consumption of per kilogram silicon grain product is at below 23Kwh.
By one or more embodiment of the present utility model, the utility model has following beneficial effect or advantage:
The utility model provides a kind of system utilizing trichlorosilane to prepare granular polycrystalline silicon, and this system mainly comprises trichlorosilane disproportionation tower, silane separator, silane flow fluidized bed reactor.Trichlorosilane is passed in trichlorosilane disproportionation tower, make trichlorosilane under the effect of catalyzer, there are two step disproportionation reactions and obtain dichlorosilane, silane, then dichlorosilane, silane are passed into silane separator to carry out rectifying separation further and obtain highly purified silane, silane is after preheating, carried out the thermolysis of silane again by silane flow fluidized bed reactor, obtain granular polycrystalline silicon product.The purity of granular polycrystalline silicon product prepared by the utility model can as solar-grade polysilicon, and the product purity of preparation is high, and preparation technology is simple, and energy consumption is low.
Although described the preferred embodiment of the application, one of ordinary skilled in the art once obtain the basic creative concept of cicada, then can make other change and amendment to these embodiments.So claims are intended to be interpreted as comprising preferred embodiment and falling into all changes and the amendment of the application's scope.
Obviously, those skilled in the art can carry out various change and modification to the application and not depart from the spirit and scope of the application.Like this, if these amendments of the application and modification belong within the scope of the application's claim and equivalent technologies thereof, then the application is also intended to comprise these change and modification.
Claims (9)
1. utilize trichlorosilane to prepare a system for granular polycrystalline silicon, it is characterized in that, described system comprises:
Trichlorosilane disproportionation tower, there are two step disproportionation reactions in the trichlorosilane utilizing catalyzer to make to pass into, generates dichlorosilane, silane; By rectification and purification, described dichlorosilane, described silane are separated with described silicon tetrachloride again;
Silane separator, is connected with described trichlorosilane disproportionation tower, receives described dichlorosilane and described silane, and described dichlorosilane be separated with described silane by rectifying separation;
Silane flow fluidized bed reactor, is connected with described silane separator, receives described silane, for described silane and the extraneous hydrogen passed into provide reaction compartment to react, to obtain described granular polycrystalline silicon.
2. the system as claimed in claim 1, is characterized in that, the top of described trichlorosilane disproportionation tower is the first rectifying section, middle part is double-layer catalyst layer, bottom is the first stripping section; Described double-layer catalyst layer is filled with described catalyzer.
3. the system as claimed in claim 1, is characterized in that, described system also comprises:
Trichlorosilane surge tank;
Trichlorosilane transferpump, is connected between described trichlorosilane surge tank and described trichlorosilane disproportionation tower.
4. the system as described in claim 1 or 3, is characterized in that, described system also comprises:
Trichlorosilane disproportionation tower condenser, is connected to described trichlorosilane disproportionation top of tower;
Trichlorosilane disproportionation tower return tank, is connected between described trichlorosilane disproportionation tower condenser and trichlorosilane disproportionation tower reflux pump;
Described trichlorosilane disproportionation tower reflux pump, is connected to described trichlorosilane disproportionation top of tower;
Wherein, from the top of described trichlorosilane disproportionation tower, dichlorosilane out and silane cool through described trichlorosilane disproportionation tower condenser, the dichlorosilane be condensed and silane flow in described trichlorosilane disproportionation tower return tank, and are delivered to described trichlorosilane disproportionation top of tower by described trichlorosilane disproportionation tower reflux pump;
Trichlorosilane disproportionation tower reboiler, is connected to described trichlorosilane disproportionation tower bottom and provides thermal source.
5. the system as claimed in claim 1, is characterized in that, the top of described silane knockout tower is the second rectifying section, bottom is the second stripping section.
6. the system as claimed in claim 1, is characterized in that, described system also comprises:
Silane knockout tower reboiler, is connected to bottom described silane knockout tower and provides thermal source;
Silane is separated overhead condenser;
Silane is separated return tank of top of the tower, connects described silane and is separated overhead condenser;
Silane is separated tower top reflux pump, connects described silane and is separated return tank of top of the tower;
Wherein, be separated overhead condenser from the top silane out of described silane knockout tower through described silane and cool, then flow into described silane and be separated return tank of top of the tower, and be separated by described silane the top that tower top reflux pump is delivered to described silane knockout tower.
7. the system as claimed in claim 1, is characterized in that, described system also comprises:
Silane preheater, is connected with described silane separator, carries out preheating to the silane of described silane separator extraction;
Silane gas surge tank, is connected with described silane preheater, the silane gas of preheating is carried out buffer memory;
Silane hydrogen mixing tank, be connected between described silane gas surge tank and described silane flow fluidized bed reactor, the hydrogen passed in the external world mixes with the silane gas after preheating, is then delivered to described silane flow fluidized bed reactor.
8. the system as claimed in claim 1, is characterized in that, described system also comprises:
Silane fluidized-bed external heat device, for described silane flow fluidized bed reactor provides thermal source;
Crystal silicon kind feed pot, for described silane flow fluidized bed reactor provides crystal seed, reacts crystallize out silicon to make described silane and described hydrogen at described seed surface.
9. system as claimed in claim 8, it is characterized in that, described system also comprises:
Tail gas first-stage condenser connects described silane fluidized-bed external heat device, and tail gas secondary condenser connects described tail gas first-stage condenser, and the reacted tail gas of described silane flow fluidized bed reactor is carried out condensation cooling;
Before compressor, surge tank is connected between described tail gas secondary condenser and hydrogen recycle compressor, surge tank after described hydrogen recycle compressor connection compressor;
Air preheater after compression, connects surge tank after described compressor, and the reaction end gas after pressurization is carried out preheating, and is again delivered to the reaction of described silane flow fluidized bed reactor.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106829863A (en) * | 2015-12-04 | 2017-06-13 | 新特能源股份有限公司 | The recovery system of hydrogen in a kind of polysilicon production process |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106829863A (en) * | 2015-12-04 | 2017-06-13 | 新特能源股份有限公司 | The recovery system of hydrogen in a kind of polysilicon production process |
| CN106829863B (en) * | 2015-12-04 | 2019-03-22 | 新特能源股份有限公司 | The recovery system of hydrogen in a kind of polysilicon production process |
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