CN201371313Y - Laser processing twin-beam reference light device - Google Patents

Laser processing twin-beam reference light device Download PDF

Info

Publication number
CN201371313Y
CN201371313Y CN 200920106804 CN200920106804U CN201371313Y CN 201371313 Y CN201371313 Y CN 201371313Y CN 200920106804 CN200920106804 CN 200920106804 CN 200920106804 U CN200920106804 U CN 200920106804U CN 201371313 Y CN201371313 Y CN 201371313Y
Authority
CN
China
Prior art keywords
lens
light
reference light
spectroscope
reflective mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN 200920106804
Other languages
Chinese (zh)
Inventor
张冬云
鹿堃
赵建哲
王瑞泽
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing University of Technology
Original Assignee
Beijing University of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing University of Technology filed Critical Beijing University of Technology
Priority to CN 200920106804 priority Critical patent/CN201371313Y/en
Application granted granted Critical
Publication of CN201371313Y publication Critical patent/CN201371313Y/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Abstract

The utility model relates to a laser processing device, in particular to a laser processing twin-beam reference light device. In virtue of a beam splitting system, the reference light device improves the single-beam reference light of the traditional laser processing device into the twin-beam reference light. By the control over the beam splitting system, the intersection of two reference beams is caused to coincide with a laser focus position. Consequently, the position relation between a workpiece and the laser focus can be judged by observing the light spot status of the twin-beam reference light on the workpiece, thus achieving the objective of only needing to observe the light spot status of the twin-beam reference light on the workpiece without need of using other tools to measure focal position during laser processing. The method for indicating the focal position through the intersection of two beams has the advantages of simple structure, high accuracy, convenient operation, wide applicable range, etc.

Description

Laser Processing dual-beam reference light device
Technical field
The utility model relates to a kind of laser process equipment, is specially a kind of Laser Processing dual-beam reference light device.
Background technology
In the Materialbearbeitung mit Laserlicht process, the beam focus position is one of crucial control technological parameter, under certain laser power and speed of welding, has only focus to be in the scope of optimum position and could obtain best Laser Processing effect.The focal position that laser focuses on generally can't directly be seen, can only detect by indirect method.For a laser materials processing system, its focal position is by the decision of the optical focus of focus lamp, so its position is constant (not considering the fuel factor of focus lamp) under the fixed situation of focus lamp, therefore can come the position between indirect detection focus and the processed object to concern by the relative position that detects between focus lamp and the processed object.
As shown in Figure 1, in laser process equipment, after laser transfers to workbench from laser instrument, become directional light through specific colimated light system earlier usually, be focused on the focus by focus lamp then.Materials processing (is generally CO with laser 2Or Solid State Laser) is generally black light, passes through the single track He-Ne light beam of same optical path as reference light with laser so be furnished with usually with processing.Reference light transmits by the straight line of materials processing with the laser optical path place through colimated light system and focus lamp the time always, so the hot spot that reference light is beaten on workpiece is identical with processing with laser spot position.By adjusting workpiece or manipulator facula position is overlapped with predetermined Working position then.
But in common Materialbearbeitung mit Laserlicht (as laser weld etc.) technology, not only need to indicate the position of light beam straight line in the space, and need find the position of laser spot in the light beam straight line.Usually the focus searching method of usefulness is, before welding, parameter and the welding empirical parameter given according to focus lamp, opticpath straight line along reference light, measure the approximate location of focus with rule, adjust manipulator or workbench then so that focus moves to surface of the work (or optimum position of other suitable technological requirement), its concrete structure as shown in Figure 1, two critical pieces, collimation lens 1 and convergent lens 2 are arranged in the process equipment working head light path.It is diverging light that laser is derived the back from optical fiber, becomes the horizontal infection collimated light through behind the collimation lens 1, and laser is propagated with the form of directional light earlier, becomes converging light behind the process convergent lens 2 then, and 4 converges and be a bit in the focal position, in order to carry out Laser Processing.The reference light that laser processing device commonly used is furnished with is derived the back and is propagated in same optical path with laser from laser instrument, 2 pairs of reference lights of collimation lens 1 and convergent lens have identical action effect.When workpiece is placed on working head following time, can see that reference light beats the hot spot on workpiece, the position of hot spot is exactly the position of Laser Processing application point.Because the stability that light is propagated, focal position 4 is fixed for identical wavelength light wave, so determine the relative altitude distance of convergent mirror focal length 6 by certain measuring method after, just can determine the accurate position of focal position 4.Just workpiece can be placed on the suitable location of workpiece 5 places then.Seek in the burnt process in tradition, the measuring method of measuring poly-mirror focal length 6 relative altitude distances is for using tape measure.The shortcoming of this focus searching method is that the degree of accuracy is low, inconvenient operation and when machined surface is complex surface or on-plane surface, is difficult to direct measurement with rule.
The utility model content
The purpose of this utility model has been to overcome the above-mentioned defective that current laser process equipment reference light is sought coke installation, and a kind of Laser Processing dual-beam reference light device is provided, and this device can guarantee machining accuracy, simplify technological operation, also increases work efficiency simultaneously.
To achieve these goals, the utility model has been taked following technical scheme: this device comprise collimation lens, plus lens and be placed on collimation lens and plus lens between beam splitting system.The light that laser instrument sends behind the collimation lens collimation, has been divided into two bundle directional lights by beam splitting system, and two bundle directional lights pool a bit through plus lens again.
Described beam splitting system comprises spectroscope and reflective mirror, through the directional light behind the collimation lens collimation, a part is formed transmitted light by the spectroscope transmission, another part is reflected into the light beam parallel with transmitted light by reflective mirror again after being reflected by spectroscope, and two bundle directional lights pool a bit through behind the plus lens.
The concrete structure of described beam splitting system is as follows: comprise upper shell, lower house, beam split frame, be used for fixing spectroscopical spectroscope lens frame and be used for fixing the reflective mirror lens frame of reflective mirror; All be provided with the light hole that is used for fixing processing head on described upper shell and the lower house.Wherein: upper shell and lower house are connected, and surround a space between the two, and this space is communicated with light hole, and beam split frame, spectroscope lens frame and reflective mirror lens frame all are arranged in this space.The beam split frame is connected with lower house by slide rail, can slide with respect to lower house.Spectroscope lens frame and reflective mirror lens frame are connected on the beam split frame, and the angle between spectroscope lens frame, reflective mirror lens frame and the beam split frame can be regulated.Be provided with at beam split frame two ends and be used for spacing baffle plate.
The utility model is reequiped original light path, single beam is realized dual-beam through beam splitting system, replace original single beam reference light with dual-beam He-Ne reference light, utilize the intersection point of twice light beam to find the exact position of impact point (laser spot) easily.Whether the intersection point of twice light beam can overlap easily by two hot spots of surface of the work is judged.During Laser Processing calibration workpiece, if focus is on surface of the work the time, He-Ne light hot spot then is a point, if focus outside surface of the work the time, then is two hot spots.
The utility model is regional with one section collimation that beam splitting system is arranged between collimation lens and the plus lens, and in this zone, beam splitting system is divided into two bundle directional lights with collimated light beam, and two bundle directional lights can be converted into a bit at the focus place through after the focus lamps.
When carrying out Laser Processing after calibration finishes, because of the common power of the used laser of materials processing bigger, beam splitting system in the light path is easily by its damage, and the beam quality to laser also exerts an influence, therefore beam splitting system is designed to movable structure, when adjusting workpiece beam splitting system is pushed in the light path, during Laser Processing system is released, make light path remain original structure.
Compare with existing laser process equipment reference light system, the utility model has following advantage: replace original single beam reference light with the dual-beam reference light, make the focal position to determine by the positions of judging two bundle reference light hot spots.Thereby when calibrating workpiece, needn't measure the focal position by other instrument more at every turn.Characteristics at laser process equipment, utilize dual-beam to intersect the method for indication focal position than focus indicating means degree of accuracy height commonly used, easy to operate, applied widely, and principle is simple, structure is ingenious, and cost is cheaper than methods such as machinery location, sensor location.
Description of drawings
Fig. 1 is a conventional laser process equipment reference light device schematic diagram
Fig. 2 is the utility model principle schematic
Fig. 3 is the utility model constructional device structure diagram
Fig. 4 is the utility model constructional device front view
Wherein: 1, collimation lens, 2, convergent lens, 3, light path, 4, the focal position, 5, the location of workpiece, 6, the convergent mirror focal length, 7, spectroscope, 8 reflective mirrors, 9, workpiece out of focus position, 10, the focal position is at surface of the work, 11, hot spot state during workpiece out of focus position, 12, the hot spot state of focal position when surface of the work, 13, last light hole, 14, upper shell, 15, lower house, 16, movable beam split frame, 17, the reflective mirror lens frame, 18, the spectroscope lens frame, 19, right baffle plate, 20, the reflective mirror adjusting knob, 21, the spectroscope adjusting knob, 22, following light hole, 23, right baffle-plate.
The specific embodiment
The utility model is described in further detail below in conjunction with accompanying drawing:
Present embodiment comprise collimation lens 1, plus lens 2 and be placed on collimation lens 1 and plus lens 2 between beam splitting system, beam splitting system comprises spectroscope 7 and reflective mirror 8 again.The light that laser instrument sends, collimate to behind the directional light through collimation lens 1, a part is formed transmitted light by spectroscope 7 transmissions, and another part is reflected into the light beam parallel with transmitted light by reflective mirror 8 again after being reflected by spectroscope 7, and two bundle directional lights pool a bit through behind the plus lens 2.
As shown in Figure 3, Figure 4, present embodiment comprises upper shell 14, lower house 15, movable beam split frame 16, spectroscope lens frame 18 and reflective mirror lens frame 17.Upper shell 14 is provided with circular hole at Si Jiaochu, and the same position of lower house 15 is provided with internal thread hole, and both match at the circular hole place, and are fixedly connected by screw thread.Movable beam split frame 16 forms by chute on the lower house 15 and lower house and is slidingly connected.Spectroscope lens frame 18 and reflective mirror lens frame 17 are installed on the movable beam split frame 16, and the angle between spectroscope lens frame and reflective mirror lens frame and the movable beam split frame can regulate 21 by reflective mirror adjusting knob 20 and spectroscope adjusting knob.Spectroscope 7 and reflective mirror 8 are housed respectively on two lens frame.Upper shell is provided with light hole 13, and lower house is provided with down light hole 22.There is helicitic texture at last light hole 13 places, and there is helicitic texture at following light hole 22 places, and effect is and has laser process equipment realization assembling now.Right baffle-plate 23 and the right baffle plate 19 that lens frame is shielded is installed in the outside of two lens frame.
Movable beam split frame can slide along setting track in the hole slot of lower house 15, and its effect is to make beam splitting system be positioned at diverse location man-hour with adding when seeking Jiao.
Position by regulating movable beam split frame in the present embodiment, by the angle that reflective mirror adjusting knob 20 and spectroscope adjusting knob 21 are regulated spectroscope and reflective mirror, adjust the position of dual-beam intersection point, to realize error compensation, reach accurate match.As calculated: but the difference of the used laser of He-Ne light and materials processing by the focus lamp back focal length in the allowable error scope, and error is fixed value, can carry out error compensation by the adjusting device in the beam splitting system.
The beam splitting system of this device (comprising critical piece spectroscope and reflective mirror and corresponding adjusting device) exists in the drive of movable beam split frame 16, can move along lower house.It is that the dual-beam effect is only meaningful in seeking burnt process that this structural reason is set, nonsensical in process.And after opening laser, powerful laser can have infringement to the eyeglass in the native system.When seeking Jiao, regulate the position of beam split frame, beam splitting system is pushed in the light path, connect reference light then, realize the dual-beam effect; When Laser Processing, beam splitting system is released light path, the used laser of materials processing is propagated by the light path in the conventional apparatus, and beam splitting system can not have any interference to the used laser of materials processing.Baffle plate also is equipped with in lens frame both sides at the beam split frame, and effect is that the protection beam splitting system can not damaged because of bump when the beam split frame moves.
Compare with the traditional benchmark photosystem, the reference light system in the present embodiment has increased light-dividing device in the directional light zone, comprising two critical pieces: spectroscope and reflective mirror.The light that laser instrument sends, after after the colimated light system, pass through the light-dividing device that spectroscope and reflective mirror are formed again, make light path become the dual-beam of certain distance apart by original single beam in the collimation zone, and all continue to propagate, through intersecting at the focus place behind the plus lens along original parallel direction of light.Since reference light during with materials processing used Wavelength of Laser different, also there is difference its focal position separately, so the position of two-beam joining can regulate by the angle of adjusting parts 5, with the focal position of the used laser of accurate match materials processing.Effect was shown in 11 among Fig. 2,12 after adjusting was finished, and when workpiece places the two-beam position of intersecting point just during focal position of laser, only saw a hot spot on the workpiece; When workpiece places the out of focus position, can see two hot spots on the workpiece.Just can determine the position of impact point when carrying out processing technology afterwards by judging the hot spot state at every turn.

Claims (4)

1, Laser Processing dual-beam reference light device comprises collimation lens and plus lens, it is characterized in that: also comprise the beam splitting system that is placed between collimation lens and the plus lens; The light that laser instrument sends behind the collimation lens collimation, has been divided into two bundle directional lights by beam splitting system, and two bundle directional lights pool a bit through plus lens again.
2, Laser Processing dual-beam reference light device according to claim 1, it is characterized in that: described beam splitting system comprises spectroscope and reflective mirror, through the directional light behind the collimation lens collimation, a part is formed transmitted light by the spectroscope transmission, another part is reflected into the light beam parallel with transmitted light by reflective mirror again after being reflected by spectroscope, and two bundle directional lights pool a bit through behind the plus lens.
3, Laser Processing dual-beam reference light device according to claim 2, it is characterized in that: the concrete structure of described beam splitting system is as follows: comprise upper shell, lower house, beam split frame, be used for fixing spectroscopical spectroscope lens hanger and be used for fixing the reflective mirror lens hanger of reflective mirror; All be provided with the light hole that is used for fixing processing head on described upper shell and the lower house; Wherein: upper shell and lower house are connected, and surround a space between the two, and this space is communicated with light hole, and beam split frame, spectroscope lens hanger and reflective mirror lens hanger all are arranged in this space; The beam split frame is connected with lower house by slide rail, can slide with respect to lower house; Spectroscope lens hanger and reflective mirror lens hanger are connected on the beam split frame, and the angle between spectroscope lens hanger, reflective mirror lens hanger and the beam split frame can be regulated.
4, Laser Processing dual-beam reference light device according to claim 3 is characterized in that: also be provided with at beam split frame two ends and be used for spacing baffle plate.
CN 200920106804 2009-03-20 2009-03-20 Laser processing twin-beam reference light device Expired - Fee Related CN201371313Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 200920106804 CN201371313Y (en) 2009-03-20 2009-03-20 Laser processing twin-beam reference light device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 200920106804 CN201371313Y (en) 2009-03-20 2009-03-20 Laser processing twin-beam reference light device

Publications (1)

Publication Number Publication Date
CN201371313Y true CN201371313Y (en) 2009-12-30

Family

ID=41497397

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 200920106804 Expired - Fee Related CN201371313Y (en) 2009-03-20 2009-03-20 Laser processing twin-beam reference light device

Country Status (1)

Country Link
CN (1) CN201371313Y (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101862902A (en) * 2010-03-11 2010-10-20 广东海洋大学 Handheld laser welding method and device
CN101862911A (en) * 2010-03-11 2010-10-20 广东海洋大学 Handheld laser cutting method
CN101862912A (en) * 2010-03-11 2010-10-20 广东海洋大学 Handheld laser drilling method
CN105710539A (en) * 2014-12-02 2016-06-29 大族激光科技产业集团股份有限公司 Laser cutting system
CN106944739A (en) * 2017-03-22 2017-07-14 广东工业大学 One kind welding laser head assembly and processing method
CN108132102A (en) * 2018-02-09 2018-06-08 广东海洋大学 A kind of optical-fiber intelligent Michelson's interferometer device and its application method
CN109954968A (en) * 2017-12-25 2019-07-02 大族激光科技产业集团股份有限公司 A kind of laser spot positioning device and method
CN111070907A (en) * 2020-01-06 2020-04-28 珠海格力智能装备有限公司 Marking detection equipment
WO2021053168A3 (en) * 2019-09-20 2021-07-08 Alltec Angewandte Laserlicht Technologie Gmbh Electromagnetic radiation system

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101862902A (en) * 2010-03-11 2010-10-20 广东海洋大学 Handheld laser welding method and device
CN101862911A (en) * 2010-03-11 2010-10-20 广东海洋大学 Handheld laser cutting method
CN101862912A (en) * 2010-03-11 2010-10-20 广东海洋大学 Handheld laser drilling method
CN105710539A (en) * 2014-12-02 2016-06-29 大族激光科技产业集团股份有限公司 Laser cutting system
CN106944739A (en) * 2017-03-22 2017-07-14 广东工业大学 One kind welding laser head assembly and processing method
CN109954968A (en) * 2017-12-25 2019-07-02 大族激光科技产业集团股份有限公司 A kind of laser spot positioning device and method
CN108132102A (en) * 2018-02-09 2018-06-08 广东海洋大学 A kind of optical-fiber intelligent Michelson's interferometer device and its application method
CN108132102B (en) * 2018-02-09 2024-01-30 广东海洋大学 Optical fiber intelligent Michelson interferometer device and application method thereof
WO2021053168A3 (en) * 2019-09-20 2021-07-08 Alltec Angewandte Laserlicht Technologie Gmbh Electromagnetic radiation system
CN111070907A (en) * 2020-01-06 2020-04-28 珠海格力智能装备有限公司 Marking detection equipment
CN111070907B (en) * 2020-01-06 2021-05-28 珠海格力智能装备有限公司 Marking detection equipment

Similar Documents

Publication Publication Date Title
CN201371313Y (en) Laser processing twin-beam reference light device
CN107076546B (en) Equipment for measuring weld penetration in real time
CA3036985C (en) Method for optically measuring the weld penetration depth
CN101646525B (en) Machining device and method for machining material
CN103175808B (en) Laser-induced breakdown spectroscopy analysis system and laser-induced breakdown spectroscopy analysis method
CN103781618B (en) Apparatus and method for implementation and monitoring plastics laser transmission welding technique
CN100475414C (en) Real time monitoring device of the three-dimensional laser beam welding and incising process
CN112247382A (en) Laser welding penetration information monitoring system and method based on optical weak coherent imaging
CN105181298B (en) Multiple reflections formula confocal laser Long focal length measurement method and apparatus
CN104002051A (en) Vertical detection device and method for laser welding
KR20160060112A (en) Method for measuring the depth of penetration of a laser beam into a workpiece, and laser machining device
CN111055030A (en) Device and method for monitoring and feeding back light beam pointing stability
JPH03151180A (en) Joint chasing type precision laser welding system
CN102062678A (en) Device and method for measuring transmissivity and reflectivity of optical element with heavy calibre
CN104913732B (en) The normal tracking mode non-spherical measuring method and system interfered based on recombination laser
CN216622173U (en) Remote measurement type laser-induced breakdown spectroscopy detection system
CN104154882B (en) Dual-beam device for detecting parallelism and method based on differential confocal measurement
CN102564741B (en) Method and system for measuring grating diffraction efficiency by using ellipsoidal reflecting mirror
CN103033261A (en) On-line detection method of focal spot energy distribution
CN104748674A (en) Focus monitoring device and method
US11359994B2 (en) Laser beam profiling system for use in laser processing systems
JP2002219591A (en) Laser beam irradiation device
CN113740316A (en) Laser focusing point position automatic positioning method and system based on light spot position
CN212470240U (en) Light beam pointing stability monitoring and feedback device
JP2021186848A (en) Laser processing device

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20091230

Termination date: 20130320