CN201355323Y - Ultrahigh vacuum linear pushing guider - Google Patents
Ultrahigh vacuum linear pushing guider Download PDFInfo
- Publication number
- CN201355323Y CN201355323Y CNU2009200110330U CN200920011033U CN201355323Y CN 201355323 Y CN201355323 Y CN 201355323Y CN U2009200110330 U CNU2009200110330 U CN U2009200110330U CN 200920011033 U CN200920011033 U CN 200920011033U CN 201355323 Y CN201355323 Y CN 201355323Y
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- CN
- China
- Prior art keywords
- flange
- urceolus
- ultrahigh vacuum
- straight line
- promotes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model relates to vacuum equipment, in particular to an ultrahigh vacuum linear pushing guider, wherein one end of an outer cylinder is provided with a rear plate, the other end is fixedly provided with a vacuum equipment connecting flange, one end of the vacuum equipment connecting flange, which is arranged in the outer cylinder is welded with a bellow, the bellow is arranged in the outer cylinder, the other end is welded with a movable flange, a guiding rod is arranged in the bellow, one end of the guiding rod is inserted and connected in a center hole of the vacuum equipment connecting flange, the other end of the guiding rod is welded on the end surface of the movable flange, the back surface of the guiding rod of the movable flange is fixedly provided with a pushing rod, and the pushing rod is inserted and connected with the rear plate. The ultrahigh vacuum linear pushing guider is sealed by a fixed bellow, which leads the linear driving to be smooth and the sealing performance to be excellent, thereby achieving the requirement of discharging less gas, the manual driving is free, the linear driving on an atmospheric side is directly pushed and driven through an external pushing rod in ultrahigh vacuum environment, the speed is rapid and convenient, and the control of the position of the linear driving is accurate.
Description
Technical field
The utility model relates to ultrahigh vacuum equipment, particularly inducting device.
Background technology
Ultra high vacuum technique is that new material is synthetic, the physicochemical property analysis of material and the basic environment of space development.In order to be implemented in the various analysis and research in the ultra-high vacuum environment, be unable to do without transmission and manipulation to sample.Sample is in transmission and manipulation process, because the sealing height that vacuum equipment requires, handle and all need carry out at atmospheric side, a lot of situation samples need import by rectilinear motion, and when driving, to guarantee vacuum equipment and the sealing property that drives inducting device, to guarantee vacuum environment, present straight line gatherer precision has much room for improvement, and all are rigid elements, poor sealing performance.
Summary of the invention
The purpose of this utility model is to overcome above-mentioned not enough problem, provides a kind of ultravacuum straight line to promote inducting device, and simple in structure, actuating speed is fast and convenient, the precision height, and sealing property is good.
The technical scheme that the utility model is adopted for achieving the above object is: the ultravacuum straight line promotes inducting device, urceolus one end is equipped with back panel, other end fixed installation vacuum equipment joint flange, the vacuum equipment joint flange places the end welding bellows in the urceolus, corrugated tube places in the urceolus, and the other end welds movable flange, be equipped with in the corrugated tube and import rod, importing an excellent end activity is plugged in the vacuum equipment joint flange center pit, import the excellent other end and be welded on movable end face of flange, catch bar fixedly is equipped with at the back side that movable flange imports rod, and catch bar and back panel are movable pegs graft.
Described vacuum equipment joint flange is made of ring flange, axle sleeve and urceolus adapter sleeve one, axle sleeve one end mounting flange, and the other end connects the urceolus adapter sleeve, and urceolus adapter sleeve end face has the corrugated tube link slot.
The driving shaft front end is equipped with orienting lug in the described vacuum equipment joint flange, and the orienting lug gear is housed; Orienting lug is the oxygen-free copper orienting lug.
On the described movable flange pointer is housed, has the scale groove on the urceolus, the pointer bar slides and places in the scale groove.
On the described urceolus dog screw is housed, the dog screw termination contacts with catch bar is movable.
On the described catch bar handle is housed.
The utility model ultrahigh vacuum linear actuator employing fixedly corrugated tube realizes sealing, make linear drives smooth and easy, sealing property is good, reaches to emit the few requirement of gas, and the manual drives freedom, linear drives in the ultra-high vacuum environment adopts atmospheric side directly to push away mode by outside catch bar, actuating speed is fast, and convenient, and straight driving position control accurately, but high-temperature baking resistant, the system of being convenient to arrives ultrahigh vacuum.The driving shaft front end is installed the oxygen-free copper orienting lug, realizes that on the one hand gas emits fewly, keeps the driving rectilinearity of driving stem on the other hand.Use gib screw, activation point can be determined arbitrarily.The parts that contact with vacuum all adopt stainless steel and oxygen-free copper, help keeping ultrahigh vacuum.The utility model setting angle freedom is the important means that realizes the accurate linear drives of sample in the ultra-high vacuum environment.
Description of drawings:
Fig. 1 is the utility model perspective view.
Fig. 2 is the utility model cut-open view.
Fig. 3 is the utility model vacuum equipment joint flange structural representation.
Fig. 4 is the movable flange arrangement synoptic diagram of the utility model.
Among the figure: 1 imports rod; 2 vacuum equipment joint flanges; 3 scale grooves; 4 pointers; 5 handles; 6 catch bars; 7 back panels; 8 dog screws; 9 urceolus; 10 movable flanges; 11 corrugated tubes; 12 orienting lugs; 13 end wheel; 14 ring flanges; 15 axle sleeves; 16 urceolus adapter sleeves.
Embodiment:
As Fig. 1, ultravacuum straight line shown in 2 promotes inducting device, urceolus 9 one ends are equipped with back panel 7, have jack in the middle of the back panel, urceolus other end fixed installation vacuum equipment joint flange 2, the vacuum equipment joint flange is by ring flange 14, axle sleeve 15 and urceolus adapter sleeve 16 one constitute, axle sleeve one end mounting flange, the other end connects the urceolus adapter sleeve, urceolus adapter sleeve end face has the corrugated tube link slot, the urceolus adapter sleeve of vacuum equipment joint flange places in the urceolus, corrugated tube link slot place welding bellows 11, corrugated tube places in the urceolus 9, and the other end welds movable flange 10, be equipped with in the corrugated tube and import rod 1, importing an excellent end activity is plugged in vacuum equipment joint flange 2 center pits, import nose in the vacuum equipment joint flange center pit oxygen-free copper orienting lug 12 is housed, and orienting lug is housed only takes turns 13 and prevent that orienting lug from coming off, import the excellent other end and be welded on movable flange 10 end faces, catch bar 6 fixedly is equipped with at the back side that movable flange imports rod, catch bar and back panel are movable pegs graft, on the movable flange 10 screw rod-type pointer 4 is housed fixedly, have scale groove 3 on the urceolus, shank of screw slides and places in the scale groove, so that the control stroke is equipped with dog screw 8 on the urceolus, the dog screw termination contacts with catch bar is movable, when reaching device travel, tighten dog screw, the dog screw of outwarding winding during promotion.Handle 5 is housed, more convenient operation on the catch bar.The parts that contact with vacuum in it all adopt stainless steel and oxygen-free copper, help keeping ultrahigh vacuum.
The ultravacuum straight line promotes inducting device and finishes and being connected of ultrahigh vacuum equipment by the vacuum equipment joint flange during use, inner corrugated tube and movable flange are realized separating of ultrahigh vacuum and atmospheric environment, unscrew dog screw rear drive handle and catch bar, make corrugated tube be compressed or extend, drive and import excellent rectilinear motion, straight driving position is learnt by pointer, the dog screw location.
Claims (7)
1, the ultrahigh vacuum straight line promotes inducting device, it is characterized in that: urceolus one end is equipped with back panel, other end fixed installation vacuum equipment joint flange, the vacuum equipment joint flange places the end welding bellows in the urceolus, corrugated tube places in the urceolus, and the other end welds movable flange, be equipped with in the corrugated tube and import rod, importing an excellent end activity is plugged in the vacuum equipment joint flange center pit, import the excellent other end and be welded on movable end face of flange, catch bar fixedly is equipped with at the back side that movable flange imports rod, and catch bar and back panel are movable pegs graft.
2, ultrahigh vacuum straight line according to claim 1 promotes inducting device, it is characterized in that: the vacuum equipment joint flange is made of ring flange, axle sleeve and urceolus adapter sleeve one, axle sleeve one end mounting flange, the other end connects the urceolus adapter sleeve, and urceolus adapter sleeve end face has the corrugated tube link slot.
3, ultrahigh vacuum straight line according to claim 1 and 2 promotes inducting device, it is characterized in that: the driving shaft front end is equipped with orienting lug in the vacuum equipment joint flange, and only wheel of orienting lug is housed.
4, ultrahigh vacuum straight line according to claim 3 promotes inducting device, and it is characterized in that: orienting lug is the oxygen-free copper orienting lug.
5, ultrahigh vacuum straight line according to claim 1 and 2 promotes inducting device, it is characterized in that: on the movable flange pointer is housed, has the scale groove on the urceolus, the pointer bar slides and places in the scale groove.
6, ultrahigh vacuum straight line according to claim 1 and 2 promotes inducting device, it is characterized in that: dog screw is housed on the urceolus, and dog screw termination and catch bar flexibly connect.
7, ultrahigh vacuum straight line according to claim 1 and 2 promotes inducting device, it is characterized in that: handle is housed on the catch bar.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2009200110330U CN201355323Y (en) | 2009-02-27 | 2009-02-27 | Ultrahigh vacuum linear pushing guider |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2009200110330U CN201355323Y (en) | 2009-02-27 | 2009-02-27 | Ultrahigh vacuum linear pushing guider |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201355323Y true CN201355323Y (en) | 2009-12-02 |
Family
ID=41411665
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2009200110330U Expired - Fee Related CN201355323Y (en) | 2009-02-27 | 2009-02-27 | Ultrahigh vacuum linear pushing guider |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201355323Y (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102106766A (en) * | 2011-03-03 | 2011-06-29 | 上海大学 | Novel linear driving device |
| CN102409998A (en) * | 2011-10-28 | 2012-04-11 | 中国海洋石油总公司 | Downhole safety valve |
| CN106248128A (en) * | 2016-07-26 | 2016-12-21 | 苏州衡微仪器科技有限公司 | A kind of rotation introducer of vacuum equipment |
| CN107761076A (en) * | 2017-09-28 | 2018-03-06 | 中国科学院重庆绿色智能技术研究院 | A kind of scalable gas source device of vacuum equipment |
| CN108181487A (en) * | 2018-03-15 | 2018-06-19 | 上海交通大学 | A kind of ultrahigh vacuum sample cutting device |
| CN109142211A (en) * | 2018-09-13 | 2019-01-04 | 中国核动力研究设计院 | A kind of dynamic load conducting structure between vacuum environment and atmospheric pressure environment |
| WO2019037402A1 (en) * | 2017-08-22 | 2019-02-28 | 合肥中科离子医学技术装备有限公司 | Adjustment device for superconducting cyclotron lead-out zone magnet channel |
-
2009
- 2009-02-27 CN CNU2009200110330U patent/CN201355323Y/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102106766A (en) * | 2011-03-03 | 2011-06-29 | 上海大学 | Novel linear driving device |
| CN102409998A (en) * | 2011-10-28 | 2012-04-11 | 中国海洋石油总公司 | Downhole safety valve |
| CN102409998B (en) * | 2011-10-28 | 2014-08-13 | 中国海洋石油总公司 | Downhole safety valve |
| CN106248128A (en) * | 2016-07-26 | 2016-12-21 | 苏州衡微仪器科技有限公司 | A kind of rotation introducer of vacuum equipment |
| CN106248128B (en) * | 2016-07-26 | 2018-07-03 | 苏州衡微仪器科技有限公司 | A kind of rotation inducting device of vacuum equipment |
| WO2019037402A1 (en) * | 2017-08-22 | 2019-02-28 | 合肥中科离子医学技术装备有限公司 | Adjustment device for superconducting cyclotron lead-out zone magnet channel |
| CN107761076A (en) * | 2017-09-28 | 2018-03-06 | 中国科学院重庆绿色智能技术研究院 | A kind of scalable gas source device of vacuum equipment |
| CN108181487A (en) * | 2018-03-15 | 2018-06-19 | 上海交通大学 | A kind of ultrahigh vacuum sample cutting device |
| CN108181487B (en) * | 2018-03-15 | 2020-03-06 | 上海交通大学 | Ultrahigh vacuum sample cutting device |
| CN109142211A (en) * | 2018-09-13 | 2019-01-04 | 中国核动力研究设计院 | A kind of dynamic load conducting structure between vacuum environment and atmospheric pressure environment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20091202 Termination date: 20180227 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |